Large hollow detection device based on high-precision air floating type single-shaft spiral motion

Abstract

The utility model discloses a large hollow detection device based on high-precision air-floating single-shaft helical motion, which relates to the technical field of ultrahigh-precision detection equipment and comprises a linear driving assembly, a linear displacement energy output end, a linear displacement energy output end, a linear displacement energy output end and a linear displacement energy output end, and the rotation driving assembly is provided with a positioning base part and a rotation kinetic energy output end which is rotatably assembled on the positioning base part, the positioning base part and the linear displacement kinetic energy output end of the linear driving assembly are fixedly assembled and connected in a transmission manner, and the rotation kinetic energy output end correspondingly forms a wafer bearing surface. The technical problems that when high-precision optical detection equipment in the prior art correspondingly performs ultrahigh-precision measurement, the overall detection motion path error is large, the stability is poor, and the measurement result precision is low are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of ultra-high precision detection equipment, in particular to a large hollow detection device based on high-precision air-floating single-axis spiral motion. Background Art

[0002] With the rapid development of the field of ultra-high precision detection, the requirements for detection accuracy in the high-end precision manufacturing industry are gradually increasing. For example, in the field of high-precision semiconductor detection, traditional detection means and methods can no longer meet its ultra-high detection requirements, especially in the semiconductor wafer detection industry. At present, in the chip manufacturing process, it is necessary to perform ultra-high precision detection on the flatness, thickness, size, defects and other items of the wafers used, and at this time, professional high-precision optical detection equipment is required. However, the detection movement corresponding to the high-precision optical detection equipment in the prior art is generally XY two-axis movement, which not only has low measurement efficiency, but also obtains a M-shaped path during the measurement process. Since the M-shaped path is a superposition of two axes, it is very easy to cause large overall motion errors, poor stability, and low measurement accuracy, which greatly affects the actual results of ultra-high precision measurements. Utility Model Content

[0003] To this end, the utility model provides a large hollow detection device based on high-precision air-floating single-axis spiral motion to solve the technical problems in the prior art that when high-precision optical detection equipment performs ultra-high precision measurement, its overall detection motion path error is large, stability is poor, and measurement result accuracy is low.

[0004] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0005] A large hollow detection device based on high-precision air-floating single-axis spiral motion, comprising:

[0006] A linear drive assembly having at least one linear motion energy output terminal;

[0007] The rotary drive component has a positioning base part and a rotational kinetic energy output end rotatably assembled on the positioning base part. The positioning base part and the linear position kinetic energy output end of the linear drive component are connected by a transmission fixed assembly, and the rotational kinetic energy output end corresponds to a wafer bearing surface.

[0008] On the basis of the above technical solution, the utility model is further described as follows:

[0009] As a further solution of the utility model, the linear drive assembly includes an air-floating guide structure and a linear drive structure;

[0010] The air-floating guide structure and the linear drive structure are each provided with two groups, and the two groups of the air-floating guide structure and the two groups of the linear drive structure are respectively fixedly assembled and connected with each other in a one-to-one correspondence, and the two groups of the linear drive structures are respectively located in the outer sides of the two groups of the air-floating guide structures in a one-to-one correspondence; the linear drive structure forms an air-floating linear position movement energy output end based on the air-floating guide structure.

[0011] As a further solution of the utility model, each group of the air-floating guide structures includes an air-floating guide rail and an air-floating slide seat;

[0012] The two groups of air-floating guide rails are arranged in parallel with each other; the two groups of air-floating sliding seats are slidably assembled on the two groups of air-floating guide rails in a one-to-one corresponding manner through the air-floating effect of the air-floating guide rails.

[0013] As a further solution of the utility model, each group of the linear drive structures includes a linear motor stator and a linear motor mover;

[0014] The two groups of linear motor stators are respectively fixedly assembled and connected with the two groups of air-floating guide rails in a one-to-one correspondence, and the extension directions of the two groups of linear motor stators are arranged parallel to the extension directions of the two groups of air-floating guide rails;

[0015] The two groups of linear motor movers are respectively and one-to-one correspondingly transmission-assembled on the two groups of linear motor stators, and the two groups of linear motor movers are respectively and one-to-one correspondingly fixedly assembled and connected between the two groups of air-floating sliding seats; the two groups of linear motor movers form the air-floating linear position motion energy output end.

