Electric two-dimensional material transfer platform equipment

Abstract

The utility model discloses electric two-dimensional material transfer platform equipment, which is used for realizing the transfer of a two-dimensional material, and comprises an objective table for fixing a substrate; the moving table is located above the objective table, the moving table is parallel to the objective table, and a two-dimensional material to be transferred is arranged on the moving table; the displacement module is connected with at least one side of the movable table, and the displacement module can move up and down along the stand column; the imaging module is positioned above the moving table and is used for observing the moving table and the objective table; the display module is connected with the imaging module and used for displaying signals of the imaging module; the control module is respectively connected with the objective table and the displacement module; wherein the control module can control the displacement module to drive the moving table to be close to the objective table, so that the two-dimensional material to be transferred on the moving table is transferred to the substrate. And the displacement module is electrically controlled by adopting the control module, so that the moving precision and stability are remarkably improved, and the two-dimensional material transfer efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of materials, and more specifically, to an electrically powered two-dimensional material transfer platform device. Background Art

[0002] Two-dimensional materials refer to materials in which electrons can only move freely in two dimensions at the nanoscale (planar motion), such as nanofilms, superlattices, and quantum wells. Two-dimensional materials were proposed along with the successful separation of a single atomic layer of graphite material - graphene.

[0003] With the discovery of graphene, the research of two-dimensional layered materials has been completely changed. In addition to graphene, semiconductor transition metal dichalcogenides (few-layer molybdenum disulfide, TMDCs) have also received great attention in the electronics community. Early researchers believed that two-dimensional materials are potential substitutes for silicon, but growing large-area, high-quality two-dimensional materials has become a difficult problem for scientists. Therefore, growing high-quality two-dimensional materials on a substrate and cleanly transferring them to another target substrate has become a new research direction.

[0004] Since 2D materials have no dangling bonds on their surfaces, they can be stacked in a pre-designed manner to form van der Waals heterojunctions, supercrystals, or multi-heterojunctions, thereby creating electronic devices with greatly improved performance and unique functions, such as "van der Waals heterostructures," which are structures made of different 2D materials stacked on top of each other and bonded by van der Waals forces. The field of "twisted electronics" that has emerged from this new structure has created unprecedented opportunities for science, but this is largely due to the ability to transfer 2D materials between substrates and allow easy stacking and twisting of layers with mismatched lattices. Therefore, it is imperative to achieve pollution-free, damage-free, high-precision, and easy-to-operate 2D material transfer.

[0005] The existing transfer platform requires manual operation and has insufficient precision, which has seriously affected the quality and efficiency of material transfer. A new transfer platform device is urgently needed to improve this problem. Utility Model Content

[0006] In view of the above problems, the purpose of the utility model is to provide an electrically powered two-dimensional material transfer platform device, whose displacement module can be electrically controlled by a control module, and the mobile platform is driven to move by the displacement module, which significantly improves the accuracy and stability of the movement and improves the efficiency of the two-dimensional material transfer.

[0007] The utility model provides an electrically powered two-dimensional material transfer platform device, characterized in that it includes: a stage for fixing a substrate; a moving stage located above the stage, the moving stage being parallel to the stage, and the moving stage having a two-dimensional material to be transferred; a displacement module connected to at least one side of the moving stage, the displacement module being movable up and down along a column; an imaging module located above the moving stage and being used to observe the moving stage and the stage; a display module connected to the imaging module, the display module being used to display the signal of the imaging module; a control module, respectively connected to the stage and the displacement module; wherein the control module can control the displacement module to drive the moving stage to approach the stage, so as to transfer the two-dimensional material to be transferred on the moving stage to the substrate.

[0008] Preferably, the movable platform includes a bracket and a fixing bolt, the two-dimensional material to be transferred is located on a glass slide, the fixing bolt can fix the glass slide on the bracket, and the bracket has an observation port on a side facing the stage to expose the two-dimensional material to be transferred on the glass slide.

