Drainage device
By designing a liquid discharge device including a leakproof disk, a drainage tank and a water pumping device, and using a pneumatic valve and a ventilation device to control liquid discharge, the problem of gravity discharge instability is solved, and more efficient liquid discharge and equipment maintenance is achieved.
Patent Information
- Application Number
- CN202323647035.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-29
- Publication Date
- 2024-12-31
- Estimated Expiration
- 2033-12-29
AI Technical Summary
In the prior art, the gravity liquid discharge method leads to unstable liquid discharge in semiconductor manufacturing, which easily leads to leakage-proof liquid accumulation, affecting the equipment operation and process time.
A liquid discharge device is designed, including a leakproof disk, a drainage tank, a water pumping device, a connecting pipe, a pneumatic valve and a ventilation device. By controlling the ventilation device, the connecting channel can be opened or closed, so as to achieve independent water pumping of the leakproof disk and a drainage tank. , avoid the instability of gravity discharge.
It effectively reduces the accumulation of liquid in leak-proof disks, improves liquid emission efficiency, simplifies the maintenance process, saves time and labor, and ensures the normal operation of the equipment.
Smart Images
Figure CN222268160U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of semiconductor manufacturing, in particular to a liquid discharge device. Background Art
[0002] In the semiconductor industry, equipment cleaning is a very important step. Cleaning equipment can ensure the normal operation of the equipment and improve the efficiency and quality of the process. However, during the cleaning process, liquid can easily leak into the leak-proof tray, which may lead to poor drainage effect, thus affecting the use of the entire equipment and process time.
[0003] A leak pan is a device used to collect and drain liquids, usually located at the bottom of the equipment. Its main function is to prevent liquids from leaking into other parts of the equipment while ensuring that the liquid can be effectively drained. If the leak pan does not drain well, liquids may remain in the equipment, causing the equipment to not function properly or extending the process time.
[0004] At present, the existing technology usually uses gravity drainage to discharge wastewater from the leakproof tray. The principle of this method is to use gravity to discharge wastewater from the leakproof tray. However, since the effect of gravity drainage is affected by many factors, such as the viscosity of the liquid, the drainage effect is unstable and the drainage is incomplete, which ultimately causes the semiconductor manufacturing equipment to fail to operate normally or reduce the working efficiency. Utility Model Content
[0005] In view of the above problems existing in the prior art, a liquid discharge device is now provided.
[0006] The specific technical solution is as follows: a drainage device, characterized in that the drainage device includes a leak-proof plate, a drainage box and a pumping device;
[0007] Also includes:
[0008] A communication pipe, the communication pipe comprising a water pumping interface connected to the water pumping device, a first interface connected to the anti-leakage disk, and a second interface connected to the drainage box;
[0009] A normally open pneumatic valve, disposed on the first connecting channel;
[0010] A normally closed pneumatic valve, disposed on the second connecting channel;
[0011] A ventilation device, connected to the normally open pneumatic valve and the normally closed pneumatic valve respectively;
[0012] When the ventilation device is not ventilating:
[0013] The normally open pneumatic valve is opened, the first connecting channel is opened, and the normally closed pneumatic valve is closed, the second connecting channel is closed; and
[0014] When the ventilation device is ventilating:
[0015] The normally open pneumatic valve is closed, and the first connecting channel is closed; meanwhile, the normally closed pneumatic valve is opened, and the second connecting channel is opened.
[0016] Preferably, the first connecting channel and the second connecting channel merge at a connecting node to form a pumping channel connected to the pumping device.
[0017] Preferably, the normally open pneumatic valve and the normally closed pneumatic valve are arranged on the same valve plate.
[0018] Preferably, it also includes:
[0019] A first one-way valve is provided on the first connecting passage and is located between the control device and the anti-leakage disk.
[0020] Preferably, it also includes:
[0021] A second one-way valve is arranged at the outlet of the pumping device.
[0022] Preferably, it also includes:
[0023] A pressure gauge is arranged between the outlet of the pumping device and the second one-way valve.