[0016] As a further solution of the utility model, it also includes:

[0017] The transmission support platform structure comprises a transmission docking portion and an inner concave support platform portion;

[0018] The transmission docking parts are provided with two groups, and the two groups of the transmission docking parts are respectively fixedly assembled on the tops of the two groups of the air-floating sliding seat bodies in a one-to-one correspondence;

[0019] The inner concave support portion is in a concave shape and is integrally fixedly arranged between the two sets of transmission docking portions;

[0020] The positioning base portion of the rotary drive assembly is fixedly mounted on the concave support portion.

[0021] As a further solution of the utility model, the rotary drive assembly includes an air-floating turntable structure and an arc-shaped motor structure;

[0022] The air-floating turntable structure is configured as a hollow structure, the base of the hollow air-floating turntable structure is fixedly mounted on the top of the concave support portion as the positioning base of the rotary drive assembly, and the air-floating output end of the hollow air-floating turntable structure is correspondingly formed in the hollow position thereof;

[0023] The arc-shaped motor structure has a rotational kinetic energy output end, and the rotational kinetic energy output end is arranged correspondingly to the hollow air-floating output end portion of the air-floating turntable structure.

[0024] As a further solution of the utility model, the arc-shaped motor structure includes an arc-shaped motor stator and an arc-shaped motor rotor;

[0025] The arc-shaped motor stator is fixedly assembled and connected to the base of the air-floating turntable structure, and the arc-shaped motor stator has an annular magnetic driving end;

[0026] The arc-shaped motor rotor is connected to the annular magnetic driving end of the arc-shaped motor stator by a transmission assembly, and the arc-shaped motor rotor serves as the rotational kinetic energy output end of the arc-shaped motor structure, and its middle position is vertically corresponding to the air-floating output end of the air-floating turntable structure;

[0027] The wafer carrying surface is correspondingly formed by the arc-shaped motor rotor.

[0028] As a further solution of the utility model, the air-floating turntable structure is internally fixedly assembled with at least two sets of grating scale structures;

[0029] And / or, at least one set of grating scale structures are fixedly mounted on the inner sides of the air-floating guide rails of the two sets of air-floating guide structures.

[0030] As a further solution of the utility model, the wafer carrying surface formed by the arc-shaped motor rotor is also provided with a plurality of negative pressure suction holes and / or vacuum suction cups, and the plurality of negative pressure suction holes are connected to the suction pump body through pipelines.

[0031] As a further solution of the utility model, the concave base portion is built-in with a plurality of groups of air flotation channels, one end of the air flotation channel is connected to the air output mechanism, and the other end of the air flotation channel is formed with a plurality of top flotation air ports corresponding to the bottom end surface of the concave base portion, a top flotation air gap is formed between the bottom end surface of the concave base portion and the top end surface of the basic platform structure, and the plurality of top flotation air ports are arranged corresponding to the top end surface of the basic platform structure and the top flotation air gap.

[0032] The utility model has the following beneficial effects:

[0033] 1. The device can cooperate with the single-axis motion design formed by air-floating linear drive and the spiral motion design formed by air-floating rotary drive. The data feedback function of the grating scale structure can effectively improve the stability of the detection motion. At the same time, the control system and algorithm can accurately obtain stable spiral path detection. The spiral path not only avoids the motion error caused by the superimposed axis, and does not require correction during measurement, but also improves the motion efficiency and detection efficiency, improves the overall motion stability and detection accuracy, and has a qualitative improvement on the actual measurement results, which can meet the detection needs in ultra-high precision measurement scenarios;

[0034] 2. By adopting a single-axis motion design, the motion error caused by traditional superposition axis or multi-axis motion can be effectively avoided. In terms of functional debugging, the single-axis motion design only needs to debug the motion accuracy of the linear single-axis air floating mechanism during the debugging process, without debugging the accuracy of multiple axes. This significantly reduces the difficulty of debugging and the complexity of the process, and also increases the positioning accuracy, motion accuracy and stability of the entire motion module;

[0035] 3. Through the concave arrangement of the inner concave support part of the transmission support structure, the wafer bearing surface and the top surfaces of the two side parts of the transmission support structure can be on the same horizontal plane, which not only makes the overall structure of the module more compact, but also reduces the height of the wafer bearing surface compared to the traditional wafer detection structure setting, making it more compatible and effectively compatible with the movement stroke of the external loading and unloading mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the implementation methods of the utility model or the technical solutions in the prior art, the drawings required for the implementation methods or the description of the prior art will be briefly introduced below. The structures, proportions, sizes, etc. illustrated in this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read. Any structural modification, change in proportional relationship or adjustment of size should still fall within the scope of the technical contents disclosed in the utility model without affecting the effects and purposes that can be achieved by the utility model.

