Silicon wafer cleaning basket feeding device

Abstract

The utility model discloses a silicon wafer cleaning basket feeding device which comprises an empty basket conveying mechanism, a full basket conveying mechanism and an empty and full basket switching mechanism, the empty and full basket switching mechanism comprises a first moving assembly and a second moving assembly, and the first moving assembly and the second moving assembly move independently; when the cleaning baskets on the wafer inserting station are full of silicon wafers, the second moving assembly drives the full basket clamping assembly to clamp the full baskets on the wafer inserting station and move in the direction close to the full basket conveying mechanism, and the first moving assembly drives the empty basket clamping assembly to clamp the empty baskets and move the empty baskets to the wafer inserting station. The empty basket clamping assembly and the full basket clamping assembly are driven by the two moving assemblies to move independently, so that the full basket clamping assembly directly moves to the next machining station after clamping full baskets at the sheet inserting station, waiting for the empty basket clamping assembly is not needed, the waiting time is shortened, and the working efficiency is improved. The time for moving the full basket to the next processing station is relatively shortened, and the production efficiency of subsequent silicon wafer cleaning and processing is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of auxiliary equipment for silicon wafer production, in particular to a silicon wafer cleaning basket loading device. Background Art

[0002] During the silicon wafer processing process, the silicon wafers need to be strictly cleaned to remove impurities on the surface of the silicon wafers. The silicon wafers are first degummed and cleaned, and then subjected to subsequent processing operations such as drying. After the degumming and cleaning, the silicon wafers are inserted into the cleaning basket through the inserting machine, and then the cleaning basket full of silicon wafers is moved to the next processing station through the cleaning basket loading device, and at the same time, the empty cleaning basket is moved to the inserting machine through the cleaning basket loading device to continue the silicon wafer inserting operation; the existing cleaning basket loading device is also provided with two clamps, and the two clamps are driven to move by the same set of driving devices. When one clamp grabs the cleaning basket full of silicon wafers, it is necessary to wait for the other clamp grabbing the empty cleaning basket to place the empty cleaning basket on the inserting station, and then the clamp grabbing the full cleaning basket can drive the full cleaning basket to move to the next processing station, which prolongs the time for the full cleaning basket to move to the next processing step, affecting the subsequent cleaning processing energy efficiency. Utility Model Content

[0003] In view of the above-mentioned defects or deficiencies in the prior art, it is desired to provide a silicon wafer cleaning basket loading device to improve the energy efficiency of subsequent processing and cleaning of silicon wafers.

[0004] The utility model provides a silicon wafer cleaning basket feeding device, comprising:

[0005] An empty basket conveying mechanism, a full basket conveying mechanism and an empty and full basket switching mechanism, wherein:

[0006] The empty basket conveying mechanism is arranged on one side of the empty-full basket switching mechanism, and is used to provide empty baskets to the empty-full basket switching mechanism;

[0007] The full basket conveying mechanism is arranged on one side of the empty and full basket switching mechanism, and is used to convey the full basket on the inserting station to the next process;

[0008] The empty-full basket switching mechanism comprises a first moving assembly and a second moving assembly, and the first moving assembly and the second moving assembly move independently; the bottom of the first moving assembly is connected to an empty basket clamping assembly, and the first moving assembly can drive the empty basket clamping assembly to clamp an empty basket from the empty basket conveying mechanism and drive the empty basket to move to the inserting station; the bottom of the second moving assembly is connected to a full basket clamping assembly, and the second moving assembly can drive the full basket clamping assembly to clamp a full basket from the inserting station and directly drive the full basket to move to the full basket conveying mechanism;

[0009] When the cleaning basket on the wafer insertion station is full of silicon wafers, the second moving component drives the full basket clamping component to clamp the full basket on the wafer insertion station and move toward the full basket conveying mechanism, and the first moving component drives the empty basket clamping component to clamp the empty basket and move it to the wafer insertion station.

[0010] Furthermore, the empty basket conveying mechanism includes an empty basket flipping assembly and an empty basket conveying belt, and the empty basket flipping assembly is arranged at one end of the empty basket conveying belt close to the empty and full basket switching mechanism;

[0011] The full basket conveying mechanism includes a full basket flipping assembly and a full basket conveying belt. The full basket flipping assembly is arranged at one end of the full basket conveying belt close to the empty-full basket switching mechanism.

