Rotation driving mechanism and vacuum processing system

Abstract

The utility model relates to the technical field of vacuum devices, and discloses a rotary driving mechanism and a vacuum processing system. The rotation driving mechanism comprises an eccentric rotating shaft, a rotating swing block and a driving device. The eccentric rotating shaft comprises an eccentric section and a central section. The rotating swing block is arranged outside the eccentric section of the eccentric rotating shaft in a sleeving mode and can drive the eccentric rotating shaft to rotate around the rotating axis of the eccentric rotating shaft. The driving device is connected with the rotating swing block and can drive the rotating swing block to rotate around the rotating axis of the eccentric rotating shaft so as to drive the eccentric rotating shaft to rotate around the rotating axis.

Description

Technical Field

[0001] The present disclosure relates to the technical field of vacuum devices, and in particular to a rotary drive mechanism and a vacuum processing system. Background Art

[0002] In the field of vacuum technology, transmitting the rotation outside the vacuum to the inside of the vacuum is a complex and challenging problem. Due to the particularity of the vacuum environment, traditional mechanical transmission methods cannot work effectively. At present, magnetic transmission and molecular flow are the two mainstream solutions. The rotation drive mechanism mainly includes differential rotation drive and magnetic coupling rotation drive. The differential rotation drive has high precision and large transmission torque, but it needs to be continuously pumped with a vacuum pump when in use. Although the magnetic coupling rotation drive does not require the cooperation of the vacuum pump, it has a small transmission torque, low precision and a relatively large volume. Utility Model Content

[0003] The present disclosure provides a rotation drive mechanism, comprising:

[0004] An eccentric rotating shaft, comprising an eccentric section and a central section;

[0005] A rotating pendulum block is sleeved outside the eccentric section of the eccentric shaft and can drive the eccentric shaft to rotate around its own rotation axis; and

[0006] The driving device is connected to the rotating pendulum block and can drive the rotating pendulum block to rotate around the rotation axis of the eccentric rotating shaft, so as to drive the eccentric rotating shaft to rotate around the rotation axis.

[0007] In some embodiments of the present disclosure, the rotary drive mechanism further includes a bellows assembly, the bellows assembly including:

[0008] A bellows, sleeved outside the eccentric shaft; and

[0009] The proximal shaft has its distal end fixedly connected to the proximal seal of the bellows, and the proximal shaft includes a rotating chamber for being rotatably connected to the proximal end of the eccentric section of the eccentric rotating shaft, and a rotating pendulum block is sleeved outside the proximal shaft to drive the proximal shaft to rotate and swing, thereby driving the eccentric rotating shaft to rotate around the rotation axis.

[0010] In some embodiments of the present disclosure, the rotary drive mechanism further includes an eccentric transmission seat, and the eccentric transmission seat includes an eccentric accommodating cavity for accommodating the rotating pendulum block to drive the rotating pendulum block to rotate around the rotation axis.

[0011] In some embodiments of the present disclosure, the driving device includes:

[0012] A rotating block is fixedly connected to the eccentric transmission seat;

[0013] A driving mechanism is connected to the rotating block and is used to drive the rotating block to rotate so as to drive the rotating pendulum block to rotate around the rotation axis;

[0014] The eccentric accommodation cavity includes a hole with a flat cross section;

[0015] The cross section of the outer peripheral surface of the rotating pendulum block is in a flat shape, which matches with the flat hole of the eccentric accommodating cavity.

[0016] In some embodiments of the present disclosure, the bellows assembly further comprises:

[0017] a distal shaft, the proximal end of the distal shaft being sealed and fixedly connected to the distal end of the bellows; and

[0018] A flange plate, wherein the distal shaft passes through a flange hole of the flange plate and is sealed and fixedly connected to the flange plate;

[0019] The rotary drive mechanism also includes a fixed seat, which is sleeved on the outside of at least a portion of the bellows assembly. The proximal end of the fixed seat is rotatably connected to the eccentric transmission seat, and the distal end of the fixed seat is fixedly connected to the distal shaft or flange of the bellows assembly.

