Furnace chamber rotating and lifting mechanism for single crystal furnace and single crystal furnace

Abstract

The utility model is applicable to the technical field of single crystal furnaces, and provides a furnace chamber rotating and lifting mechanism for a single crystal furnace and the single crystal furnace, the furnace chamber rotating and lifting mechanism comprises a first frame body, a second frame body and a third frame body, the first hydraulic cylinder is fixed on the first frame body and comprises a cylinder body and a piston rod mounted on the cylinder body; the first gear is fixed on the piston rod; the limiting component is matched with the guide rail, moves up and down along the guide rail and is fixedly connected with the first gear or the piston rod; the rotating assembly comprises a support, a second gear and a motor; the second frame body is rotationally connected to the piston rod, the piston rod is used for driving the second frame body to ascend and descend, and the rotating assembly is connected with the second frame body. According to the furnace chamber rotating and lifting mechanism for the single crystal furnace, the piston rod of the first gear or the first hydraulic cylinder is externally connected with the limiting component matched with the guide rail, the circumferential limiting effect of the piston rod is good, the piston rod is not prone to rotating, and the rotating reliability of the furnace chamber of the single crystal furnace is good.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a furnace chamber rotating and lifting mechanism for a single crystal furnace and a single crystal furnace. Background Art

[0002] Single crystal furnace is a device used to produce solar-grade single crystal silicon rods. In order to increase its production capacity, reduce production costs, and improve the production efficiency of single crystal silicon rods, many silicon rod manufacturers use a single furnace to add materials multiple times and pull single crystal silicon rods multiple times to increase production capacity. This requires that the auxiliary furnace chamber of the single crystal furnace be raised and unscrewed multiple times when preparing silicon rods to achieve multiple feeding.

[0003] In the prior art, the furnace chamber of a single crystal furnace usually includes a main furnace chamber and an auxiliary furnace chamber. The main furnace chamber and the auxiliary furnace chamber are generally driven to rise and fall by a hydraulic cylinder. The lifting frame of the main furnace chamber or the auxiliary furnace chamber is connected to the piston rod of the hydraulic cylinder. The piston rod of the hydraulic cylinder drives the lifting frame to rise and fall to realize the lifting and falling of the main furnace chamber or the auxiliary furnace chamber. At the same time, the lifting frame forms a rotational connection with the piston rod of the hydraulic cylinder, and the driving component drives the lifting frame to rotate around the central axis of the piston rod of the hydraulic cylinder, thereby realizing the rotation of the main furnace chamber or the auxiliary furnace chamber. Among them, during the lifting and falling process of the piston rod of the hydraulic cylinder, it is necessary to limit the circumferential position of the piston rod of the hydraulic cylinder, that is, to limit the rotation of the piston rod of the hydraulic cylinder around its central axis. Usually, a limiting groove is provided on the side of the piston rod of the hydraulic cylinder, and a guide wheel matching the limiting groove is fixed on the frame body to realize the circumferential position limit of the piston rod of the hydraulic cylinder. However, due to weight and space limitations, the diameter of the hydraulic cylinder's piston rod cannot be made too large. Therefore, the distance from the guide wheel to the center axis of the hydraulic cylinder's piston rod is small, the circumferential limiting effect of the hydraulic cylinder's piston rod is poor, and the hydraulic cylinder's piston rod is prone to rotation angles, resulting in poor furnace chamber rotation reliability. Utility Model Content

[0004] The utility model provides a furnace chamber rotating and lifting mechanism for a single crystal furnace, aiming to solve the problems of poor circumferential limiting effect of the piston rod of the hydraulic cylinder, easy rotation angle of the piston rod of the hydraulic cylinder and poor furnace chamber rotation reliability in the furnace chamber rotating and lifting mechanism of the single crystal furnace in the prior art.