[0012] Furthermore, the empty basket flipping assembly and the full basket flipping assembly both include a placement rack, a first rotating shaft and a first drive motor. The cross-section of the placement rack is "L"-shaped, and a limit hole and a limit plate are provided on the horizontal portion thereof. The vertical portion thereof is fixedly connected to the first rotating shaft through a fixed seat, and one end of the first rotating shaft is connected to the output end of the first drive motor through a coupling. Starting the first drive motor can drive the placement rack to flip 90 degrees.

[0013] Furthermore, it also includes two parallel Y-axis support beams, and the Y-axis support beams are provided with Y-axis slide rails and Y-axis racks along their length directions. The first movable component and the second movable component are respectively slidably connected to the Y-axis slide rails, and one side of the first movable component and the second movable component are fixedly connected with a Y-axis driving component, and the Y-axis driving component is connected to the Y-axis rack. Starting the Y-axis driving component can respectively drive the first movable component or the second movable component to move along the Y-axis direction.

[0014] Further, the first moving assembly and the second moving assembly each include an X-axis support beam and a Z-axis support beam perpendicular to each other, and both ends of the X-axis support beam are slidably connected to the Y-axis slide rail;

[0015] The X-axis support beam is provided with an X-axis slide rail and an X-axis rack along its length direction, the X-axis slide rail is slidably connected to the X-axis slide seat 313, the Z-axis support beam is fixedly connected to the corresponding X-axis slide seat, and the Z-axis support beam is fixedly connected to an X-axis driving member, and the X-axis driving member is connected to the corresponding X-axis rack;

[0016] The bottom of the Z-axis support beam of the first movable assembly is fixedly connected to the empty basket clamping assembly, and the bottom of the Z-axis support beam of the second movable assembly is fixedly connected to the full basket clamping assembly. Z-axis slide rails and Z-axis racks are arranged on the two Z-axis support beams along their length directions. A Z-axis slide is slidably connected in the Z-axis slide rail, and the Z-axis slide is fixedly connected to the X-axis slide through a fixed seat. A Z-axis driving component is also fixedly installed on the fixed seat, and the Z-axis driving component is connected to the Z-axis rack. Starting the X-axis driving component can drive the corresponding empty basket clamping assembly or the full basket clamping assembly to move along the X-axis direction, and starting the Z-axis driving component can drive the corresponding empty basket clamping assembly or the full basket clamping assembly to move along the Z-axis direction.

[0017] Furthermore, the empty basket clamping assembly and the full basket clamping assembly both include a mounting plate, a first cylinder, a second cylinder, a first clamp and a second clamp; the mounting plate is fixedly connected to the bottom of the Z-axis support beam; the first cylinder and the second cylinder are disposed at the bottom of the mounting plate; the first clamp and the second clamp are disposed correspondingly; the first clamp is connected to the telescopic end of the first cylinder; the second clamp is connected to the telescopic end of the second cylinder; starting the first cylinder and the second cylinder can drive the first clamp and the second clamp to move away from or closer to each other.

[0018] Furthermore, a pressure block is provided below the mounting plate between the first clamping jaw and the second clamping jaw, and a spring member is connected between the pressure block and the mounting plate.

[0019] Furthermore, the cross section between the first clamping jaw and the second clamping jaw is in an "L" shape.

[0020] Furthermore, anti-collision sensing plates are provided at the same side ends of the two X-axis support beams, the anti-collision sensing plates are located between the two X-axis support beams and are arranged correspondingly, and proximity sensors are provided on the anti-collision sensing plates.

[0021] Compared with the prior art, the beneficial effects of the utility model are:

[0022] The empty basket conveying mechanism of the utility model is arranged on one side of the empty-full basket switching mechanism, and the full basket conveying mechanism is also arranged on one side of the empty-full basket switching mechanism, and the full basket conveying mechanism is used to convey the full basket filled with silicon wafers to the next processing position; the empty-full basket switching mechanism comprises a first moving component and a second moving component, wherein the bottom of the first moving component is connected with an empty basket clamping component, and the bottom of the second moving component is connected with a full basket clamping component, the first moving component can drive the empty basket clamping component to clamp the empty basket from the empty basket conveying mechanism and drive the empty basket to move to the wafer insertion station, the second moving component can drive the full basket clamping component to clamp the full basket filled with silicon wafers from the wafer insertion station and move it to the full basket conveying mechanism, and then convey the full basket to the next processing position through the full basket conveying mechanism; the utility model The first moving assembly and the second moving assembly can move separately, and drive the empty basket clamping assembly and the full basket clamping assembly to move respectively. When the cleaning basket on the wafer insertion station is full of silicon wafers, the second moving assembly drives the full basket clamping assembly to clamp the full basket on the wafer insertion station, and directly drives the full basket to move toward the full basket conveying mechanism. At the same time, the first moving assembly drives the empty basket clamping assembly to clamp the empty basket and move it to the wafer insertion position, and replenish the empty basket at the wafer insertion station. The full basket clamping assembly and the empty basket clamping assembly can move and clamp respectively. After the full basket clamping assembly clamps the full basket, it can move to the next processing station without waiting for the empty basket to be lowered, thereby reducing the movement time of the full basket to the next processing station and improving the efficiency of the silicon wafer cleaning processing.

