Oxygenation mechanism and baking device comprising same

Abstract

The utility model relates to the technical field of single crystal growth, and discloses an oxygenating mechanism and a baking device comprising the oxygenating mechanism, the oxygenating mechanism comprises a container, an air inlet pipe and an air distribution pipe; the container is provided with a containing cavity used for containing a plurality of crucibles, and the container is provided with an opening communicated with the containing cavity; the air inlet pipe is provided with an air inlet pipeline, the air inlet pipeline is provided with a first end and a second end, and the first end is provided with an oxygen input port; the gas distribution pipe is connected to the second end and arranged in the containing cavity, the gas distribution pipe is provided with a gas distribution pipeline, and a plurality of oxygen output holes are formed in the gas distribution pipe; according to the oxygenating mechanism provided by the utility model, the oxygen can be conveyed into the plurality of areas in the container through the plurality of oxygen output holes, so that the distribution uniformity of the oxygen concentration in the container is improved, and furthermore, sufficient oxygen can be contained in the container for sufficient reaction of the plurality of crucibles.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal growth, in particular to an oxygenating mechanism and a baking device comprising the oxygenating mechanism. Background Art

[0002] In the field of single crystal growth, a crucible is needed to wet the crystal, and the crucible needs to be treated by oxygenation and baking to form a boron nitride oxide film on the surface of the crucible, so that the crucible can better wet the crystal; the oxygenation mechanism in the existing crucible baking device is as follows Figure 1 As shown, the container 1 includes a container 1 and an air inlet pipe 3. A plurality of crucibles 5 can be accommodated in the container 1. The oxygen outlet of the air inlet pipe 3 is directly arranged at the opening of the container 1. This results in that when the container 1 is oxygenated through the air inlet pipe 3, the oxygen concentration in the area near the opening of the container 1 is much greater than the oxygen concentration in the area far from the opening of the container 1. As a result, when the crucible is subjected to oxygenation and baking treatment through a baking device, the crucibles arranged in the area far from the opening of the container cannot fully react with oxygen, resulting in that an oxide layer cannot be formed well on the surfaces of these crucibles, thereby reducing the wettability of these crucibles and reducing the single crystal crystallization rate. Therefore, the oxygenation mechanism of the prior art has the problem of uneven distribution of oxygen concentration in the container, thereby reducing the wettability of the crucible. Utility Model Content

[0003] Aiming to solve at least one of the technical problems existing in the prior art, the utility model provides an oxygenation mechanism and a baking device including the oxygenation mechanism, wherein the oxygenation mechanism can transport oxygen to multiple areas in a container to improve the distribution uniformity of the oxygen concentration in the container.

[0004] In order to achieve the above-mentioned purpose, the utility model provides an oxygenation mechanism, which has a first direction, and includes a container, an air inlet pipe and an air distribution pipe; the container has a accommodating chamber extending along the first direction and used to accommodate multiple crucibles, and one end of the container in the first direction is open to form an opening connected to the accommodating chamber; the air inlet pipe has an air inlet pipeline, and the air inlet pipe has a first end and a second end opposite to each other in the first direction, and the first end is provided with an oxygen input port connected to the air inlet pipeline; the air distribution pipe is connected to the second end and is arranged in the accommodating chamber, the air distribution pipe has an air distribution pipeline connected to the air inlet pipeline, and the air distribution pipe is provided with a plurality of oxygen output holes connecting the air distribution pipeline and the accommodating chamber.

[0005] In some embodiments, the air inlet pipe is a straight air inlet pipe.

[0006] In some embodiments, the air distribution duct is a straight air distribution duct.

[0007] In some embodiments, the air distribution duct is a spiral air distribution duct.

[0008] In some embodiments, a receiving space capable of receiving the crucible is formed inside the spiral gas distribution pipe.

[0009] In some embodiments, the spiral air distribution pipe is formed by extending spirally in the first direction while maintaining a preset interval.

[0010] In some embodiments, a sealing cover is further included, which is sealed on the opening and is detachably connected to the container, and the air inlet pipe is connected to the sealing cover.

[0011] In some embodiments, the container is made of quartz.

[0012] In some embodiments, the air inlet pipe is made of quartz.

[0013] The utility model also provides a baking device, comprising the oxygenation mechanism described in any one of the above items, and also comprising an oxygen supply mechanism and a heating furnace, the heating furnace having a furnace chamber, the oxygenation mechanism being arranged in the furnace chamber, the oxygen supply mechanism being connected to the first end and communicating with the air intake pipe through the oxygen input port.

[0014] Compared with the prior art, the oxygen charging mechanism provided by the utility model has the following beneficial effects: by arranging the gas distribution pipe connected to the air inlet pipe and arranging the gas distribution pipe in the accommodating chamber, oxygen can be firstly delivered into the gas distribution pipe through the air inlet pipe, and then the oxygen in the gas distribution pipe is delivered to the accommodating chamber through the oxygen output hole, so that oxygen can be delivered to multiple areas in the container through the multiple oxygen output holes, so as to improve the uniformity of the distribution of the oxygen concentration in the container, thereby making it possible for the container to have sufficient oxygen for the multiple crucibles to fully react.