[0024] Preferably, the pumping device is a water pump.
[0025] The above technical solution has the following advantages or beneficial effects:
[0026] In the utility model, the control device controls the pumping device to pump out the waste water from the leak-proof tray and the drainage box. The pumping device can effectively reduce the accumulation of liquid in the leak-proof tray. The utility model has a simple structure and is easy to maintain in the later stage, saving time and labor. BRIEF DESCRIPTION OF THE DRAWINGS
[0027] The embodiments of the present invention will be described more fully with reference to the attached drawings, which are however only used for illustration and description and are not intended to limit the scope of the present invention.
[0028] Figure 1 This is a schematic diagram of the overall structure of a liquid discharge device in a preferred embodiment of the utility model;
[0029] Figure 2 The figure is a schematic diagram of the overall structure of a liquid discharge device in a preferred embodiment of the present utility model. DETAILED DESCRIPTION
[0030] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0031] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.
[0032] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments, but they are not intended to limit the present invention.
[0033] In a preferred embodiment of the present invention, a liquid discharge device is provided, wherein, Figure 1 or Figure 2 As shown, the drainage device includes a leakproof plate 1, a drainage box 2 and a pumping device 3;
[0034] Also includes:
[0035] A connecting pipe, the connecting pipe includes a water pumping interface connected to the water pumping device 3, a first interface connected to the leakproof disk 1, and a second interface connected to the drainage box 2;
[0036] A normally open pneumatic valve 41 is provided on the first connecting channel;
[0037] A normally closed pneumatic valve 42 is provided on the second connecting channel;
[0038] A ventilation device, connected to a normally open pneumatic valve 41 and a normally closed pneumatic valve 42 respectively;
[0039] When the ventilation device is not venting:
[0040] The normally open pneumatic valve 41 is opened, the first connecting channel is opened, and the normally closed pneumatic valve 42 is closed, the second connecting channel is closed; and
[0041] When the ventilator is ventilating:
[0042] The normally open pneumatic valve 41 is closed, and the first connecting channel is closed, while the normally closed pneumatic valve 42 is opened, and the second connecting channel is opened.
[0043] Specifically, in the prior art, the waste liquid in the leakproof tray 1 is treated by gravity drainage, so the waste liquid in the leakproof tray 1 cannot be discharged well, so that liquid may accumulate on the leakproof tray 1.
[0044] In the above embodiment, the drainage device includes a leak-proof tray 1, a drainage box 2 and a pumping device 3;
[0045] Connect the pumping device 3, the leak-proof plate 1 and the drainage box 2 through a connecting pipe;
[0046] The connecting pipe is provided with a water pumping interface for connecting to the water pumping device 3, a first interface for connecting to the anti-leakage disk 1, and a second interface for connecting to the drainage device;
[0047] When the ventilation device is not ventilating, the normally open pneumatic valve 41 is in an open state, so that the first connecting channel is open.
[0048] At the same time, the normally closed pneumatic valve 42 is in a closed state, thereby closing the second connecting channel.
[0049] When the ventilation device is ventilating, the normally open pneumatic valve 41 is closed, resulting in the closure of the first connecting channel.
[0050] At the same time, the normally closed pneumatic valve 42 is opened, so that the second connecting channel is opened.
[0051] Through this design, the opening and closing of the two connecting channels can be controlled according to the ventilation state of the ventilation device.
[0052] In this way, the normally open pneumatic valve 41 and the normally closed pneumatic valve 42 can be controlled by the ventilation device to accurately control the first connecting channel and the second connecting channel.