[0020] In some embodiments of the present disclosure, the rotating pendulum mass further comprises at least one protrusion or positioning pin disposed on the outer surface;

[0021] The inner side of the eccentric transmission seat includes an inwardly protruding flange or an outwardly recessed groove, and at least one protrusion or positioning pin cooperates with the inner flange or groove of the eccentric transmission seat to limit the rotating pendulum block.

[0022] In some embodiments of the present disclosure, the rotary drive mechanism further includes a one-way self-locking component, and the one-way self-locking component includes:

[0023] A ratchet wheel is fixedly connected to the eccentric transmission seat;

[0024] A pawl, the pawl being capable of partially engaging with the ratchet wheel;

[0025] A stopper is arranged on the back of the pawl, and a first limiting groove and a second limiting groove are respectively arranged at both ends of the stopper; and

[0026] The biasing mechanism can abut against the first limiting groove or the second limiting groove, so that the part of the pawl located in the first limiting groove or the second limiting groove engages with the ratchet, and the part of the pawl located at one end of the second limiting groove or the first limiting groove is separated from the ratchet.

[0027] In some embodiments of the present disclosure, the biasing mechanism comprises:

[0028] A supporting seat, fixedly connected to the fixing seat;

[0029] A button, rotatably connected to the support base; and

[0030] The telescopic positioning rod is connected to the button and can move synchronously with the button so that the telescopic positioning rod is locked in the first limiting groove or the second limiting groove.

[0031] In some embodiments of the present disclosure, the eccentric shaft is rotatably connected to the bellows assembly via at least one bearing, and the at least one bearing comprises:

[0032] A proximal bearing, wherein the proximal end of the eccentric shaft is rotatably connected to the proximal shaft of the bellows assembly via the proximal bearing; and / or

[0033] A middle bearing, wherein the middle portion of the eccentric shaft is rotatably connected to the proximal end of the distal shaft of the bellows assembly via the middle bearing; and / or

[0034] A distal bearing, the distal end of the eccentric shaft is rotationally connected with the distal end of the distal shaft of the bellows assembly through the distal bearing.

[0035] The present disclosure provides a vacuum processing system, comprising:

[0036] Vacuum chamber,

[0037] Rotating device, and

[0038] The rotary drive mechanism according to any one of the embodiments of the present disclosure is used to drive a rotary device.

[0039] The rotary drive mechanism and vacuum processing system according to some embodiments of the present disclosure can bring beneficial technical effects. For example, the rotary drive mechanism and vacuum processing system according to some embodiments of the present disclosure can transmit the vacuum external rotational motion to the vacuum internal through the cooperation of the driving device with the rotating pendulum block and the eccentric rotating shaft, and the structure is simple and reliable, the volume is small and the precision is high. For another example, the rotary drive mechanism and vacuum processing system according to some embodiments of the present disclosure can achieve one-way self-locking through a ratchet mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0041] Figure 1 A partial cross-sectional structural schematic diagram of a rotary drive mechanism according to some embodiments of the present disclosure is shown;

[0042] Figure 2 A schematic diagram showing the structure of a bellows assembly according to some embodiments of the present disclosure is shown;

[0043] Figure 3A schematic structural diagram of an eccentric transmission seat according to some embodiments of the present disclosure is shown;

[0044] Figure 4 A schematic structural diagram of a ratchet limiting device according to some embodiments of the present disclosure is shown;

[0045] Figure 5 A schematic structural diagram of a vacuum processing system according to some embodiments of the present disclosure is shown;

[0046] In the above drawings, the reference numerals represent:

