Device convenient for replacing target material

Abstract

The utility model relates to a device convenient for replacing a target material, which comprises a cavity, a slide holder and a target material assembly, and the slide holder and the target material assembly are both positioned in the cavity; a plurality of movable guide assemblies are mounted at the bottom of the target material assembly in the X-axis direction, and the movable guide assemblies can move on the fixed guide assemblies below in the X-axis direction; when the target material assembly moves out of the cavity in the positive direction of the X axis, the movable guide assembly can continue to move on the jacking guide assembly on the lower portion in the X axis direction. The target material assembly can freely enter and exit from the cavity under the action of the movable guide assembly and the fixed guide assembly, and then under the action of the movable guide assembly and the jacking guide assembly, the target material assembly is completely pulled out of the cavity to complete target replacement.

Description

Technical Field

[0001] The utility model relates to the technical field related to PVD equipment, and in particular to a device for facilitating the replacement of target materials. Background Art

[0002] PVD physical vapor deposition technology refers to the technology of using physical methods under vacuum conditions to vaporize the surface of the material source (solid or liquid) into gaseous atoms or molecules, or partially ionize it into ions, and deposit a thin film with certain special functions on the surface of the substrate through a low-pressure gas (or plasma) process. Physical vapor deposition is one of the main surface treatment technologies.

[0003] After massive searches, it was found that the prior art publication number is CN212025441U, which discloses a combined PVD coating target and a PVD coating machine. The combined PVD coating target includes a target body and a base of different materials. The target body and the base are separately arranged, and the first end of the base is connected to one end of the target body, so that the base and the target body are combined into one. The combined PVD coating target of the utility model can solve the problem that the brittle target of the prior art is easy to break when it is installed and matched with the coating machine, which helps to improve the film quality, improve production efficiency and reduce costs.

[0004] To sum up, after a period of use, the target material on the existing magnetron sputtering device will become uneven on its surface under the action of inert gas, and different areas of the target material will have different thicknesses, which may easily cause damage to the outer surface of the support tube. In addition, the staff need to disassemble a large number of parts when replacing the target material, which makes it troublesome for the staff to replace the target material, seriously affecting the staff's work efficiency.

[0005] In view of the above-mentioned defects, the designers have actively carried out research and innovation in order to create a device that is convenient for replacing target materials and make it more valuable for industrial use. Utility Model Content

[0006] In order to solve the above technical problems, the purpose of the utility model is to provide a device for facilitating the replacement of target materials.

[0007] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0008] A device for facilitating the replacement of a target material comprises a cavity, a wafer stage and a target material assembly, wherein the wafer stage and the target material assembly are both located in the cavity, and the target material assembly is located below the wafer stage;

[0009] Several movable guide components are installed along the X-axis direction at the bottom of the target assembly, and fixed guide components distributed along the X-axis direction are installed in the cavity below the movable guide components. The movable guide components can move along the X-axis direction on the fixed guide components below.

[0010] A movable frame is provided at the bottom of the cavity along the positive direction of the X-axis, a plurality of movable wheels are installed at the bottom of the movable frame, a support frame is installed near the top of the movable frame, a plurality of lifting assemblies are evenly installed on the support frame along the X-axis direction, the lifting assembly can drive the upper lifting plate to move along the Z-axis direction, and the lifting plate is provided with lifting guide assemblies distributed along the X-axis direction. When the target assembly moves out of the cavity along the positive direction of the X-axis, the movable guide assembly can continue to move along the X-axis direction on the lower lifting guide assembly.

[0011] As a further improvement of the utility model, a guide shaft distributed along the X-axis direction is also provided on the mobile frame, the guide shaft is installed on the mobile frame through a guide shaft seat along the positive direction of the X-axis, and the guide shaft is installed on the target assembly along the negative direction of the X-axis.

[0012] As a further improvement of the utility model, the movable guide assembly is a guide wheel, and the fixed guide assembly and the lifting guide assembly are both guide wheel grooves.

