Resonator

A glass substrate-based resonator addresses the high-voltage resistance issue by offering improved isolation and reduced substrate losses, enhancing the performance of electronic resonators.

CN222169773UActive Publication Date: 2024-12-13GLASSMICRO (CHONGQING) SEMICONDUCTOR TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202420927758.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-04-29
Publication Date
2024-12-13
Estimated Expiration
2034-04-29

AI Technical Summary

Technical Problem

Traditional electronic resonators face challenges in achieving high isolation voltage due to material limitations of the insulating substrate, leading to poor high-voltage resistance.

Method used

The use of a glass substrate with a conductive layer and electrode plates to form a capacitor, where the glass substrate provides insulation, high resistivity, and a small dielectric constant, reducing substrate loss and parasitic capacitance, and enhancing breakdown field strength.

Benefits of technology

The glass substrate improves the high-voltage resistance performance of the resonator by providing better isolation and reducing substrate losses, while maintaining a compact design.

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Abstract

The resonator comprises a glass substrate, a first conductive layer and a second conductive layer, and the glass substrate is provided with a first surface and a second surface which are opposite to each other; the first conducting layer is arranged on the first surface and comprises a first pole plate and an inductance coil surrounding the periphery of the first pole plate, and the inductance coil is provided with an inner connecting end and an outer connecting end; the second conducting layer comprises a second polar plate arranged on the second surface, and the second polar plate is opposite to the first polar plate; the inner connecting end is electrically connected with the first polar plate, and the outer connecting end and the second polar plate are used for connecting an external circuit, or the inner connecting end is electrically connected with the second polar plate, and the outer connecting end and the first polar plate are used for connecting the external circuit. According to the resonator, the glass substrate is used as the substrate of the capacitor formed by the first polar plate and the second polar plate, so that the substrate loss and the substrate parasitic capacitance can be reduced, the isolation performance of the capacitor can be greatly improved, and the high-voltage resistance of the resonator can be effectively improved.
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Description

Technical Field

[0001] The present application relates to the technical field of resonators, and in particular to a resonator. Background Art

[0002] A resonator is an oscillator that can generate a specific frequency. It is used to generate a stable AC signal in a circuit and can be used in wireless communications, radar systems, radio frequency circuits and other electronic devices. The working principle of the resonator is based on the resonance phenomenon, that is, when the vibration frequency of a system matches the natural frequency of the system, a resonance phenomenon will occur, thereby generating an oscillation signal of a specific frequency.

[0003] Resonators are usually divided into mechanical resonators and electronic resonators. Mechanical resonators use the natural frequency of the mechanical system to produce resonance. For example, quartz crystals or ceramic resonators are usually used to generate oscillation signals of specific frequencies. Electronic resonators use components such as inductance, capacitance, and resistance in the circuit to produce resonance. The most common electronic resonator is the LC resonator, which is composed of an inductor and a capacitor. When the natural frequencies of the inductor and capacitor match, resonance occurs.

[0004] Capacitors can achieve advantages such as higher data rates, higher signal integrity and noise immunity. However, since the insulating substrate of the capacitor is limited by material constraints, it is difficult to achieve a higher isolation voltage, which in turn leads to poor high-voltage resistance of the resonator. Utility Model Content

[0005] The present application aims to provide a resonator to improve the high-voltage resistance performance of the resonator.

[0006] According to a first aspect of the present application, the present application provides a resonator, comprising:

[0007] a glass substrate having a first surface and a second surface opposite to each other;

[0008] A first conductive layer, which is disposed on the first surface, the first conductive layer comprising: a first electrode plate and an inductor coil disposed around the first electrode plate, the inductor coil having an inner connecting end and an outer connecting end;

[0009] The second conductive layer includes: a second electrode plate disposed on the second surface, the second electrode plate being opposite to the first electrode plate;

[0010] The inner connection end is electrically connected to the first electrode plate, and the outer connection end is used to connect to an external circuit with the second electrode plate, or,

[0011] The internal connection end is electrically connected to the second electrode plate, and the external connection end is used to connect to an external circuit with the first electrode plate.