[0037] Figure 1 This is a schematic diagram of the overall axonometric structure of a large hollow detection device based on high-precision air-floating single-axis spiral motion provided in an embodiment of the utility model.

[0038] Figure 2 This is a schematic diagram of the principle of the movement direction of a large hollow detection device based on high-precision air-floating single-axis spiral motion corresponding to a rectangular coordinate system provided in an embodiment of the utility model.

[0039] Figure 3A schematic diagram of the movement principle of the detection probe in the large hollow detection device based on high-precision air-floating single-axis spiral motion corresponding to the detection point of the wafer to be tested provided by an embodiment of the utility model.

[0040] Figure 4 A schematic diagram of the spiral motion trajectory of the detection probe in the large hollow detection device based on high-precision air-floating single-axis spiral motion provided by an embodiment of the utility model corresponding to the detection point of the wafer to be tested.

[0041] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0042] Basic platform structure 1;

[0043] Air-floating guide structure 2: air-floating guide rail 21, air-floating slide seat 22;

[0044] Linear drive structure 3: linear motor stator 31, linear motor mover 32;

[0045] Transmission support structure 4: transmission docking portion 41, inner concave support portion 42;

[0046] Buffer damper structure 5; air-floating turntable structure 6;

[0047] Arc motor structure 7: arc motor stator 71, arc motor rotor 72;

[0048] Grating ruler structure 8; detection probe a. DETAILED DESCRIPTION

[0049] The following is a specific embodiment of the present invention. People familiar with the technology can easily understand the other advantages and functions of the present invention from the contents disclosed in this specification. Obviously, the described embodiment is a part of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0050] The terms such as "upper", "lower", "left", "right", and "middle" used in this specification are only for the convenience of description and are not intended to limit the scope of the present invention. Changes or adjustments to their relative relationships shall be deemed to be within the scope of the present invention without substantially changing the technical content.

[0051] like Figure 1As shown, the embodiment of the utility model provides a large hollow detection device based on high-precision air-floating single-axis spiral motion, including a basic platform structure 1, an air-floating guide structure 2, a linear drive structure 3, a transmission support structure 4, a buffer damper structure 5, an air-floating turntable structure 6, an arc motor structure 7 and a grating scale structure 8, which are used to cooperate with the single-axis motion design formed by the air-floating linear drive and the spiral motion design formed by the air-floating rotary drive, and the data feedback function of the grating scale structure 8 can effectively improve the stability of the detection motion, thereby effectively realizing stable spiral path detection. The spiral path not only avoids the motion error caused by the superimposed axis, but also improves the detection efficiency, thereby improving the overall motion stability and measurement accuracy, and meeting the detection needs in ultra-high precision measurement scenarios. The specific settings are as follows:

[0052] Please refer to Figure 1 The basic platform structure 1 is used as the installation base of the overall structure; the air-floating guide structure 2 and the linear drive structure 3 are each provided with two groups, the two groups of the air-floating guide structure 2 and the two groups of the linear drive structure 3 are respectively fixedly assembled on the top surface of the basic platform structure 1, and the two groups of the linear drive structures 3 are respectively located on the outer sides of the two groups of the air-floating guide structures 2 in a one-to-one correspondence, so as to utilize the air-floating guide structure 2 and the linear drive structure 3 to cooperate to form an air-floating linear drive function.

[0053] Specifically, each group of the air-floating guide structure 2 includes an air-floating guide rail 21 and an air-floating slide seat 22; wherein, the two groups of the air-floating guide rails 21 are respectively fixedly assembled on the top surface of the basic platform structure 1, and the two groups of the air-floating guide rails 21 are arranged in parallel; the two groups of the air-floating slide seat 22 are respectively and one by one slidably assembled on the two groups of the air-floating guide rails 21 through the action of air flotation.