[0013] As a further improvement of the utility model, the movable guide component is a slider, and the fixed guide component and the lifting guide component are both slider grooves.

[0014] As a further improvement of the utility model, guardrails are installed on the movable frames on both sides of the target assembly along the Y-axis direction, and the guardrails are installed on the movable frames along the X-axis direction through guardrail brackets.

[0015] As a further improvement of the utility model, the jacking assembly is a hydraulic cylinder or an electric cylinder.

[0016] By means of the above solution, the utility model has at least the following advantages:

[0017] The target assembly of the utility model can freely enter and exit the cavity under the action of the movable guide assembly and the fixed guide assembly, and then under the action of the movable guide assembly and the lifting guide assembly, the target assembly is completely pulled out of the cavity to complete the target replacement.

[0018] When the target material assembly of the utility model is replaced, a large number of parts do not need to be disassembled, the target material assembly is replaced more conveniently, and the working efficiency is higher.

[0019] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the utility model in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 It is a structural schematic diagram of the prior art;

[0022] Figure 2 It is a schematic diagram of the structure of the utility model in the first use state;

[0023] Figure 3 It is a structural schematic diagram of the utility model in the second use state.

[0024] The meanings of the various reference numerals in the figures are as follows.

[0025] Cavity 1, wafer carrier 2, target assembly 3, fixed guide assembly 4, movable guide assembly 5, moving frame 6, moving wheel 7, support frame 8, lifting assembly 9, lifting plate 10, lifting guide assembly 11, guide shaft 12, guide shaft seat 13. DETAILED DESCRIPTION

[0026] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0027] In order to make the technical personnel in the technical field better understand the scheme of the utility model, the technical scheme in the embodiment of the utility model will be clearly and completely described below in combination with the drawings in the embodiment of the utility model. Obviously, the described embodiment is only a part of the embodiment of the utility model, rather than all the embodiments. The components of the embodiment of the utility model usually described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiment of the utility model provided in the drawings is not intended to limit the scope of the utility model for protection, but only represents the selected embodiment of the utility model. Based on the embodiment of the utility model, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the utility model.

[0028] Example

[0029] like Figure 1 As shown,

[0030] The target material device of the prior art comprises a cavity 1 , a wafer stage 2 and a target material assembly 3 . The wafer stage 2 and the target material assembly 3 are both located in the cavity 1 , and the target material assembly 3 is fixedly installed in the cavity 1 below the wafer stage 2 .

[0031] like Figure 2-3 As shown,

[0032] A device for facilitating replacement of a target material comprises a cavity 1, a wafer stage 2 and a target material assembly 3, wherein the wafer stage 2 and the target material assembly 3 are both located in the cavity 1, and the target material assembly 3 is located below the wafer stage 2, and the target material assembly 3 is movably installed in the cavity 1. Guardrails are installed on the movable frames 6 on both sides of the target material assembly 3 along the Y-axis direction, and the guardrails are installed on the movable frames along the X-axis direction through guardrail brackets.

[0033] The target assembly 3 mentioned above may be a rotating target or a planar target, etc.

[0034] First, the target assembly 3 can move along the X-axis in the chamber 1:

[0035] like Figure 2 A plurality of movable guide assemblies 5 are installed at the bottom of the target assembly 3 along the X-axis direction, and fixed guide assemblies 4 distributed along the X-axis direction are installed in the cavity 1 below the movable guide assemblies 5. The movable guide assemblies 5 can move along the X-axis direction on the fixed guide assemblies 4 below.

[0036] Second, the target assembly 3 can continue to move in the X-axis direction on the moving frame 6:

[0037] like Figure 3 A movable frame 6 is provided at the bottom of the cavity 1 along the positive direction of the X-axis, and a plurality of movable wheels 7 are installed at the bottom of the movable frame 6. A support frame 8 is installed near the top of the movable frame 6, and a plurality of lifting components 9 are evenly installed on the support frame 8 along the X-axis direction. The lifting components 9 are hydraulic cylinders or electric cylinders. The lifting components 9 can drive the lifting plate 10 above to move along the Z-axis direction. The lifting plate 10 is installed with lifting guide components 11 distributed along the X-axis direction. When the target assembly 3 moves out of the cavity 1 along the positive direction of the X-axis, the movable guide component 5 can continue to move along the X-axis direction on the lifting guide component 11 below.

