Plunger three-dimensional magnetic clamp
By designing a plunger three-dimensional magnetic fixture with a simple structure and low cost, using components such as magnetic adsorption and rotating paddles, the problem of plunger fixing during magnetron sputtering coating is solved, and the stable fixing of plunger is achieved and Three-dimensional movement avoids clamping marks.
Patent Information
- Application Number
- CN202420678669.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-03
- Publication Date
- 2024-12-31
- Estimated Expiration
- 2034-04-03
AI Technical Summary
During the magnetron sputtering coating process, the plunger cannot be effectively fixed, resulting in problems with clamping marks.
Design a plunger three-dimensional magnetic clamp with simple structure and low cost. Use magnetic adsorption to fix the plunger on the clamp, and realize three-dimensional motion through components such as rotating paddles, fixing the clamp top plate, bottom plate, support column and magnetic clamp unit.
It effectively solves the problem of clamping marks, realizes stable fixation and three-dimensional movement of the plunger, simplifies structural design and reduces costs.
Smart Images

Figure CN222270001U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to a clamp used for magnetron coating equipment, in particular to a plunger three-dimensional magnetic clamp. Background Art
[0002] During the magnetron sputtering coating process, there is a special plunger, and there must be no clamping marks under the product shoulder, so a special magnetic clamp is used to fix it. Utility Model Content
[0003] The utility model aims to overcome the above technical deficiencies and provide a plunger three-dimensional magnetic clamp with a simple structure and low cost. The plunger can be fixed on the clamp by magnetic adsorption, and the plunger can move three-dimensionally along with the coating platform, thus solving the problem of clamping marks.
[0004] The technical solution of the utility model is implemented as follows: a plunger three-dimensional magnetic clamp comprises a rotating paddle (1-3), a clamp top plate (1-4), a clamp bottom plate (1-10), a support column (1-9), a magnetic clamp unit (1-6), a clamp rod (2-3), a rotating frame support rod (2-6) and a rotating frame base (2-4);
[0005] The clamp top plate (1-4) and the clamp bottom plate (1-10) are connected by a support column (1-9), and the magnetic clamp unit (1-6) is fixed between the clamp top plate (1-4) and the clamp bottom plate (1-10) by a top plate fixing nut (1-5), and a plunger product (2-5) is placed in the magnetic clamp unit (1-6);
[0006] One end of the paddle base (1-1) is fixed to the fixture bottom plate (1-10) by a bottom plate fixing plate (1-8) and a bottom plate screw (1-7); one end of the rotating paddle (1-3) is fixed to the paddle base (1-1) by a paddle fixing column (1-2); the other end of the paddle base (1-1) is connected to a rotating frame support rod (2-6); and the rotating frame support rod (2-6) is fixed to the rotating frame base (2-4).
[0007] Furthermore, the clamp top plate (1-4) and the clamp bottom plate (1-10) are mounted on the clamp rod (2-3) through a central hole (1-11), and a plurality of clamp rod sleeves (2-2) are mounted on the clamp rod to fix each layer of the clamp body (2-1) at intervals.
[0008] Compared with the prior art, the beneficial effects of the utility model are: the utility model has a simple structure, a clever design, and can effectively fix the product plunger, thereby solving the problem of clamping marks caused by the previous clamping method. BRIEF DESCRIPTION OF THE DRAWINGS
[0009] In order to more clearly illustrate the technical solution of the implementation mode of the utility model, the drawings required for use in the implementation mode will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.
[0010] Figure 1 It is a top view of the main structure of the plunger three-dimensional magnetic fixture.
[0011] Figure 2 It is a bottom view of the main structure of the plunger three-dimensional magnetic fixture.
[0012] Figure 3 It is a schematic diagram of the structure of the fixture body on the turntable.