[0005] The utility model is implemented by providing a furnace chamber rotating and lifting mechanism for a single crystal furnace, comprising:

[0006] A first frame, wherein the first frame is provided with guide rails distributed along a vertical direction;

[0007] A first hydraulic cylinder fixed on the first frame, the first hydraulic cylinder comprising a cylinder body and a piston rod installed on the cylinder body;

[0008] a first gear fixed to the piston rod;

[0009] a limiting component that cooperates with the guide rail and moves up and down along the guide rail; wherein the limiting component is fixedly connected to the first gear, or the limiting component is fixedly connected to the piston rod;

[0010] a rotating assembly, the rotating assembly comprising a bracket rotatably connected to the piston rod, a second gear rotatably disposed on the bracket and meshing with the first gear, and a motor drivingly connected to the second gear, the motor being used to drive the second gear to rotate around the central axis of the piston rod; and

[0011] The second frame is used to be connected to the main furnace chamber or the auxiliary furnace chamber, the second frame is rotatably connected to the piston rod, the piston rod is used to drive the second frame to rise and fall, and the rotating assembly is connected to the second frame and is used to drive the second frame to rotate around the central axis of the piston rod.

[0012] Preferably, the limiting component is a guide wheel, the guide rail is provided with a slide groove distributed in a vertical direction, and the guide wheel is embedded in the slide groove and can roll up and down along the slide groove.

[0013] Preferably, the limiting component is a slider, the guide rail is provided with convex strips distributed in the vertical direction, the slider is slidably connected with the convex strips and can slide up and down along the convex strips.

[0014] Preferably, the first gear is provided with a connecting portion extending in the direction of the first frame, and the limiting component is fixed to the connecting portion.

[0015] Preferably, it also includes a connecting shaft for installing the guide wheel, the connecting part is provided with a through groove formed by hollowing out, and a mounting hole connected to the through groove, one end of the connecting shaft is rotatably connected to the guide wheel, and the other end extends from the mounting hole into the through groove and is fixed to the connecting part by a nut.

[0016] Preferably, it further comprises a connecting plate fixed on the piston rod, and the limiting component is connected to the piston rod via the connecting plate.

[0017] Preferably, the first gear is fixed to the piston rod via a first tension sleeve; and / or the connecting plate is fixed to the piston rod via a second tension sleeve.

[0018] Preferably, the rotating assembly further comprises:

[0019] A transmission box is installed on the bracket, the second gear is connected to the output shaft of the transmission box, and the motor is connected to the input shaft of the transmission box.

[0020] Preferably, the second frame is provided with an upper connecting block and a lower connecting block which are spaced apart from each other, the upper connecting block is connected to the rotating assembly, and both the upper connecting block and the lower connecting block are rotatably connected to the piston rod.

[0021] The utility model also provides a single crystal furnace, comprising the above-mentioned furnace chamber rotating and lifting mechanism for the single crystal furnace.

[0022] The utility model provides a furnace chamber rotation and lifting mechanism for a single crystal furnace, by setting a guide rail distributed along the vertical direction on the first frame, and connecting a limiting component matched with the guide rail to the first gear or piston rod, on the one hand, the limiting component cooperates with the guide rail to realize the guiding effect of the piston rod, so that the piston rod can be stably lifted and lowered along the guide rail, and on the other hand, the limiting component cooperates with the guide rail to realize the circumferential limit of the piston rod of the first hydraulic cylinder, and the circumferential limit point of the piston rod of the limiting component is located on the guide rail of the first frame. Compared with the circumferential limit point of the traditional piston rod located on the piston rod of the hydraulic cylinder, the distance from the circumferential limit point to the central axis of the piston rod is greatly increased, the accuracy of the circumferential limit of the piston rod is greatly improved, and the circumferential limit effect of the piston rod of the first hydraulic cylinder is improved, and the piston rod of the first hydraulic cylinder is not easy to produce a rotation angle, so that the furnace chamber rotation reliability of the single crystal furnace is good, and the circumferential limit point of the piston rod of the first hydraulic cylinder is subjected to less force, and the structure is more durable. In addition, there is no need to process the limiting groove on the side of the piston rod of the traditional hydraulic cylinder, which simplifies the processing difficulty of the piston rod of the hydraulic cylinder and reduces the production cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A three-dimensional diagram of a furnace chamber rotation and lifting mechanism for a single crystal furnace provided in Example 1 of the utility model;

[0024] Figure 2 for Figure 1 A magnified view of the part A in the middle;

[0025] Figure 3 A three-dimensional diagram of a second frame and a rotating assembly of a furnace chamber rotating and lifting mechanism for a single crystal furnace provided in the first embodiment of the utility model;

[0026] Figure 4 A three-dimensional diagram of a rotating assembly of a furnace chamber rotating and lifting mechanism for a single crystal furnace provided in Example 1 of the utility model;