[0009] Preferably, the stage comprises: a base having an adjustment knob; a temperature control module located on the base and used to adjust the temperature of the substrate on the stage; and an adsorption module located on the temperature control module and used to adsorb the substrate; wherein the position of the base can be adjusted by the adjustment knob of the base so that the substrate on the stage is aligned with the glass slide on the movable stage.

[0010] Preferably, the support further comprises a through hole, and the imaging module can generate an image of the positional relationship between the two-dimensional material to be transferred and the substrate through the through hole.

[0011] Preferably, the column is perpendicular to the plane where the stage is located, and a first adjusting knob and a second adjusting knob are provided on the column, and both the first adjusting knob and the second adjusting knob can adjust the initial height of the displacement module on the column, and the adjustment accuracy of the first adjusting knob is less than the adjustment accuracy of the second adjusting knob.

[0012] Preferably, the adsorption module includes: an adsorption hole located on the carrying surface of the stage, and a vacuum pump, one end of the vacuum pump is connected to the adsorption hole, and the other end of the vacuum pump is connected to the control module; wherein the control module can control the operation of the vacuum pump to adsorb the substrate on the carrying surface of the stage through the adsorption hole.

[0013] Preferably, a scale is also provided on the column, and the height of the displacement module is fed back through the scale.

[0014] Preferably, the stroke of the displacement module is 0-25 mm, and the minimum stroke accuracy of the displacement module is 0.5 μm.

[0015] Preferably, the two-dimensional material transfer platform device further comprises a shockproof base, and the loading platform, the moving platform, the column, the displacement module and the imaging module are all located on the shockproof base.

[0016] The embodiments of the utility model have the following advantages or beneficial effects: the utility model provides an electrically powered two-dimensional material transfer platform device which adopts a design in which a control module controls the movement of a displacement module, thereby significantly improving the movement accuracy, improving the stability and success rate of two-dimensional material transfer, and reducing the impact of manual operation on two-dimensional material transfer. The electrically powered two-dimensional material transfer platform device has a simple structure and is easy to operate. The efficiency of two-dimensional material transfer can be significantly improved by using the device. The same parameters can be used for the same material to achieve batch acquisition, which can save the operator's energy and time and has strong practicality. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The above and other purposes, features and advantages of the present invention will become more apparent through the following description of the embodiments of the present invention with reference to the accompanying drawings, in which:

[0018] Figure 1 A schematic diagram showing a first embodiment of the electric two-dimensional material transfer platform device of the utility model is shown;

[0019] Figure 2 A schematic diagram of a second embodiment of the electric two-dimensional material transfer platform device of the utility model is shown. DETAILED DESCRIPTION

[0020] Various embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. In each of the accompanying drawings, the same components are represented by the same or similar reference numerals. For the sake of clarity, the various parts in the accompanying drawings are not drawn to scale.

[0021] The specific implementation of the utility model is further described in detail below in conjunction with the drawings and embodiments.

[0022] Figure 1A schematic diagram of the first embodiment of the utility model electric two-dimensional material transfer platform device is shown; the two-dimensional material transfer platform device includes: a stage 110, a moving stage 120, a column 130, a displacement module 140, an imaging module 150, a control module 160 and a display module 170, wherein a substrate 210 is placed on the stage 110, the stage 110 can fix the substrate 210 on the stage 110, a moving stage 120 is arranged above the stage 110, the moving stage 120 is connected to the column 130, for example, through the displacement module 140, the column 130 is, for example, perpendicular to the plane where the stage 110 is located, and the displacement module 140 can drive the moving stage 120 to move up and down along the column 130 to approach or move away from the stage 110. The movable platform 120, for example, includes a U-shaped bracket 121 and a fixing bolt 122. The bracket 121 is provided with an observation port 123 on the side facing the stage 110. The two-dimensional material 220 to be transferred is adhered to the bottom of the glass slide 230 (the side facing the stage 110) by PDMS (polydimethylsiloxane), for example. The left and right sides of the glass slide 230 are respectively fixed to the bracket 121 by two fixing bolts 122. Furthermore, the bracket 121 of the movable platform 120 is also provided with a through hole 124 at a position corresponding to the two-dimensional material 220 to be transferred. The imaging module 150 located above the movable platform 120 can observe the two-dimensional material 220 to be transferred on the glass slide 230 and the alignment of the two-dimensional material 220 to be transferred and the substrate 210 through the through hole 124. The imaging module 150 is connected to the display module 170 (not shown in the figure), and its imaging data is displayed through the display module 170. The control module 160 is connected to the displacement module 140 via a connecting line. The displacement module 140 is an electric device. The displacement module 140 can move up and down along the column 130 under the control of the control module 160 .