[0023] It should be understood that the contents described in the utility model summary are not intended to limit the key or important features of the embodiments of the utility model, nor are they intended to limit the scope of the utility model. Other features of the utility model will become easy to understand through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Other features, objects and advantages of the present invention will become more apparent by reading the detailed description of non-limiting embodiments made with reference to the following drawings:

[0025] Figure 1 It is a schematic diagram of the structure of the utility model;

[0026] Figure 2 It is a structural schematic diagram of an empty basket flipping assembly;

[0027] Figure 3 A schematic diagram of the structure of the empty basket flipping assembly from another angle;

[0028] Figure 4 It is a structural schematic diagram of the empty and full basket switching mechanism;

[0029] Figure 5 It is the top view of the Y-axis support beam;

[0030] Figure 6It is an enlarged view of the X-axis support beam;

[0031] Figure 7 This is an enlarged view of the Z-axis support beam;

[0032] Figure 8 It is an enlarged view of the empty basket gripping assembly;

[0033] Fig. 9 This is an enlarged view of the anti-collision sensor plate installation status;

[0034] Numbers in the figure: 1. Empty basket conveying mechanism; 2. Full basket conveying mechanism; 3. Empty and full basket switching mechanism; 4. Anti-collision sensor plate; 5. Proximity sensor;

[0035] 11. Empty basket turning assembly; 12. Empty basket conveyor belt;

[0036] 21. Full basket turning assembly; 22. Full basket conveyor belt;

[0037] 31. First moving assembly; 32. Second moving assembly; 33. Empty basket gripping assembly; 34. Full basket gripping assembly; 35. Y-axis support beam; 36. Y-axis driving member;

[0038] 111, a placement rack; 112, a first rotating shaft; 113, a first driving motor; 114, a limiting plate; 115, a fixing seat;

[0039] 311, X-axis support beam; 312, Z-axis support beam; 313, X-axis slide; 314, X-axis drive member; 315, Z-axis slide; 316, Z-axis drive member;

[0040] 341, mounting plate; 342, first cylinder; 343, second cylinder; 344, first clamping jaw; 345, second clamping jaw; 346, pressing block; 347, spring member;

[0041] 351, Y-axis slide rail; 352, Y-axis rack;

[0042] 3111, X-axis slide rail; 3112, X-axis rack;

[0043] 3121, Z-axis slide rail; 3122, Z-axis rack. DETAILED DESCRIPTION

[0044] The utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It is understood that the specific embodiments described herein are only used to explain the relevant utility model, rather than to limit the utility model. It is also necessary to explain that, for the convenience of description, only the parts related to the utility model are shown in the accompanying drawings.

[0045] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments of the present invention can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0046] Please refer to Figure 1 and Figure 4 The embodiment of the utility model provides a silicon wafer cleaning basket loading device, comprising an empty basket conveying mechanism 1, a full basket conveying mechanism 2 and an empty and full basket switching mechanism 3, wherein a plurality of wafer inserting stations are arranged below the empty and full basket switching mechanism 3, the cleaning basket is placed on the wafer inserting station, the silicon wafers after degumming and cleaning are inserted into the cleaning basket under the action of the wafer inserting machine, and the silicon wafers are collected, and then the full basket is clamped and moved to the next processing station through the empty and full basket switching mechanism 3, and a new empty basket is added at the wafer inserting station to complete the loading of the cleaning basket;