[0053] When it is necessary to extract the water on the anti-leakage tray 1, the first connecting channel between the water extraction interface and the first interface is opened. At this time, the waste liquid on the anti-leakage tray 1 is extracted by the water extraction device 3 and discharged through the first connecting channel;
[0054] At the same time, the second connection channel connecting the pumping interface and the second interface is closed, and the pumping device 3 does not extract the waste liquid in the drainage box 2;
[0055] When it is necessary to drain the water in the drainage box 2, the second connection channel between the pumping interface and the second interface is opened. At this time, the waste water in the drainage box 2 is pumped out by the pumping device 3 and discharged through the second connection channel;
[0056] At the same time, the first connection channel connecting the water extraction interface and the first interface is closed, and the water extraction device 3 does not extract the waste liquid in the leak-proof plate 1;
[0057] Furthermore, in the above embodiment, the pumping device 3 can control the leak-proof disc 1 and the drainage box 2 separately.
[0058] In a preferred embodiment of the present invention, the first connecting channel and the second connecting channel merge at a connecting node to form a pumping channel connected to the pumping device 3 .
[0059] Specifically, in the above embodiment, the first connecting channel and the second connecting channel merge at a connecting node, and after merging, a pumping channel is formed to be connected to the pumping device 3 .
[0060] In a preferred embodiment of the present invention, Figure 1 or Figure 2 As shown, the normally open pneumatic valve 41 and the normally closed pneumatic valve 42 are arranged on the same valve plate.
[0061] Specifically, in the above embodiment, the normally open pneumatic valve 41 and the normally closed pneumatic valve 42 are arranged on the same valve plate, and the valve plate is arranged between the first connecting channel and the second connecting channel;
[0062] When the valve plate is ventilated, the valve plate opens the second connecting channel to open the normally closed pneumatic valve and close the normally open pneumatic valve, thus completing the drainage process of the drainage box; vice versa.
[0063] Through the setting of a valve plate, when one of the pneumatic valves is opened, the other pneumatic valve will be closed, and vice versa.
[0064] In a preferred embodiment of the present invention, Figure 1 or Figure 2 As shown, it also includes:
[0065] The first one-way valve 5 is arranged on the first connecting channel and located between the first one-way valve 5 and the anti-leakage disk 1 .
[0066] Specifically, in the above embodiment, a first one-way valve 5 is further provided. The first one-way valve 5 is provided on the first connecting channel and is located between the first one-way valve 5 and the anti-leakage disc 1 .
[0067] Its main function is to prevent waste water from flowing back to the anti-leakage disk 1 from the first connecting channel.
[0068] By using the first one-way valve 5, the backflow of waste water can be effectively prevented, thereby ensuring that the waste water drawn out from the anti-leakage tray 1 will not flow back into the anti-leakage tray 1;
[0069] Meanwhile, the first one-way valve 5 will not affect the normal waste liquid treatment process of the leak-proof disk 1 .
[0070] In a preferred embodiment of the present invention, Figure 1 or Figure 2 As shown, it also includes:
[0071] The second one-way valve 6 is arranged at the outlet of the pumping device 3 .
[0072] Specifically, in the above embodiment, the second one-way valve 6 is arranged at the outlet of the pumping device 3, and its function is to prevent the waste water from flowing back to the pumping device 3. The second one-way valve 6 only allows liquid flowing in one direction to pass through, and when the pumping device 3 starts to work, the second one-way valve 6 opens, allowing the waste water to flow out of the pumping device 3.
[0073] The second one-way valve 6 does not allow the pumped liquid to flow back to the drainage box 2 or the leak-proof disk 1 to prevent the waste water from flowing back to the pumping device 3.
[0074] By providing the second one-way valve 6 at the outlet of the water pumping device 3 , the preferred embodiment of the utility model can effectively prevent the waste water from flowing back to the water pumping device 3 , thereby improving the working efficiency and stability of the water pumping device 3 .
[0075] In a preferred embodiment of the present invention, Figure 1 or Figure 2 As shown, it also includes:
[0076] The pressure gauge 7 is arranged between the outlet of the pumping device 3 and the second one-way valve 6 .
[0077] Specifically, in the above embodiment, the pressure gauge 7 is installed between the outlet of the pumping device 3 and the second one-way valve 6. It can be a digital pressure gauge 7 or a pointer pressure gauge 7.