[0023] When it is necessary to transfer the two-dimensional material 220 to be transferred under the glass slide 230 to the substrate 210, first check the alignment of the two-dimensional material 220 to be transferred and the substrate 210 through the display module 170, align the two, and then control the displacement module 140 to move downward, drive the moving stage 120 to move downward, until the two-dimensional material 220 to be transferred located on the moving stage 120 contacts the substrate 210 through the observation port. The stage 110 can, for example, heat the substrate 210 thereon. When the two-dimensional material 220 to be transferred contacts the substrate 210, the stage 110 heats the substrate 210 to a preset temperature and maintains it for a preset time. At least part of the two-dimensional material 220 to be transferred will be transferred to the substrate 210. At this time, the control module 160 controls the displacement module 140 to move upward, separates the moving stage 120 from the stage 110, and completes the transfer of the two-dimensional material 220.

[0024] Figure 2A schematic diagram of a second embodiment of the electric two-dimensional material transfer platform device of the utility model is shown. The overall layout of the second embodiment is similar to that of the first embodiment, except that the second embodiment shows more details of the stage 110, the column 130 and the control module 160, and omits the substrate 210. Since the moving table 120 in the second embodiment is similar to the moving table in the first embodiment, they will not be described here in detail. The following will focus on the differences between the second embodiment and the first embodiment.

[0025] The stage 110 in the electric two-dimensional material transfer platform device of the second embodiment includes, for example, a base, a temperature adjustment module 113, and an adsorption module 114, wherein an X-direction adjustment knob 111 and a Y-direction adjustment knob 112 are provided on the base, wherein the X-direction adjustment knob 111 can, for example, adjust the bearing surface of the stage 110 to move left and right, and the Y-direction adjustment knob 112 can, for example, adjust the bearing surface of the stage 110 to move forward and backward in a direction perpendicular to the paper surface, and the position of the bearing surface of the stage 110 can be adjusted by the X-direction adjustment knob 111 and the Y-direction adjustment knob 112, so as to align the substrate on the bearing surface with the two-dimensional material 220 to be transferred. The X-direction adjustment knob 111 and the Y-direction adjustment knob 112 are, for example, manual adjustment knobs, and the operator can observe the alignment of the substrate and the two-dimensional material 220 to be transferred through the display module 170 for manual adjustment. Of course, it can also be optimized to electric adjustment, which is connected to the control module 160, and the control module 160 automatically adjusts the adjustment knob according to the image to complete the alignment work.

[0026] The temperature control module 113 is, for example, located on a base, and is used to heat and keep the substrate warm to provide the temperature required for the transfer of two-dimensional materials. The temperature control module 113 is, for example, connected to the control module 160 via a wire. The control module 160 also has a liquid crystal display 162, and the liquid crystal display 162 can display parameters such as the set temperature and current temperature of the temperature control module 113. Furthermore, since the material transfer may take a certain amount of time, the control module 160 can also include a timing unit, which starts when the current temperature of the temperature control module 113 reaches the set temperature, such as a 30-second countdown. The LCD display 162 can also display the countdown. The end of the timing indicates that the transfer is completed and the glass slide can be separated from the substrate.

