Working cabin for magnetron sputtering target material replacement

Abstract

The utility model discloses a work cabin for magnetron sputtering target material replacement, which comprises a cabin main body, the cabin main body is of an upper opening structure, a hollow floor is arranged in the cabin main body, the hollow floor divides the cabin main body into an upper work space and a lower negative pressure space, the hollow floor is provided with a work table located in the work space, and the work table is arranged on the lower negative pressure space. A fan filter unit for communicating the outside with the negative pressure space is arranged on the cabin main body; and a cabin door for communicating the outside with the working space is arranged on the cabin main body. The dustproof workbench has the advantages that the workbench is isolated from the outside through the combination of the section bar and the transparent baffle, dust is sucked away from the position below the workbench through the fan filter unit and the hollowed-out floor, dust spreading is avoided, it is guaranteed that the cleanliness, the yield and the rework rate of a workshop are not affected, and meanwhile the risk that workers inhale ITO dust is reduced.

Description

Technical Field

[0001] The utility model belongs to supporting equipment for replacing sputtering target materials, in particular to a working cabin for replacing magnetron sputtering target materials. Background Art

[0002] Because PVD (Physical vapor deposition) magnetron sputtering targets need to be replaced after being consumed, the current solution is to hoist the cavity cover onto the target replacement trolley on site and then directly remove the mask and guard plate to replace the target. At this time, the dust is scattered everywhere and cannot be controlled. Since the gold and stone dust particles are small, if they are accidentally inhaled without wearing a special mask, it will cause irreversible damage to the human body; in addition, the dust will seriously pollute the cleanliness of the workshop, increase the cleanliness management cost of the workshop, and reduce the product yield.

[0003] That is, the prior art directly performs PVD target changing operations in a clean room, and the dust generated by the operation cannot be controlled at all. Utility Model Content

[0004] The purpose of the utility model is to provide a working cabin for replacing magnetron sputtering targets, solve the problem of ITO (Indium tin oxide) dust dispersion caused by replacing PVD magnetron sputtering targets, not only avoid workshop cleanliness pollution, reduce the clean room management cost, improve the yield rate of defective products caused by dust, but also avoid the risk of pneumoconiosis caused by other workshop workers inhaling ITO dust.

[0005] The purpose of the utility model is achieved through the following technical solutions:

[0006] A working cabin for replacing magnetron sputtering targets comprises a cabin body, the cabin body is an upper opening structure, a hollow floor is arranged inside the cabin body, the hollow floor divides the cabin body into an upper working space and a lower negative pressure space, a workbench is arranged on the hollow floor in the working space, a fan filter unit connecting the outside world with the negative pressure space is arranged on the cabin body, and a cabin door connecting the outside world with the working space is arranged on the cabin body.

[0007] Furthermore, the cabin body is a rectangular parallelepiped structure.

[0008] Furthermore, the cabin body includes a profile frame, a transparent baffle, a sealing baffle and a bottom plate, the transparent baffle is arranged on the side of the profile frame above the hollow floor, the sealing baffle is arranged on the side of the profile frame below the hollow floor, and the bottom plate is arranged at the bottom of the profile frame.

[0009] Furthermore, the profile frame is made of aluminum alloy, and the transparent baffle is made of acrylic.

[0010] Furthermore, the hollow floor is a steel plate with round holes.

[0011] Furthermore, the workbench includes a first frame, a second frame and a rotating frame, and a rotating frame rotating along a horizontal axis is arranged between the first frame and the second frame.

[0012] Furthermore, the workbench also includes a placement table and a rotating motor. The second frame is provided with a placement table, the placement table is provided with a rotating motor, and the rotating motor is connected to the rotating frame.

[0013] Furthermore, the fan filter units are symmetrically arranged on the front and rear sides of the cabin body.

[0014] Furthermore, the fan filter units are provided with six groups.

[0015] Furthermore, the hatch is a hinged structure.

[0016] The beneficial effects of the utility model are as follows: the workbench is isolated from the outside world by combining the profile with the transparent baffle, and the dust is extracted from under the platform by the fan filter unit and the hollow floor to avoid the spread of dust, thereby ensuring that the cleanliness, yield and rework rate of the workshop are not affected, and reducing the risk of personnel inhaling ITO dust.