[0027] Figure 5 A three-dimensional diagram of the assembly of a first gear and a limiting component of a furnace chamber rotating and lifting mechanism for a single crystal furnace provided in Example 1 of the utility model;

[0028] Figure 6 A three-dimensional exploded view of a first gear and a limiting component of a furnace chamber rotating and lifting mechanism for a single crystal furnace provided in Example 1 of the utility model;

[0029] Figure 7 A three-dimensional diagram of a furnace chamber rotation and lifting mechanism for a single crystal furnace provided in the second embodiment of the utility model;

[0030] Figure 8 for Figure 7 Enlarged view of part B in the middle. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0032] The embodiment of the utility model provides a furnace chamber rotation and lifting mechanism for a single crystal furnace, by arranging guide rails distributed in a vertical direction on the first frame, and a limiting component coordinated with the guide rail is connected to the outside of the first gear or the piston rod, and the circumferential limitation of the piston rod of the first hydraulic cylinder is achieved by the cooperation between the limiting component and the guide rail. The circumferential limitation point of the piston rod of the first hydraulic cylinder by the limiting component is located on the guide rail of the first frame instead of on the piston rod of the first hydraulic cylinder, which greatly increases the distance from the circumferential limitation point to the central axis of the piston rod of the hydraulic cylinder, greatly improves the accuracy of the circumferential limitation of the piston rod of the first hydraulic cylinder, and improves the circumferential limitation effect of the piston rod of the first hydraulic cylinder. The piston rod of the first hydraulic cylinder is not easy to produce a rotation angle, so that the furnace chamber rotation reliability of the single crystal furnace is good, the circumferential limitation point of the piston rod of the first hydraulic cylinder is subjected to less force, and the structure is more durable.

[0033] Embodiment 1

[0034] Please refer to Figure 1-Figure 4 The embodiment of the utility model provides a furnace chamber rotating and lifting mechanism for a single crystal furnace, comprising:

[0035] A first frame 1, wherein the first frame 1 is provided with guide rails 2 distributed along a vertical direction;

[0036] A first hydraulic cylinder 3 fixed on the first frame 1, the first hydraulic cylinder 3 comprises a cylinder body 31 and a piston rod 32 mounted on the cylinder body 31;

[0037] A first gear 4 fixed to the piston rod 32;

[0038] a limiting component 5 that cooperates with the guide rail 2 and moves up and down along the guide rail 2, and the limiting component 5 is fixedly connected to the first gear 4;

[0039] The rotating assembly 6 includes a bracket 61 rotatably connected to the piston rod 32, a second gear 62 rotatably disposed on the bracket 61 and meshing with the first gear 4, and a motor 63 drivingly connected to the second gear 62, the motor 63 is used to drive the second gear 62 to rotate around the central axis of the piston rod 32; and

[0040] The second frame 7 is used to be connected to the main furnace chamber or the auxiliary furnace chamber. The second frame 7 can be rotatably connected to the piston rod 32. The piston rod 32 is used to drive the second frame 7 to rise and fall. The rotating assembly 6 is connected to the second frame 7 and is used to drive the second frame 7 to rotate around the central axis of the piston rod 32.

[0041] In the embodiment of the utility model, a furnace chamber rotation and lifting mechanism for a single crystal furnace is provided by arranging a guide rail 2 distributed in a vertical direction on the first frame 1, and connecting a limiting component 5 that cooperates with the guide rail 2 to the outside of the first gear 4. On the one hand, the limiting component 5 cooperates with the guide rail 2 to realize the guiding effect of the piston rod 32, so that the piston rod 32 can be stably lifted and lowered along the guide rail 2. On the other hand, the limiting component 5 cooperates with the guide rail 2 to realize the circumferential limitation of the piston rod 32 of the hydraulic cylinder; since the limiting point of the piston rod 32 of the limiting component 5 is located on the guide rail 2 of the first frame 1 instead of on the piston rod 32, the distance from the circumferential limiting point to the center axis of the piston rod 32 is greatly increased, the accuracy of the circumferential limitation of the piston rod 32 of the hydraulic cylinder is greatly improved, and the circumferential limiting effect of the piston rod 32 of the first hydraulic cylinder 3 is improved. The piston rod 32 of the first hydraulic cylinder 3 is not easy to produce a rotation angle, so that the furnace chamber rotation reliability of the single crystal furnace is good, and the circumferential limiting point of the piston rod 32 of the first hydraulic cylinder 3 is subjected to less force, and the structure is more durable. Furthermore, there is no need to process a limiting groove on the side of the piston rod 32 of the conventional hydraulic cylinder, which simplifies the processing difficulty of the piston rod 32 of the hydraulic cylinder and reduces the production cost.

