Handover device

Abstract

The embodiment of the utility model provides a handover device, and relates to the field of wafer bearing equipment. The handover device comprises a rotary table handover mechanism and a positioning mechanism. The transfer turntable mechanism is provided with a bearing table for mounting a to-be-tested piece, the positioning mechanism is located on one side of the bearing table, and when the to-be-tested piece is mounted on the bearing table, the positioning mechanism can move to a preset position and abut against one side of the to-be-tested piece. In the process that the mechanical arm clamps the to-be-tested piece and installs the to-be-tested piece on the bearing table, the positioning mechanism can move to the preset position, under the positioning reference of the positioning mechanism, the mechanical arm can accurately install the to-be-tested piece on the bearing table, it is guaranteed that the mechanical arm accurately places the to-be-tested piece on the preset position of the bearing table, and therefore the placing precision of the to-be-tested piece is improved.

Description

Technical Field

[0001] The utility model relates to the field of wafer carrying equipment, in particular to a handover device. Background Art

[0002] As the thickness of chips for high-performance electronic products becomes thinner and thinner, the difficulty of processing such as bonding or grinding these ultra-thin wafers is increasing, and the requirements for wafer carriers are also becoming higher and higher.

[0003] The inventors have found that due to the limited precision of the iron ring and the wafer box, coupled with the cumulative error of the robot itself, when the wafer is embedded in the iron ring to form a test piece, some existing robots find it difficult to accurately place the test piece at the predetermined position on the carrier. Utility Model Content

[0004] The utility model aims to provide a handover device, which can ensure that the manipulator can accurately place the workpiece to be tested on a predetermined position of a bearing platform.

[0005] The embodiment of the utility model is achieved as follows:

[0006] In a first aspect, the utility model provides a handover device, comprising:

[0007] A transfer turntable mechanism, the transfer turntable mechanism having a bearing platform for mounting the test piece;

[0008] The positioning mechanism is located on one side of the carrying platform. When the piece to be tested is installed on the carrying platform, the positioning mechanism can move to a preset position and abut against one side of the piece to be tested.

[0009] In an optional embodiment, the positioning mechanism includes a first driving member and a positioning member connected to each other, the positioning member is used to abut against the test piece, and the first driving member is used to drive the positioning member to move along a first preset direction, and the first preset direction forms an angle with the support platform, and the angle is less than or greater than 90°.

[0010] In an optional embodiment, the first preset direction is parallel to the supporting platform.

[0011] In an optional embodiment, the positioning member includes a positioning mounting plate and a positioning portion, the positioning mounting plate is detachably connected to the first driving member, the positioning mounting plate includes a first end and a second end opposite to each other, the first end is provided with a mounting portion detachably connected to the positioning portion, the first end is close to the supporting platform or the second end is close to the supporting platform.

[0012] In an optional embodiment, the positioning mechanism further includes a first speed regulating member connected to the first driving member, and the first speed regulating member is used to adjust the driving speed of the first driving member.

[0013] In an optional embodiment, the positioning mechanism also includes a first mounting member, a second driving member, and a second mounting member connected in sequence, the first mounting member is connected to the transfer turntable mechanism, the second driving member is used to drive the second mounting member to move along a second preset direction, the first driving member is installed on the second mounting member, and the second preset direction is perpendicular to the support platform.

[0014] In an optional embodiment, the positioning mechanism further includes a second speed regulating member connected to the second driving member, and the second speed regulating member is used to adjust the driving speed of the second driving member.

[0015] In an optional embodiment, at least one of the first driving member and the second driving member is an adjustable stroke cylinder.

[0016] In an optional embodiment, the carrier platform is provided with a plurality of first mounting holes arranged at intervals, the handover turntable mechanism further comprises a plurality of first handover supports for supporting the workpiece to be tested, the plurality of first handover supports are mounted in a one-to-one correspondence in the plurality of first mounting holes, and the first handover supports can move along the axial direction of the first mounting holes; and / or,

[0017] The outer peripheral wall of the supporting platform is also provided with a plurality of spaced connection parts, and the connection parts are provided with second mounting holes. The handover turntable mechanism also includes a plurality of second handover support members for supporting the test pieces. The plurality of second handover support members are installed in a one-to-one correspondence in the plurality of second mounting holes, and the second handover support members can move along the axial direction of the second mounting holes.

