Vacuum pretreatment transmission device for metal surface cleaning

Abstract

A vacuum pretreatment transmission device for metal surface cleaning can perform plasma surface cleaning on a zone-melting sample metal bar through a high-voltage arc, so that the cleanliness of the purified metal surface is greatly improved, the vacuum pretreatment transmission device is characterized by comprising a vacuum pretreatment cavity, an upper cavity cover of the vacuum pretreatment cavity is provided with an observation window, and a lower cavity cover of the vacuum pretreatment cavity is provided with an observation window. The rear side face of the vacuum pretreatment cavity is connected with a molecular pump, a high-voltage arc discharge device is arranged in the vacuum pretreatment cavity to conduct plasma cleaning on the surface of a metal bar to be subjected to vacuum zone melting, and an electrode for connecting a power source to the high-voltage arc discharge device is arranged on the bottom side face of the vacuum pretreatment cavity. The right side face of the vacuum pretreatment cavity is connected with a magnetic sample feeding rod through a sample feeding rod flange, and the left side face of the vacuum pretreatment cavity is provided with a conveying opening flange used for being connected with an ultrahigh vacuum zone melting process chamber.

Description

Technical Field

[0001] The utility model relates to the technical field of plasma surface cleaning of zone melting sample metal bars by high voltage electric arc in zone melting and purification pre-treatment, in particular to a vacuum pre-treatment transmission device for metal surface cleaning. Background Art

[0002] Zone melting is a method for preparing high-purity materials. It was invented by John Desmond Bernal and further developed by William G. Pfann of Bell Labs. Before zone melting, the raw materials are generally prepared into rod-shaped materials of a certain size, and the raw material rods are fixed vertically in the furnace chamber with two chucks. The raw material rods are partially heated and melted by high-frequency coils, and the molten zone slowly passes through the entire raw material rod from one end to the other to complete the purification. During the entire zone melting process, the molten zone melts the impure solid at its leading edge, and the impurities are concentrated in the melt and moved to one end of the raw material rod, so that the molten zone solidifies after passing through the raw material rod, leaving a purer material. The molten zone is supported by surface tension, so it is often called "suspended zone melting method". This method does not require a crucible, avoids contact between the raw material and the crucible, and the purified material is of high purity. On the other hand, during the zone melting process, the main chamber is evacuated to an ultra-high vacuum state or some gas atmosphere is introduced according to the properties of the purified material to further improve the zone melting effect. In recent years, with the development of technology, some devices have increasingly stringent requirements on the purity of metal materials, especially in the semiconductor industry. The improvement of the purity of metal raw materials often leads to an exponential improvement in device performance. In this regard, it is particularly important to improve the cleanliness of the surface of metal bars before the zone melting process. Therefore, it is necessary to develop a vacuum pretreatment transmission device for metal surface cleaning, which can perform plasma surface cleaning on the zone melting sample metal bars through a high-voltage arc, thereby greatly improving the cleanliness of the purified metal surface. Utility Model Content

[0003] In view of the defects or shortcomings in the prior art, the utility model provides a vacuum pretreatment transmission device for metal surface cleaning, which can perform plasma surface cleaning on zone melting sample metal bars through high-voltage electric arc, thereby greatly improving the cleanliness of the purified metal surface.

[0004] The technical solutions of the utility model are as follows:

[0005] A vacuum pretreatment transmission device for metal surface cleaning, characterized in that it includes a vacuum pretreatment chamber, the upper chamber cover of the vacuum pretreatment chamber has an observation window, the rear side of the vacuum pretreatment chamber is connected to a molecular pump, a high-voltage arc discharge device is arranged in the vacuum pretreatment chamber to perform plasma cleaning on the surface of a metal rod to be melted in a vacuum zone, an electrode for connecting a power supply to the high-voltage arc discharge device is arranged on the bottom side of the vacuum pretreatment chamber, the right side of the vacuum pretreatment chamber is connected to a magnetic sample delivery rod through a sample delivery rod flange, and the left side of the vacuum pretreatment chamber is provided with a transmission port flange for connecting to an ultra-high vacuum zone melting process chamber.

[0006] A first observation window is arranged on the left part of the top surface of the upper chamber cover, a second observation window is arranged on the right part of the top surface of the upper chamber cover, and a third observation window is arranged on the right part of the front of the vacuum pretreatment chamber.

[0007] The molecular pump includes a molecular pump support, a fan and a molecular pump outlet. The molecular pump is used to increase the vacuum degree in the vacuum pretreatment chamber to 9×10 -5 Pa.