[0013] In the figure: 1-1-pick base; 1-2-pick fixing column; 1-3-rotating paddle; 1-4-clamp top plate; 1-5-top plate fixing nut; 1-6-magnetic clamp unit; 1-7-bottom plate screw; 1-8-bottom plate fixing plate; 1-9-support column; 1-10-clamp bottom plate; 1-11-center hole; 2-1-clamp body; 2-2-clamp rod sleeve; 2-3-clamp rod; 2-4-turntable base; 2-5-plunger product; 2-6-turntable support rod. DETAILED DESCRIPTION
[0014] In order to make the purpose, technical solution and advantages of the implementation of the utility model clearer, the technical solution in the implementation of the utility model will be clearly and completely described below in conjunction with the drawings in the implementation of the utility model. Obviously, the described implementation is a part of the implementation of the utility model, not all of the implementations. Based on the implementation of the utility model, all other implementations obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0015] like Figure 1-3 As shown, a plunger three-dimensional magnetic clamp includes a rotating paddle 1-3, a clamp top plate 1-4, a clamp bottom plate 1-10, a support column 1-9, a magnetic clamp unit 1-6, a clamp rod 2-3, a rotating frame support rod 2-6 and a rotating frame base 2-4;
[0016] The clamp top plate 1-4 and the clamp bottom plate 1-10 are connected by a support column 1-9, and the magnetic clamp unit 1-6 is fixed between the clamp top plate 1-4 and the clamp bottom plate 1-10 by a top plate fixing nut 1-5, and the plunger product 2-5 is placed in the magnetic clamp unit 1-6;
[0017] One end of the paddle base 1-1 is fixed to the fixture bottom plate 1-10 by the bottom plate fixing plate 1-8 and the bottom plate screw 1-7, one end of the rotating paddle 1-3 is fixed to the paddle base 1-1 through the paddle fixing column 1-2, and the other end of the paddle base 1-1 is connected to the turntable support rod 2-6, and the turntable support rod 2-6 is fixed to the turntable base 2-4.
[0018] The clamp top plate 1-4 and the clamp bottom plate 1-10 are mounted on the clamp rod 2-3 through a center hole 1-11, and a plurality of clamp rod sleeves 2-2 are mounted on the clamp rod to fix each layer of the clamp body 2-1 at intervals.
[0019] The method of using the utility model is as follows: the clamp body 2-1 is fixed on the clamp rod 2-3, and each layer of the clamp body 2-1 is supported and spaced by the clamp rod sleeve 2-2. The clamp rod 2-3 rotates and accompanies the revolution of the turntable base 2-4. At this time, the turntable support rod 2-6 fixed to the turntable base 2-4 will drive the rotating paddle 1-3 to realize the rotation of the plunger product 2-5 in the clamp body 2-1.
[0020] The above description is only the preferred implementation of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.
Claims
1. Plunger three-dimensional magnetic fixture, characterized in that, It includes a rotating paddle (1-3), a fixture top plate (1-4), a fixture bottom plate (1-10), a support column (1-9), a magnetic fixture unit (1-6), a fixture rod (2-3), a rotating frame support rod (2-6) and a rotating frame base (2-4); The clamp top plate (1-4) and the clamp bottom plate (1-10) are connected by a support column (1-9), and the magnetic clamp unit (1-6) is fixed between the clamp top plate (1-4) and the clamp bottom plate (1-10) by a top plate fixing nut (1-5), and a plunger product (2-5) is placed in the magnetic clamp unit (1-6); One end of the paddle base (1-1) is fixed to the fixture bottom plate (1-10) by a bottom plate fixing plate (1-8) and a bottom plate screw (1-7); one end of the rotating paddle (1-3) is fixed to the paddle base (1-1) by a paddle fixing column (1-2); the other end of the paddle base (1-1) is connected to a rotating frame support rod (2-6); and the rotating frame support rod (2-6) is fixed to the rotating frame base (2-4).
2. The plunger three-dimensional magnetic fixture according to claim 1, characterized in that: The clamp top plate (1-4) and the clamp bottom plate (1-10) are mounted on the clamp rod (2-3) through a central hole (1-11), and a plurality of clamp rod sleeves (2-2) are mounted on the clamp rod to fix each layer of the clamp body (2-1) at intervals.