[0018] In an optional embodiment, the support platform is further provided with a plurality of vacuum holes arranged at intervals, and the outer peripheral wall of the support platform is further provided with a plurality of suction nozzles arranged at intervals.

[0019] The beneficial effect of the embodiment of the utility model is as follows: the embodiment of the utility model provides a handover device including a turntable handover mechanism and a positioning mechanism. The handover turntable mechanism has a support platform for mounting the workpiece to be tested, and the positioning mechanism is located on one side of the support platform. When the workpiece to be tested is mounted on the support platform, the positioning mechanism can move to a preset position and abut against one side of the workpiece to be tested. When the manipulator clamps the workpiece to be tested and mounts it on the support platform, the positioning mechanism can move to a preset position. Under the positioning reference of the positioning mechanism, the manipulator can accurately mount the workpiece to be tested on the support platform, ensuring that the manipulator accurately places the workpiece to be tested at the predetermined position of the support platform, thereby improving the placement accuracy of the workpiece to be tested. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 A schematic diagram of the structure of the handover device provided in the embodiment of the utility model;

[0022] Figure 2 One of the structural schematic diagrams of the positioning mechanism provided in the embodiment of the utility model;

[0023] Figure 3 The second structural diagram of the positioning mechanism provided by the embodiment of the utility model;

[0024] Figure 4 A schematic diagram of the structure of a handover device provided by an embodiment of the utility model and equipped with a small-sized piece to be tested;

[0025] Figure 5 One of the working schematic diagrams of the handover device provided in the embodiment of the utility model;

[0026] Figure 6 The second working schematic diagram of the handover device provided in the embodiment of the utility model;

[0027] Figure 7 The third working schematic diagram of the handover device provided in the embodiment of the utility model;

[0028] Figure 8 The fourth working diagram of the handover device provided in the embodiment of the utility model;

[0029] Fig. 9 The fifth working diagram of the handover device provided in the embodiment of the utility model;

[0030] Fig.10 The sixth working diagram of the handover device provided in the embodiment of the utility model;

[0031] Fig.11 The seventh working diagram of the handover device provided in the embodiment of the utility model;

[0032] Fig.12 The eighth working diagram of the handover device provided by the embodiment of the utility model;

[0033] Fig.13 A ninth working diagram of the handover device provided in the embodiment of the utility model;

[0034] Fig.14 A schematic structural diagram of a handover device provided in an embodiment of the utility model and equipped with a large-sized piece to be tested.

[0035] Icons: 1-handover device; 100-handover turntable mechanism; 110-carrying platform; 111-first mounting hole; 112-vacuum hole; 120-first handover support; 130-connecting part; 131-second mounting hole; 140-second handover support; 150-sucking nozzle; 160-rotating motor; 170-vacuum pressure gauge; 200-positioning mechanism; 210-first driving part; 220-second driving part; 230-positioning part; 231-positioning mounting plate; 2311-first end; 2312-second end; 2313-mounting part; 232-positioning part; 240-first speed regulating part; 250-first mounting part; 260-second mounting part; 270-second speed regulating part; 2-manipulator; 3-part to be tested; 301-iron ring; 302-wafer. DETAILED DESCRIPTION

[0036] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0037] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0038] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0039] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0040] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0041] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0042] The specific structure of a handover device provided by an embodiment of the utility model and the corresponding technical effects it brings are described in detail below in conjunction with the patent drawings.

[0043] Please refer to Figure 1 , Figure 4 and Fig.14 The embodiment of the utility model provides a handover device 1 including a turntable handover mechanism and a positioning mechanism 200 .

[0044] The transfer turntable mechanism 100 has a support platform 110 for mounting the DUT 3 , and the positioning mechanism 200 is located on one side of the support platform 110 . When the DUT 3 is mounted on the support platform 110 , the positioning mechanism 200 can move to a preset position and abut against one side of the DUT 3 .