[0008] The front end of the magnetic sample sending rod is located in the vacuum pretreatment chamber, the front end of the magnetic sample sending rod is provided with a claw for the cleaned metal rod, the tail end face of the magnetic sample sending rod is provided with a tail fixing block of the sample sending rod, the tail end circumference of the magnetic sample sending rod is surrounded by a driving component, and the driving component is distributed with sample sending rod magnetic blocks, and the sample sending rod flange and the sample sending rod limit block are separately provided on the sample sending rod body of the magnetic sample sending rod close to the vacuum pretreatment chamber.

[0009] The rear edge of the upper cavity cover is connected to the upper edge of the rear side surface of the vacuum pretreatment cavity by a hinge, and the hinge includes a first hinge located at the left half and a second hinge located at the right half. A fixing buckle with a fixing rod is provided between the front edge of the upper cavity cover and the front side surface of the vacuum pretreatment cavity. An illuminating lamp is provided on the right side surface of the vacuum pretreatment cavity. An upper cavity sealing plate is provided between the vacuum pretreatment cavity and the upper cavity cover.

[0010] A cylinder and a pipeline with a solenoid valve are arranged on the bottom side of the vacuum pretreatment chamber.

[0011] The technical effects of the utility model are as follows: the utility model is a vacuum pretreatment transmission device for metal surface cleaning, which can perform plasma cleaning on metal bars used for zone melting purification, has a controllable process, simple steps, and can be applied to industrial production. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 The utility model is a schematic structural diagram of a vacuum pretreatment transmission device for metal surface cleaning.

[0013] Figure 2 It is a schematic diagram of the structure of the magnetic sample feeding rod.

[0014] The reference numerals are as follows: 1-vacuum pretreatment chamber; 2-transmission port flange; 3-handle; 4-top surface of the first observation window (left part of the top surface); 5-upper chamber cover; 6-first hinge; 7-molecular pump support foot; 8-fan; 9-molecular pump; 10-molecular pump water outlet; 11-second hinge; 12-second observation window (right part of the top surface); 13-illumination lamp; 14-sample delivery rod flange; 15-sample delivery rod; 16-sample delivery rod limit block; 17-sample delivery rod body; 18-driving component; 19-sample delivery rod Tail fixing block; 20-magnetic block of sample delivery rod; 21-fixing screw; 22-sealing plate on the cavity; 23-third observation window (front right); 24-air suction port or exhaust port; 25-fixing buckle; 26-fixing rod; 27-electrode; 28-cylinder air inlet; 29-air pipe; 30-cylinder; 31-cylinder position switch; 32-solenoid valve; 33-intake solenoid valve package; 34-intake ferrule; 35-intake solenoid valve; 36-intake solenoid valve bracket; 37-claws of cleaned metal rod. DETAILED DESCRIPTION

[0015] Below is a combination of the embodiments and the accompanying drawings ( Figure 1-Figure 2 ) to illustrate the utility model.

[0016] Figure 1 The utility model is a schematic structural diagram of a vacuum pretreatment transmission device for metal surface cleaning. Figure 2 This is a schematic diagram of the magnetic sample delivery rod structure. Figure 1 to Figure 2 As shown, a vacuum pretreatment transmission device for metal surface cleaning includes a vacuum pretreatment chamber 1, an upper chamber cover 5 of the vacuum pretreatment chamber 1 has observation windows (such as a first observation window 4 and a second observation window 12, etc.), the rear side of the vacuum pretreatment chamber 1 is connected to a molecular pump 9, a high-voltage arc discharge device is arranged in the vacuum pretreatment chamber 1 to perform plasma cleaning on the surface of a metal rod to be melted in a vacuum zone, an electrode 27 for connecting a power supply to the high-voltage arc discharge device is arranged on the bottom side of the vacuum pretreatment chamber 1, and the right side of the vacuum pretreatment chamber 1 is connected to a magnetic sample delivery rod through a sample delivery rod flange 14 (see Figure 2 ), the left side of the vacuum pretreatment chamber 1 is provided with a transfer port flange 2 for connecting to the ultra-high vacuum zone melting process chamber.

[0017] The left part of the top surface of the upper chamber cover 5 is provided with a first observation window 4, the right part of the top surface of the upper chamber cover 5 is provided with a second observation window 12, and the right part of the front of the vacuum pretreatment chamber 1 is provided with a third observation window 23. The molecular pump 9 includes a molecular pump support 7, a fan 8 and a molecular pump outlet 10. The molecular pump 9 is used to increase the vacuum degree in the vacuum pretreatment chamber 1 to 9×10 -5 Pa.