[0038] In addition, the movable frame 6 is also provided with a guide shaft 12 distributed along the X-axis direction. The guide shaft 12 is installed on the movable frame 6 through a guide shaft seat 13 along the positive direction of the X-axis, and the guide shaft 12 is installed on the target assembly 3 along the negative direction of the X-axis.

[0039] In the first case, the movable guide assembly 5 is a guide wheel, and the fixed guide assembly 4 and the lifting guide assembly 11 are both guide wheel grooves.

[0040] In the second case, the movable guide assembly 5 is a slider, and the fixed guide assembly 4 and the lifting guide assembly 11 are both slider grooves.

[0041] After the target assembly 3 is pulled out of the cavity 1, it is guided and supported by the guide shaft 12 in the early stage, and the lifting assembly 9 rises in the later stage so that the lifting guide assembly 11 contacts the movable guide assembly 5. The target assembly 3 is completely pulled out of the cavity 1 to complete the target replacement.

[0042] In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly referring to the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present utility model, unless otherwise specified, "multiple" means two or more.

[0043] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0044] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. It should be pointed out that a person skilled in the art can make several improvements and modifications without departing from the technical principle of the present invention, and these improvements and modifications should also be regarded as within the protection scope of the present invention.

Claims

1. A device for facilitating the replacement of a target material, comprising a chamber (1), a wafer carrier (2) and a target material assembly (3), wherein the wafer carrier (2) and the target material assembly (3) are both located in the chamber (1), and the target material assembly (3) is located below the wafer carrier (2); Features: A plurality of movable guide assemblies (5) are installed at the bottom of the target assembly (3) along the X-axis direction, and fixed guide assemblies (4) distributed along the X-axis direction are installed in the cavity (1) below the movable guide assemblies (5), and the movable guide assemblies (5) can move along the X-axis direction on the fixed guide assemblies (4) below; A movable frame (6) is arranged at the bottom of the cavity (1) along the positive direction of the X-axis, a plurality of movable wheels (7) are installed at the bottom of the movable frame (6), a support frame (8) is installed near the top of the movable frame (6), a plurality of lifting assemblies (9) are evenly installed on the support frame (8) along the X-axis direction, the lifting assemblies (9) can drive the upper lifting plate (10) to move along the Z-axis direction, and the lifting plate (10) is installed with lifting guide assemblies (11) distributed along the X-axis direction, and when the target assembly (3) moves out of the cavity (1) along the positive direction of the X-axis, the movable guide assembly (5) can continue to move along the X-axis direction on the lower lifting guide assembly (11).

2. A device for facilitating target replacement as claimed in claim 1, It is characterized in that The movable frame (6) is also provided with a guide shaft (12) distributed along the X-axis direction; the guide shaft (12) is installed on the movable frame (6) along the side of the positive direction of the X-axis through a guide shaft seat (13); and the guide shaft (12) is installed on the target assembly (3) along the side of the negative direction of the X-axis.

3. A device for facilitating target replacement as claimed in claim 1, It is characterized in that The movable guide component (5) is a guide wheel, and the fixed guide component (4) and the lifting guide component (11) are both guide wheel grooves.

4. A device for facilitating target replacement as claimed in claim 1, It is characterized in that The movable guide component (5) is a slider, and the fixed guide component (4) and the lifting guide component (11) are both slider grooves.

5. A device for facilitating target replacement as claimed in claim 1, It is characterized in that Guardrails are installed on the movable frames (6) on both sides of the target assembly (3) along the Y-axis direction, and the guardrails are installed on the movable frames along the X-axis direction via guardrail brackets.

6. A device for facilitating target replacement as claimed in claim 1, It is characterized in that The lifting component (9) is a hydraulic cylinder or an electric cylinder.

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