[0017] The aforementioned main scheme of the utility model and its further options can be freely combined to form multiple schemes, all of which are schemes that can be adopted and protected by the utility model; and in the utility model, (non-conflicting options) options and other options can also be freely combined. After understanding this scheme, those skilled in the art can understand that there are many combinations based on the existing technology and common knowledge, all of which are technical schemes to be protected by the utility model, and they are not exhaustively listed here. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the structure of the utility model.

[0019] In the figure: 1-cabin body, 2-hollow floor, 3-workbench, 4-fan filter unit (FFU), 5-cabin door; 11-profile frame, 12-transparent baffle, 13-sealing baffle; 31-first stand, 32-second stand, 33-rotating stand, 34-placing table, 35-rotating motor. DETAILED DESCRIPTION

[0020] The present invention will be further described below in conjunction with specific embodiments and accompanying drawings.

[0021] refer to Figure 1As shown, a working cabin for replacing magnetron sputtering targets includes a cabin body 1, a hollow floor, a workbench 3, a fan filter unit 4 and a cabin door 5.

[0022] The cabin body 1 is a box-type structure, which is used to accommodate workpieces and operators when the target is replaced, forming a relatively closed space. The cabin body 1 is an upper opening structure to ensure that tooling can be hoisted into or out of the cabin from above. The cabin body 1 is provided with a hollow floor 2, which divides the cabin body 1 into an upper working space and a lower negative pressure space.

[0023] A workbench 3 is provided in the work space on the hollow floor 2, and the workbench 3 is used to place tooling parts so as to replace the target material. A door 5 connecting the outside world and the work space is provided on the cabin body 1, and the door 5 is convenient for operators to enter and exit the cabin to carry out specific operations.

[0024] A fan filter unit 4 connecting the outside world and the negative pressure space is provided on the cabin body 1. The fan filter unit 4 filters and intercepts dust and forms a negative pressure environment in the negative pressure space to ensure that the scattered dust can fall downward instead of floating around.

[0025] Specifically, the cabin body 1 is in the shape of a rectangular structure, and the structure of the cabin body 1 includes a profile frame 11, a transparent baffle 12, a sealing baffle 13 and a bottom plate. The profile frame 11 is a rectangular frame welded from aluminum alloy profiles, and various panels are arranged on the rectangular frame.

[0026] The transparent baffle 12 is arranged on the side of the profile frame 11 above the hollow floor 2. The transparent baffle 12 is made of acrylic material. The transparent panels on four sides form an internal working space, and the transparent material facilitates observation of the internal working conditions. The sealing baffle 13 is arranged on the side of the profile frame 11 below the hollow floor 2. The bottom plate is arranged at the bottom of the profile frame 11. The sealing baffles 13 on four sides and the bottom plate enclosure form a negative pressure space.

[0027] The hollow floor 2 is a steel plate with round holes, and a number of round hole baffles are assembled together to form a complete supporting surface, so as to support the workbench 3 and personnel and enable airflow to pass through.

[0028] The workbench 3 includes a first frame 31, a second frame 32 and a rotating frame 33. The first frame 31 and the second frame 32 are both door frame structures erected in the transverse direction, and reinforcing rods are provided between the legs of the frames and between the legs and the bottom plate to increase the overall stability and reliability of the frames.

[0029] A rotating frame 33 is arranged between the first frame 31 and the second frame 32 and rotates along a horizontal longitudinal axis. The rotating frame 33 is a rectangular parallelepiped frame structure and is used to place the tooling. Since the tooling needs to be turned over when the target is replaced, the tooling can be rotated 180° by turning the rotating frame 33.

[0030] The workbench 3 also includes a placement table 34 and a rotating motor 35. A horizontal placement table 34 is provided on the second frame 32. A rotating motor 35 is provided on the placement table 34. The rotating motor 35 is connected to the rotating frame 33. The rotating frame 33 and the tooling thereon are driven to rotate by the power of the rotating motor 35.

[0031] There are six groups of fan filter units 4, which are symmetrically arranged in threes on the front and back (long sides) of the cabin body 1 to ensure uniform suction of the negative pressure space. Not only is the dust suction uniform, but the negative pressure environment formed is also relatively uniform.