[0054] Each group of the linear drive structure 3 includes a linear motor stator 31 and a linear motor mover 32; wherein, the two groups of the linear motor stators 31 are respectively fixedly mounted on the top surface of the basic platform structure 1, and the extension directions of the two groups of the linear motor stators 31 are arranged parallel to the extension directions of the two groups of the air-floating guide rails 21; the two groups of the linear motor movers 32 are respectively and one-to-one correspondingly transmission-mounted on the two groups of the linear motor stators 31, and the two groups of the linear motor movers 32 are respectively and one-to-one correspondingly fixedly assembled and connected with the two groups of the air-floating slide seats 22, so as to utilize the two groups of linear motor movers 32 as two linear displacement energy output ends, synchronously drive the two groups of air-floating slide seats 22 to perform air-floating linear displacement based on the two groups of air-floating guide rails 21, thereby significantly improving the stability performance of the linear displacement.

[0055] Please continue to refer to Figure 1The transmission platform structure 4 includes a transmission docking part 41 and a concave platform part 42; wherein, the transmission docking part 41 is provided with two groups, and the two groups of the transmission docking parts 41 are respectively and one by one fixedly assembled on the top of the two groups of the air-floating sliding seat bodies 22; the concave platform part 42 is concave and integrally fixedly arranged between the two groups of the transmission docking parts 41, and the air-floating turntable structure 6 and the arc motor structure 7 are both fixedly assembled on the concave platform part 42; the above-mentioned arrangement is used to effectively realize that the concave platform part 42 can be synchronously linearly displaced with the two groups of air-floating sliding seat bodies 22 and the transmission docking part 41, so that the wafer bearing surface formed by the cooperation of the air-floating turntable structure 6 and the arc motor structure 7 can perform linear uniaxial motion, and by adopting a single The axis motion design can effectively avoid the motion errors caused by traditional superimposed axis or multi-axis motion, and in terms of functional debugging, the single-axis motion design only needs to debug the motion accuracy of the linear single-axis air floating mechanism during the debugging process, without debugging the accuracy of multiple axes, thereby significantly reducing the difficulty of debugging and the complexity of the process, and also increasing the positioning accuracy, motion accuracy and stability of the entire motion module. In addition, the concave arrangement of the concave support portion 42 can be used to make the wafer bearing surface and the top surfaces of the two side portions of the transmission support structure 4 be on the same horizontal plane, thereby not only making the overall structure of the module more compact, but also reducing the height of the wafer bearing surface compared to the traditional wafer detection structure setting, so that it has better compatibility to effectively compatible with the motion stroke of the external loading and unloading mechanism.

[0056] As a preferred solution of this embodiment, a buffer damper structure 5 is fixedly installed at the top position of the basic platform structure 1 corresponding to both sides of the air-floating guide rail 21, so as to utilize the buffer damper structure 5 to effectively perform a buffering and stopping function when the air-floating sliding seat 22 slides to the edge of the guide rail.

[0057] As another preferred solution of this embodiment, the inner concave support portion 42 is equipped with a plurality of groups of air flotation channels, one end of the air flotation channel is connected to the air output mechanism, and the other end of the air flotation channel is formed with a plurality of top flotation air ports corresponding to the bottom end surface of the inner concave support portion 42, a top flotation air gap is formed between the bottom end surface of the inner concave support portion 42 and the top end surface of the basic platform structure 1, and the plurality of top flotation air ports are arranged corresponding to the top end surface of the basic platform structure 1 and the top flotation air gap, so as to form a top flotation air gap between the inner concave support portion 42 and the top end surface of the basic platform structure 1 ... During the linear displacement of the concave supporting platform portion 42 and the air-floating turntable structure 6, gas is sprayed downward through a number of top-floating air ports, so that an air film is formed at the top-floating air gap position between the bottom end surface of the inner concave supporting platform portion 42 and the top end surface of the basic platform structure 1. The air film provides a vertical upward supporting force for the inner concave supporting platform portion 42, thereby effectively reducing the influence of gravity on the entire rotating supporting mechanism, thereby significantly reducing the slight deformation of the structural parts caused by the gravity of the air-floating turntable structure 6 and its assembly structure, and further effectively improving the stability and operation accuracy of the entire module.