[0012] As a further solution of the resonator provided in the present application, the first conductive layer includes:

[0013] A first pin, the first pin is connected to the first electrode plate or the second electrode plate, and the first electrode plate or the second electrode plate is used to connect the external circuit through the first pin;

[0014] A second pin, wherein the second pin is connected to the external connection end, and the external connection end is connected to the external circuit through the second pin.

[0015] As a further solution of the resonator provided in the present application, the glass substrate is provided with a through hole, a conductive wire is arranged in the through hole, and the first pin is connected to the second electrode plate through the conductive wire.

[0016] As a further solution of the resonator provided in the present application, the second conductive layer includes:

[0017] A first pin, the first pin is connected to the first electrode plate or the second electrode plate, and the first electrode plate or the second electrode plate is used to connect the external circuit through the first pin;

[0018] A second pin, wherein the second pin is connected to the external connection end, and the external connection end is connected to the external circuit through the second pin.

[0019] As a further solution of the resonator provided in the present application, the glass substrate is provided with a through hole, a conductive wire is arranged in the through hole, and the conductive wire connects the external connection end and the second pin.

[0020] According to a second aspect of the present application, the present application provides a resonator, including:

[0021] a glass substrate having a first surface and a second surface opposite to each other;

[0022] A first conductive layer, which is disposed on the first surface, the first conductive layer comprising: a first electrode plate and an inductor coil disposed around the first electrode plate, the inductor coil having an inner connecting end and an outer connecting end;

[0023] A second conductive layer includes a second electrode plate disposed on the second surface, and the second electrode plate is opposite to the first electrode plate;

[0024] The internal connection end is electrically connected to the first electrode plate, and the external connection end is electrically connected to the second electrode plate. The internal connection end and the external connection end are used to connect to an external circuit.

[0025] As a further solution of the resonator provided in the present application, the first conductive layer further includes:

[0026] A first pin, the first pin being connected to the internal connection end;

[0027] A second pin, the second pin being connected to the external connection end;

[0028] The first pin and the second pin are used to connect to an external circuit.

[0029] As a further solution of the resonator provided in the present application, the glass substrate is provided with a through hole, a conductive wire is provided in the through hole, and the conductive wire connects the external connection end and the second pin.

[0030] As a further solution of the resonator provided in the present application, the second conductive layer further includes:

[0031] A first pin, wherein the first pin is connected to the second electrode plate;

[0032] a second pin, the second pin being connected to the internal connection end;

[0033] The first pin and the second pin are used to connect to an external circuit.

[0034] As a further solution of the resonator provided in the present application, the glass substrate is provided with a through hole, a conductive wire is provided in the through hole, and the conductive wire connects the internal connection end and the second pin.

[0035] According to the resonator of the above embodiment, the glass substrate is used as the substrate of the capacitor formed by the first electrode and the second electrode. The glass substrate not only has insulation performance, but also has a larger resistivity and a smaller dielectric constant, which can reduce the substrate loss and the substrate parasitic capacitance, thereby greatly improving the isolation performance of the capacitor. At the same time, the thickness of the glass substrate as a substrate is in the order of millimeters, and has a larger breakdown field strength. Compared with substrates made of other insulating materials, it can effectively improve the high voltage resistance performance of the resonator. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 Schematic diagram of the series connection state of the resonator provided by the utility model Figure 1 ;

[0037] Figure 2 Schematic diagram of the series connection state of the resonator provided by the utility model Figure 2 ;

[0038] Figure 3 Schematic diagram of the series connection state of the resonator provided by the utility model Figure 3 ;

[0039] Figure 4 Schematic diagram of the parallel connection state of the resonator provided by the utility model Figure 1 ;

[0040] Figure 5 Schematic diagram of the parallel connection state of the resonator provided by the utility model Figure 2 ;

[0041] Figure 6 Schematic diagram of the parallel connection state of the resonator provided by the utility model Figure 3 ;

[0042] Figure 7 A schematic diagram of the series connection relationship of the resonators provided by the utility model;

[0043] Figure 8 A schematic diagram of the parallel connection relationship of the resonators provided by the utility model;

[0044] Fig. 9 A front view schematic diagram of a resonator provided by the utility model;