[0045] It should be noted that the test piece 3 can be understood as the test piece 3 in which the wafer 302 is embedded in the iron ring 301. When the manipulator 2 clamps the test piece 3 and installs it on the carrier 110, the positioning mechanism 200 can move to a preset position. Under the positioning reference of the positioning mechanism 200, the manipulator 2 can accurately install the test piece 3 on the carrier 110, and make the outer wall of the test piece 3 abut against the positioning mechanism 200, thereby reducing the situation where the test piece 3 cannot be accurately placed at the predetermined position of the carrier 110, and ensuring that the manipulator 2 accurately places the test piece 3 at the predetermined position of the carrier 110.

[0046] Optionally, the positioning mechanism 200 includes a first driving member 210 and a positioning member 230 connected to each other, the positioning member 230 is used to abut against the test piece 3, and the first driving member 210 is used to drive the positioning member 230 to move along a first preset direction, and the first preset direction forms an angle with the support platform 110, and the angle is less than or greater than 90°.

[0047] In detail, in this embodiment, the first preset direction is parallel to the loading platform 110, that is, the first preset direction is parallel to the loading platform 110 surface of the loading platform 110. When the transfer turntable mechanism 100 is placed on a horizontal plane, the first preset direction is parallel to the horizontal plane.

[0048] It can be understood that since the first preset direction is parallel to the horizontal plane, it should be noted that during the loading process, the manipulator 2 clamps the workpiece 3 to be tested and moves in the direction close to the positioning member 230 until the workpiece 3 to be tested abuts against the positioning member 230. Therefore, the first driving member 210 can drive the positioning member 230 to move in the first preset direction to change the distance between the positioning member 230 and the center of the supporting platform 110, so as to adapt to workpieces 3 to be tested of different sizes.

[0049] Of course, in some other optional embodiments, the first preset direction is not parallel to the support platform 110, and the first driving member 210 can also drive the positioning member 230 to move in the first direction to change the distance between the positioning member 230 and the center of the support platform 110, so as to adapt to different sizes of the test pieces 3.

[0050] In detail, the positioning member 230 includes a positioning mounting plate 231 and a positioning portion 232. The positioning mounting plate 231 is detachably connected to the first driving member 210. The positioning mounting plate 231 includes a first end 2311 and a second end 2312 relative to each other. The first end 2311 is provided with a mounting portion 2313 detachably connected to the positioning portion 232. The first end 2311 is close to the support platform 110 or the second end 2312 is close to the support platform 110.

[0051] In detail, in the present embodiment, the positioning portion 232 has an installation end and a positioning end, the positioning end is used to abut against the outer wall of the test piece 3, and the installation end is used to connect with the positioning mounting plate 231, wherein the positioning end faces the center of the support platform 110. It should be noted that the positioning end is not limited to being completely facing the center of the support platform 110 in a strict sense, and the positioning end only needs to be roughly facing the center of the support platform 110.

[0052] by Figure 2-Figure 3 For reference, it can be understood that since the positioning mounting plate 231 is detachably connected to the first driving member 210, the positioning mounting plate 231 is removed to change the relative position of the first end 2311 and the supporting platform 110. Therefore, the first end 2311 can be made close to the supporting platform 110, and the second end 2312 can be made close to the supporting platform 110. Since the first end 2311 is provided with a mounting portion 2313 detachably connected to the positioning portion 232, while changing the relative position of the first end 2311 and the supporting platform 110, the relative distance between the positioning member 230 and the supporting platform 110 is also changed.

[0053] That is to say, when the first end 2311 is close to the supporting platform 110, the end of the positioning member 230 close to the center of the supporting platform 110 has a first distance from the center of the supporting platform 110, and when the second end 2312 is close to the supporting platform 110, the first end 2311 of the positioning member 230 close to the center of the supporting platform 110 has a second distance from the center of the supporting platform 110, wherein the second distance is greater than the first distance.

[0054] In an optional embodiment, the positioning mechanism 200 also includes a first speed regulating member 240 connected to the first driving member 210, and the first speed regulating member 240 is used to adjust the driving speed of the first driving member 210, that is, the speed at which the first driving member 210 drives the positioning member 230 to move in the first preset direction can be adjusted by the first speed regulating member 240.