[0042] In the embodiment of the utility model, the furnace chamber rotating and lifting mechanism for a single crystal furnace can be used for the main furnace chamber rotating and lifting mechanism of a single crystal furnace, and can also be used for the auxiliary furnace chamber rotating and lifting mechanism of a single crystal furnace. The furnace chamber rotating and lifting mechanism for a single crystal furnace is used for the main furnace chamber rotating and lifting principle and the auxiliary furnace chamber rotating and lifting principle are the same. For ease of description, the embodiment of the utility model is described by using the furnace chamber rotating and lifting mechanism for a single crystal furnace as the auxiliary furnace chamber rotating and lifting mechanism for a single crystal furnace.

[0043] In the embodiment of the utility model, the second frame 7 is used to connect with the main furnace chamber or the auxiliary furnace chamber, so that the main furnace chamber or the auxiliary furnace chamber can be rotated and lifted. Figure 1As shown, the first frame 1 is the main furnace chamber frame, the second frame 7 is used to connect with the auxiliary furnace chamber, the cylinder body 31 of the first hydraulic cylinder 3 is fixed on the first frame 1, the piston rod 32 of the first hydraulic cylinder 3 is used to lift the second frame 7, thereby driving the auxiliary furnace chamber to lift, and the rotating assembly 6 is used to drive the auxiliary furnace chamber to rotate. The first frame 1 is connected to the second hydraulic cylinder 10, and the second hydraulic cylinder 10 is used to lift the main furnace chamber frame to achieve the lifting of the main furnace chamber.

[0044] In the embodiment of the utility model, the first frame 1 is provided with a guide rail 2 distributed along the vertical direction. The specific structure of the guide rail 2 is not limited, and the structure of the guide rail 2 is compatible with that of the limiting component 5.

[0045] In the embodiment of the utility model, the limiting component 5 cooperates with the guide rail 2 to limit the position. The limiting component 5 moves up and down along the guide rail 2 together with the piston rod 32, and the limiting component 5 and the guide rail 2 realize the circumferential limitation of the piston rod 32, so that when the second frame 7 drives the furnace chamber to rotate, the piston rod 32 cannot rotate, thereby realizing good circumferential limitation of the piston rod 32, realizing stable and reliable rotation of the second frame 7, and improving the reliability of the furnace chamber rotation.

[0046] As an embodiment of the present utility model, the limiting component 5 is a guide wheel or a slider. When the limiting component 5 is a guide wheel, the guide wheel can roll relative to the guide rail 2 during the up and down movement of the guide wheel along the guide rail 2. The guide wheel and the guide rail 2 have rolling friction, which greatly reduces the friction between the limiting component 5 and the guide rail 2, and the limiting component 5 moves more smoothly relative to the guide rail 2. When the limiting component 5 is a slider, the contact surface between the slider and the guide rail 2 is more stable, which can further improve the reliability of the circumferential limit of the piston rod 32. Among them, the limiting component 5 shown in the drawings of this embodiment is a guide wheel.

[0047] As a preferred embodiment of the utility model, the limiting component 5 is a guide wheel, and the guide rail 2 is provided with a slide groove 21 distributed in the vertical direction. The guide wheel is embedded in the slide groove 21 and can roll up and down along the slide groove 21. The guide wheel contacts the two side walls of the slide groove 21. When the guide wheel moves up and down along the slide groove 21, the guide wheel can roll relative to the slide groove 21, and the guide wheel contacts the side wall of the slide groove 21 to realize the circumferential limit of the piston rod 32. The piston rod 32 of the first hydraulic cylinder 3 is not easy to produce a rotation angle, and the furnace chamber rotation reliability of the single crystal furnace is good.

[0048] Please refer to Figure 5-Figure 6 As an embodiment of the present utility model, the first gear 4 is provided with a connecting portion 41 extending toward the first frame 1 , and the limiting component 5 is fixed to the connecting portion 41 .