[0047] 1000-Vacuum treatment system

[0048] 100-Rotation drive mechanism

[0049] 110-Eccentric shaft

[0050] 111-Eccentric section

[0051] 112-Center Section

[0052] 120-Rotating pendulum

[0053] 121-Location pin

[0054] 130-Drive device

[0055] 131-Rotating Block

[0056] 132-Drive mechanism

[0057] 140-Bellows Assembly

[0058] 141- Bellows

[0059] 142-Proximal shaft

[0060] 14201-Rotary Cavity

[0061] 143-distal axis

[0062] 14301-V-groove

[0063] 144-Flange

[0064] 150-Eccentric transmission seat

[0065] 151-eccentric accommodation chamber

[0066] 160-Fixed seat

[0067] 170-One-way self-locking assembly

[0068] 171-Ratchet

[0069] 172-Pawl

[0070] 173-Block

[0071] 17301-First limit slot

[0072] 17302-Second limit slot

[0073] 174-Biasing mechanism

[0074] 17401-Support seat

[0075] 17402-Button

[0076] 17403-Telescopic positioning rod

[0077] 17404-Axis

[0078] 180a, 180b-bearing

[0079] 180c-proximal bearing

[0080] 180d-intermediate bearing

[0081] 180e-distal bearing

[0082] 181-Bearing spacer

[0083] 182-Bearing seat

[0084] 183c, 183d, 183e - retaining ring

[0085] 200-Vacuum Chamber DETAILED DESCRIPTION

[0086] Some embodiments of the present disclosure will be described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only exemplary embodiments of the present disclosure, rather than all embodiments.

[0087] In the description of the present disclosure, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", "top", "bottom" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present disclosure. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance. In the description of the present disclosure, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "coupled" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements. In the description of the present disclosure, the distal end or the distal side refers to an end or a side that penetrates into a vacuum environment (e.g., a vacuum chamber), and the proximal end or the proximal side refers to an end or a side opposite to the distal end or the distal side (e.g., an end or a side that is away from the vacuum chamber, or an end or a side that is close to the vacuum chamber wall in the vacuum chamber, etc.). For those of ordinary skill in the art, the specific meanings of the above terms in the present disclosure can be understood according to specific circumstances.

[0088] Figure 1 A partial cross-sectional structural schematic diagram of a rotation drive mechanism 100 according to some embodiments of the present disclosure is shown.

[0089] like Figure 1 As shown, in some embodiments of the present disclosure, the rotary drive mechanism 100 may include an eccentric rotating shaft 110, a rotating pendulum 120, and a driving device 130. The eccentric rotating shaft 110 may include an eccentric section 111 and a central section 112. In the present disclosure, the eccentric section 111 refers to a portion extending away from the rotation axis, and the central section 112 refers to a portion extending along the rotation axis. Those skilled in the art will appreciate that the eccentric rotating shaft 110 may also include a transition section disposed between the eccentric section 111 and the central section 112, but for simplicity of description, the transition section is not described in detail in the present disclosure.

[0090] like Figure 1 As shown, the rotating pendulum block 120 is sleeved outside the eccentric section 111 of the eccentric shaft 110, and can drive the eccentric shaft 110 to rotate around its own rotation axis. The driving device 130 is connected to the rotating pendulum block 120, and can drive the rotating pendulum block 120 to rotate around the rotation axis of the eccentric shaft 110, so as to drive the eccentric shaft 110 to rotate around the rotation axis.

[0091] Figure 2 A schematic structural diagram of a bellows assembly 140 according to some embodiments of the present disclosure is shown.

[0092] like Figure 1 and Figure 2 As shown, in some embodiments of the present disclosure, the rotary drive mechanism 100 may further include a bellows assembly 140. The bellows assembly 140 may include a bellows 141 and a proximal shaft 142. Figure 1 As shown, the bellows 141 is sleeved outside the eccentric shaft 110. The distal end of the proximal shaft 142 is sealed and fixedly connected to the proximal end of the bellows 141. The proximal shaft 142 includes a rotating chamber 14201, which is used to be rotatably connected to the proximal end of the eccentric section 111 of the eccentric shaft 110. The rotating pendulum block 120 is sleeved outside the proximal shaft 142 to drive the proximal shaft 142 to rotate and swing, thereby driving the eccentric shaft 110 to rotate around the rotation axis.