[0055] In detail, the positioning mechanism 200 also includes a first mounting member 250, a second driving member 220, and a second mounting member 260 which are connected in sequence. The first mounting member 250 is connected to the handover turntable mechanism 100. The second driving member 220 is used to drive the second mounting member 260 to move along the second preset direction. The first driving member 210 is installed on the second mounting member 260. That is to say, while the second driving member 220 drives the second mounting member 260 to move along the second preset direction, it also drives the first driving member 210 to move in the second preset direction. Since the positioning mounting plate 231 is installed on the first driving member 210 and the positioning portion 232 is installed on the positioning mounting plate 231, the positioning portion 232 can also move along the second preset direction with the second mounting member 260. The second preset direction is perpendicular to the support platform 110, that is, the second preset direction is perpendicular to the horizontal direction. It can be understood that the second preset direction is the vertical direction.

[0056] It should be noted that the first mounting member 250 can be connected to the transfer turntable mechanism 100 .

[0057] Optionally, the positioning mechanism 200 also includes a second speed regulating member 270 connected to the second driving member 220, and the second speed regulating member 270 is used to adjust the driving speed of the second driving member 220. In other words, the second speed regulating member 270 can facilitate the user to adjust the movement speed of the second driving member 220 to drive the positioning part 232 in the second preset direction.

[0058] Optionally, at least one of the first driving member 210 and the second driving member 220 is an adjustable stroke cylinder. In detail, in the present embodiment, the first driving member 210 and the second driving member 220 are both adjustable stroke cylinders, that is, the relative position between the preset position and the supporting platform 110 can be adjusted by adjusting the stroke of the first driving member 210 and the second driving member 220 to adapt to different sizes of the test pieces 3.

[0059] Of course, in some other embodiments, only the first driving member 210 may be an adjustable stroke cylinder.

[0060] Please continue to refer to Figure 1 The carrying platform 110 is provided with a plurality of first mounting holes 111 arranged at intervals. The handover turntable mechanism 100 also includes a plurality of first handover supports 120 for supporting the test piece 3. The plurality of first handover supports 120 are installed in the plurality of first mounting holes 111 in a one-to-one correspondence. The first handover supports 120 can move along the axial direction of the first mounting holes 111. The outer peripheral wall of the carrying platform 110 is also provided with a plurality of connection parts 130 arranged at intervals. The connection parts 130 are provided with second mounting holes 131.

[0061] It is understandable that the first intersection support 120 can be driven by a telescopic driving mechanism to move along the axis direction of the first mounting hole 111. The telescopic driving mechanism is a conventional setting in the mechanical field, and will not be described in detail here.

[0062] Optionally, the transfer turntable mechanism 100 further includes a plurality of second transfer supports 140 for supporting the test piece 3 , the plurality of second transfer supports 140 are mounted in a one-to-one correspondence in the plurality of second mounting holes 131 , and the second transfer supports 140 can move along the axial direction of the second mounting holes 131 .

[0063] Similarly, the second intersecting support member 140 can also be driven by the telescopic driving mechanism to move along the axial direction of the second mounting hole 131 .

[0064] In detail, after the manipulator 2 completes loading, that is, after the manipulator 2 places the small-sized workpiece to be tested 3 on the supporting platform 110, the small-sized workpiece to be tested 3 can be supported by the first intersection support 120. At this time, the workpiece to be tested 3 is not in contact with the surface of the supporting platform 110. After the positioning part 232 is used to place the workpiece to be tested 3 at a predetermined position, and the positioning part 232 leaves the preset position and leaves the supporting platform 110 under the drive of the first driving member 210 and the second driving member 220, the first intersection support 120 moves along the axial direction of the first mounting hole 111 to shrink into the first mounting hole 111 so that the workpiece to be tested 3 contacts the surface of the supporting platform 110.

[0065] During the unloading process of the robot 2, the first intersection support 120 will move along the axial direction of the first mounting hole 111, extend out of the first mounting hole 111, and lift the test piece 3 to separate the test piece 3 from the surface of the support platform 110. At this time, the positioning portion 232 returns to the preset position, and the robot 2 removes the test piece 3.

