Vacuum coating evaporation source with anti-splashing function

Abstract

The utility model relates to a vacuum coating evaporation source with an anti-splashing function, which comprises an evaporation crucible and a heating source, and is characterized in that an anti-splashing device for preventing liquid evaporation raw materials from splashing is arranged in the evaporation crucible, and the anti-splashing device is horizontally arranged in the liquid evaporation raw materials. By arranging the splash-proof device which is horizontally arranged in the liquid evaporation raw material, bubbles generated during boiling can be intervened, so that the occurrence of a splash field is greatly reduced, the heating power of a heating source is increased, the film forming speed of vacuum coating equipment is improved, and the uniformity of formed films is kept. The vacuum coating evaporation source with the splash-proof function is simple in structure, long in service life, good in splash-proof effect and wide in application range.

Description

Technical Field

[0001] The utility model relates to an evaporation source of a vacuum coating machine, in particular to a vacuum coating evaporation source with an anti-splashing function. Background Art

[0002] Vacuum evaporation is widely used to plate various metal, alloy and compound films, and is applied to industrial fields such as optics, electronics, semiconductors, solar energy utilization, light industry and decoration. Vapor deposition is an earlier and more widely used vapor deposition technology, with the advantages of simple film forming method, high film purity and density, unique film structure and performance, etc. The materials used for vacuum evaporation are called evaporation materials.

[0003] Generally, the evaporation raw material source is placed in the evaporation source crucible. After being heated by the heating source, the evaporation raw material vaporizes and deposits on the surface of the substrate. The uniformity of evaporation is the key factor in determining whether the coating thickness is uniform. The power of the heating source during evaporation determines the speed of coating. Generally, in order to ensure the efficiency of vacuum coating, the heating source power is increased to speed up the film formation.

[0004] Evaporation materials, such as aluminum or copper, will melt from solid to liquid as the heating temperature rises, and then as the power of the heating source is further increased, the liquid evaporation material will quickly evaporate into gas on the surface to achieve the purpose of evaporation; however, as the power of the heating source increases, the liquid evaporation material may boil locally, and part of the liquid evaporation material may splash. If the splashed liquid falls on the workpiece to be evaporated, the film layer of the workpiece will be damaged. Even if the splashed liquid does not fall on the workpiece to be evaporated, it will cause uneven gas evaporation source, ultimately leading to uneven film formation and a decrease in film formation speed.

[0005] Therefore, it is particularly necessary to develop a vacuum coating evaporation source that solves the above problems. Utility Model Content

[0006] The utility model aims to provide a vacuum coating evaporation source with an anti-splashing function, comprising an evaporation crucible and a heating source, characterized in that an anti-splashing device is arranged in the evaporation crucible to prevent the liquid evaporation raw material from splashing, and the anti-splashing device is horizontally placed inside the liquid evaporation raw material.

[0007] Furthermore, the anti-splash device is a thin sheet-like wire mesh structure, and the thickness of the wire mesh is relatively thin, for example, 0.2mm-1mm.

[0008] Furthermore, the lamellar wire mesh structure is one layer or multiple layers.

[0009] Furthermore, each layer of the thin sheet-like wire mesh structure is composed of one piece of wire mesh or a combination of multiple pieces of wire mesh.

[0010] Furthermore, at least one layer of thin sheet-like wire mesh structure is arranged below the liquid surface of the liquid evaporation raw material and close to the upper surface of the liquid, so as to destroy or inhibit bubbles during the boiling and rising process.

[0011] Preferably, when the thin sheet wire mesh structure is two or more layers, at least one layer of the thin sheet wire mesh structure is arranged below the liquid surface of the liquid evaporation raw material and near the bottom of the liquid. In the early stage of boiling, bubbles are generated due to boiling at the bottom of the liquid evaporation raw material. Arranging the thin sheet wire mesh structure near the bottom of the liquid evaporation raw material can make the bottom of the liquid evaporation raw material heated more evenly and control the boiling phenomenon in the early stage. Even if some bubbles appear, the thin sheet wire mesh structure will have a cutting, homogenizing and inhibitory effect on the bubbles.

[0012] Furthermore, the anti-splashing device is a three-dimensional open porous structure material with a thickness of 3mm-10mm, which is placed below the liquid surface of the evaporation raw material. When the liquid evaporation raw material boils and bubbles are generated, the bubbles will be suppressed, divided and homogenized when passing through the three-dimensional open porous structure material during the rising process, thereby avoiding violent splashing on the surface of the evaporation raw material.