[0093] like Figure 1 As shown, in some embodiments of the present disclosure, the rotating pendulum block 120 is sleeved outside the proximal shaft 142 and is slidably connected to the proximal shaft 142. The rotating pendulum block 120 slides relative to the proximal shaft 142 of the bellows assembly 140. When the rotating pendulum block 120 rotates an angle, the proximal shaft 142 of the bellows assembly 140 drives the bellows 141 to swing to a corresponding angle, and at the same time drives the eccentric shaft 110 to rotate, thereby realizing the transmission of rotational motion.

[0094] Figure 3 A schematic structural diagram of an eccentric transmission seat 150 according to some embodiments of the present disclosure is shown.

[0095] like Figure 1 and Figure 3 As shown, in some embodiments of the present disclosure, the rotary drive mechanism 100 may further include an eccentric transmission seat 150. The eccentric transmission seat 150 may include an eccentric accommodation cavity 151 for accommodating the rotating pendulum block 120 to drive the rotating pendulum block 120 to rotate around the rotation axis.

[0096] like Figure 3 As shown, in some embodiments of the present disclosure, the eccentric accommodating cavity 151 includes a hole with a flat cross section, such as a truncated ellipse. The cross section of the outer peripheral surface of the rotating pendulum block 120 is a flat shape, such as a truncated ellipse, which cooperates with the flat hole of the eccentric accommodating cavity 151. The rotating pendulum block 120 and the eccentric accommodating cavity 151 are matched through the flat shaft hole to achieve rotation prevention and guidance.

[0097] Those skilled in the art will understand that, in the present disclosure, a flattened shape refers to a non-circular shape, which may include a rectangle, a polygon, an ellipse, a truncated ellipse, and any other suitable shape, as long as the rotating pendulum block 120 cooperates with the eccentric accommodating cavity 151 and can rotate with the rotation of the eccentric accommodating cavity 151 and cannot rotate on its own.

[0098] like Figure 1 As shown, in some embodiments of the present disclosure, the driving device 130 may include a rotating block 131 and a driving mechanism 132. The rotating block 131 is fixedly connected to the eccentric transmission seat 150. For example, Figure 1 As shown, the rotating block 131 can be a hollow cover, fixedly connected to the eccentric transmission seat 150, covering the eccentric transmission seat 150, for example, covering the eccentric accommodating cavity 151. The driving mechanism 132 is connected to the rotating block 131, and is used to drive the rotating block 131 to rotate, so as to drive the rotating pendulum block 120 to rotate around the rotation axis.

[0099] Those skilled in the art will appreciate that although Figure 1 The driving mechanism 132 is shown as a handle, which can be driven by hand, but this is only exemplary, and the driving mechanism 132 can also be other types of driving mechanisms, such as a motor, an engine, etc.

[0100] like Figure 1 and Figure 2 As shown, in some embodiments of the present disclosure, the bellows assembly 140 may further include a distal shaft 143 and a flange 144. The proximal end of the distal shaft 143 is sealed and fixedly connected to the distal end of the bellows 141. The distal shaft 143 passes through the flange hole of the flange 144 and is sealed and fixedly connected to the flange 144.

[0101] like Figure 1 As shown, the rotary drive mechanism 100 may further include a fixed seat 160, which is sleeved on the outside of at least a portion of the bellows assembly 140. The proximal end of the fixed seat 160 is rotatably connected to the eccentric transmission seat 150, and the distal end of the fixed seat 160 is fixedly connected to the distal shaft 142 or the flange 144 of the bellows assembly 140.

[0102] For example, Figure 2 As shown, in some embodiments of the present disclosure, a circumferential groove (e.g., a circumferential V-shaped groove) 14301 is provided on the distal shaft 143 of the bellows assembly 140, and at least two through holes are provided on the distal end of the fixing seat 160. At least two screws respectively pass through the at least two through holes of the fixing seat 160 and abut against the circumferential groove 14301, thereby realizing a fixed connection between the distal end of the fixing seat 160 and the distal shaft 142 of the bellows assembly 140.