[0027] The adsorption module 114 is, for example, located on the temperature control module 113. The adsorption module 114 uses vacuum adsorption to fix the substrate thereon to reduce damage to the substrate. The adsorption module 114 is provided with adsorption holes 115. The adsorption holes 115 are connected to the vacuum pump 116 through a pipeline. The vacuum pump 116 is connected to the control module 160. The switch 161 on the control module 160 controls whether the vacuum pump 116 is working. After the material transfer is completed, the vacuum pump 116 is turned off, and the substrate can be removed from the adsorption module 114.

[0028] For example, a coarse adjustment knob 131 and a fine adjustment knob 132 are further provided on the column 130. The height of the displacement module 140 on the column 130 can be manually adjusted by the two adjustment knobs on the column 130, that is, the initial height of the displacement module 140 on the column 130 is adjusted. The displacement module 140 is connected to the control module 160. The control module 160 also includes a computer. The control module 160 is connected to the display module 170. The height of the displacement module 140 on the column 130 can be electrically adjusted by the control module 160. Specifically, the stroke of the displacement module 140 is 0 to 25 mm, and its minimum stroke accuracy is, for example, 0.5 μm. The displacement module 140 can be given an appropriate initial height by manual adjustment first, and then the control module 160 controls the displacement module 140 to move, so as to improve the accuracy and stability. Furthermore, a ruler may be provided on the column 130 , through which the current height of the displacement module 140 can be directly read, which is more convenient when manually adjusting the height of the displacement module 140 .

[0029] Of course, two columns and displacement modules may be symmetrically arranged on both sides of the moving platform 120, or more columns and displacement modules may be arranged, and each module may move synchronously, so that the lifting and lowering of the moving platform 120 may be more stable.

[0030] In order to reduce the impact of vibration on the transfer of two-dimensional materials, the above-mentioned components can be arranged on a shock-proof base 300, which is, for example, an optical shock-proof base, which can significantly reduce the impact of external vibration on the transfer of two-dimensional materials, reduce environmental jitter under precision operation, further improve the stability and reliability of the equipment, and improve the success rate of material transfer.

[0031] The specific steps of transferring using the electric two-dimensional material transfer platform device of the second embodiment are given below:

[0032] The peeled two-dimensional material 220 to be transferred is first adhered to the PDMS, and then the PDMS with the sample is adhered to the transparent glass slide 230, with the side with the two-dimensional material 220 to be transferred facing downward, and the glass slide 230 is fixed to the bracket 121 by the fixing screws 122 on both sides of the observation port 123 of the bracket 121.

[0033] The substrate is placed on the stage 110 and covers the adsorption holes 115 of the adsorption module 114 , and the vacuum pump 116 is turned on by the switch 161 on the control module 160 to draw a vacuum to fix the substrate.

[0034] The image of the imaging module 150 is observed through the display module 170, and the X-direction adjustment knob 111 and the Y-direction adjustment knob 112 on the base of the stage 110 are adjusted to align the two-dimensional material 220 to be transferred with the substrate.

[0035] The initial height of the movable stage 120 is adjusted by manually adjusting the coarse adjustment knob 131 and the fine adjustment knob 132 on the column 130 so that the movable stage 120 is close to the stage 110 and the two-dimensional material 220 to be transferred and the substrate are as close as possible but not in contact.

[0036] The control module 160 controls the displacement module 140 to move with high precision. Specifically, for example, the displacement module 140 is controlled to move in single steps for several times, and the distance of each single step is, for example, 0.5 μm, so that the two-dimensional material 220 to be transferred fits with the substrate.

[0037] The control module 160 controls the temperature adjustment module 113 to rise to about 80 degrees Celsius and then shut down, waiting for 30 seconds for the two-dimensional material 220 to be transferred to the substrate.

[0038] Finally, the control module 160 controls the displacement module 140 to rise, lifts the moving stage 120, and then turns off the vacuum pump 116, so that the substrate and the two-dimensional material transferred thereon can be taken out.