[0066] Similarly, please refer to Fig.14 For a larger piece to be tested 3, after the manipulator 2 completes loading, the piece to be tested 3 can be supported by the second intersection support 140. At this time, the piece to be tested 3 is not in contact with the surface of the carrier 110. After the piece to be tested 3 is placed at a predetermined position by the positioning portion 232, and the positioning portion 232 leaves the preset position and leaves the carrier 110 under the drive of the first driving member 210 and the second driving member 220, the second intersection support 140 moves along the axial direction of the second mounting hole 131 to shrink into the second mounting hole 131, so that the piece to be tested 3 contacts the surface of the carrier 110.

[0067] During the unloading process of the robot 2, similarly to the above, the second cross support 140 moves along the axial direction of the second mounting hole 131, extends out of the second mounting hole 131, and lifts the test piece 3 to separate the test piece 3 from the surface of the carrier 110. At this time, the positioning portion 232 returns to the preset position, and the robot 2 removes the test piece 3.

[0068] Please note that, please refer to Figure 4 When a small-sized DUT 3 is placed, the preset position of the positioning portion 232 has a third distance from the center line of the carrier 110. When a large-sized DUT 3 is placed, the preset position of the positioning portion 232 has a fourth distance from the center line of the carrier 110. The fourth distance is greater than the third distance.

[0069] It should be noted that, in order to ensure that the test piece 3 is stably supported by the second intersecting supports 140 , a plurality of second intersecting supports 140 are evenly spaced and arranged.

[0070] Similarly, the carrying platform 110 is also provided with a plurality of vacuum holes 112 arranged at intervals, and the outer peripheral wall of the carrying platform 110 is also provided with a plurality of suction nozzles 150 arranged at intervals.

[0071] It should be noted that the transfer turntable mechanism 100 also has a vacuum pressure gauge 170 and a rotary motor 160. The rotary motor 160 is used to drive the support platform 110 to rotate, and the vacuum pressure gauge 170 is used to detect the pressure of the vacuum hole 112 or the suction nozzle 150. The vacuum hole 112 and the suction nozzle 150 are both used to adsorb the test piece 3. Of course, the vacuum hole 112 and the suction nozzle 150 are both used to connect the vacuum generator (not shown in the figure). When the test piece 3 contacts the surface of the support platform, and the vacuum hole 112 or the suction nozzle 150 generates negative pressure to adsorb the test piece 3, it is mainly used to realize the functions of completing the detection of the wafer 302 on the test piece 3. It should be noted that the detection structure of the wafer 302 of the transfer turntable mechanism 100 is a conventional structure in the field, and it will not be repeated here.

[0072] It can be understood that the outer peripheral wall of the carrying platform 110 is also provided with a plurality of suction nozzles 150 arranged at intervals, which can absorb large-sized test pieces 3.

[0073] The plurality of suction nozzles 150 are evenly spaced and arranged along the outer peripheral wall of the carrying platform 110 .

[0074] Working principle:

[0075] Please refer to Figure 5-Figure 13 , taking the loading of small-sized test piece 3 as an example, please refer to Figure 5-Figure 6 When the manipulator 2 is in the process of loading, the first intersection support 120 extends out of the first mounting hole 111, and the workpiece 3 to be tested is placed on the first support. Then, the positioning portion 232 moves to a preset position under the action of the first driving member 210 and the second driving member 220 to abut against the side wall of the workpiece 3 to complete the assembly positioning of the workpiece 3 under the cooperation with the manipulator 2. After the workpiece 3 to be tested abuts against the positioning portion 232, the manipulator 2 moves out.

[0076] Please refer to Figure 7-Figure 8 , and then the first driving member 210 drives the positioning portion 232 to move in the first preset direction away from the supporting platform 110, and the second driving member 220 also drives the positioning portion 232 to descend.

[0077] Please refer to Fig. 9 , and then the first intersection support member 120 moves along the axial direction of the first mounting hole 111 to be retracted into the first mounting hole 111 so that the test piece 3 contacts the surface of the carrier platform 110 .

[0078] Furthermore, the vacuum hole 112 generates negative pressure to absorb the DUT 3 , and detects the wafer 302 on the DUT 3 .

[0079] Please refer to Fig.10 After the detection is completed, the first intersection support member 120 moves along the axial direction of the first mounting hole 111, extends out of the first mounting hole 111, and lifts the test piece 3 to separate the test piece 3 from the surface of the carrier 110.