[0078] Furthermore, by using the pressure gauge 7 to detect the outlet pressure of the pumping device 3, it is convenient to determine whether there is foreign matter in the drainage box 2. In this way, measures can be taken in time to clean up foreign matter, avoid clogging and damage to the pumping device 3, and improve the efficiency and reliability of the drainage system.
[0079] When the pumping device 3 starts working, water will be pumped out of the drainage box 2 and pass through the pressure gauge 7. If there are foreign objects in the drainage box 2, such as plastic bags, paper, etc., these foreign objects will hinder the flow of water, causing the outlet pressure of the pumping device 3 to increase. When the pressure of the pressure gauge 7 increases, the pressure gauge 7 will feedback an alarm message to the outside world to prompt the staff to check the drainage box or the first connecting channel or the second connecting channel.
[0080] In a preferred embodiment of the present invention, Figure 2 As shown, the water pumping device 3 is a water pump.
[0081] Specifically, in actual use, the pumping device 3 can be replaced by other devices for extracting solution.
[0082] In summary, when the leak-proof tray 1 needs to be treated for waste liquid, the first connection channel between the pumping interface and the first interface is controlled to be opened, and the second connection channel between the pumping interface and the second interface is closed. In this way, the pumping device 3 can extract waste water from the leak-proof tray 1.
[0083] When the waste water in the drainage box 2 needs to be treated, the second connection channel is controlled to be opened and the first connection channel is closed. In this way, the pumping device 3 can extract the waste water in the drainage box 2.
[0084] In short, when the wastewater in the anti-leakage tray 1 needs to be processed, the first connecting channel is used to connect the pumping device 3 to the anti-leakage tray 1 to extract the wastewater;
[0085] When the wastewater in the drainage box 2 needs to be processed, the pumping device 3 is connected to the drainage box 2 using the second connecting channel to extract the wastewater.
[0086] The above are only preferred embodiments of the present invention, and do not limit the implementation mode and protection scope of the present invention. Those skilled in the art should be aware that all solutions obtained by equivalent substitutions and obvious changes made using the description and illustrations of the present invention should be included in the protection scope of the present invention.
Claims
1. A liquid discharge device, characterized in that: The drainage device includes a leak-proof tray, a drainage box and a pumping device; Also includes: A communication pipe, the communication pipe comprising a water pumping interface connected to the water pumping device, a first interface connected to the anti-leakage disk, and a second interface connected to the drainage box; A normally open pneumatic valve, arranged on a first connecting channel, wherein the first connecting channel is located between the water pumping interface and the first interface; A normally closed pneumatic valve, disposed on a second connecting channel, wherein the second connecting channel is located between the water pumping interface and the second interface; A ventilation device, connected to the normally open pneumatic valve and the normally closed pneumatic valve respectively; When the ventilation device is not ventilating: The normally open pneumatic valve is opened, the first connecting channel is opened, and the normally closed pneumatic valve is closed, the second connecting channel is closed; and When the ventilation device is ventilating: The normally open pneumatic valve is closed, and the first connecting channel is closed; meanwhile, the normally closed pneumatic valve is opened, and the second connecting channel is opened.
2. The liquid discharge device according to claim 1, characterized in that: The first connecting channel and the second connecting channel merge at a connecting node to form a pumping channel connected to the pumping device.
3. The liquid discharge device according to claim 1, characterized in that: The normally open pneumatic valve and the normally closed pneumatic valve are arranged on the same valve plate.
4. The liquid discharge device according to claim 1, characterized in that: Also includes: A first one-way valve is provided on the first connecting channel and is located between the normally open pneumatic valve and the anti-leakage disk.
5. The liquid discharge device according to claim 1, characterized in that: Also includes: A second one-way valve is arranged at the outlet of the pumping device.
6. The liquid discharge device according to claim 5, characterized in that: Also includes: A pressure gauge is arranged between the outlet of the pumping device and the second one-way valve.
7. The liquid discharge device according to claim 1, characterized in that: The water pumping device is a water pump.