[0047] Preferably, the empty basket conveying mechanism 1 is arranged on one side of the empty-full basket switching mechanism 3, and is used to provide empty baskets to the empty-full basket switching mechanism 3; the full basket conveying mechanism 2 is arranged on one side of the empty-full basket switching mechanism 3, and is used to convey the full basket to the next process; the empty-full basket switching mechanism 3 includes a first moving component 31 and a second moving component 32, and the first moving component 31 and the second moving component 32 move separately; the bottom of the first moving component 31 is connected to an empty basket clamping component 33, and the first moving component 31 can drive the empty basket clamping component 33 to clamp the empty basket from the empty basket conveying mechanism 1 and drive the empty basket to move to the insertion station; the bottom of the second moving component 32 is connected to a full basket clamping component 34, and the second moving component 32 can drive the full basket clamping component 34 to clamp the full basket from the insertion station and directly drive the full basket to move to the full basket conveying mechanism 2; the first moving component 31 and the second moving component 32 can move separately, and do not affect each other, and can drive the empty basket clamping component 33 or the full basket clamping component 34 to move respectively.

[0048] Specifically, the present application is provided with a plurality of wafer insertion stations, and the empty and full basket switching mechanism 3 is arranged above the wafer insertion station, and a cleaning basket is placed on each wafer insertion station. When the cleaning basket is full of silicon wafers, the second moving component 32 drives the full basket clamping component 34 to move to the wafer insertion station. When the full basket clamping component 34 clamps the full basket, the second moving component 32 directly drives the full basket to move toward the full basket conveying mechanism 2, drives the full basket to the full basket conveying mechanism 2, and the full basket is driven by the full basket conveying mechanism 2 to move to the next processing station. At the same time, the first moving component 31 drives the empty basket clamping component 33 to clamp the empty basket from the empty basket conveying mechanism 1, and drives the empty basket to the wafer insertion station, places the empty basket on the wafer insertion station, and completes the loading of the cleaning basket and the switching of the empty and full baskets. The empty basket clamping assembly 33 and the full basket clamping assembly 34 of the present application can be driven separately by two sets of driving assemblies. The full basket clamping mechanism 34 clamps the full basket on the wafer insertion station and directly drives the full basket to move to the next processing station. There is no need to wait for the empty basket clamping assembly 33 to lower the empty basket to the wafer insertion station, which reduces the waiting time and relatively shortens the time for the full basket to move to the next processing station, thereby improving the efficiency of subsequent cleaning and processing of the silicon wafers.

[0049] In a preferred embodiment, if Figure 1 As shown, the empty basket conveying mechanism 1 includes an empty basket flipping assembly 11 and an empty basket conveying belt 12, and the empty basket flipping assembly 11 is arranged at one end of the empty basket conveying belt 12 close to the empty-full basket switching mechanism 3;

[0050] The full basket conveying mechanism 2 includes a full basket turning assembly 21 and a full basket conveying belt 22 . The full basket turning assembly 21 is arranged at one end of the full basket conveying belt 22 close to the empty-full basket switching mechanism 3 .

[0051] In this embodiment, both the empty basket conveyor belt 12 and the full basket conveyor belt 22 are chain-transmitted. The empty basket flipping assembly 11 can receive the empty basket transmitted by the empty basket conveyor belt 12, and then drive the empty basket to flip 90 degrees, so that the empty basket clamping assembly 33 can clamp the empty basket; the full basket flipping assembly 22 can receive the full basket clamped by the full basket clamping assembly 34, so that it can be conveyed to the next processing station through the full basket conveyor belt 22. The empty basket flipping assembly 21 and the full basket flipping assembly 22 are both arranged at one end close to the empty-full basket switching mechanism 3, so as to facilitate the clamping and transportation of empty baskets and full baskets.

[0052] In a preferred embodiment, if Figure 2 and Figure 3As shown, the empty basket flipping assembly 11 and the full basket flipping assembly 21 both include a placement rack 111, a first rotating shaft 112 and a first driving motor 113. The cross section of the placement rack 111 is "L"-shaped, and a limiting hole and a limiting plate 114 are provided on its horizontal portion. The vertical portion is fixedly connected to the first rotating shaft 112 through a fixing seat 115, and one end of the first rotating shaft 112 is connected to the output end of the first driving motor 113 through a coupling. Starting the first driving motor 113 can drive the placement rack 111 to flip 90 degrees.