[0045] Fig.10 This is a schematic diagram of the back side of the resonator provided by the utility model. DETAILED DESCRIPTION

[0046] The present application is further described in detail below by specific embodiments in conjunction with the accompanying drawings. Wherein similar elements in different embodiments adopt associated similar element numbers. In the following embodiments, many detailed descriptions are intended to enable the present application to be better understood. However, those skilled in the art can easily recognize that some of the features can be omitted in different situations, or can be replaced by other elements, materials, and methods. In some cases, some operations related to the present application are not shown or described in the specification, in order to avoid the core part of the present application being overwhelmed by too much description, and for those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations based on the description in the specification and the general technical knowledge in the art.

[0047] In addition, the features, operations or characteristics described in the specification can be combined in any appropriate manner to form various implementations, and the operation steps involved in each embodiment can also be replaced or adjusted in a sequence in a manner that is obvious to those skilled in the art. Therefore, the specification and drawings are only for the purpose of clearly describing a certain embodiment and do not mean that the composition and / or sequence are necessary.

[0048] The serial numbers of the components in this document, such as "first", "second", etc., are only used to distinguish the objects described and do not have any order or technical meaning. The "connection" and "coupling" mentioned in this application, unless otherwise specified, include direct and indirect connections (couplings).

[0049] Electronic resonators use components such as inductors and capacitors in circuits to produce resonance. When the natural frequencies of the inductors and capacitors match, resonance occurs. The insulating substrate of the capacitor in traditional resonators is limited by material limitations, making it difficult to achieve a high isolation voltage, resulting in poor high-voltage resistance of the resonator.

[0050] Embodiment 1

[0051] See also Figure 1-Figure 3 ,and Figure 7 , Fig. 9 and Fig.10 As shown, the resonator provided in this embodiment includes: a glass substrate 10, a first conductive layer and a second conductive layer.

[0052] The glass substrate 10 is a plate-like structure, and has a first surface 11 and a second surface 12 opposite to each other. The glass substrate 10 can be one of alkali-free glass, aluminosilicate glass, and soda glass, and its thickness is usually not greater than 0.7 mm. The glass substrate 10 can be manufactured by cutting, for example.

[0053] The first conductive layer is disposed on the first surface 11 of the glass substrate 10 , and the second conductive layer is disposed on the second surface 12 of the glass substrate 10 .

[0054] In a specific embodiment, the first conductive layer includes: a first electrode plate 20 and an inductor 40, both of which are disposed on the first surface 11 of the glass substrate 10, and the inductor 40 has an inner connection end 41 and an outer connection end 42, wherein the inductor 40 is disposed around the periphery of the first electrode plate 20, which is beneficial for reducing the size of the filter. The second conductive layer includes: a second electrode plate 30, which is disposed on the second surface 12 of the glass substrate 10, and the second electrode plate 30 is opposite to the first electrode plate 20.

[0055] In one embodiment of the present application, the first electrode plate 20 and the second electrode plate 30 can be prepared on one side and the other side of the glass substrate 10 respectively by deposition or other chemical preparation processes.

[0056] In this embodiment, Figure 1 As shown, the internal connection terminal 41 is electrically connected to the first electrode plate 20, and the external connection terminal 42 is used to connect to the second electrode plate 30 for connecting to an external circuit, or, as shown in FIG. Figure 2 As shown, the internal connection terminal 41 is electrically connected to the second electrode plate 30, and the external connection terminal 42 is connected to the first electrode plate 20 for connecting to an external circuit.

[0057] Combination Figure 7As shown, the external circuit is a power source U, wherein the power source U has a positive terminal and a negative terminal. When the internal connection terminal 41 is electrically connected to the first electrode plate 20, the external connection terminal 42 is connected to the positive terminal and the negative terminal of the power source U with the second electrode plate 30, respectively, or the external connection terminal 42 is connected to the negative terminal and the positive terminal of the power source U with the second electrode plate 30, respectively, to form a series connection form. When the internal connection terminal 41 is electrically connected to the second electrode plate 30, the external connection terminal 42 is connected to the positive terminal and the negative terminal of the power source U with the first electrode plate 20, respectively, or the external connection terminal 42 is connected to the negative terminal and the positive terminal of the power source U with the first electrode plate 20, respectively, to form another series connection form.

