Supporting rod assembly for single crystal drawing

Abstract

The utility model discloses a die-pin assembly for single crystal drawing, which comprises a die-pin, a tray, a crucible holder and support columns, the tray is arranged at the top of the die-pin, the support columns are arranged on the tray at intervals, the crucible holder is arranged on the support columns, the top of each support column is provided with a first positioning column extending upwards into the crucible holder, and a second positioning column extending upwards into the crucible holder is arranged on the top of each support column. First positioning holes in one-to-one correspondence with the first positioning columns are formed in the bottom of the crucible supporting tool, second positioning columns extending downwards into the tray are arranged at the bottoms of the supporting columns, and second positioning holes in one-to-one correspondence with the second positioning columns are formed in the tray. According to the die-pin assembly for single crystal drawing, the plurality of supporting columns are matched with the tray, so that a crucible support is supported, the supporting columns are uniform in stress, light in self weight and high in supporting stability, and heat transfer and loss are reduced.

Description

Technical Field

[0001] The utility model relates to the field of single crystal pulling equipment, in particular to a supporting rod assembly for single crystal pulling. Background Art

[0002] The single crystal furnace is the core equipment for single crystal pulling. The crucible is supported by the support rod assembly, and the crucible is rotated and lifted by the drive device outside the furnace to assist in single crystal pulling.

[0003] In order to achieve the pulling of large-sized single crystals, more polysilicon materials need to be put into the crucible, which requires higher support stability of the support rod assembly. In the prior art, a larger tray is often used to improve the support effect of the support rod on the crucible support, but at the same time, the weight of the support rod assembly is increased. In addition, a larger tray absorbs more heat, and the heat dissipated to the outside of the furnace through the support rod is large, which increases energy consumption and needs to be improved. Utility Model Content

[0004] The utility model aims to provide a support rod assembly for single crystal pulling, which ensures the support of the crucible and reduces the heat loss.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] A support rod assembly for single crystal pulling comprises: a support rod, a tray, a crucible holder and a support column, wherein the tray is arranged on the top of the support rod, the support columns are arranged on the tray at intervals, the crucible holder is arranged on the support column, the top of the support column is provided with a first positioning column extending upward into the crucible holder, the bottom of the crucible holder is provided with a first positioning hole corresponding to the first positioning column in a one-to-one manner, the bottom of the support column is provided with a second positioning column extending downward into the tray, and the tray is provided with a second positioning hole corresponding to the second positioning column in a one-to-one manner.

[0007] Wherein, the diameters of the first positioning column and the second positioning column are respectively smaller than the diameter of the supporting column.

[0008] Wherein, the first positioning column, the second positioning column and the supporting column adopt an integrated structure.

[0009] Wherein, a third positioning column extending upward into the tray is arranged on the top of the support rod, and third positioning holes corresponding to the third positioning columns are arranged on the tray.

[0010] Wherein, the support rod and the third positioning column adopt an integrated structure, and the number of the third positioning columns is at least 2.

[0011] Wherein, the support columns are distributed in a circular array on the tray, and the number of the support columns is at least 4.

[0012] The beneficial effects of the utility model are as follows: a support rod assembly for single crystal pulling realizes the support of a crucible holder through the cooperation of a plurality of support columns and a tray. The support columns are subjected to uniform force, have light weight and high support stability. Moreover, the support columns avoid contact between the crucible holder and the tray, reduce heat transfer and loss, and are beneficial to improving the energy saving of single crystal pulling. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a structural schematic diagram of the utility model;

[0014] Figure 2 yes Figure 1 Top view of the middle tray. DETAILED DESCRIPTION

[0015] Combine the following Figure 1 to Figure 2 The technical solution of the utility model is further illustrated by specific embodiments.