[0058] Please continue to refer to Figure 1 The air-floating turntable structure 6 is configured as a hollow structure, and the base of the hollow air-floating turntable structure 6 is fixedly assembled on the top of the concave supporting platform portion 42, and the air-floating output end of the hollow air-floating turntable structure 6 is correspondingly formed in the hollow position thereof, so as to utilize the air-floating turntable structure 6 to form a high-precision large hollow design. Compared with the traditional middle solid air-floating turntable, the overall weight of the middle solid air-floating turntable is relatively large due to the need to deploy structures such as air ducts. On this basis, when the size is synchronously large, it will directly affect the rotational stability of the air-floating turntable, and the drive control and positioning accuracy are low. The above factors make it impossible to design the air-floating turntable in a large size; the large hollow design of this embodiment can effectively reduce the overall weight of the air-floating turntable structure 6, thereby allowing the air-floating turntable structure 6 to be designed in a large size, thereby effectively meeting the scene requirements of different sizes, and at the same time effectively avoiding the problems of unstable rotation motion and low drive control and positioning accuracy caused by heavy weight.

[0059] Please continue to refer to Figure 1 The rotational kinetic energy output end of the arc-shaped motor structure 7 is arranged correspondingly to the hollow air-floating output end of the air-floating turntable structure 6; thereby, a synchronous air-floating rotating wafer supporting platform is formed by cooperating with the hollow air-floating output end of the air-floating turntable structure 6 and the rotational kinetic energy output end of the arc-shaped motor structure 7, thereby effectively ensuring the stability and reliability of the wafer during the rotation process.

[0060] For details, please refer to Figure 1The arc motor structure 7 includes an arc motor stator 71 and an arc motor rotor 72; wherein, the arc motor stator 71 is fixedly assembled and connected to the base part of the air-floating turntable structure 6, and the arc motor stator 71 has an annular magnetic driving end; the arc motor rotor 72 is transmission-assembled and connected to the annular magnetic driving end of the arc motor stator 71, and the arc motor rotor 72 serves as the rotational kinetic energy output end of the arc motor structure 7, and its middle position is vertically corresponding to the air-floating output end of the air-floating turntable structure 6, so as to utilize the annular magnetic driving end of the arc motor stator 71 to correspond to the transmission arc motor rotor 72 and the air-floating output end of the air-floating turntable structure 6 to synchronously form an air-floating rotational motion function, and at the same time, it can further cooperate with the air-floating linear single-axis motion to effectively improve the functional stability of the detection motion, and can realize stable spiral path detection, which not only avoids the motion error caused by the superimposed axis, but also improves the detection efficiency, thereby improving the overall motion stability and measurement accuracy, and meeting the detection requirements in ultra-high precision measurement scenarios.

[0061] As another preferred scheme of the present embodiment, the air-floating turntable structure 6 is internally fixedly assembled with at least two groups of the grating scale structures 8, and the inner sides of the air-floating guide rails 21 of the two groups of the air-floating guide structures 2 are fixedly assembled with at least one group of the grating scale structures 8, so as to ensure the overall motion stability through the air-floating structure, and further assist in accurately obtaining the accurate motion position of the air-floating structure based on the signal feedback of the grating scale structure 8, thereby further significantly improving the detection motion positioning accuracy of the structure.

[0062] As another preferred scheme of the present embodiment, the wafer carrying surface formed by the arc-shaped motor rotor 72 is also provided with a plurality of negative pressure suction holes and / or vacuum suction cups, and the plurality of negative pressure suction holes are connected to the suction pump body through pipelines, so as to utilize the plurality of negative pressure suction holes and / or vacuum suction cups to effectively form an adsorption effect on the wafer carrying surface, thereby further improving the wafer support stability and detection accuracy.

