Lifting device for induction coil of crystal growth furnace

Abstract

The utility model discloses a lifting device for a crystal growth furnace induction coil, and belongs to the technical field of crystal preparation auxiliary equipment. The device comprises a frame, a counterweight mechanism, a lining plate and a second transmission piece, the frame is used for fixing an induction coil, and a sliding groove and a positioning hole are formed in the upper portion of the frame; the counterweight mechanism comprises a fixed pulley, a counterweight block, a traction rope and a traction piece, the fixed pulley is arranged on the crystal growth furnace rack, the traction rope bypasses one end of the fixed pulley to be connected with the counterweight block, the other end of the traction rope is connected with the traction piece, and the traction piece is fixedly connected in the chute; the lining plate is arranged on the side, away from the induction coil, of the frame. A first transmission part is arranged on the side, away from the frame, of the lining plate. The second transmission part is fixed on the crystal growth furnace rack, the second transmission part is matched with the first transmission part, and the first transmission part can ascend or descend relative to the second transmission part. The device can reduce running heat generation and heat transfer, so that the influence on the uniformity of a thermal field of the crystal growth furnace is reduced, the service life is prolonged, and the running precision and reliability are improved.

Description

Technical Field

[0001] The present application relates to a lifting device for an induction coil of a crystal growth furnace, and belongs to the technical field of auxiliary equipment for crystal preparation. Background Art

[0002] At present, the mainstream method for growing industrial silicon carbide is the PVT method, which has the advantages of simple structure and low manufacturing cost. The commonly used heating power source in the PVT method is the medium-frequency induction coil. Thermal field control is the core technology of the PVT method and plays a decisive role in the quality of crystal growth. The traditional induction coil lifting structure uses a motor to drive the lead screw to rotate and drive the induction coil to rise and fall. In order to meet the load-bearing requirements, the transmission lead screw is generally made of carbon steel or alloy steel, which has good magnetic conductivity and is easy to generate heat. Because of its position close to the induction coil, induced heat and thermal radiation will occur, resulting in excessive local temperature of the lead screw, which affects the transmission accuracy and has an adverse effect on the uniformity of the thermal field of the crystal growth furnace.

[0003] In addition, during the production process, the lead screw is generally lubricated with lubricating oil. Conventional thin oil lubricants will vaporize and evaporate at high temperatures. If high-temperature resistant grease is used for lubrication, the grease will gradually harden and adhere to the lead screw raceway as it is heated at high temperatures, forming spot-like hardened attachments. These are difficult to clean and will aggravate the wear of the lead screw, making it impossible for the lead screw to be lubricated normally when running at high temperatures for a long time. This makes it difficult to effectively maintain the lead screw, reducing the operating accuracy of the equipment and seriously affecting the service life and reliability of the induction coil lifting device.

[0004] In order to avoid the above problems, aluminum plates or copper plates with weak magnetic conductivity are currently added between the screw drive and the electromagnetic heating to serve as magnetic or heat insulation plates. However, the magnetic or heat insulation effect brought about by this operation is poor, and the actual application effect is not good, and the above problems cannot be fundamentally solved. Utility Model Content

[0005] In order to solve the above problems, the present application proposes a lifting device for the induction coil of a crystal growth furnace, which drives the lifting of the induction coil through the cooperation of a first transmission member and a second transmission member, and at the same time adopts a counterweight mechanism to reduce the driving load of the overall moving part. The above arrangement can reduce the heat generation and heat transfer of the device, thereby reducing the impact on the uniformity of the thermal field of the crystal growth furnace, and when using high-temperature resistant lubricating oil for lubrication, it can avoid high-temperature hardening of the lubricating oil, thereby improving the service life, operating accuracy and reliability of the device.