[0080] Please refer to Figure 10-11 Then, the positioning portion 232 rises under the drive of the second driving member 220 , and returns to the preset position under the drive of the first driving member to position the test piece 3 .

[0081] Please refer to Fig.12 , and then the external manipulator 2 takes down the wafer after the test from the test piece 3;

[0082] Please refer to Fig.13 Finally, the positioning portion 232 is driven by the first driving portion to move away from the supporting platform 110, waiting for the next piece of the test piece 3 to be loaded.

[0083] In summary, a handover device 1 provided by an embodiment of the utility model includes a turntable handover mechanism and a positioning mechanism 200. The handover turntable mechanism 100 has a carrier 110 for mounting the test piece 3, and the positioning mechanism 200 is located on one side of the carrier 110. When the test piece 3 is mounted on the carrier 110, the positioning mechanism 200 can move to a preset position and abut against one side of the test piece 3. When the manipulator 2 clamps the test piece 3 and mounts it on the carrier 110, the positioning mechanism 200 can move to a preset position. Under the positioning reference of the positioning mechanism 200, the manipulator 2 can accurately mount the test piece 3 on the carrier 110, ensuring that the manipulator 2 accurately places the test piece 3 at the predetermined position of the carrier 110, thereby improving the placement accuracy of the test piece 3.

[0084] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A handover device, characterized in that: include: A transfer turntable mechanism, wherein the transfer turntable mechanism has a bearing platform for mounting the test piece; The positioning mechanism is located at one side of the carrying platform. When the piece to be tested is installed on the carrying platform, the positioning mechanism can move to a preset position and abut against one side of the piece to be tested.

2. The handover device according to claim 1, characterized in that: The positioning mechanism includes a first driving member and a positioning member connected to each other, the positioning member is used to abut against the test piece, and the first driving member is used to drive the positioning member to move along a first preset direction. The first preset direction forms an angle with the supporting platform, and the angle is less than or greater than 90°.

3. The handover device according to claim 2, characterized in that: The first preset direction is parallel to the supporting platform.

4. The handover device according to claim 2, characterized in that: The positioning member includes a positioning mounting plate and a positioning portion, the positioning mounting plate is detachably connected to the first driving member, the positioning mounting plate includes a first end and a second end opposite to each other, the first end is provided with a mounting portion detachably connected to the positioning portion, the first end is close to the supporting platform or the second end is close to the supporting platform.

5. The handover device according to claim 2, characterized in that: The positioning mechanism further includes a first speed regulating member connected to the first driving member, and the first speed regulating member is used to adjust a driving speed of the first driving member.

6. The handover device according to claim 2, characterized in that: The positioning mechanism also includes a first mounting member, a second driving member, and a second mounting member connected in sequence, the first mounting member is connected to the handover turntable mechanism, the second driving member is used to drive the second mounting member to move along a second preset direction, the first driving member is installed on the second mounting member, and the second preset direction is perpendicular to the supporting platform.

7. The handover device according to claim 6, characterized in that: The positioning mechanism also includes a second speed regulating member connected to the second driving member, and the second speed regulating member is used to adjust the driving speed of the second driving member.

8. The handover device according to claim 6, characterized in that: At least one of the first driving member and the second driving member is an adjustable stroke cylinder.

9. The handover device according to claim 1, characterized in that: The carrier platform is provided with a plurality of first mounting holes arranged at intervals, the handover turntable mechanism further comprises a plurality of first handover supports for supporting the test pieces, the plurality of first handover supports are mounted in a one-to-one correspondence in the plurality of first mounting holes, and the first handover supports can move along the axial direction of the first mounting holes; and / or, The outer peripheral wall of the supporting platform is also provided with a plurality of spaced connection parts, and the connection parts are provided with second mounting holes. The handover turntable mechanism also includes a plurality of second handover supports for supporting the test pieces. The plurality of second handover supports are mounted one by one in the plurality of second mounting holes, and the second handover supports can move along the axial direction of the second mounting holes.

10. The handover device according to claim 1, characterized in that: The carrying platform is also provided with a plurality of vacuum holes arranged at intervals, and the outer peripheral wall of the carrying platform is also provided with a plurality of suction nozzles arranged at intervals.

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