[0058] In this way, the first electrode plate 20 and the second electrode plate 30 form a capacitor, and the glass substrate 10 becomes a substrate of the capacitor.

[0059] As the substrate of the capacitor, the glass substrate 10 has certain insulation properties and can also provide a larger resistivity and a smaller dielectric constant, which can greatly reduce the substrate loss and the substrate parasitic capacitance, thereby greatly improving the isolation performance of the capacitor. At the same time, the thickness of the glass substrate 10 as a substrate is in the order of millimeters, and has a larger breakdown field strength. Compared with substrates made of other insulating materials, it can effectively improve the high-voltage resistance performance of the resonator.

[0060] like Figure 7 As shown, in this embodiment, the internal connection terminal 41 is electrically connected to the first electrode plate 20, the external connection terminal 42 is electrically connected to the positive terminal of the power source U through the resistor R, and the second electrode plate 30 is electrically connected to the negative terminal of the power source U.

[0061] In another embodiment of the present application, Figure 3 As shown, the external connection terminal 42 is electrically connected to the first electrode plate 20 and electrically connected to the positive terminal or negative terminal of the power source U, and the internal connection terminal 41 is electrically connected to the second electrode plate 30 and electrically connected to the negative terminal or positive terminal of the power source U, which can also form a series connection form.

[0062] In one embodiment of the resonator provided in the present application, the first conductive layer also includes: a first pin and a second pin, the first pin is connected to the first electrode 20 or the second electrode 30, and the first electrode 20 or the second electrode 30 is used to connect to an external circuit through the first pin; the second pin is connected to an external connection terminal 42, and the external connection terminal 42 is connected to an external circuit through the second pin.

[0063] Specifically, when the first pin is connected to the first electrode plate 20, the first electrode plate 20 is connected to the positive terminal or the negative terminal of the power source U through the first pin, the second pin is connected to the external connection terminal 42, the external connection terminal 42 is connected to the negative terminal or the positive terminal of the power source U through the second pin, and the second pin is electrically connected to the second electrode plate 30, thereby forming a series connection form. When the first pin is connected to the second electrode plate 30, the second electrode plate 30 is connected to the positive terminal or the negative terminal of the power source U through the first pin, the second pin is connected to the external connection terminal 42, the external connection terminal 42 is connected to the negative terminal or the positive terminal of the power source U through the second pin, and the second pin is electrically connected to the first electrode plate 20, thereby forming a series connection form.

[0064] In this embodiment, the first pin and the second pin are both disposed on the first surface 11 of the glass substrate 10, and in order to connect the second pin to the second electrode plate 30, the Figure 1 As shown, the glass substrate 10 is provided with a through hole 13, which passes through the thickness direction of the glass substrate 10, that is, passes through the first surface 11 and the second surface 12. A conductive wire 14 is provided in the through hole 13, and the conductive wire 14 connects the external connection end 42 and the second pin. The conductive wire 14 is also connected to the second electrode plate 30, thereby electrically connecting the second pin to the second electrode plate 30.

[0065] In another embodiment of the resonator provided in the present application, the second conductive layer further includes: a first pin and a second pin, the first pin is connected to the first plate 20 or the second plate 30, the first plate 20 or the second plate 30 is used to connect to an external circuit through the first pin. The second pin is connected to the external connection terminal 42, and the external connection terminal 42 is connected to the external circuit through the second pin.

[0066] Specifically, when the first pin is connected to the first electrode plate 20, the first electrode plate 20 is connected to the positive terminal or the negative terminal of the power source U through the first pin, the second pin is connected to the external connection terminal 42, the external connection terminal 42 is connected to the negative terminal or the positive terminal of the power source U through the second pin, and the second pin is electrically connected to the second electrode plate 30, thereby forming a series connection form. When the first pin is connected to the second electrode plate 30, the second electrode plate 30 is connected to the positive terminal or the negative terminal of the power source U through the first pin, the second pin is connected to the external connection terminal 42, the external connection terminal 42 is connected to the negative terminal or the positive terminal of the power source U through the second pin, and the second pin is electrically connected to the first electrode plate 20, thereby forming a series connection form.