[0006] The present application provides a lifting device for an induction coil of a crystal growth furnace, comprising:

[0007] A frame, the frame is used to fix the induction coil, a slide groove and a positioning hole are arranged on the frame, and the positioning hole cooperates with the guide rail on the crystal growth furnace frame;

[0008] A counterweight mechanism, the counterweight mechanism comprising a fixed pulley, a counterweight block, a traction rope and a traction member, the fixed pulley is arranged on the crystal growth furnace frame, the traction rope passes over the fixed pulley and is connected to the counterweight block at one end, and is connected to the traction member at the other end, and the traction member is fixedly connected in the slide groove;

[0009] A lining plate, the lining plate is arranged on a side of the frame away from the induction coil, and a first transmission member is arranged on the side of the lining plate away from the frame;

[0010] The second transmission member is fixed on the crystal growth furnace frame, the second transmission member cooperates with the first transmission member, and the first transmission member can rise or fall relative to the second transmission member.

[0011] Optionally, the lining plate is made of aluminum alloy or copper alloy, and the interior of the lining plate is hollow to form a cooling cavity for accommodating coolant.

[0012] Optionally, a plurality of heat dissipation fins are arranged in the cooling cavity, and the heat dissipation fins are arranged in a staggered manner from top to bottom.

[0013] Optionally, a liquid injection port and a liquid outlet are provided on the lining plate, the liquid injection port is connected to the liquid injection pipeline, the liquid outlet is connected to the liquid outlet pipeline, and a temperature measuring flow meter is provided on the liquid outlet pipeline.

[0014] Optionally, a curved plate-shaped heat insulation board is provided on the frame.

[0015] Optionally, the heat insulation board is made of aluminum alloy or copper alloy.

[0016] Optionally, the length of the heat insulation board is half or 3 / 4 of the length surrounding the induction coil.

[0017] Optionally, a plurality of support columns are further included, wherein upper and lower ends of the support columns are fixed to the frame and are evenly distributed along the circumference of the frame, and the support columns are arranged on the outer side of the heat insulation board.

[0018] Optionally, the first transmission member is a rack, the second transmission member is a gear, the gear is meshed with the rack, and the gear is fixed to the crystal growth furnace frame through a power mechanism.

[0019] Optionally, an oil receiving box is further provided on the lining plate, and the oil receiving box is located below the rack; and / or

[0020] An L-shaped guard plate is also provided on one side of the rack, and the L-shaped guard plate is made of aluminum alloy or copper alloy.

[0021] Optionally, there is one slide groove, and the vertical symmetry plane of the frame coincides with the vertical symmetry plane of the slide groove.

[0022] Optionally, there are two positioning holes, and the two positioning holes are symmetrically distributed along the vertical symmetry plane of the frame.

[0023] Optionally, a sliding bearing is provided in the positioning hole, and the sliding bearing cooperates with the guide rail.

[0024] The beneficial effects of this application include but are not limited to:

[0025] 1. The lifting device for the induction coil of the crystal growth furnace of the present application adopts the first transmission member and the second transmission member to drive instead of the screw drive, and adopts a fixed pulley and a counterweight block to reduce the drive load, which can meet the low-load drive and can greatly reduce the generation of induced heat, reduce the energy consumption of the drive motor, and reduce the influence of high-temperature thermal deformation on the transmission accuracy, thereby realizing high-precision transmission and improving the service life, operation accuracy and use reliability of the induction coil lifting device.

[0026] 2. The lifting device for the induction coil of the crystal growth furnace of the present application is provided with a plurality of heat dissipation fins in the cavity of the lining plate, which has a fast heat dissipation speed. Compared with a simple heat insulation plate structure, it can greatly reduce the operating temperature of the gear rack, further avoiding the generation of high-temperature induction heat by the device, thereby reducing the impact on the stability of the thermal field of the crystal growth and improving the uniformity of the thermal field of the crystal growth.