[0103] like Figure 1 As shown, in some embodiments of the present disclosure, the rotating pendulum block 120 may further include at least one protrusion or positioning pin 121 disposed on the outer surface. The inner side of the eccentric transmission seat 150 may include an inwardly protruding flange or an outwardly recessed groove, and the at least one protrusion or positioning pin 121 cooperates with the inner flange or groove of the eccentric transmission seat 150 to limit the rotating pendulum block 120.

[0104] Figure 4 A schematic structural diagram of a one-way self-locking assembly 170 according to some embodiments of the present disclosure is shown.

[0105] like Figure 1 and Figure 4 As shown, in some embodiments of the present disclosure, the rotary drive mechanism 100 may further include a one-way self-locking assembly 170. The one-way self-locking assembly 170 may include a ratchet 171, a pawl 172, a stopper 173 and a biasing mechanism 174. The ratchet 171 is fixedly connected to the eccentric transmission seat 150. The pawl 172 can partially engage with the ratchet 171. The stopper 173 is arranged at the back of the pawl 172, and a first limiting groove 17301 and a second limiting groove 17302 are respectively arranged at both ends of the stopper 173. The biasing mechanism 174 is fixedly connected to the fixed seat 160. The biasing mechanism 174 can abut against the first limiting groove 17301 or the second limiting groove 17302 so that the biasing mechanism 174 is locked in the first limiting groove 17301 or the second limiting groove 17302, so that the pawl 172 is located at one end of the second limiting groove 17302 or the first limiting groove 17301 and is separated from the ratchet 171, so that the ratchet 171 can only rotate in one direction.

[0106] like Figure 4 As shown, in some embodiments of the present disclosure, the biasing mechanism 174 may further include a support seat 17401, a button 17402, and a telescopic positioning rod 17403. The support seat 17401 is fixedly connected to the fixing seat 160. The button 17402 is rotatably connected to the support seat 17401. The telescopic positioning rod 17403 is connected to the button 17402 and can move synchronously with the button 17402 so that the telescopic positioning rod 17403 is locked in the first limiting groove 17301 or the second limiting groove 17302.

[0107] like Figure 4 As shown, in some embodiments of the present disclosure, the biasing mechanism 174 may further include a shaft 17404. The button 17402 is provided with a longitudinal through hole for accommodating the shaft 17404 so that the button 17402 can rotate relative to the shaft 17404. The telescopic positioning rod 17403 may include a spring and a pin. The front end of the button 17402 is provided with a transverse through hole for accommodating at least part of the spring and / or the pin so that the spring can move synchronously with the button 17402 so that the telescopic positioning rod 17403 is locked in the first limiting groove 17301 or the second limiting groove 17302. One end of the pin is connected to the spring or at least partially sleeved on the outside of the spring, and the other end of the pin can abut against the first limiting groove 17301 or the second limiting groove 17302.

[0108] like Figure 4As shown, in some embodiments of the present disclosure, the button 17402 can be V-shaped, L-shaped, U-shaped, etc. When the button 17402 is pressed to the left, the button 17402 rotates around the axis 17404 until the telescopic positioning rod 17403 abuts against the first limit groove 17301. At this time, the right end of the pawl 172 engages with the ratchet 171, and the right end of the pawl 172 abuts against the inner edge of the support seat 17401, so that the ratchet 171 can only rotate clockwise.

[0109] like Figure 1 As shown, in some embodiments of the present disclosure, the distal end of the eccentric transmission seat 150 is sleeved outside the proximal end of the fixed seat 160, through at least one bearing (e.g. Figure 1 The bearing 180a and / or bearing 180b shown are rotatably connected.