[0013] Preferably, the average pore size of the three-dimensional open porous structure is 1 mm-5 mm.

[0014] Furthermore, the melting point of the material of the anti-splash device is greater than the boiling point of the liquid evaporation raw material to ensure that the anti-splash device remains solid and is not liquefied during the evaporation process. For example, tungsten is selected as the material.

[0015] Preferably, the mesh number of the flaky wire mesh structure ranges from 10 mesh to 200 mesh.

[0016] Preferably, the mesh number of the flaky wire mesh structure ranges from 50 mesh to 100 mesh.

[0017] Furthermore, the evaporation crucible is made of ceramic material, metal material or graphite material, and can be selected according to actual use requirements.

[0018] Furthermore, the heating source is placed at the bottom and / or side of the evaporation crucible to heat the evaporation raw material so that the evaporation raw material changes from solid to liquid, or from liquid to gas, thereby controlling the film forming speed of the vacuum coating machine.

[0019] Furthermore, it also includes a heat preservation structure, which is arranged on the periphery of the evaporation crucible to reduce heat dissipation loss.

[0020] The utility model proposes a vacuum coating evaporation source with an anti-splashing function. The anti-splashing device horizontally placed inside the liquid evaporation raw material can intervene in the bubbles generated during boiling, greatly reducing the occurrence of splashing scenes, increasing the heating power of the heating source, improving the film forming speed of the vacuum coating equipment, and maintaining the uniformity of film forming. The vacuum coating evaporation source with an anti-splashing function proposed by the utility model has a simple structure, a long service life, a good anti-splashing effect, and a wide range of applications. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 It is a schematic diagram of the evaporation source structure of a vacuum coating machine with a single-layer anti-splash device;

[0023] Figure 2 It is a schematic diagram of the evaporation source structure of a vacuum coating machine having a two-layer thin-sheet screen structure;

[0024] Figure 3 A schematic diagram of a single sheet of thin wire mesh structure;

[0025] Figure 4 It is a schematic diagram of a multi-sheet thin wire mesh structure;

[0026] Figure 5 Schematic diagram of a three-dimensional open porous structure.

[0027] In the figure, 1 is a evaporation crucible, 2 is a heating source, 3 is a heat preservation structure, 4 is an anti-splashing device, 5 is a liquid evaporation raw material, 6 is a thin sheet wire mesh structure, 61 is a first thin sheet wire mesh structure, 62 is a second thin sheet wire mesh structure, 6a is a first wire mesh, 6b is a second wire mesh, 6c is a third wire mesh, 6d is a fourth wire mesh, and 7 is a three-dimensional open porous structure. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0029] When the evaporation material of vacuum coating is metal (such as copper, aluminum, etc.), the heating source will first heat the metal into liquid during evaporation, and then evaporate it by further heating and heating. During coating production, in order to accelerate the speed of film formation, the power of the heating source will be increased. When the power of the heating source is heated to a certain degree, the evaporation material will boil. The boiling process is usually that bubbles will be generated on the side wall or bottom of the evaporation crucible close to the heating source. The bubbles usually contain gas. As the buoyancy increases, the bubbles will gradually rise. New bubbles are generated at the bottom, thus forming boiling. When the bubbles reach the surface of the liquid evaporation material, they will move upward with inertia and break on the surface of the liquid evaporation raw material, causing splashing of the liquid evaporation material. The larger the size of the bubble, the more obvious the splashing phenomenon. The larger the size of the large particles that affect the quality of the film layer, the greater the number. If the liquid evaporation material splashes onto the workpiece to be plated, it will destroy the film formation on the surface of the workpiece to be plated; if the liquid evaporation material splashes to other places, it will also contaminate the internal surface of the evaporation source. Regardless of which of the above situations occurs, the boiling and splashing process of the liquid evaporation material will destroy the vacuum film-forming atmosphere, causing uneven film formation on the workpiece and failing to achieve the expected film-forming speed.