[0027] 3. According to the lifting device for the induction coil of the crystal growth furnace of the present application, a triple protection and heat insulation measure of a heat insulation plate, an L-shaped guard plate and a cooling lining plate is provided at the gear rack transmission position, which greatly reduces the heat transfer and the operating temperature of the gear rack; and the lubricating grease is easy to apply and maintain, and the lubricating grease is easy to collect and clean, and effective lubrication and maintenance can be performed, thereby improving the service life and operating reliability of the lifting device. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0029] Figure 1 It is a front view of the lifting device for the induction coil of the crystal growth furnace involved in the present application;

[0030] Figure 2 A top view of a lifting device for an induction coil of a crystal growth furnace involved in the present application;

[0031] Figure 3 for Figure 2 AA section structure diagram in the figure;

[0032] Figure 4 for Figure 3 A partial enlarged view of part B;

[0033] Figure 5 It is a three-dimensional schematic diagram of a lifting device for an induction coil of a crystal growth furnace involved in the present application;

[0034] Figure 6 It is a three-dimensional schematic diagram of the lifting device for the induction coil of the crystal growth furnace involved in the present application.

[0035] List of parts and reference numerals:

[0036] 1. Induction coil; 2. Support column; 3. Heat insulation board; 4. Sliding bearing; 5. Guide rail; 6. Traction rope; 7. Fixed pulley; 8. Counterweight; 9. L-shaped guard plate; 10. Rack; 11. Gear; 12. Reducer; 13. Motor; 14. Lining plate; 15. Oil collecting box; 16. Frame; 17. Traction part; 18. Slide. DETAILED DESCRIPTION

[0037] In order to more clearly illustrate the overall concept of the present application, a detailed description is given below in an illustrative manner in conjunction with the accompanying drawings.

[0038] In order to more clearly understand the above-mentioned purposes, features and advantages of the present application, the present application is further described in detail below in conjunction with the accompanying drawings and specific implementation methods. It should be noted that the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

[0039] In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application may also be implemented in other ways different from those described herein. Therefore, the scope of protection of the present application is not limited to the specific embodiments disclosed below.

[0040] In addition, in the description of the present application, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0041] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0042] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or a communication; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0043] In the present application, unless otherwise clearly specified and limited, a first feature "above" or "below" a second feature may be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in an appropriate manner in any one or more embodiments or examples.

[0044] refer to Figure 1-6 The embodiment of the present application discloses a lifting device for an induction coil 1 of a crystal growth furnace, comprising: a frame 16, the frame 16 is used to fix the induction coil 1, a slide groove 18 and a positioning hole are arranged above the frame 16, and the positioning hole cooperates with the guide rail 5 on the crystal growth furnace frame; a counterweight mechanism, the counterweight mechanism comprises a fixed pulley 7, a counterweight block 8, a traction rope 6 and a traction member 17, the fixed pulley 7 is arranged on the crystal growth furnace frame, the traction rope 6 passes around the fixed pulley 7, one end is connected to the counterweight block 8, and the other end is connected to the traction member 17, and the traction member 17 is fixedly connected in the slide groove 18; a lining plate 14, the lining plate 14 is arranged on the side of the frame 16 away from the induction coil 1, and a first transmission member is arranged on the side of the lining plate 14 away from the frame 16; a second transmission member, the second transmission member is fixed on the crystal growth furnace frame, the second transmission member cooperates with the first transmission member, and the first transmission member can rise or fall under the drive of the power mechanism.

[0045] During the operation of the lifting device, the second transmission member is fixed on the crystal growth furnace frame, so under the drive of the power mechanism, the first transmission member and the second transmission member slide relative to each other, thereby realizing the rise or fall of the first transmission member, and then driving the lining plate 14, the frame 16 and the traction member 17 fixed on the slide 18 to move, so as to realize the rise or fall of the induction coil 1. During the rise or fall of the induction coil 1, the positioning hole slides along the guide rail 5 to achieve positioning and limiting effects, and because the traction member 17 is connected to the counterweight block 8 through the traction rope 6, the counterweight block 8 can reduce the driving load of the power mechanism and improve the stability of the lifting, thereby improving the reliability of the device.