[0015] Compared with the prior art, the baking device provided by the utility model has the beneficial effect that oxygen is delivered to multiple areas in the container through multiple oxygen output holes, so that the distribution uniformity of the oxygen concentration in the container can be improved, so that there is sufficient oxygen in the container for the crucible to fully react, and then when the multiple crucibles are subjected to oxygen-filled baking treatment by the baking device, the surfaces of the multiple crucibles arranged in the multiple areas in the container can form an oxide layer well, thereby improving the wettability of the crucible. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of the oxygenation mechanism of the prior art;

[0017] Figure 2 This is a structural schematic diagram of an oxygenation mechanism provided in Embodiment 1 of the present utility model;

[0018] Figure 3 It is a cross-sectional view of an air intake pipe and an air distribution pipe provided by an embodiment of the utility model;

[0019] Figure 4 This is a schematic diagram of an oxygenation mechanism provided by an embodiment of the utility model when a crucible is provided in the oxygenation mechanism;

[0020] Figure 5 yes Figure 4 AA section view;

[0021] Figure 6 It is a cross-sectional view of an oxygenation mechanism provided in the second embodiment of the present utility model;

[0022] Figure 7 This is a schematic diagram of a crucible provided in an oxygenation mechanism provided in the second embodiment of the present utility model;

[0023] Figure 8 It is a structural schematic diagram of a baking device provided by an embodiment of the utility model.

[0024] In the figure, 1, container; 11, accommodating cavity;

[0025] 2. Sealing cover;

[0026] 3. Air intake pipe; 31. Air intake pipe; 32. Oxygen input port;

[0027] 4. Gas distribution pipe; 41. Gas distribution pipeline; 42. Oxygen output hole;

[0028] 5. Crucible;

[0029] 100. Oxygenation mechanism;

[0030] 200. Oxygen supply mechanism;

[0031] 300, heating furnace; 301, furnace;

[0032] X, first direction; Z, second direction. DETAILED DESCRIPTION

[0033] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0034] In the description of the present invention, it should be understood that the terms "length", "width", "thickness", "up", "down", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0035] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features.

[0036] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0037] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0038] Embodiment 1

[0039] like Figure 2-5As shown, an oxygenation mechanism provided by Embodiment 1 of the utility model has a first direction X, and includes a container 1, an air inlet pipe 3 and an air distribution pipe 4; the container 1 has a accommodating chamber 11 extending along the first direction X and used to accommodate multiple crucibles 5, and one end of the container 1 in the first direction X is open to form an opening connected to the accommodating chamber 11; the air inlet pipe 3 has an air inlet pipeline 31, and the air inlet pipe 3 has a first end and a second end opposite to each other in the first direction X, and the first end is provided with an oxygen input port 32 connected to the air inlet pipeline 31; the air distribution pipe 4 is connected to the second end and is arranged in the accommodating chamber 11, and the air distribution pipe 4 has an air distribution pipeline 41 connected to the air inlet pipeline 31, and the air distribution pipe 4 is provided with a plurality of oxygen output holes 42 connecting the air distribution pipeline 41 and the accommodating chamber 11 and arranged along the first direction X.

[0040] Based on this technical solution, by setting up an air distribution pipe 4 connected to the air inlet pipe 3 and setting the air distribution pipe 4 in the accommodating chamber 11, oxygen can be first delivered into the air distribution pipe 41 through the air inlet pipe 31, and then the oxygen in the air distribution pipe 41 is transported to the accommodating chamber 11 through the oxygen output hole 42, so that oxygen can be transported to multiple areas in the container 1 through multiple oxygen output holes 42, so as to improve the uniformity of the distribution of oxygen concentration in the container 1, and then the container 1 can have sufficient oxygen for multiple crucibles 5 to fully react.

[0041] The oxygenation mechanism further includes a second direction Z, which is perpendicular to the first direction X.

[0042] In this embodiment, the first direction X is the length direction, and the second direction Z is the height direction.

[0043] In this embodiment, the container 1 is made of quartz.

[0044] In this embodiment, the material of the air inlet pipe 3 is quartz.

[0045] In this embodiment, the air intake pipe 3 is a straight air intake pipe.

[0046] The air distribution pipe 4 is a straight air distribution pipe.

[0047] In this embodiment, the gas distribution pipe 4 extends along the first direction X. A plurality of oxygen output holes 42 are sequentially distributed along the first direction X on the gas distribution pipe 4 .

[0048] In this embodiment, the cross-sectional shape of the container 1 is a circular structure. Specifically, the container 1 is a cylindrical quartz tube.

[0049] In some other embodiments, the cross-sectional shape of the container 1 may also be any shape such as a triangle, a rectangle, a regular pentagon, etc., which is not limited here.

[0050] In this embodiment, the air intake pipe 3 and the air distribution pipe 4 are integrally formed.

[0051] The cross-sectional shape of the air inlet pipe 3 is a circular structure, and the cross-sectional shape of the air distribution pipe 4 is a circular structure. Specifically, the air inlet pipe 3 and the air distribution pipe 4 are two pipe sections of a cylindrical quartz pipe, respectively.