[0049] In this embodiment, the connecting portion 41 is integrally formed with the first gear 4, which is easy to process. The first gear 4 is connected to the limiting component 5 through the connecting portion 41, and the limiting component 5 cooperates with the guide rail 2 to achieve circumferential limiting of the first gear 4 to prevent the first gear 4 from rotating. Since the first gear 4 is fixed on the piston rod 32, the limiting component 5 cooperates with the guide rail 2 to synchronously achieve circumferential limiting of the piston rod 32.

[0050] As an embodiment of the utility model, it also includes a connecting shaft 8 for installing the guide wheel. The connecting part 41 is provided with a hollowed-out through groove 42 and a mounting hole (unnumbered) connected to the through groove 42. One end of the connecting shaft 8 is rotatably connected to the guide wheel, and the other end extends from the mounting hole into the through groove 42 and is fixed to the connecting part 41 by a nut 9.

[0051] In this embodiment, the guide wheel can rotate relative to the connecting shaft 8, so that the guide wheel can roll during the up and down movement along the guide rail 2. By providing a through slot 42 in the connecting portion 41, one end of the connecting shaft 8 extends from the mounting hole into the through slot 42 and is fixed to the connecting portion 41 by the nut 8, so that the guide wheel is fixedly connected to the first gear 4, which facilitates the installation and fixation of the guide wheel.

[0052] In this practical embodiment, the motor 63 is used to drive the second gear 62 to rotate around the central axis of the piston rod 32. Since the first gear 4 is stationary, the second gear 62 will rotate around the axis of the first gear 4 under the meshing action of the second gear 62 and the first gear 4, that is, the second gear 62 rotates around the central axis of the piston rod 32, so that the second gear 62 drives the entire rotating assembly 6 to rotate around the central axis of the piston rod 32. During the rotation of the rotating assembly 6, the second frame 7 is driven to rotate around the central axis of the piston rod 32, realizing the rotation of the second frame 7, thereby realizing the rotation of the auxiliary furnace chamber. During the lifting and lowering process of the piston rod 32, the piston rod 32 drives the first gear 4, the rotating assembly 6 and the first frame 1 to rise and fall synchronously.

[0053] As an optional embodiment of the present invention, the bracket 61 of the rotating assembly 6 is connected to the second frame 7. Specifically, one end of the bracket 61 is provided with a U-shaped opening 611 that matches the piston rod 32, and the U-shaped opening 611 is sleeved with the piston rod 32 and can rotate relative to the piston rod 32, so that the bracket 61 can rotate around the central axis of the piston rod 32.

[0054] As an optional embodiment of the present invention, the second frame body 7 can be fixedly connected to the bracket 61 by screws or bolts, so that the bracket 61 can drive the second frame body 7 to rotate synchronously around the central axis of the piston rod 32.

[0055] As an embodiment of the present utility model, the rotating assembly 6 further includes:

[0056] The transmission box 64 is mounted on the bracket 61 , the second gear 62 is connected to the output shaft of the transmission box 64 , and the motor 63 is connected to the input shaft of the transmission box 64 .

[0057] In this embodiment, the motor 63 rotates with the input shaft of the transmission box 64, and the input shaft of the transmission box 64 drives the output shaft of the transmission box 64 to rotate through the transmission gear inside the transmission box 64, and the output shaft of the transmission box 64 drives the second gear 62 to rotate, and the second gear 62 drives the rotating assembly 6 to rotate. The motor 63 is connected to the second gear 62 by the transmission box 64, and the corresponding transmission box 64 can be flexibly selected, which is convenient for adjusting the speed of the second gear 62, and it is also convenient to change the layout of the output shaft of the motor 63 and the rotating shaft of the second gear 62. In this embodiment, the output shaft of the motor 63 and the rotating shaft of the second gear 62 are perpendicular to each other, which is convenient for the layout setting of the rotating assembly 6. Of course, the output shaft of the motor 63 and the rotating shaft of the second gear 62 can also be arranged in parallel with each other.

[0058] As an embodiment of the present invention, the first gear 4 is fixed to the piston rod 32 through the first tension sleeve 13, so that the first gear 4 is stably fixed to the piston rod 32, preventing the first gear 4 from rotating relative to the piston rod 32. The first tension sleeve 13 is fixed to the center hole of the first gear 4, and the piston rod 32 passes through the first tension sleeve 13 and is fixedly connected to the first tension sleeve 13, so that the first gear 4 is fixed to the piston rod 32.