[0046] Therefore, the lifting device uses the first transmission member and the second transmission member to cooperate, and then reduces the driving load through the counterweight mechanism, which can greatly reduce the generation of induction heat while meeting the high-load drive, thereby reducing heat transfer, that is, reducing the impact on the thermal field of the crystal growth furnace and improving the growth quality of the crystal. In addition, the position of the traction member 17 fixed on the slide 18 can be adjusted, and the installation position of the fixed pulley 7 can also be adjusted. Therefore, the position of the traction member 17 on the slide 18 can be adjusted according to the position of the induction coil 1, thereby reducing the eccentric load and further reducing the driving load.

[0047] Specifically, the installation position of the fixed pulley 7 can be adjusted by setting different installation holes on the crystal growth furnace frame, and after determining the installation position of the fixed pulley 7, it can be fixed on the crystal growth furnace frame through the installation holes. When the position needs to be changed, the fixed pulley 7 can be disassembled and then installed at the new position. The position of the traction member 17 on the slide 18 can be adjusted in a conventional manner in the art. For example, a screw with an external thread can be set on the traction member 17, and the screw can pass through the slide 18 and can be fixed by a bolt under the slide 18. When it needs to be fixed, it can be done by tightening the bolt. When it needs to change the position, loosen the bolt, move the position of the screw in the slide 18, and tighten the bolt after determining the new position.

[0048] Specifically, the connection method between the traction rope 6 and the traction member 17 and the counterweight block 8 can adopt the existing method in the prior art, for example, a connection hole is reserved on the traction member 17 and the counterweight block 8, and the end of the traction rope 6 is tied to the connection hole.

[0049] In addition, since the lifting device can greatly reduce the generation of induced heat during operation, there will be no local excessive temperature during the operation of the entire device. Therefore, high-temperature resistant grease can be used for lubrication, and the grease will not harden at high temperature, which can ensure normal lubrication of the device and extend the service life of the device.

[0050] Specifically, the rise or fall of the first transmission member relative to the second transmission member is driven by a power mechanism, and the power mechanism may drive the second transmission member, or the first transmission member, or the first transmission member and the second transmission member at the same time, as long as the relative sliding of the two can be achieved. For example, the second transmission member may be set as a slide rail, the first transmission member is engaged on the slide rail, and the first transmission member is driven by an electromagnetic to slide on the second transmission member, thereby achieving the rise or fall of the first transmission member; for example, the first transmission member may be set as a gear, and the second transmission member may be set as a rack, and the power mechanism drives the gear to rotate along the rack, thereby achieving the movement of the first transmission member.

[0051] As an implementation method, the first transmission member is a rack 10, and the second transmission member is a gear 11, which meshes with the rack 10, and the gear 11 is fixed to the crystal growth furnace frame through a power mechanism. Under this setting, the gear 11 is driven to rotate by the power mechanism to achieve the relative movement of the gear 11 and the rack 10. Since the power mechanism and the gear 11 are fixed to the crystal growth furnace frame, the position of the gear 11 remains unchanged, and the rack 10 moves up and down to achieve the rise or fall of the induction coil 1. This method uses a gear 11 and a rack 10 with a linear contact surface for cooperation. The transmission of the gear 11 and the rack 10 of the same material has the characteristics of large load-bearing capacity, high transmission rigidity, and not easy to be overloaded and deformed compared to the screw transmission method. However, aluminum alloy has the defect of being soft and easy to deform relative to carbon steel screws. Therefore, in order to reduce heat generation and reduce the deformation of the gear rack during the driving load, a counterweight mechanism is added to reduce the driving load, so that the device can greatly reduce the generation of induction heat while meeting the high-load drive.