[0067] In this embodiment, the first pin and the second pin are both disposed on the second surface 12 of the glass substrate 10, and the second pin is connected to the first electrode plate 20. Figure 2As shown, the glass substrate 10 is provided with a through hole 13, which passes through the thickness direction of the glass substrate 10, that is, passes through the first surface 11 and the second surface 12. A conductive wire 14 is provided in the through hole 13, and the conductive wire 14 connects the external connection terminal 42 and the second pin.

[0068] In practical applications, in order to improve the safety of the product, the resonator provided in this embodiment also includes: a first insulating layer and a second insulating layer, the first insulating layer covers the first electrode plate 20, and the second insulating layer covers the second electrode plate 30, so as to protect the first electrode plate 20 and the second electrode plate 30 respectively through the first insulating layer and the second insulating layer.

[0069] In a preferred embodiment, the first insulating layer and the second insulating layer may be silicon oxide, silicon nitride, or a stack of silicon oxide and silicon nitride.

[0070] like Figure 1 As shown, the inductor 40 is disposed on the first surface 11 of the glass substrate 10, thus saving the space for disposing the inductor 40. Thus, the inductor 40 surrounds the periphery of the first electrode plate 20, further saving space and making the product structure more compact.

[0071] In this embodiment, the line width of the inductor coil may be in the range of 10-50 microns, and the distance (line spacing) between the centers of two adjacent coils may be in the range of 10-100 microns. In this way, the inductor coil has good electrical performance.

[0072] In this embodiment, in order to avoid a short circuit caused by the inductor coil 40 contacting the first pole plate 20 and / or the second pole plate 30, the resonator provided in the present application also includes: an insulating component, which is arranged between the inductor coil 40 and the first pole plate 20 and / or the second pole plate 30.

[0073] It should be noted that the resonator provided in this embodiment may also include other passive components, such as resistors, other capacitors and other inductors. These passive components may be arranged on the first surface and / or the second surface of the glass substrate as required.

[0074] Embodiment 2

[0075] See also Figure 4-Figure 6 ,and Figure 8-Figure 10 As shown, the resonator provided in this embodiment includes: a glass substrate 10, a first conductive layer and a second conductive layer.

[0076] The glass substrate 10 is a plate-like structure, and has a first surface 11 and a second surface 12 opposite to each other. The glass substrate 10 can be one of alkali-free glass, aluminosilicate glass, and soda glass, and the thickness is usually not greater than 0.7 mm. The glass substrate 10 can be manufactured, for example, by cutting.

[0077] The first conductive layer is disposed on the first surface of the glass substrate 10 , and the second conductive layer is disposed on the second surface 12 of the glass substrate 10 .

[0078] In a specific embodiment, the first conductive layer includes: a first electrode plate 20 and an inductor coil 40, both of which are disposed on the first surface 11 of the glass substrate 10, and the inductor coil 40 has an inner connection end 41 and an outer connection end 42, wherein the inductor coil 40 is disposed around the periphery of the first electrode plate 20. The second conductive layer includes: a second electrode plate 30, which is disposed on the second surface 12 of the glass substrate 10, and the second electrode plate 30 is opposite to the first electrode plate 20.

[0079] In one embodiment of the present application, the first electrode plate 20 and the second electrode plate 30 can be prepared on one side and the other side of the glass substrate 10 respectively by deposition or other chemical preparation processes.

[0080] The internal connection terminal 41 is electrically connected to the first electrode plate 20 , and the external connection terminal 42 is electrically connected to the second electrode plate 30 . In addition, the internal connection terminal 41 and the external connection terminal 42 are used to connect to an external circuit.

[0081] Specifically, the internal connection terminal 41 and the first electrode plate 20 are connected to one end of the external circuit at the same time, and the external connection terminal 42 and the second electrode plate 30 are connected to the other end of the external circuit at the same time.