[0063] like Figures 2 to 4 As shown, a large hollow detection method using the large hollow detection device based on high-precision air-floating uniaxial spiral motion specifically includes the following steps:

[0064] S1: placing the wafer to be inspected on the wafer carrying surface formed by the arc-shaped motor rotor 72;

[0065] The wafer is fixed by assisting in the adsorption effect formed by a plurality of negative pressure suction holes and / or vacuum suction cups;

[0066] S2: Start the control system of the large hollow inspection device. The control system first drives the air-floating turntable structure 6 and the arc motor structure 7 through its controller component, so that the wafer carrying surface formed by the arc motor rotor 72 gradually increases in speed until the wafer carrying surface reaches a stable state after running to a preset speed;

[0067] The purpose of this step is to make the wafer bearing surface formed by the arc-shaped motor rotor 72 reach a stable operating speed to ensure the stability and accuracy of subsequent wafer detection;

[0068] S3: The control system continues to obtain the initial "0" position of the rotation axis and the translation axis through the grating scale structure 8, and obtains the actual physical position of the motion axis through the feedback information of the grating scale structure 8 in real time in subsequent detection;

[0069] The specific process is as follows: the control system continues to obtain the initial "0" position of the motion axis corresponding to the wafer bearing surface formed by the air-floating guide rail 21 and the arc-shaped motor rotor 72 through its built-in photoelectric switch in coordination with the origin position of the grating scale structure 8, and maps the value of the grating scale structure 8 to the actual physical position, and obtains the actual physical position of the corresponding motion axis in real time through the feedback information of the grating scale structure 8 in subsequent detection;

[0070] S4: Start the linear drive structure 3. The linear displacement energy output end formed by the linear motor mover 32 drives the transmission platform structure 4, the air-floating turntable structure 6 and the arc motor structure 7 to synchronously perform air-floating linear displacement at a preset speed. In this way, the wafer bearing surface formed by the arc motor rotor 72 is driven into the detection state through the coordination of the air-floating linear displacement at a predetermined speed and the air-floating rotational motion at a predetermined speed, and the external detection probe a is synchronously started to form a spiral path corresponding to the wafer bearing surface for detection.

[0071] For details, please refer to Figures 2 to 4 , the method of forming a spiral path for detection includes:

[0072] It is known that the radius of the wafer carrying surface formed by the arc-shaped motor rotor 72 is R, and the linear displacement speed of the wafer carrying surface in the y-axis direction is set to V, and it rotates clockwise at an angular velocity of ω, and the initial angle is θ.

[0073] Based on the wafer point A, point A is the detection point of the detection probe a corresponding to the wafer, and the coordinates of point A are (x, y). Point A synchronizes the entire wafer carrying surface with a linear shift in the y-axis direction, and based on the overall rotation of the wafer carrying surface, point A gradually forms an arc path, and finally forms a spiral path corresponding to the entire process. The curve equation is:

[0074] R 2 sin2(θ+ωt)+(Rcos(θ+ωt)+Vt)2=R2

[0075] The curve equation is used to calculate the position point corresponding to the detection probe a when the corresponding time node is selected according to the set linear displacement speed V and angular velocity ω at any process time node, that is, point A (x, y), and then obtain the data information of the detection probe a at this time to obtain the detection information of the wafer.

[0076] Although the utility model has been described in detail above with general descriptions and specific embodiments, it is obvious to those skilled in the art that some modifications or improvements can be made to the utility model. Therefore, these modifications or improvements made without departing from the spirit of the utility model are within the scope of protection claimed by the utility model.

Claims

1. A large hollow detection device based on high-precision air-floating single-axis spiral motion, characterized in that: include: A linear drive assembly having at least one linear motion energy output terminal; The rotary drive component has a positioning base part and a rotational kinetic energy output end rotatably assembled on the positioning base part. The positioning base part and the linear position kinetic energy output end of the linear drive component are connected by a transmission fixed assembly, and the rotational kinetic energy output end corresponds to a wafer bearing surface.

2. The large hollow detection device based on high-precision air-floating single-axis spiral motion according to claim 1 is characterized in that: The linear drive assembly includes an air-floating guide structure and a linear drive structure; The air-floating guide structure and the linear drive structure are each provided with two groups, and the two groups of the air-floating guide structure and the two groups of the linear drive structure are respectively fixedly assembled and connected with each other in a one-to-one correspondence, and the two groups of the linear drive structures are respectively located in the outer sides of the two groups of the air-floating guide structures in a one-to-one correspondence; the linear drive structure forms an air-floating linear position movement energy output end based on the air-floating guide structure.