[0059] As an embodiment of the utility model, the second frame 7 is provided with an upper connecting block 71 and a lower connecting block 72 spaced apart from each other. The upper connecting block 71 is connected to the rotating assembly 6 , and both the upper connecting block 71 and the lower connecting block 72 are rotatably connected to the piston rod 32 .

[0060] In this embodiment, the second frame 7 is rotatably connected to the piston rod 32 by means of the upper connecting block 71 and the lower connecting block 72, so that the second frame 7 can rotate relative to the central axis of the piston rod 32, and the piston rod 32 can drive the second frame 7 to rise and fall through the upper connecting block 71 and the lower connecting block 72. Among them, the upper connecting block 71 is connected to the bracket 61 of the rotating assembly 6, so that the rotating assembly 6 can drive the first frame 1 to rotate relative to the central axis of the piston rod 32, so as to realize the rotation of the auxiliary furnace chamber. Of course, the upper connecting block 71 can also be connected to other parts of the rotating assembly 6, so that the rotating assembly 6 can also drive the second frame 7 to rotate relative to the central axis of the piston rod 32.

[0061] Embodiment 2

[0062] Please refer to Figure 7-Figure 8The difference between the second embodiment and the first embodiment is that the limiting component 5 is fixedly connected to the piston rod 32, so that the first gear 4 does not need to be connected to the limiting component 5, and the first gear 4 can use a standard gear, which reduces the processing difficulty of the first gear 4 and reduces the production cost.

[0063] In this embodiment, the limiting component 5 and the piston rod 32 may be directly connected or indirectly connected.

[0064] In this embodiment, the limiting component 5 can also be a guide wheel or a slider. In this embodiment, the limiting component 5 is preferably a slider, and the guide rail 2 is provided with convex strips 22 distributed in the vertical direction, and the slider forms a sliding connection with the convex strips 22 and can slide up and down along the convex strips 22. The slider and the convex strips 22 cooperate to limit the position, so as to achieve a good circumferential limiting effect of the piston rod 32 and prevent the piston rod 32 from rotating circumferentially.

[0065] As an embodiment of the utility model, the furnace chamber rotation and lifting mechanism for the single crystal furnace also includes a connecting plate 12 fixed on the piston rod 32, and the limiting component 5 is connected to the piston rod 32 through the connecting plate 12, which facilitates the connection and fixation of the limiting component 5 and the piston rod 32.

[0066] As an embodiment of the present utility model, the connecting plate 12 is fixed on the piston rod 32 through the second tension sleeve 15, so that the connecting plate 12 and the piston rod 32 are stably connected.

[0067] Embodiment 3

[0068] The embodiment of the utility model further provides a single crystal furnace, comprising the furnace chamber rotating and lifting mechanism for the single crystal furnace of the above-mentioned embodiment 1 or embodiment 2.

[0069] In this embodiment, the furnace chamber rotation and lifting mechanism for the single crystal furnace can be used for rotating and lifting the main furnace chamber of the single crystal furnace, and can also be used for rotating and lifting the auxiliary furnace chamber of the single crystal furnace, and the principle used for rotating and lifting the main furnace chamber is the same as that used for rotating and lifting the auxiliary furnace chamber.

[0070] The single crystal furnace of this embodiment is provided with the above-mentioned single crystal furnace chamber rotation and lifting mechanism, and utilizes the limiting component 5 that is externally connected to the first gear 4 or the piston rod 32 and cooperates with the guide rail 2, thereby greatly increasing the distance from the circumferential limiting point to the central axis of the piston rod 32 of the first hydraulic cylinder 3, greatly improving the accuracy of the circumferential limiting of the piston rod 32 of the first hydraulic cylinder 3, and improving the circumferential limiting effect of the piston rod 32 of the first hydraulic cylinder 3. The piston rod 32 of the hydraulic cylinder is not easy to produce a rotation angle, so that the furnace chamber rotation reliability of the single crystal furnace is good and the structure is more durable.