[0052] Specifically, the above-mentioned gear 11 and rack 10 can be one or more than two. Those skilled in the art can set them according to the sizes of the lining plate 14, the gear 11, and the rack 10, the driving force of the power mechanism, the weight of the induction coil 1, the difficulty of maintenance, etc. Similarly, the number of counterweight mechanisms can also be set according to the above conditions.

[0053] As an implementation method, the first power member is a worm gear, the second power member is a turbine, the worm gear meshes with the turbine, and the turbine is fixed to the crystal growth furnace frame through a power mechanism. Similarly, driven by the power mechanism, the turbine rotates to achieve relative movement of the turbine and the worm gear. Since the turbine and the power mechanism are fixed to the crystal growth furnace frame, the position of the turbine remains unchanged, and the worm gear moves up and down, thereby achieving the rise or fall of the induction coil 1.

[0054] Specifically, the power mechanism can be a conventional power providing component in the prior art. In a specific embodiment of the present application, the power mechanism includes a reducer 12 and a motor 13. The motor 13 is installed on the crystal growth furnace frame. The motor 13 is connected to the reducer 12, and the output shaft of the reducer 12 is connected to the gear 11 or the turbine. The rotation of the gear 11 or the turbine is realized by the rotation of the motor 13.

[0055] As an implementation method, the rack 10 and the gear 11 are made of aluminum alloy or copper alloy. The gear 11 and the rack 10 made of the above materials can reduce the generation of induction heat, ensure the transmission rigidity of the liner 14, and reduce the high-temperature thermal deformation of the gear 11 and the rack 10, so as to achieve high-precision transmission and improve the service life, operation accuracy and reliability of the device.

[0056] As an embodiment, an L-shaped guard plate 9 is also provided on one side of the rack 10, and the L-shaped guard plate 9 is made of aluminum alloy or copper alloy. The L-shaped guard plate 9 can prevent the grease lubricated by the gear 11 and the rack 10 from splashing around, thereby improving the cleanliness of the device, and the material can play a heat-insulating role, further reducing heat transfer.

[0057] As an embodiment, an oil receiving box 15 is also provided on the liner 14, and the oil receiving box 15 is located below the rack 10. The oil receiving box 15 is arranged below the rack 10, and the lubricating oil blocked by the L-shaped guard plate 9 can be directed to the oil receiving box 15, so as to collect the lubricating oil, avoid the waste of the lubricating oil, and facilitate maintenance and collection and cleaning.

[0058] As an implementation manner, the lining plate 14 is made of aluminum alloy or copper alloy, and the interior of the lining plate 14 is hollow to form a cooling cavity for accommodating coolant.

[0059] The material of the lining 14 can further reduce the generation of induced heat, reduce the deformation of the lining 14, and extend the service life of the lining 14. By setting the interior of the lining 14 as a cooling chamber, coolant can be introduced into the lining 14 to cool the lifting device, further reduce the operating temperature of the gear 11 and the rack 10, improve the uniformity of the crystal growth thermal field, facilitate lubrication and maintenance of the lubricating oil, and extend the service life of the device.

[0060] Specifically, the injection and outflow of the coolant in the liner 14 can be carried out by setting an injection port and a liquid outlet. During the operation of the device, cooling can be achieved by injecting flowing coolant in real time, which is beneficial to maintaining the low temperature state of the device and improving the consistency of the thermal field during the overall crystal growth process.

[0061] As an implementation method, a plurality of heat dissipation fins are arranged in a staggered manner from top to bottom in the cooling cavity. The design of the heat dissipation fins can increase the heat dissipation area and improve the heat dissipation speed, thereby greatly reducing the operating temperature of the device, avoiding the influence of high-temperature induced heat generated by the lead screw on the stability of the crystal growth thermal field, and at the same time, when lubricated with high-temperature resistant lubricating oil, there will be no hardening and bonding phenomenon, thereby improving the service life and reliability of the device.