[0082] In a specific embodiment, Figure 8 As shown, the external circuit is a power supply U, wherein the power supply U has a positive terminal and a negative terminal, the internal connection terminal 41 is electrically connected to the first electrode plate 20 through a resistor R, and is connected to the positive terminal or the negative terminal of the power supply U, and the external connection terminal 42 is electrically connected to the second electrode plate 30, and is connected to the negative terminal or the positive terminal of the power supply U, thereby forming a parallel connection form.

[0083] In this way, the first electrode plate 20 and the second electrode plate 30 form a capacitor, and the glass substrate 10 becomes a substrate of the capacitor.

[0084] As the substrate of the capacitor, the glass substrate 10 has certain insulation properties and can also provide a larger resistivity and a smaller dielectric constant, which can greatly reduce the substrate loss and the substrate parasitic capacitance, thereby greatly improving the isolation performance of the capacitor. At the same time, the thickness of the glass substrate 10 as a substrate is in the order of millimeters, and has a larger breakdown field strength. Compared with substrates made of other insulating materials, it can effectively improve the high-voltage resistance performance of the resonator.

[0085] In one embodiment of the resonator provided in the present application, the first conductive layer further includes: a first pin and a second pin, the first pin is connected to the internal connection end 41, the second pin is connected to the external connection end 42, and the first pin and the second pin are used to connect to an external circuit.

[0086] Specifically, when the first pin is connected to the internal connection terminal 41 and the second pin is connected to the external connection terminal 42, the first pin is connected to the positive terminal or negative terminal of the power source U, and the second pin is connected to the negative terminal or positive terminal of the power source U, thereby forming a parallel connection.

[0087] In this embodiment, the first pin and the second pin are both disposed on the first surface 11 of the glass substrate 10, and in order to connect the second pin to the external connection terminal 42, the Figure 4 As shown, the glass substrate 10 is provided with a through hole 13, which passes through the thickness direction of the glass substrate 10, that is, passes through the first surface 11 and the second surface 12. A conductive wire 14 is provided in the through hole 13, and the conductive wire 14 connects the external connection terminal 42 and the second pin.

[0088] In another embodiment of the resonator provided in the present application, the second conductive layer further includes: a first pin and a second pin, the first pin is connected to the second electrode plate 30, the second pin is connected to the internal connection terminal 41, and the first pin and the second pin are used to connect to an external circuit.

[0089] Specifically, when the first pin is connected to the second electrode plate 30 and the second pin is connected to the internal connection terminal 41, the first pin is connected to the positive terminal or negative terminal of the external circuit (voltage U at both ends), and the second pin is connected to the negative terminal or positive terminal of the external circuit, thereby forming a parallel connection.

[0090] In this embodiment, the first pin and the second pin are both disposed on the second surface 12 of the glass substrate 10, and in order for the second pin to be connected to the inner connection terminal 41, the Figure 5 As shown, the glass substrate 10 is provided with a through hole 13, which passes through the thickness direction of the glass substrate 10, that is, passes through the first surface 11 and the second surface 12. A conductive wire 14 is provided in the through hole 13, and the conductive wire 14 connects the internal connection terminal 41 and the second pin.

[0091] In this embodiment, the connecting pins 50 are disposed on one side or the other side of the glass substrate 10 , thereby saving the space for disposing the connecting pins 50 .

[0092] In practical applications, in order to improve the safety of the product, the resonator provided in this embodiment also includes: a first insulating layer and a second insulating layer, the first insulating layer covers the first electrode plate 20, and the second insulating layer covers the second electrode plate 30, so as to protect the first electrode plate 20 and the second electrode plate 30 respectively through the first insulating layer and the second insulating layer.

[0093] In a preferred embodiment, the first insulating layer and the second insulating layer may be silicon oxide, silicon nitride, or a stack of silicon oxide and silicon nitride.

[0094] like Figure 4As shown, the inductor 40 is disposed on the first surface of the glass substrate 10, thus saving the space for disposing the inductor 40. Thus, the inductor 40 surrounds the periphery of the first electrode plate 20, further saving space and making the product structure more compact.

[0095] In this embodiment, in order to avoid a short circuit caused by the inductor 40 contacting the first pole plate 20 and / or the second pole plate 40, the resonator provided in the present application also includes: an insulating component, which is arranged between the inductor 40 and the first pole plate 20 and / or the second pole plate 30.