[0030] The utility model proposes a vacuum coating evaporation source with anti-splashing function (such as Figure 1 As shown), it includes an evaporation crucible 1 and a heating source 2, characterized in that an anti-splashing device 4 is arranged in the evaporation crucible 1 to prevent the liquid evaporation raw material 5 from splashing, and the anti-splashing device 4 is horizontally placed inside the liquid evaporation raw material 5. Preferably, the anti-splashing device 4 is a thin sheet-like wire mesh structure 6, and the thickness of the thin sheet-like wire mesh structure 6 is relatively thin, preferably 0.2mm-1mm. The thin sheet-like wire mesh structure 6 is one or more layers, such as Figure 1 As shown, the anti-splash device 4 is preferably a thin sheet-like wire mesh structure, which is a layer and is arranged below the liquid surface of the liquid evaporation raw material 5 and close to the upper surface of the liquid. Figure 2As shown, the anti-splash device 4 is preferably a thin-layer wire mesh structure 6, and the thin-layer wire mesh structure 6 is multi-layered, preferably two-layered. At this time, the first thin-layer wire mesh structure 61 is arranged below the liquid surface of the liquid evaporation raw material 5 and close to the upper surface of the liquid, and the second thin-layer wire mesh structure 62 is arranged below the liquid surface of the liquid evaporation raw material 5 and close to the bottom of the liquid. The thin-layer wire mesh structure arranged below the liquid surface of the liquid evaporation raw material 5 and close to the upper surface of the liquid is to facilitate the destruction or suppression of bubbles in the rising process that are about to boil or splash; the thin-layer wire mesh structure 6 arranged near the bottom of the liquid evaporation raw material 5 is to make the bottom of the liquid evaporation raw material 5 heated more evenly, control the boiling phenomenon in the early stage, and solve the bubbles in the early stage of boiling caused by uneven heating at the bottom of the liquid evaporation raw material 5; even if some bubbles appear, the thin-layer wire mesh structure 6 will have a cutting, homogenizing and suppressing effect on the bubbles. It should be pointed out that Figure 2 Only the case where the thin sheet-like wire mesh structure 6 has two layers is shown, and the case where there are multiple layers also falls within the protection scope of the present utility model. When there are more than two layers, at least one layer of the thin sheet-like wire mesh structure 6 is arranged below the liquid surface of the liquid evaporation raw material 5 and close to the upper surface of the liquid; and at least one other layer is arranged below the liquid surface of the liquid evaporation raw material 5 and close to the bottom of the liquid.

[0031] like Figure 3 and Figure 4 The structure of the thin sheet-like wire mesh shown in the figure is that each layer of the thin sheet-like wire mesh structure is composed of one piece of wire mesh or a combination of multiple pieces of wire mesh. Figure 3 As shown, the thin sheet-like wire mesh structure 6 is composed of a piece of wire mesh, such as Figure 4 As shown, the thin sheet-like wire mesh structure 6 is composed of a plurality of wire meshes. Figure 4 Take 4 pieces of wire mesh as an example, that is, the lamellar wire mesh structure 6 is composed of a first wire mesh 6a, a second wire mesh 6b, a third wire mesh 6c and a fourth wire mesh 6d. It should be noted that only one wire mesh structure is shown in the present utility model, and other wire mesh structures with a cross-hollowed type also fall within the protection scope of the present utility model. It should also be pointed out that the present utility model only shows a lamellar wire mesh structure composed of one and four wire meshes, and the anti-splash wire mesh structure composed of other numbers of wire meshes also falls within the protection scope of the present utility model. Preferably, the mesh number range of the lamellar wire mesh structure 6 is between 10 mesh and 200 mesh, so as to control the size of the boiling bubbles within a smaller range; further preferably, the mesh number range of the lamellar wire mesh structure 6 is between 50 mesh and 100 mesh, so as to better take into account the cost life of the wire mesh and the bubble size and other aspects.

[0032] Further preferably, the anti-splash device 4 is a three-dimensional open porous structure 7 (such as Figure 5 As shown in the figure, the three-dimensional open porous structure 7 is placed below the surface of the evaporation raw material. When the liquid evaporation raw material 5 boils and generates bubbles, the bubbles are divided and homogenized when they pass through the three-dimensional open porous structure 7 during their rise, thereby avoiding violent splashing on the surface of the liquid evaporation raw material 5. Further preferably, the average pore size of the three-dimensional open porous structure 7 is 1 mm-5 mm.