[0062] As an implementation mode, a liquid injection port and a liquid outlet are provided on the liner 14, the liquid injection port is connected to the liquid injection pipeline, the liquid outlet is connected to the liquid outlet pipeline, and a temperature measuring flow meter is provided on the liquid outlet pipeline. The temperature measuring flow meter is helpful to count the flow rate and temperature of the coolant, which is convenient for the operator to adjust the flow rate of the coolant, and the temperature output by the temperature measuring flow meter is used to determine the operating temperature of the device, so as to determine the best cooling condition.

[0063] Specifically, the coolant can be water or other cooling media, as long as it can achieve the cooling function.

[0064] As an embodiment, an arc-shaped heat insulation board 3 is provided on the frame 16. Preferably, the heat insulation board 3 is made of aluminum alloy or copper alloy. The induction coil 1 is circular, and the shape of the heat insulation board 3 is adapted to the induction coil 1. Therefore, the existence of the heat insulation board 3 can reduce the heat influence between the induction coil 1 and the lifting device, and ensure the normal operation of the lifting device and the induction coil 1.

[0065] Specifically, the length of the heat insulation board 3 can be set according to actual conditions, for example, it can be set to surround half or 3 / 4 of the induction coil 1, as long as heat insulation can be achieved without hindering the operation and maintenance of the induction coil 1.

[0066] As an embodiment, it also includes a plurality of support columns 2, the upper and lower ends of the support columns 2 are fixed on the frame 16, and are evenly distributed along the circumference of the frame 16, and the support columns 2 are arranged on the outside of the insulation board 3. The presence of the support columns 2 can increase the stability of the frame 16, thereby improving the stability of the overall moving parts in the device.

[0067] As an implementation mode, a sliding bearing 4 is provided in the positioning hole, and the sliding bearing 4 cooperates with the guide rail 5. The sliding bearing 4 can effectively reduce the friction between the device and the guide rail 5, reduce the driving resistance of the device while achieving positioning, and facilitate efficient and stable operation of the device.

[0068] As an implementation method, there is one counterweight mechanism, one slide slot 18, and the vertical symmetry plane of the frame 16 coincides with the vertical symmetry plane of the slide slot 18. The above arrangement can effectively avoid the device from being overloaded, which is conducive to the normal operation of the device.

[0069] As an implementation method, there are two positioning holes, and the two positioning holes are symmetrically distributed along the vertical symmetry plane. This setting can effectively guide, position and limit the device, further improving the operating reliability of the device.

[0070] As an embodiment, the weight of the counterweight 8 is 0.5-0.6 times the total weight of the overall moving parts of the frame 16, the induction coil 1 and the lining plate 14. The overall moving parts refer to the collective name of all the components that can rise and fall driven by the gear 11 and the rack 10 of the device, including the induction coil 1, the frame 16 and the support column 2, the heat insulation board 3, the sliding bearing 4, the lining plate 14, the rack 10, the L-shaped guard plate 9, the oil receiving box 15, the coolant in the lining plate 14, the heat dissipation fins, the traction member 17 and the parts used to fix the above components.

[0071] Specifically, the weight of the counterweight block 8 can be adjusted by combining multiple blocks into the counterweight block 8, and adjusting the weight of the counterweight block 8 by increasing or decreasing the weight of the blocks. The multiple blocks can be combined by connecting them through screws.

[0072] The installation method of the lifting device comprises the following steps:

[0073] (1) Assembling the frame 16, the liner 14, the gear 11, the rack 10 and the counterweight mechanism, and installing them on the crystal growth furnace frame so that the positioning holes match the guide rails 5;

[0074] (2) moving the traction member 17 to a position on the slide 18, operating the lifting device, monitoring the operating current of the power mechanism at multiple positions, and fixing the traction member 17 to the slide 18 using a fixed connection member at a position where the current is minimum;

[0075] (3) Increase or decrease the weight of the counterweight 8, then operate the lifting device, monitor the operating current of the power mechanism, and determine the final weight of the counterweight 8 when the current is at the minimum value, indicating that the installation is complete.