3. The large hollow detection device based on high-precision air-floating single-axis spiral motion according to claim 2 is characterized in that: Each group of the air-floating guide structures comprises an air-floating guide rail and an air-floating slide seat; The two groups of air-floating guide rails are arranged in parallel with each other; the two groups of air-floating sliding seats are slidably assembled on the two groups of air-floating guide rails in a one-to-one corresponding manner through the air-floating effect of the air-floating guide rails.

4. The large hollow detection device based on high-precision air-floating single-axis spiral motion according to claim 3 is characterized in that: Each set of the linear drive structures comprises a linear motor stator and a linear motor mover; The two groups of linear motor stators are respectively fixedly assembled and connected with the two groups of air-floating guide rails in a one-to-one correspondence, and the extension directions of the two groups of linear motor stators are arranged parallel to the extension directions of the two groups of air-floating guide rails; The two groups of linear motor movers are respectively and one-to-one correspondingly transmission-assembled on the two groups of linear motor stators, and the two groups of linear motor movers are respectively and one-to-one correspondingly fixedly assembled and connected between the two groups of air-floating sliding seats; the two groups of linear motor movers form the air-floating linear position motion energy output end.

5. The large hollow detection device based on high-precision air-floating single-axis spiral motion according to claim 4 is characterized in that: Also includes: The transmission support platform structure comprises a transmission docking portion and an inner concave support platform portion; The transmission docking parts are provided with two groups, and the two groups of the transmission docking parts are respectively fixedly assembled on the tops of the two groups of the air-floating sliding seat bodies in a one-to-one correspondence; The inner concave support portion is in a concave shape and is integrally fixedly arranged between the two sets of transmission docking portions; The positioning base portion of the rotary drive assembly is fixedly mounted on the concave support portion.

6. The large hollow detection device based on high-precision air-floating single-axis spiral motion according to claim 5 is characterized in that: The rotary drive assembly includes an air-floating turntable structure and an arc-shaped motor structure; The air-floating turntable structure is configured as a hollow structure, the base of the hollow air-floating turntable structure is fixedly mounted on the top of the concave support portion as the positioning base of the rotary drive assembly, and the air-floating output end of the hollow air-floating turntable structure is correspondingly formed in the hollow position thereof; The arc-shaped motor structure has a rotational kinetic energy output end, and the rotational kinetic energy output end is arranged correspondingly to the hollow air-floating output end portion of the air-floating turntable structure.

7. The large hollow detection device based on high-precision air-floating single-axis spiral motion according to claim 6 is characterized in that: The arc-shaped motor structure comprises an arc-shaped motor stator and an arc-shaped motor rotor; The arc-shaped motor stator is fixedly assembled and connected to the base of the air-floating turntable structure, and the arc-shaped motor stator has an annular magnetic driving end; The arc-shaped motor rotor is connected to the annular magnetic driving end of the arc-shaped motor stator by a transmission assembly, and the arc-shaped motor rotor serves as the rotational kinetic energy output end of the arc-shaped motor structure, and its middle position is vertically corresponding to the air-floating output end of the air-floating turntable structure; The wafer carrying surface is correspondingly formed by the arc-shaped motor rotor.

8. The large hollow detection device based on high-precision air-floating single-axis spiral motion according to claim 7 is characterized in that: The air-floating turntable structure is internally fixedly assembled with at least two sets of grating scale structures; And / or, at least one set of grating scale structures are fixedly mounted on the inner sides of the air-floating guide rails of the two sets of air-floating guide structures.

9. The large hollow detection device based on high-precision air-floating single-axis spiral motion according to claim 8 is characterized in that: The wafer carrying surface formed by the arc-shaped motor rotor is also provided with a plurality of negative pressure suction holes and / or vacuum suction cups, and the plurality of negative pressure suction holes are connected to the suction pump body through pipelines.

10. The large hollow detection device based on high-precision air-floating single-axis spiral motion according to claim 5, characterized in that: The concave base portion is equipped with a plurality of groups of air flotation channels, one end of the air flotation channel is connected to the air output mechanism, and the other end of the air flotation channel is formed with a plurality of top flotation air ports corresponding to the bottom end surface of the concave base portion, a top flotation air gap is formed between the bottom end surface of the concave base portion and the top end surface of the basic platform structure, and the plurality of top flotation air ports are arranged corresponding to the top end surface of the basic platform structure and between the top flotation air gap.

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