[0033] Since the anti-splash device needs to maintain its original shape and structure during operation, the melting point of the material of the anti-splash device 4 is greater than the boiling point of the liquid evaporation raw material. For example, when the liquid evaporation raw material is copper, the anti-splash device 4 is a tungsten wire mesh. The tungsten wire mesh of the anti-splash device 4 is horizontally arranged in the copper liquid, which can play a splash-proof role during boiling. Specifically, the heating power of the heating source 2 increases, so that the temperature of the copper liquid gradually increases and boils. At the beginning, bubbles will be generated at the bottom or side of the copper liquid. The bubbles will gradually rise as the buoyancy increases. During the rising process, they will be blocked by the tungsten wire mesh of the anti-splash device 4, and the bubbles will break or their size will be greatly reduced, thereby avoiding the occurrence of obvious splashing. The evaporation crucible 1 is made of ceramic material, metal material or graphite material. Preferably, the ceramic material is aluminum oxide, boron nitride, silicon carbide, etc.; the metal material is tungsten, molybdenum, tantalum, etc. The heating source 2 is placed at the bottom and / or side of the evaporation crucible 1, and can be selected according to the use requirements. The heating source 2 can be arranged at the bottom and / or side of the evaporation crucible 1 at the same time. The vacuum coating evaporation source with anti-splashing function also includes a heat preservation structure 3, which is arranged at the periphery of the evaporation crucible 1 to maintain the heat loss of the heating source 2 as little as possible, thereby reducing heat loss and energy loss.

[0034] The evaporation source of the vacuum coating machine proposed in the utility model has the following beneficial effects:

[0035] 1. The addition of anti-splash device can avoid large splashes when the liquid evaporation raw material boils, which may cause contamination to the workpiece to be plated;

[0036] 2. Suitable for evaporation with larger heating power, which can speed up the film forming speed, make the film forming more uniform and improve the coating efficiency;

[0037] 3. Simple structure, long service life and wide application range.

[0038] It should be understood that the present invention is not limited to the precise structure described above and shown in the drawings, and various modifications and changes can be made without departing from the scope thereof. The scope of the present invention is limited only by the appended claims.

Claims

1. A vacuum coating evaporation source with anti-splashing function, comprising a evaporation crucible and a heating source, characterized in that: An anti-splashing device is arranged in the evaporation crucible to prevent the liquid evaporation raw material from splashing. The anti-splashing device is horizontally placed inside the liquid evaporation raw material.

2. The vacuum coating evaporation source with anti-splashing function according to claim 1, characterized in that: The anti-splash device is a thin sheet wire mesh structure.

3. The vacuum coating evaporation source with anti-splashing function according to claim 2, characterized in that: The sheet-like wire mesh structure is one layer or multiple layers.

4. The vacuum coating evaporation source with anti-splashing function according to claim 3, characterized in that: Each layer of the thin sheet-like wire mesh structure is composed of one piece of wire mesh or a combination of multiple pieces of wire mesh.

5. The vacuum coating evaporation source with anti-splashing function according to claim 3, characterized in that: At least one layer of thin sheet-like wire mesh structure is arranged below the liquid surface of the liquid evaporation raw material and close to the upper surface of the liquid.

6. The vacuum coating evaporation source with anti-splashing function according to claim 5, characterized in that: When the thin sheet-like wire mesh structure has two or more layers, at least one layer of the thin sheet-like wire mesh structure is arranged below the liquid surface of the liquid evaporation raw material and close to the bottom of the liquid.

7. The vacuum coating evaporation source with anti-splashing function according to claim 1, characterized in that: The anti-splash device is a three-dimensional open porous structure with a thickness of 3mm-10mm.

8. The vacuum coating evaporation source with anti-splashing function according to claim 7, characterized in that: The average pore size of the three-dimensional open porous structure is 1 mm to 5 mm.

9. The vacuum coating evaporation source with anti-splashing function according to claim 1, characterized in that: The melting point of the material of the anti-splashing device is greater than the boiling point of the liquid evaporation raw material.

10. The vacuum coating evaporation source with anti-splashing function according to claim 2, characterized in that: The mesh number of the flaky wire mesh structure ranges from 10 meshes to 200 meshes.

11. The vacuum coating evaporation source with anti-splashing function according to claim 10, characterized in that: The mesh number of the flaky wire mesh structure ranges from 50 meshes to 100 meshes.

12. The vacuum coating evaporation source with anti-splashing function according to claim 1, characterized in that: The evaporation crucible is made of ceramic material, metal material or graphite material.

13. The vacuum coating evaporation source with anti-splashing function according to claim 1, characterized in that: The heating source is disposed at the bottom and / or the side of the evaporation crucible.

14. The vacuum coating evaporation source with anti-splashing function according to claim 1, characterized in that: It also includes a heat preservation structure, which is arranged on the periphery of the evaporation crucible.

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