[0076] After the device is installed in place using the above-mentioned installation method, the lifting device is operated to realize the rise or fall of the induction coil. Compared with the original method of using a lead screw to drive the induction coil to rise and fall, the lubricating oil will not harden during operation, and the temperature of the gear rack transmission parts is below 50°C, while the temperature of the transmission parts of the original lead screw lifting method is generally above 200°C, and the temperature of the local abnormal point can reach 500°C. This proves that the lifting device can effectively reduce the induced heat generated during the lifting process, thereby reducing the impact on the crystal growth temperature field and improving the quality of the crystal.

[0077] Each embodiment in this specification is described in a progressive manner, and the same or similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the system embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiment.

[0078] The above is only an embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various changes and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the scope of the claims of the present application.

Claims

1. A lifting device for an induction coil of a crystal growth furnace, characterized in that: include: A frame, the frame is used to fix the induction coil, a slide groove and a positioning hole are arranged on the frame, and the positioning hole cooperates with the guide rail on the crystal growth furnace frame; A counterweight mechanism, the counterweight mechanism comprising a fixed pulley, a counterweight block, a traction rope and a traction member, the fixed pulley is arranged on the crystal growth furnace frame, the traction rope passes over the fixed pulley and is connected to the counterweight block at one end, and is connected to the traction member at the other end, and the traction member is fixedly connected in the slide groove; A lining plate, the lining plate is arranged on a side of the frame away from the induction coil, and a first transmission member is arranged on the side of the lining plate away from the frame; The second transmission member is fixed on the crystal growth furnace frame, the second transmission member cooperates with the first transmission member, and the first transmission member can rise or fall relative to the second transmission member.

2. The lifting device for the induction coil of a crystal growth furnace according to claim 1, characterized in that: The lining plate is made of aluminum alloy or copper alloy, and the interior of the lining plate is hollow to form a cooling cavity for accommodating coolant.

3. The lifting device for the induction coil of a crystal growth furnace according to claim 2, characterized in that: A plurality of heat dissipation fins are arranged in the cooling cavity, and the heat dissipation fins are arranged in a staggered manner from top to bottom.

4. The lifting device for the induction coil of a crystal growth furnace according to claim 3, characterized in that: The lining plate is provided with a liquid injection port and a liquid outlet, the liquid injection port is connected to the liquid injection pipeline, the liquid outlet is connected to the liquid outlet pipeline, and a temperature measuring flow meter is provided on the liquid outlet pipeline.

5. The lifting device for the induction coil of a crystal growth furnace according to any one of claims 1 to 4, characterized in that: An arc-shaped heat insulation board is arranged on the frame.

6. The lifting device for the induction coil of a crystal growth furnace according to claim 5, characterized in that: The heat insulation board is made of aluminum alloy or copper alloy.

7. The lifting device for the induction coil of a crystal growth furnace according to any one of claims 1 to 4, characterized in that: The first transmission member is a rack, and the second transmission member is a gear. The gear is meshed with the rack, and the gear is fixed on the crystal growth furnace frame through a power mechanism.

8. The lifting device for the induction coil of a crystal growth furnace according to claim 7, characterized in that: The lining plate is also provided with an oil receiving box, and the oil receiving box is located below the rack; and / or An L-shaped guard plate is also provided on one side of the rack, and the L-shaped guard plate is made of aluminum alloy or copper alloy.

9. The lifting device for the induction coil of a crystal growth furnace according to any one of claims 1 to 4, characterized in that: There is one slide groove, and the vertical symmetry plane of the frame coincides with the vertical symmetry plane of the slide groove.

10. The lifting device for the induction coil of a crystal growth furnace according to claim 9, characterized in that: There are two positioning holes, and the two positioning holes are symmetrically distributed along the vertical symmetry plane of the frame.

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