[0110] like Figure 1 As shown, in some embodiments of the present disclosure, the proximal end of the fixed seat 160 is rotatably connected to the eccentric transmission seat 150 through the bearing 180a and the bearing 180b, and a bearing spacer 181 is provided between the bearing 180a and the bearing 180b. In some embodiments of the present disclosure, the bearing 180a is located at the proximal end, the bearing 180b is located at the distal end, and the inner ring of the ratchet 171 presses the outer ring of the bearing 180b to fix the bearing 180b.

[0111] like Figure 1 As shown, in some embodiments of the present disclosure, the eccentric shaft 110 and the bellows assembly 140 are connected by at least one bearing (e.g. Figure 1 The proximal bearing 180c and / or the middle bearing 180d and / or the distal bearing 180e) shown are rotationally connected.

[0112] like Figure 1 As shown, in some embodiments of the present disclosure, the proximal end of the eccentric shaft 110 is rotatably connected to the proximal shaft 142 of the bellows assembly 140 via a proximal bearing 180c. The middle portion of the eccentric shaft 110 is rotatably connected to the proximal end of the distal shaft 142 of the bellows assembly 140 via a middle bearing 180d. The distal end of the eccentric shaft 110 is rotatably connected to the distal end of the distal shaft 142 of the bellows assembly 140 via a distal bearing 180e.

[0113] like Figure 1 As shown, in some embodiments of the present disclosure, the vacuum rotation drive mechanism 100 may further include a bearing seat 182, which is disposed in the distal shaft 142 of the bellows assembly 140, the proximal end of the bearing seat 182 abuts against the lower end of the second bearing 180d, and the distal end of the bearing seat 182 is rotationally connected to the distal end of the eccentric shaft 110 through the third bearing 180e.

[0114] like Figure 1As shown, in some embodiments of the present disclosure, a retaining ring 183c is disposed at the proximal end of the first bearing 180c, a shaft end retaining ring 183d is disposed at the proximal end of the second bearing 180d, and a shaft end retaining ring 183e is disposed at the distal end of the third bearing 180e.

[0115] Figure 5 FIG. 1 is a schematic structural diagram of a vacuum processing system 1000 according to some embodiments of the present disclosure.

[0116] like Figure 5 As shown, in some embodiments of the present disclosure, the vacuum processing system may include a vacuum chamber 200, a rotating device (not shown in the figure), and a rotating drive mechanism 100 according to any embodiment of the present disclosure, which is used to drive the rotating device.

[0117] like Figure 5 As shown, in some embodiments of the present disclosure, the rotary drive device 130 drives the bellows 141 to swing by the swing of the proximal shaft 142 of the bellows to achieve the transmission of the rotary motion outside the vacuum into the vacuum.

[0118] In some embodiments of the present disclosure, the interior of the bellows assembly 140 is a vacuum environment, and the exterior is an atmospheric environment. For example, the rotating block 131 can be driven to rotate by manually shaking the driving mechanism 132, thereby driving the eccentric transmission seat 150 to rotate. The eccentric transmission seat 150 drives the rotating pendulum block 120 to rotate. When the rotating pendulum block 120 rotates an angle, the proximal shaft 142 of the bellows assembly 140 drives the bellows 141 to swing to the corresponding angle, and at the same time drives the eccentric shaft 110 to rotate, thereby realizing the transmission of the rotational motion.

[0119] It should be pointed out that the above are only exemplary embodiments of the present disclosure and are not intended to limit the present disclosure. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A rotary drive mechanism, characterized in that: include: An eccentric rotating shaft, comprising an eccentric section and a central section; A rotating pendulum block is sleeved on the outside of the eccentric section of the eccentric shaft and can drive the eccentric shaft to rotate around its own rotation axis; and A driving device is connected to the rotating pendulum block and can drive the rotating pendulum block to rotate around the rotation axis of the eccentric shaft, so as to drive the eccentric shaft to rotate around the rotation axis.