[0053] In this embodiment, the first state of the placement rack 111 is that the vertical part is flush with the conveying direction of the conveyor belt, and the second state is that the vertical part is perpendicular to the conveying direction of the conveyor belt. The limiting holes and limiting plates on the horizontal part of the placement rack 111 can clamp the bottom of the empty basket or the full basket, thereby playing a role in preliminarily fixing the empty basket or the full basket; the placement rack 111 is "L" shaped, and when the first driving motor 113 drives the placement rack 111 to flip 90 degrees, the empty basket or the full basket can be flipped stably and reliably.

[0054] In a preferred embodiment, if Figure 4 and Figure 5 As shown, it also includes two parallel Y-axis support beams 35, and a Y-axis slide rail 351 and a Y-axis rack 352 are arranged on the Y-axis support beam 35 along its length direction. The first movable component 31 and the second movable component 32 are respectively slidably connected to the Y-axis slide rail 351, and one side of the first movable component 31 and the second movable component 32 are fixedly connected to a Y-axis driving component 36, and the Y-axis driving component 36 is connected to the Y-axis rack 352. Starting the Y-axis driving component 36 can respectively drive the first movable component 31 or the second movable component 32 to move along the Y-axis direction.

[0055] In this embodiment, two Y-axis support beams 35 are arranged in parallel, and the two Y-axis support beams are provided with Y-axis racks 352 and Y-axis slide rails 351 along their length directions, and each Y-axis slide rail 351 is slidably connected to two Y-axis slides, and the two ends of the first moving component 31 are fixedly connected to one group of Y-axis slides, and the two ends of the second moving component 32 are fixedly connected to the other group of Y-axis slides; the Y-axis driving member 36 includes a second driving motor and a second rotating shaft, wherein one second driving motor is fixed on the first moving component 31, and the other second driving motor is fixed on the second moving component 32, and a Y-axis gear is provided at the end of each second rotating shaft, and the Y-axis gear is meshed with the Y-axis rack 352; starting the second driving motor can drive the second rotating shaft to rotate, thereby driving the Y-axis gear to move along the length direction of the Y-axis rack 352, and thereby driving the corresponding first moving component 31 or the second moving component 32 to move along the Y-axis direction.

[0056] In a preferred embodiment, if Figure 6 and Figure 7As shown, the first moving assembly 31 and the second moving assembly 32 both include an X-axis support beam 311 and a Z-axis support beam 312 which are perpendicular to each other, and both ends of the X-axis support beam 311 are slidably connected to the Y-axis slide rail 351;

[0057] An X-axis slide rail 3111 and an X-axis rack 3112 are arranged on the X-axis support beam 311 along its length direction, the X-axis slide rail 3111 is slidably connected to the X-axis slide seat 313, the Z-axis support beam 312 is fixedly connected to the corresponding X-axis slide seat 313, and the Z-axis support beam 312 is fixedly connected to an X-axis driving member 314, and the X-axis driving member 314 is connected to the corresponding X-axis rack 3112;

[0058] The bottom of the Z-axis support beam 312 of the first movable component 31 is fixedly connected to the empty basket clamping component 33, and the bottom of the Z-axis support beam 312 of the second movable component 32 is fixedly connected to the full basket clamping component 34. Z-axis slide rails 3121 and Z-axis racks 3122 are arranged on the two Z-axis support beams 312 along their length directions. A Z-axis slide seat 315 is slidably connected in the Z-axis slide rail 3121. The Z-axis slide seat 315 is fixedly connected to the X-axis slide seat 313 through a fixed seat. A Z-axis driving component 316 is also fixedly installed on the fixed seat, and the Z-axis driving component 316 is connected to the Z-axis rack 3122; starting the X-axis driving component 314 can drive the corresponding empty basket clamping component 33 or the full basket clamping component 34 to move along the X-axis direction, and starting the Z-axis driving component 316 can drive the corresponding empty basket clamping component 33 or the full basket clamping component 34 to move along the Z-axis direction.

[0059] In this embodiment, the first moving assembly 31 and the second moving assembly 32 both include an X-axis support beam 311 and a Z-axis support beam 312 that are perpendicular to each other, wherein the X-axis support beams 311 are arranged in parallel and spaced apart in two groups, each group of X-axis support beams 311 is provided with an X-axis rack 3112 and an X-axis slide rail 3111 along its length direction, an X-axis slide seat 313 is slidably connected to the X-axis slide rail, and the X-axis slide seat 313 is fixed to the corresponding Z-axis support beam 312 through a fixing frame, so that the X-axis slide seat 313 slides When the third drive motor is started, the X-axis gear can be driven to move along the X-axis, thereby driving the corresponding empty basket clamping assembly 33 or the full basket clamping assembly 34 to move along the X-axis direction. The X-axis driving member 314 includes a third driving motor, and an X-axis gear is provided at the output end of the third driving motor. The X-axis gear is meshed with the X-axis rack 3112. When the third driving motor is started, the X-axis gear can be driven to move along the X-axis, thereby driving the corresponding empty basket clamping assembly 33 or the full basket clamping assembly 34 to move along the X-axis direction.