[0018] The front end of the magnetic sample sending rod is located in the vacuum pretreatment chamber 1, and the front end of the magnetic sample sending rod is provided with a claw 37 for the cleaned metal rod, and the tail end face of the magnetic sample sending rod is provided with a sample sending rod tail fixing block 19, and the tail end circumference of the magnetic sample sending rod is surrounded by a driving component 18, and the driving component 18 is distributed with sample sending rod magnetic blocks 20, and the sample sending rod body 17 of the magnetic sample sending rod is separated from the sample sending rod 15 close to the vacuum pretreatment chamber 1 by a sample sending rod flange 14 and a sample sending rod limit block 16. The rear side of the upper chamber cover 5 is connected to the upper side of the rear side of the vacuum pretreatment chamber 1 through a hinge, and the hinge includes a first hinge 6 located at the left half and a second hinge 11 located at the right half. A fixing buckle 25 with a fixing rod 26 is provided between the front side of the upper chamber cover 5 and the front side of the vacuum pretreatment chamber 1. An illuminating lamp 13 is provided on the right side of the vacuum pretreatment chamber 1. A cavity upper sealing plate 22 is provided between the vacuum pretreatment chamber 1 and the upper chamber cover 5.

[0019] The bottom side of the vacuum pretreatment chamber 1 is provided with a cylinder 30 and a pipeline with a solenoid valve, including a cylinder air inlet 28, an air pipe 29, a cylinder position switch 31, a solenoid valve 32, an air intake solenoid valve package 33, an air intake ferrule 34, an air intake solenoid valve 35, an air intake solenoid valve bracket 36, etc.

[0020] The utility model discloses a vacuum pretreatment transmission device for metal surface cleaning, the device comprising: a vacuum pretreatment chamber, the vacuum pretreatment chamber provides an operation space for surface cleaning of a raw material rod; a clamping assembly, the clamping assembly is used to clamp the raw material rod in the main chamber; a sample delivery assembly, the sample delivery assembly is used to transfer the rod-shaped material from the vacuum pretreatment chamber to a designated position in an ultra-high vacuum process chamber; the ultra-high vacuum system is composed of a molecular pump and a mechanical pump; and a central control system, the central control system is electrically connected to the clamping assembly and the vacuum system. The device is characterized by plasma cleaning, controllable process, and simple steps, and can be used in industrial production.

[0021] A vacuum pretreatment transmission device for metal surface cleaning comprises a machine box, wherein the machine box contains a vacuum pretreatment chamber, a vacuum system, a clamping component, a magnetic sample delivery rod, an air path part, a biasing part and a central controller.

[0022] The vacuum system in the pre-vacuum chamber is a combination of a mechanical pump and a molecular pump, and its maximum vacuum degree can reach 9×10 -5 Pa, the pre-vacuum chamber can perform plasma cleaning on the rod-shaped material.

[0023] The clamping assembly comprises a spring sheet device, which can eliminate the stress exerted on the rod-shaped material by the upper and lower clamping devices during the process of clamping the rod-shaped material.

[0024] The gas outlets in the gas pipeline are small holes with a diameter of 1 mm, which are evenly distributed on the gas pipeline and face the metal rod.

[0025] The magnetic sample delivery rod in the pre-vacuum chamber can deliver the rod-shaped material into the vacuum process chamber. The temperature detection system is mainly composed of a film thickness meter. The crystal oscillator probe is connected to the film thickness meter and is located in the vacuum process chamber. The crystal oscillator probe is used to measure the deposition rate of the rod-shaped material when it is melted. After multiple experiments to determine the deposition rate when it is melted, the purpose of detecting the temperature can be achieved.

[0026] Various gas tanks are also provided outside the chassis, and the gas tanks are connected to the vacuum pretreatment chamber through air pipes. Different gases can be selected to be introduced through the input parameters of the central controller to achieve a surface cleaning effect.

[0027] The utility model discloses a vacuum pretreatment transmission device for metal surface cleaning. When in use, the device includes opening a pre-vacuum chamber and placing a rod-shaped material into the pre-vacuum chamber. The bias power supply is turned on and the surface of the rod-shaped material is cleaned by a high-voltage arc. The vacuum system is turned on by a central controller, and the plug valve is opened to make the vacuum degree of the pre-vacuum chamber reach 9×10 -5 Pa, the sample delivery component delivers the rod-shaped material to the specified position of the vacuum process chamber.