2. The rotary drive mechanism according to claim 1, characterized in that: Also included is a bellows assembly, the bellows assembly comprising: A bellows, sleeved outside the eccentric shaft; and A proximal shaft, the distal end of which is fixedly connected to the proximal seal of the bellows, the proximal shaft comprising a rotating chamber for rotationally connecting to the proximal end of the eccentric section of the eccentric shaft, the rotating pendulum block being sleeved outside the proximal shaft to drive the proximal shaft to rotate and swing, thereby driving the eccentric shaft to rotate around the rotation axis.

3. The rotary drive mechanism according to claim 2, characterized in that: It also includes an eccentric transmission seat, which includes an eccentric accommodating cavity for accommodating the rotating pendulum block to drive the rotating pendulum block to rotate around a rotation axis.

4. The rotary drive mechanism according to claim 3, characterized in that: The driving device comprises: A rotating block, fixedly connected to the eccentric transmission seat; A driving mechanism connected to the rotating block, and used to drive the rotating block to rotate, so as to drive the rotating pendulum block to rotate around the rotation axis; The eccentric accommodation cavity comprises a hole with a flat cross section; The cross section of the outer peripheral surface of the rotating pendulum block is in a flat shape, which matches with the flat hole of the eccentric accommodating cavity.

5. The rotary drive mechanism according to claim 3, characterized in that: The bellows assembly further comprises: a distal shaft, the proximal end of which is sealed and fixedly connected to the distal end of the bellows; and A flange, wherein the distal shaft passes through a flange hole of the flange and is sealed and fixedly connected to the flange; The rotary drive mechanism also includes a fixed seat, which is sleeved on the outside of at least a portion of the bellows assembly, the proximal end of the fixed seat is rotatably connected to the eccentric transmission seat, and the distal end of the fixed seat is fixedly connected to the distal shaft of the bellows assembly or the flange.

6. The rotary drive mechanism according to claim 3, characterized in that: The rotating pendulum mass further comprises at least one protrusion or positioning pin disposed on the outer surface; The inner side of the eccentric transmission seat includes an inwardly protruding flange or an outwardly recessed groove, and the at least one protrusion or positioning pin cooperates with the inner flange or groove of the eccentric transmission seat to limit the rotating pendulum block.

7. The rotary drive mechanism according to claim 5, characterized in that: It also includes a one-way self-locking component, which includes: A ratchet wheel fixedly connected to the eccentric transmission seat; a pawl, the pawl being capable of partially engaging with the ratchet wheel; A stopper is arranged on the back of the pawl, and a first limiting groove and a second limiting groove are respectively arranged at both ends of the stopper; and The biasing mechanism can abut against the first limiting groove or the second limiting groove, so that the part of the pawl located in the first limiting groove or the second limiting groove engages with the ratchet, and the part of the pawl located at one end of the second limiting groove or the first limiting groove is separated from the ratchet.

8. The rotary drive mechanism according to claim 7, characterized in that: The biasing mechanism comprises: A supporting seat, fixedly connected to the fixing seat; A button, rotatably connected to the support base; and The telescopic positioning rod is connected to the button and can move synchronously with the button so that the telescopic positioning rod is locked in the first limiting groove or the second limiting groove.

9. The rotary drive mechanism according to claim 5, characterized in that: The eccentric shaft is rotatably connected to the bellows assembly via at least one bearing, and the at least one bearing comprises: A proximal bearing, wherein the proximal end of the eccentric shaft is rotatably connected to the proximal shaft of the bellows assembly via a proximal bearing; and / or A middle bearing, wherein the middle portion of the eccentric shaft is rotatably connected to the proximal end of the distal shaft of the bellows assembly via the middle bearing; and / or A distal bearing, wherein the distal end of the eccentric shaft is rotationally connected to the distal end of the distal shaft of the bellows assembly via a distal bearing.

10. A vacuum processing system, characterized in that: include: Vacuum chamber, Rotating device, and The rotary drive mechanism according to any one of claims 1 to 9 is used to drive the rotary device.

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