[0060] There are two groups of Z-axis support beams 312, and a slider is slidably connected in the Z-axis slide rail 3121. The slider is fixedly connected to the fixed frame connected to the X-axis slide seat 313, so that the Z-axis support beam 312 can move along the Z-axis direction corresponding to the X-axis support beam 311; the Z-axis driving component 316 includes a fourth driving motor and a fourth driving motor fixing plate. The fourth driving motor is installed on the fourth driving motor fixing plate. The fourth driving motor fixing plate is connected to the fixed frame and remains fixed. A Z-axis gear is provided at the output end of the fourth driving motor. The Z-axis gear is meshed with the Z-axis rack 3122. When the fourth driving motor is started, it can drive the Z-axis gear to rotate, thereby driving the Z-axis support beam 312 and the empty basket clamping assembly 33 or the full basket clamping assembly 34 thereon to move along the Z-axis direction.

[0061] The present application drives the first moving assembly to move along the Y-axis direction through the corresponding Y-axis driving member 35, and drives the empty basket gripping assembly 33 to move along the X-axis direction and the Z-axis direction through the X-axis driving member 314 and the Z-axis driving member 316 of the first moving assembly 31, so as to realize the reciprocating movement of the empty basket gripping assembly 34 from the empty basket conveying mechanism 1 to the inserting station and from the inserting station to the empty basket conveying mechanism 1; the present application drives the second moving assembly to move along the Y-axis direction through the corresponding Y-axis driving member 35, and drives the full basket gripping assembly 33 to move along the X-axis direction and the Z-axis direction through the X-axis driving member 314 and the Z-axis driving member 316 of the second moving assembly 32. The clamping assembly 34 moves along the X-axis direction and the Z-axis direction to realize the reciprocating movement of the full basket clamping assembly 34 from the inserting station to the full basket conveying mechanism 2 and from the full basket conveying mechanism 2 to the inserting station. The two groups of moving assemblies respectively drive the empty basket clamping assembly 33 and the full basket clamping assembly 34 to move separately, so that the full basket clamping assembly 34 moves directly to the next processing station after clamping the full basket at the inserting station, without waiting for the empty basket below the empty basket clamping assembly 33 to reach the inserting station, thereby reducing the waiting time, shortening the time for the full basket to move to the next processing station, and improving the efficiency of subsequent cleaning processing.

[0062] In a preferred embodiment, if Figure 8 As shown, the empty basket clamping assembly 33 and the full basket clamping assembly 34 both include a mounting plate 341, a first cylinder 342, a second cylinder 343, a first clamp 345 and a second clamp 346. The mounting plate 341 is fixedly connected to the bottom of the Z-axis support beam 312, the first cylinder 342 and the second cylinder 343 are arranged at the bottom of the mounting plate 341, the first clamp 345 and the second clamp 346 are arranged correspondingly, the first clamp 345 is connected to the telescopic end of the first cylinder 342, and the second clamp 346 is connected to the telescopic end of the second cylinder 343. Starting the first cylinder 342 and the second cylinder 343 can drive the first clamp 345 and the second clamp 346 to move away from or approach each other.

[0063] In this embodiment, the first clamp 345 and the second clamp 346 have the same structure and are arranged correspondingly. The first cylinder 342 and the second cylinder 343 can drive the first clamp 345 and the second clamp 346 to move closer to or away from each other, thereby completing the clamping and release of the empty basket or the full basket. The empty basket clamping assembly 33 and the full basket clamping assembly 34 have simple structures and are convenient for implementing the clamping operation.

[0064] In a preferred embodiment, if Figure 8 As shown, a pressing block 347 is further provided below the mounting plate 341 and between the first clamping jaw 345 and the second clamping jaw 346 , and a spring member 348 is connected between the pressing block 347 and the mounting plate 341 .