[0028] like Figure 1As shown, the vacuum pretreatment chamber 1 is used as the pretreatment chamber for the molten sample. The transfer port flange 2 is used to connect with the main chamber. The handle 3 is connected with the main chamber and is used to open or close the vacuum pretreatment chamber. The first observation window 4 (left part of the top surface) is used to observe the pretreatment process of the molten sample. The upper chamber cover 5 is used to facilitate the placement of the molten sample. The first hinge 6 is used to connect the upper chamber cover with the pretreatment chamber. The fan 8 is used for cooling. The molecular pump 9 is used for vacuuming. The molecular pump water outlet 10 is used for cooling water outlet. The second hinge 11 is used to connect the upper chamber cover with the pretreatment chamber. The second observation window 12 (right part of the top surface) is used to observe the pretreatment process of the molten sample. The lighting lamp 13 is used to observe the room. The sample delivery rod flange 14 is connected with the sample delivery rod. The sample delivery rod 15 is used to transfer the molten sample between the pretreatment chamber and the main chamber. The sample delivery rod limit block 16 is used to control the moving distance between the pretreatment chamber and the main chamber. The sample delivery rod body 17 is used for internal vacuum. Driving component 18: can drive the internal sample transfer rod to move. Sample delivery rod tail fixing block 19: prevents the sample delivery rod magnetic block from detaching from the sample delivery rod body. Sample delivery rod magnetic block 20: can drive the internal sample transfer rod to move. Fixing screw 21: used for fixed connection. Cavity upper sealing plate 22: maintain vacuum. Third observation window 23 (front right): used to observe the interior of the chamber. Suction port or exhaust port 24: used for exhaust. Fixing buckle 25 and fixing rod 26: used to lock the upper chamber cover. Electrode 27: used to connect wires. Cylinder air inlet 28: used for inflating the cavity. Air pipe 29, cylinder 30 and cylinder position switch 31: control gas. Solenoid valve 32, air intake solenoid valve package 33, air intake ferrule 34, air intake solenoid valve 35 and air intake solenoid valve bracket are all used to control gas.

[0029] The utility model discloses a vacuum pretreatment transmission device for metal surface cleaning, which is applied to a 4N grade iron rod and performs vacuum pretreatment for surface cleaning of the 4N grade iron rod, comprising the steps of loading the 4N grade iron rod into a pre-vacuum chamber of a UHV vertical floating zone melting zone purification system (UHV, ultra-high vacuum), turning on a bias power supply, and cleaning the surface of the rod-shaped material by a high-voltage electric arc.

[0030] The contents not described in detail in this specification belong to the prior art known to the professional and technical personnel in this field. It is pointed out here that the above description helps those skilled in the art to understand the invention, but does not limit the protection scope of the invention. Any equivalent replacement, modification and / or simplification of the above description without departing from the essence of the invention falls within the protection scope of the invention.

Claims

1. A vacuum pretreatment transmission device for metal surface cleaning, characterized in that: It includes a vacuum pretreatment chamber, the upper chamber cover of the vacuum pretreatment chamber has an observation window, the rear side of the vacuum pretreatment chamber is connected to a molecular pump, a high-voltage arc discharge device is arranged in the vacuum pretreatment chamber to perform plasma cleaning on the surface of a metal rod to be melted in a vacuum zone, an electrode for connecting the high-voltage arc discharge device to a power supply is arranged on the bottom side of the vacuum pretreatment chamber, the right side of the vacuum pretreatment chamber is connected to a magnetic sample delivery rod through a sample delivery rod flange, and the left side of the vacuum pretreatment chamber is provided with a transmission port flange for connecting to an ultra-high vacuum zone melting process chamber.

2. The vacuum pretreatment transmission device for metal surface cleaning according to claim 1, characterized in that: A first observation window is arranged on the left part of the top surface of the upper chamber cover, a second observation window is arranged on the right part of the top surface of the upper chamber cover, and a third observation window is arranged on the right part of the front of the vacuum pretreatment chamber.

3. The vacuum pretreatment transmission device for metal surface cleaning according to claim 1, characterized in that: The molecular pump includes a molecular pump support, a fan and a molecular pump outlet. The molecular pump is used to increase the vacuum degree in the vacuum pretreatment chamber to 9×10 -5 Pa.

4. The vacuum pretreatment transmission device for metal surface cleaning according to claim 1, characterized in that: The front end of the magnetic sample sending rod is located in the vacuum pretreatment chamber, the front end of the magnetic sample sending rod is provided with a claw for the cleaned metal rod, the tail end face of the magnetic sample sending rod is provided with a tail fixing block of the sample sending rod, the tail end circumference of the magnetic sample sending rod is surrounded by a driving component, and the driving component is distributed with sample sending rod magnetic blocks, and the sample sending rod flange and the sample sending rod limit block are separately provided on the sample sending rod body of the magnetic sample sending rod close to the vacuum pretreatment chamber.

5. The vacuum pretreatment transmission device for metal surface cleaning according to claim 1, characterized in that: The rear edge of the upper cavity cover is connected to the upper edge of the rear side surface of the vacuum pretreatment cavity by a hinge, and the hinge includes a first hinge located at the left half and a second hinge located at the right half. A fixing buckle with a fixing rod is provided between the front edge of the upper cavity cover and the front side surface of the vacuum pretreatment cavity. An illuminating lamp is provided on the right side surface of the vacuum pretreatment cavity. An upper cavity sealing plate is provided between the vacuum pretreatment cavity and the upper cavity cover.

6. The vacuum pretreatment transmission device for metal surface cleaning according to claim 1, characterized in that: A cylinder and a pipeline with a solenoid valve are arranged on the bottom side of the vacuum pretreatment chamber.

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