[0032] The hatch door 5 is a hinged structure, and the structure of the hatch door 5 is also made of an aluminum alloy profile frame 11 and a transparent baffle 12. One side of the hatch door 5 is hinged to one side of the cabin body through a hinge, and the other side is provided with a door lock pin to achieve temporary locking.

[0033] The workflow of this utility model:

[0034] The overall working cabin consists of a cabin body, thirty-six round-hole steel floors, eight PVC sealing baffles, a workbench, six fan filter units, several 40 aluminum profiles and several acrylic transparent baffles.

[0035] The staff uses a crane to lift the tooling parts from the top of the work cabin to the workbench, and then turns on the fan filter unit to start the work. Due to the function of the fan filter unit, a negative pressure state is formed in the space under the round hole steel floor, and the dust generated by the tooling parts will be brought into the space under the round hole steel floor by the airflow, so that the dust cannot spread everywhere and the cleanliness of the clean room can be effectively controlled.

[0036] The work cabin solves the problem of ITO dust floating due to the replacement of PVD magnetron sputtering targets affecting the cleanliness of the workshop, thereby improving product yield and reducing the health risks caused by personnel inhaling ITO dust.

[0037] The working cabin has a simple mechanical design principle, is stable, reliable, not prone to damage and can be used sustainably. The filter element of the fan filter unit can be disassembled and maintenance is convenient. Since ITO dust is expensive, this working cabin also improves the recovery efficiency of ITO dust and saves operating costs.

[0038] The above basic examples and further optional examples of the utility model can be freely combined to form multiple embodiments, which are all embodiments that can be adopted and claimed for protection by the utility model. In the scheme of the utility model, each optional example can be arbitrarily combined with any other basic examples and optional examples.

[0039] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A working chamber for replacing magnetron sputtering targets, comprising a chamber body (1), characterized in that: The cabin body (1) is an upper open structure, and a hollow floor (2) is provided inside the cabin body (1). The hollow floor (2) divides the cabin body (1) into an upper working space and a lower negative pressure space. A workbench (3) located in the working space is provided on the hollow floor (2). A fan filter unit (4) connecting the outside world with the negative pressure space is provided on the cabin body (1), and a cabin door (5) connecting the outside world with the working space is provided on the cabin body (1).

2. The working chamber for replacing magnetron sputtering targets according to claim 1, characterized in that: The cabin body (1) comprises a profile frame (11), a transparent baffle (12), a sealing baffle (13) and a bottom plate, wherein the transparent baffle (12) is arranged on the side of the profile frame (11) at a position above the hollow floor (2), the sealing baffle (13) is arranged on the side of the profile frame (11) at a position below the hollow floor (2), and the bottom plate is arranged at the bottom of the profile frame (11).

3. The working chamber for replacing magnetron sputtering targets according to claim 2, characterized in that: The profile frame (11) is made of aluminum alloy, and the transparent baffle (12) is made of acrylic.

4. The working chamber for replacing magnetron sputtering targets according to claim 1, characterized in that: The hollow floor (2) is a steel plate with round holes.

5. The working chamber for replacing magnetron sputtering targets according to claim 1, characterized in that: The workbench (3) comprises a first frame (31), a second frame (32) and a rotating frame (33), wherein a rotating frame (33) rotating along a horizontal axis is arranged between the first frame (31) and the second frame (32).

6. The working chamber for replacing magnetron sputtering targets according to claim 5, characterized in that: The workbench (3) further comprises a placement platform (34) and a rotating motor (35). The second frame (32) is provided with a placement platform (34), the placement platform (34) is provided with a rotating motor (35), and the rotating motor (35) is connected to the rotating frame (33).

7. The working chamber for replacing magnetron sputtering targets according to claim 1, characterized in that: The fan filter unit (4) is symmetrically arranged on the front and rear sides of the cabin body (1).

8. The working chamber for replacing magnetron sputtering targets according to claim 1 or 7, characterized in that: The fan filter units (4) are provided with six groups.

9. The working chamber for replacing magnetron sputtering targets according to claim 1, characterized in that: The cabin door (5) is a hinged structure.

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