[0052] The oxygenation mechanism provided by the utility model further includes a sealing cover 2, which seals the opening and is detachably connected to the container 1, and an air inlet pipe 3 is connected to the sealing cover 2. The sealing cover 2 is used to seal the opening of the container 1, which can prevent the oxygen in the container 1 from leaking to the outside of the container 1 along the opening, so that the crucible 5 in the container 1 can better react with oxygen, thereby improving the quality of the crucible oxygenation baking.

[0053] In this embodiment, the sealing cover 2 is made of quartz.

[0054] Embodiment 2

[0055] See also Figure 6-Figure 7 , which is different from the first embodiment, the air distribution pipe 4 provided in the second embodiment of the utility model is a spiral air distribution pipe.

[0056] The inner side of the spiral gas distribution pipe is formed with a receiving space capable of receiving the crucible 5. By adopting the spiral gas distribution pipe and accommodating the crucible 5 on the inner side of the spiral gas distribution pipe, oxygen can be delivered into the accommodating chamber 11 by distributing a plurality of oxygen output holes 42 around the crucible 5, so that each surface of the crucible 5 can be exposed to sufficient oxygen, which is conducive to forming a better oxide layer on the surface of the crucible 5 during oxygen-filled baking, further improving the quality of oxygen-filled baking of the crucible 5, and further improving the wettability of the crucible 5.

[0057] In this embodiment, a plurality of crucibles 5 are sequentially distributed in the accommodation space along the first direction X.

[0058] In this embodiment, the spiral air distribution pipe is formed by extending in a spiral shape in the first direction X while maintaining a preset interval.

[0059] See also Figure 8 The utility model also provides a baking device, which includes the oxygenation mechanism 100 of any one of the above items, and also includes an oxygen supply mechanism 200 and a heating furnace 300. The heating furnace 300 has a furnace chamber 301. The oxygenation mechanism 100 is arranged in the furnace chamber 301. The oxygen supply mechanism 200 is connected to the first end and communicates with the air intake pipe 31 through the oxygen input port 32.

[0060] The oxygen supply mechanism 200 delivers oxygen into the air intake pipe 31 through the oxygen input port, and the air intake pipe 31 then delivers oxygen into the air distribution pipe 41, and the air distribution pipe 41 then delivers oxygen to multiple areas in the container 1 through multiple oxygen output holes 42 to improve the uniformity of the distribution of oxygen concentration in the container 1, so that when the oxygenation mechanism 100 is heated by the heating furnace 300 to oxygenate and bake the multiple crucibles 5 in the container 1, the multiple crucibles 5 can all be exposed to sufficient oxygen for reaction, so that the surfaces of the multiple crucibles 5 can form an oxide layer well, thereby improving the oxygenation and baking quality of the crucibles 5, improving the wettability of the crucible 5, and being beneficial to improving the single crystal crystallization rate.

[0061] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principle of the present invention. These improvements and substitutions should also be regarded as the protection scope of the present invention.

Claims

1. An oxygenation mechanism having a first direction, characterized in that: include: A container, wherein the container has a receiving cavity extending along the first direction and used to receive a plurality of crucibles, and one end of the container in the first direction is open to form an opening communicating with the receiving cavity; An air intake pipe, the air intake pipe having an air intake pipeline, the air intake pipe having a first end and a second end opposite to each other in the first direction, the first end being provided with an oxygen input port connected to the air intake pipeline; An air distribution pipe is connected to the second end and is arranged in the accommodating chamber. The air distribution pipe has an air distribution pipe connected to the air inlet pipe, and the air distribution pipe is provided with a plurality of oxygen output holes connecting the air distribution pipe and the accommodating chamber.

2. The oxygenation mechanism according to claim 1, characterized in that: The air intake pipe is a straight air intake pipe.

3. The oxygenation mechanism according to claim 2, characterized in that: The air distribution pipe is a straight air distribution pipe.

4. The oxygenation mechanism according to claim 2, characterized in that: The air distribution pipe is a spiral air distribution pipe.

5. The oxygenation mechanism according to claim 4, characterized in that: An accommodation space capable of accommodating the crucible is formed inside the spiral gas distribution pipe.

6. The oxygenation mechanism according to claim 4, characterized in that: The spiral air distribution pipe is formed by extending in a spiral shape while maintaining a preset interval in the first direction.

7. The oxygenation mechanism according to any one of claims 1 to 6, characterized in that: It also includes a sealing cover, which is sealed on the opening and detachably connected to the container, and the air inlet pipe is connected to the sealing cover.

8. The oxygenation mechanism according to any one of claims 1 to 6, characterized in that: The container is made of quartz.

9. The oxygenation mechanism according to any one of claims 1 to 6, characterized in that: The material of the air inlet pipe is quartz.

10. A baking device, characterized in that: It comprises the oxygenation mechanism according to any one of claims 1 to 9, and also comprises an oxygen supply mechanism and a heating furnace, the heating furnace has a furnace, the oxygenation mechanism is arranged in the furnace, the oxygen supply mechanism is connected to the first end and communicates with the air intake pipe through the oxygen input port.

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