[0016] like Figure 1 The single crystal pulling support rod assembly shown in the figure comprises: a support rod 1, a tray 2, a crucible holder 3 and a support column 4, wherein the tray 2 is arranged on the top of the support rod 1, and a third positioning column 7 extending upward into the tray 2 is arranged on the top of the support rod 1, as shown in FIG. Figure 2 As shown, the tray 2 is provided with third positioning holes 10 corresponding one to one with the third positioning columns 7, so that the assembly is convenient.

[0017] In this embodiment, the support rod 1 and the third positioning column 7 adopt an integrated structure, which can be made of isostatically pressed graphite rods, which have high strength and good high temperature resistance. The number of the third positioning columns 7 is at least 2, and the stability after assembly is high, which can ensure that the support rod 1 drives the tray 2 to rotate and avoid relative torsion problems.

[0018] The support columns 4 are arranged on the tray 2 at intervals, and the crucible holder 3 is arranged on the support columns 4. In this embodiment, the support columns 4 are distributed in a circular array on the tray 2 to support the crucible holder 3. Moreover, the support columns 4 are evenly stressed and have a light weight. The number of the support columns 4 is at least 4, and multiple support columns 4 are used to work together, so that the support stability is high.

[0019] A first positioning column 8 extending upward into the crucible holder 3 is provided on the top of the support column 4, and a first positioning hole 6 corresponding to the first positioning column 8 is provided at the bottom of the crucible holder 3, which facilitates assembly. A second positioning column 9 extending downward into the tray 2 is provided at the bottom of the support column 4, and a second positioning hole 5 corresponding to the second positioning column 9 is provided in the tray 2, which ensures the stability of the support column 4, the tray 2 and the crucible holder 3 after assembly.

[0020] like Figure 1As shown, the first positioning column 8, the second positioning column 9 and the supporting column 4 adopt an integrated structure and can be made of ceramics with low thermal conductivity, with high structural strength, good high temperature resistance, and reduced thermal conductivity problems.

[0021] In this embodiment, the diameters of the first positioning column 8 and the second positioning column 9 are respectively smaller than the diameter of the support column 4, and the support column 4 is axially limited. The support column 4 can be used to avoid direct contact between the crucible holder 3 and the tray 2, reducing the transfer and loss of heat, which is conducive to improving the energy saving of single crystal pulling. In addition, the position height of the crucible holder 3 can be changed by replacing the support column 4 of different lengths to adapt to the height of the crucible and the size of the single crystal pulled.

[0022] The above contents are only preferred embodiments of the present invention. For ordinary technicians in this field, according to the concept of the present invention, there will be changes in the specific implementation methods and application scopes. The contents of this specification should not be understood as limiting the present invention.

Claims

1. A support rod assembly for single crystal pulling, characterized in that: include: A support rod, a tray, a crucible holder and a support column, wherein the tray is arranged on the top of the support rod, the support columns are arranged on the tray at intervals, the crucible holder is arranged on the support column, the top of the support column is provided with a first positioning column extending upward into the crucible holder, the bottom of the crucible holder is provided with a first positioning hole corresponding to the first positioning column, the bottom of the support column is provided with a second positioning column extending downward into the tray, and the tray is provided with a second positioning hole corresponding to the second positioning column.

2. The support rod assembly for single crystal pulling according to claim 1, characterized in that: The diameters of the first positioning column and the second positioning column are respectively smaller than the diameter of the supporting column.

3. The support rod assembly for single crystal pulling according to claim 1, characterized in that: The first positioning column, the second positioning column and the supporting column adopt an integrated structure.

4. The support rod assembly for single crystal pulling according to claim 1, characterized in that: The top of the support rod is provided with a third positioning column extending upward into the tray, and the tray is provided with third positioning holes corresponding to the third positioning columns one by one.

5. The support rod assembly for single crystal pulling according to claim 4, characterized in that: The support rod and the third positioning column adopt an integrated structure, and the number of the third positioning columns is at least 2.

6. The support rod assembly for single crystal pulling according to claim 1, characterized in that: The support columns are distributed in a circular array on the tray, and the number of the support columns is at least 4.

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