[0039] Of course, the step of manually adjusting the knob on the column 130 can be omitted. The displacement module can be completely controlled by the control module to move. The two-dimensional material 220 to be transferred can also be aligned with the substrate by adjusting the position of the glass slide 230. The specific method will not be repeated here.

[0040] The embodiments of the utility model have the following advantages or beneficial effects: the utility model provides an electrically powered two-dimensional material transfer platform device which adopts a design in which a control module controls the movement of a displacement module, thereby significantly improving the movement accuracy, improving the stability and success rate of two-dimensional material transfer, and reducing the impact of manual operation on two-dimensional material transfer. The electrically powered two-dimensional material transfer platform device has a simple structure and is easy to operate. The efficiency of two-dimensional material transfer can be significantly improved by using the device. The same parameters can be used for the same material to achieve batch acquisition, which can save the operator's energy and time and has strong practicality.

[0041] According to the embodiments of the present invention as described above, in order to highlight the details of the technical solution of the present invention, the proportions of the components are not drawn according to the true proportions. The proportions and sizes shown in the drawings should not limit the substantive technical solution of the present invention. These embodiments do not describe all the details in detail, nor do they limit the present invention to the specific embodiments described. Obviously, many modifications and changes can be made based on the above description. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present invention, so that technicians in the relevant technical field can make good use of the present invention and the modified use based on the present invention. The present invention is only limited by the claims and their full scope and equivalents.

Claims

1. An electrically powered two-dimensional material transfer platform device, characterized in that: include: A stage for fixing the substrate; A moving platform, located above the stage, the moving platform is parallel to the stage, and the moving platform has a two-dimensional material to be transferred; A displacement module connected to at least one side of the moving platform, and the displacement module can move up and down along the column; An imaging module, located above the mobile stage, for observing the mobile stage and the object stage; A display module, connected to the imaging module, and used to display the signal of the imaging module; A control module, connected to the stage and the displacement module respectively; The control module may control the displacement module to drive the moving stage to approach the loading stage, so as to transfer the two-dimensional material to be transferred on the moving stage to the substrate. The moving stage includes a bracket and a fixing bolt, the two-dimensional material to be transferred is located on a glass slide, the fixing bolt can fix the glass slide on the bracket, the bracket has an observation port on a side facing the stage, so that the two-dimensional material to be transferred on the glass slide is exposed, the bracket also includes a through hole, and the imaging module can generate an image of the positional relationship between the two-dimensional material to be transferred and the substrate through the through hole. The stage comprises: a base having an adjustment knob; a temperature control module located on the base and used to adjust the temperature of the substrate on the stage; and an adsorption module located on the temperature control module and used to adsorb the substrate; wherein the position of the base can be adjusted by the adjustment knob of the base so that the substrate on the stage is aligned with the slide on the movable stage.

2. The device according to claim 1, characterized in that The column is perpendicular to the plane where the stage is located. A first adjusting knob and a second adjusting knob are provided on the column. Both the first adjusting knob and the second adjusting knob can adjust the initial height of the displacement module on the column. The adjustment accuracy of the first adjusting knob is less than the adjustment accuracy of the second adjusting knob.

3. The device according to claim 1, characterized in that The adsorption module comprises: The adsorption hole is located on the carrying surface of the stage. A vacuum pump, one end of which is connected to the adsorption hole, and the other end of which is connected to the control module; The control module can control the vacuum pump to work, so as to adsorb the substrate onto the carrying surface of the stage through the adsorption holes.

4. The device according to claim 2, characterized in that The column is also provided with a scale, through which the height of the displacement module is fed back.

5. The device according to claim 2, characterized in that The stroke of the displacement module is 0-25 mm, and the minimum stroke accuracy of the displacement module is 0.5 μm.

6. The device according to claim 1, characterized in that It also includes an anti-vibration base, and the object carrier, the moving platform, the column, the displacement module and the imaging module are all located on the anti-vibration base.

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