[0065] In this embodiment, when the first clamp 345 and the second clamp 346 clamp an empty basket or a full basket, under the action of the spring member 348, the top of the empty basket or the full basket pushes up the pressure block 347, and the pressure block 347 prevents the empty basket or the full basket from sliding with the first clamp 345 or the second clamp 346 during the clamping process and moving upward, thereby improving the stability of the empty basket clamping assembly 33 and the full basket clamping assembly 34 in clamping the cleaning basket.

[0066] In a preferred embodiment, if Figure 8 As shown, the cross section between the first clamping jaw 345 and the second clamping jaw 346 is “L” shaped.

[0067] In this embodiment, the "L"-shaped design allows the vertical and horizontal parts of the first clamp 345 and the second clamp 346 to cooperate with each other. The horizontal part has a certain upward supporting effect on the cleaning basket, thereby better clamping the cleaning basket. Compared with the clamp with only a vertical part, the "L"-shaped design can improve the stability during the clamping of the cleaning basket, prevent the cleaning basket from falling due to its own gravity or shaking, and reduce losses.

[0068] In a preferred embodiment, if Fig. 9 As shown, anti-collision sensing plates 4 are provided at the same side ends of the two X-axis support beams 311 , the anti-collision sensing plates 4 are located between the two X-axis support beams 311 and are correspondingly arranged, and proximity sensors 5 are provided on the anti-collision sensing plates 4 .

[0069] In this embodiment, the two X-axis support beams 311 can be driven to move by relative driving components, and the two do not affect each other. When the distance between the two X-axis support beams is reduced to a safe distance, the proximity sensor 5 sends a signal and transmits it to the controller. The controller can control the X-axis support beam to stop moving to avoid collision between the two X-axis support beams 311 and other devices connected to the X-axis support beams; and the length of the anti-collision sensor plate 4 is the safe distance between the two X-axis support beams 311, which improves the stability of the X-axis support beam 311 during movement and reduces damage to the equipment.

[0070] In the description of this specification, the terms "connection", "installation", "fixation" and the like should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0071] In the description of this specification, the description of the terms "one embodiment", "some embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0072] The above are only preferred embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A silicon wafer cleaning basket loading device, It is characterized in that include: An empty basket conveying mechanism (1), a full basket conveying mechanism (2) and an empty and full basket switching mechanism (3), wherein: The empty basket conveying mechanism (1) is arranged on one side of the empty-full basket switching mechanism (3) and is used to provide empty baskets to the empty-full basket switching mechanism (3); The full basket conveying mechanism (2) is arranged on one side of the empty-full basket switching mechanism (3) and is used to convey the full basket on the inserting station to the next process; The empty-full basket switching mechanism (3) comprises a first moving component (31) and a second moving component (32), and the first moving component (31) and the second moving component (32) move independently; the bottom of the first moving component (31) is connected to an empty basket clamping component (33), and the first moving component (31) can drive the empty basket clamping component (33) to clamp an empty basket from the empty basket conveying mechanism (1) and drive the empty basket to move to the inserting station; the bottom of the second moving component (32) is connected to a full basket clamping component (34), and the second moving component (32) can drive the full basket clamping component (34) to clamp a full basket from the inserting station and directly drive the full basket to move to the full basket conveying mechanism (2); When the cleaning basket on the wafer insertion station is full of silicon wafers, the second moving component (32) drives the full basket clamping component (34) to clamp the full basket on the wafer insertion station and move it in a direction close to the full basket conveying mechanism (2), and the first moving component (31) drives the empty basket clamping component (33) to clamp the empty basket and move it to the wafer insertion station.

2. A silicon wafer cleaning basket loading device according to claim 1, It is characterized in that The empty basket conveying mechanism (1) comprises an empty basket turning assembly (11) and an empty basket conveying belt (12); the empty basket turning assembly (11) is arranged at one end of the empty basket conveying belt (12) close to the empty / full basket switching mechanism (3); The full basket conveying mechanism (2) comprises a full basket turning assembly (21) and a full basket conveying belt (22); the full basket turning assembly (21) is arranged at one end of the full basket conveying belt (22) close to the empty / full basket switching mechanism (3).

3. A silicon wafer cleaning basket loading device according to claim 2, It is characterized in that The empty basket turning assembly (11) and the full basket turning assembly (21) both comprise a placing frame (111), a first rotating shaft (112) and a first driving motor (113); the placing frame (111) has an L-shaped cross section, a limiting hole and a limiting plate (114) are arranged on its horizontal portion, and its vertical portion is fixedly connected to the first rotating shaft (112) via a fixing seat (115); one end of the first rotating shaft (112) is connected to the output end of the first driving motor (113) via a coupling; starting the first driving motor (113) can drive the placing frame (111) to turn 90 degrees.