[0096] In summary, the resonator provided by the present application uses a glass substrate as the substrate of the capacitor formed by the first electrode and the second electrode. The glass substrate not only has insulating properties, but also has a larger resistivity and a smaller dielectric constant, which can reduce the substrate loss and the substrate parasitic capacitance, thereby greatly improving the isolation performance of the capacitor. At the same time, the thickness of the glass substrate as a substrate is in the order of millimeters / micrometers, and has a large breakdown field strength. Compared with substrates made of other insulating materials, it can effectively improve the high-voltage resistance of the resonator.

[0097] It should be noted that the resonator provided in this embodiment can also be used in a filter circuit to perform a filtering function.

[0098] The above specific examples are used to illustrate the present invention, which are only used to help understand the present invention and are not intended to limit the present invention. For those skilled in the art of the present invention, some simple deductions, deformations or substitutions can be made based on the idea of ​​the present invention.

Claims

1. A resonator, characterized in that: include: A glass substrate having a first surface and a second surface opposite to each other; A first conductive layer, which is disposed on the first surface, the first conductive layer comprising: a first electrode plate and an inductor coil disposed around the first electrode plate, the inductor coil having an inner connecting end and an outer connecting end; A second conductive layer includes a second electrode plate disposed on the second surface, the second electrode plate being opposite to the first electrode plate; The inner connection end is electrically connected to the first electrode plate, and the outer connection end is connected to the second electrode plate for connecting to an external circuit, or The internal connection end is electrically connected to the second electrode plate, and the external connection end is used to connect to an external circuit with the first electrode plate.

2. The resonator according to claim 1, characterized in that The first conductive layer further comprises: A first pin, the first pin is connected to the first electrode plate or the second electrode plate, and the first electrode plate or the second electrode plate is used to connect the external circuit through the first pin; A second pin, wherein the second pin is connected to the external connection end, and the external connection end is connected to the external circuit through the second pin.

3. The resonator according to claim 2, characterized in that The glass substrate is provided with a through hole, a conductive wire is arranged in the through hole, and the first pin is connected to the second electrode plate through the conductive wire.

4. The resonator according to claim 1, characterized in that The second conductive layer further comprises: A first pin, the first pin is connected to the first electrode plate or the second electrode plate, and the first electrode plate or the second electrode plate is used to connect the external circuit through the first pin; A second pin, wherein the second pin is connected to the external connection end, and the external connection end is connected to the external circuit through the second pin.

5. The resonator according to claim 4, characterized in that The glass substrate is provided with a through hole, a conductive wire is arranged in the through hole, and the conductive wire connects the external connection end and the second pin.

6. A resonator, characterized in that: include: a glass substrate having a first surface and a second surface opposite to each other; A first conductive layer, which is disposed on the first surface, the first conductive layer comprising: a first electrode plate and an inductor coil disposed around the first electrode plate, the inductor coil having an inner connecting end and an outer connecting end; A second conductive layer includes a second electrode plate disposed on the second surface, and the second electrode plate is opposite to the first electrode plate; The internal connection end is electrically connected to the first electrode plate, and the external connection end is electrically connected to the second electrode plate. The internal connection end and the external connection end are used to connect to an external circuit.

7. The resonator according to claim 6, characterized in that The first conductive layer further comprises: A first pin, the first pin being connected to the internal connection end; A second pin, the second pin being connected to the external connection end; The first pin and the second pin are used to connect to an external circuit.

8. The resonator according to claim 7, characterized in that The glass substrate is provided with a through hole, a conductive wire is provided in the through hole, and the conductive wire connects the external connection end and the second pin.

9. The resonator according to claim 6, characterized in that The second conductive layer further comprises: A first pin, wherein the first pin is connected to the second electrode plate; a second pin, the second pin being connected to the internal connection end; The first pin and the second pin are used to connect to an external circuit.

10. The resonator according to claim 9, characterized in that The glass substrate is provided with a through hole, a conductive wire is provided in the through hole, and the conductive wire connects the inner connection end and the second pin.