[0071] The embodiment of the utility model provides a furnace chamber rotation and lifting mechanism for a single crystal furnace, by setting a guide rail 2 distributed along the vertical direction on the first frame 1, and connecting a limiting component 5 matched with the guide rail 2 on the first gear 4, and using the limiting component 5 to cooperate with the guide rail 2 to realize the circumferential limit of the piston rod 32 of the hydraulic cylinder. Since the limiting point of the piston rod 32 of the limiting component 5 is located on the guide rail 2 of the first frame 1, rather than on the piston rod 32, the distance from the circumferential limit point to the central axis of the piston rod 32 is greatly increased, the accuracy of the circumferential limit of the piston rod 32 of the hydraulic cylinder is greatly improved, and the circumferential limit effect of the piston rod 32 of the first hydraulic cylinder 3 is improved. The piston rod 32 of the first hydraulic cylinder 3 is not easy to produce a rotation angle, so that the furnace chamber rotation reliability of the single crystal furnace is good, and the circumferential limit point of the piston rod 32 of the first hydraulic cylinder 3 is less stressed, and the structure is more durable. In addition, there is no need to process the limiting groove on the side of the piston rod 32 of the traditional hydraulic cylinder, which simplifies the processing difficulty of the piston rod 32 of the hydraulic cylinder and reduces the production cost.

[0072] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A furnace chamber rotating and lifting mechanism for a single crystal furnace, characterized in that: include: A first frame, wherein the first frame is provided with guide rails distributed along a vertical direction; A first hydraulic cylinder fixed on the first frame, the first hydraulic cylinder comprising a cylinder body and a piston rod installed on the cylinder body; a first gear fixed to the piston rod; a limiting component that cooperates with the guide rail and moves up and down along the guide rail; wherein the limiting component is fixedly connected to the first gear, or the limiting component is fixedly connected to the piston rod; a rotating assembly, the rotating assembly comprising a bracket rotatably connected to the piston rod, a second gear rotatably disposed on the bracket and meshing with the first gear, and a motor drivingly connected to the second gear, the motor being used to drive the second gear to rotate around the central axis of the piston rod; and The second frame is used to be connected to the main furnace chamber or the auxiliary furnace chamber, the second frame is rotatably connected to the piston rod, the piston rod is used to drive the second frame to rise and fall, and the rotating assembly is connected to the second frame and is used to drive the second frame to rotate around the central axis of the piston rod.

2. The furnace chamber rotating and lifting mechanism for a single crystal furnace according to claim 1, characterized in that: The limiting component is a guide wheel, and the guide rail is provided with a slide groove distributed in a vertical direction. The guide wheel is embedded in the slide groove and can roll up and down along the slide groove.

3. The furnace chamber rotating and lifting mechanism for a single crystal furnace according to claim 1, characterized in that: The limiting component is a slider, the guide rail is provided with convex strips distributed in the vertical direction, the slider is slidably connected with the convex strips and can slide up and down along the convex strips.

4. The furnace chamber rotating and lifting mechanism for a single crystal furnace according to claim 2, characterized in that: The first gear is provided with a connecting portion extending toward the first frame body, and the limiting component is fixed to the connecting portion.

5. The furnace chamber rotating and lifting mechanism for a single crystal furnace according to claim 4, characterized in that: It also includes a connecting shaft for installing the guide wheel, the connecting part is provided with a through groove formed by hollowing out, and a mounting hole connected to the through groove, one end of the connecting shaft is rotatably connected to the guide wheel, and the other end extends from the mounting hole into the through groove and is fixed to the connecting part by a nut.

6. The furnace chamber rotating and lifting mechanism for a single crystal furnace according to claim 1, characterized in that: It also includes a connecting plate fixed on the piston rod, and the limiting component is connected to the piston rod through the connecting plate.

7. The furnace chamber rotating and lifting mechanism for a single crystal furnace according to claim 6, characterized in that: The first gear is fixed to the piston rod via a first tension sleeve; and / or the connecting plate is fixed to the piston rod via a second tension sleeve.

8. The furnace chamber rotating and lifting mechanism for a single crystal furnace according to claim 1, characterized in that: The rotating assembly further comprises: A transmission box is installed on the bracket, the second gear is connected to the output shaft of the transmission box, and the motor is connected to the input shaft of the transmission box.

9. The furnace chamber rotating and lifting mechanism for a single crystal furnace according to claim 1, characterized in that: The second frame is provided with an upper connecting block and a lower connecting block which are spaced apart from each other. The upper connecting block is connected to the rotating assembly. Both the upper connecting block and the lower connecting block are rotatably connected to the piston rod.

10. A single crystal furnace, characterized in that: It comprises a furnace chamber rotating and lifting mechanism for a single crystal furnace as described in any one of claims 1 to 9.

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