4. A silicon wafer cleaning basket loading device according to claim 1, It is characterized in that The invention also comprises two Y-axis support beams (35) arranged in parallel, wherein a Y-axis slide rail (351) and a Y-axis rack (352) are arranged on the Y-axis support beam (35) along its length direction, wherein the first moving component (31) and the second moving component (32) are respectively slidably connected to the Y-axis slide rail (351), and one side of the first moving component (31) and the second moving component (32) are fixedly connected to a Y-axis driving member (36), wherein the Y-axis driving member (36) is connected to the Y-axis rack (352), and when the Y-axis driving member (36) is started, the first moving component (31) or the second moving component (32) can be respectively driven to move along the Y-axis direction.

5. A silicon wafer cleaning basket loading device according to claim 4, It is characterized in that The first moving assembly (31) and the second moving assembly (32) both comprise an X-axis support beam (311) and a Z-axis support beam (312) which are perpendicular to each other, and both ends of the X-axis support beam (311) are slidably connected to the Y-axis slide rail (351); An X-axis slide rail (3111) and an X-axis rack (3112) are provided on the X-axis support beam (311) along its length direction; the X-axis slide rail (3111) is slidably connected to an X-axis slide seat (313); the Z-axis support beam (312) is fixedly connected to the corresponding X-axis slide seat (313); an X-axis driving member (314) is fixedly connected to the Z-axis support beam (312); and the X-axis driving member (314) is connected to the corresponding X-axis rack (3112); The bottom of the Z-axis support beam (312) of the first moving assembly (31) is fixedly connected to the empty basket clamping assembly (33), and the bottom of the Z-axis support beam (312) of the second moving assembly (32) is fixedly connected to the full basket clamping assembly (34). Z-axis slide rails (3121) and Z-axis racks (3122) are provided on the two Z-axis support beams (312) along their length directions. A Z-axis slide seat (315) is slidably connected inside the Z-axis slide rail (3121). The Z-axis slide seat (315) is connected to the Z-axis slide rail (3121). The fixed seat is fixedly connected to the X-axis slide seat (313), and a Z-axis driving component (316) is also fixedly installed on the fixed seat, and the Z-axis driving component (316) is connected to the Z-axis rack (3122); starting the X-axis driving component (314) can drive the corresponding empty basket clamping component (33) or the full basket clamping component (34) to move along the X-axis direction, and starting the Z-axis driving component (316) can drive the corresponding empty basket clamping component (33) or the full basket clamping component (34) to move along the Z-axis direction.

6. A silicon wafer cleaning basket loading device according to claim 5, It is characterized in that The empty basket clamping assembly (33) and the full basket clamping assembly (34) both include a mounting plate (341), a first cylinder (342), a second cylinder (343), a first clamping jaw (344) and a second clamping jaw (345); the mounting plate (341) is fixedly connected to the bottom of the Z-axis support beam (312); the first cylinder (342) and the second cylinder (343) are arranged at the bottom of the mounting plate (341); the first clamping jaw (344) and the second clamping jaw (345) are arranged correspondingly; the first clamping jaw (344) is connected to the telescopic end of the first cylinder (342); the second clamping jaw (345) is connected to the telescopic end of the second cylinder (343); starting the first cylinder (342) and the second cylinder (343) can drive the first clamping jaw (344) and the second clamping jaw (345) to move away from or closer to each other.

7. A silicon wafer cleaning basket loading device according to claim 6, It is characterized in that A pressing block (346) is also provided below the mounting plate (341) and between the first clamping jaw (344) and the second clamping jaw (345), and a spring member (347) is connected between the pressing block (346) and the mounting plate (341).

8. A silicon wafer cleaning basket loading device according to claim 7, It is characterized in that The cross section between the first clamping jaw (344) and the second clamping jaw (345) is in an "L" shape.

9. The silicon wafer cleaning basket loading device according to claim 5, It is characterized in that The same-side ends of the two X-axis support beams (311) are both provided with anti-collision sensing plates (4), the anti-collision sensing plates (4) are located between the two X-axis support beams (311) and are arranged correspondingly, and the anti-collision sensing plates (4) are both provided with proximity sensors (5).

Images