Double-sided grinding machine
By introducing hydraulic power units, servo motors and vacuum cleaners into the double-sided grinder, the dust problem is solved and the grinding precision and edge treatment of the silicon wafer are improved through the synchronous rotation of the grinding mechanism, achieving a cleaner grinding environment and easy to replace grinder.
Patent Information
- Application Number
- CN202421153764.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-24
- Publication Date
- 2025-01-03
- Estimated Expiration
- 2034-05-24
AI Technical Summary
The existing double-sided grinders generate dust during the grinding process, which affects the working environment and the edges and corners of the silicon wafer are not fine enough, and the grinding disc cannot be disassembled, affecting the later grinding effect.
A double-sided grinder including hydraulic power unit, servo motor and vacuum cleaner is designed. The grinding disc is rotated and polished by servo motor, dust is collected by using discharge hole slots and vacuum cleaner, and the upper and lower cover plate is controlled through the drive box. Move to maintain a clean environment; the grinding mechanism includes a side grinding plate and a top grinding disc, both rotating simultaneously to improve grinding fineness and allow removal and replacement of the top grinding disc.
It realizes effective dust collection and cleaning of the silicon wafer surface, improves the grinding precision and cleanliness of the working environment, and allows replacement and maintenance of the grinding disc, improving the effect of the silicon wafer corner treatment.
Smart Images
Figure CN222289713U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of silicon wafer grinding, in particular to a double-sided grinding machine. Background Art
[0002] The preparation of silicon materials includes directional cutting, grinding, polishing, etc., among which grinding is required after slicing. Since the silicon single crystal wafer after slicing does not have the curvature, flatness and parallelism required in the semiconductor manufacturing process, the grinding step becomes the key process for effectively improving the curvature, flatness and parallelism of the silicon single crystal wafer. If the surface quality of the semiconductor silicon wafer does not meet the use requirements, no matter how perfectly the other process links are controlled, it is impossible to obtain high-quality semiconductor devices.
[0003] After grinding, there are residues on the surface of the silicon wafer, including diamond sand, silicon powder, silicon oxide and metal oxide, etc. Before the next process, the protrusions on the surface need to be polished clean.
[0004] The existing technology has the following problems:
[0005] 1. In the existing double-sided grinding machine, the grinding space is not sealed during grinding, so the dust generated by grinding flies everywhere, which not only affects the working environment, but also causes the silicon wafer to absorb the dust, which requires secondary cleaning;
[0006] 2. The existing double-sided grinder has a single grinding method, which is to grind the silicon wafer by clamping it from both sides. The edges and corners of the silicon wafer are not properly processed, resulting in secondary processing of the silicon wafer, and the grinding disc cannot be disassembled, which affects the subsequent silicon wafer grinding. Utility Model Content
[0007] In order to solve the above technical problems, the technical solution adopted by the utility model is:
[0008] A double-sided grinder comprises a workbench, a hydraulic power unit is fixedly connected to one side of the top of the workbench, an output end of the hydraulic power unit is transmission-connected to a bracket body, a top end of the bracket body is fixedly connected to a driving motor, a fixed cover is fixedly connected to the bottom of the driving motor, a grinding mechanism is transmission-connected to the output end of the driving motor, and a placement groove is provided on the top of the workbench;
[0009] The workbench includes a protective shell, a servo motor is fixedly connected to the interior of the protective shell, the servo motor is installed in the interior of a placement slot, the output end of the servo motor is transmission-connected to a bottom grinding disc, discharge holes are provided around the bottom grinding disc, a dust suction device is embedded in the placement slot, one end of the bottom of the dust suction device is fixedly connected to a connecting pipe, and one end of the connecting pipe is fixedly connected to a dust collection box.
[0010] A further improvement of the technical solution of the utility model is that the dust suction device is sleeved on the outer wall of the bottom grinding disc, and the dust collecting box can be movably drawn out from one side of the protective shell.
[0011] A further improvement of the technical solution of the utility model is that the fixed cover includes a first connecting component, the inner wall of the first connecting component is connected to the bottom of the driving motor, the outer wall of the first connecting component is fixedly connected to the driving box, the bottom of the driving box is fixedly connected to the pulling mechanism, and the bottom of the pulling mechanism is fixedly connected to the cover plate.
[0012] A further improvement of the technical solution of the utility model is that the cover plate can be connected to the top of the placement groove through a pulling mechanism, and the interior of the cover plate passes through the output end of the driving motor.
[0013] A further improvement of the technical solution of the utility model is that the grinding mechanism includes a second connecting component, the interior of the second connecting component is threadedly connected to the output end of the driving motor, the outer wall of the second connecting component is fixedly connected to a connecting frame, one end of the connecting frame is fixedly connected to an edge grinding plate, the output end of the driving motor is fixedly connected to a connecting box, and the bottom of the connecting box is threadedly connected to a top grinding disc.
[0014] A further improvement of the technical solution of the utility model is that the top grinding disc can be disassembled and replaced, and the top grinding disc is installed inside the edge grinding plate.
[0015] Due to the adoption of the above technical solution, the utility model has achieved the following technical progress compared with the prior art:
[0016] The utility model provides a double-sided grinder, which controls the bottom grinding discs on the top to rotate and grind through a servo motor, and the bottom grinding disc is provided with a discharge hole groove inside, so that dust generated by grinding can be discharged from the discharge hole groove and absorbed into the inside by a dust suction device on the outside, and a connecting pipe is installed at the bottom of the dust suction device, and one end of the connecting pipe is connected to a dust collecting box, so that dust generated inside the device can be collected, and grinding is cleaner, and dust will not be attached to the surface of the object, making it cleaner, and at the same time, a driving box controls a pulling mechanism to pull the bottom cover plate to move up and down, so that the cover plate can be stably installed on the top of the placement groove, and the working environment can be made cleaner.
[0017] The utility model provides a double-sided grinder, wherein the grinding mechanism comprises two parts, an edge grinding plate and a top grinding disc, wherein the edge grinding plate is connected to the output end of a driving motor via a second connecting component, and when the output end rotates, the second connecting component drives the edge grinding plate to rotate and grind together, and at the same time, the bottom of the output end is movably connected with the top grinding disc, and the two are synchronously operated to grind the silicon wafer more finely, and the top grinding disc is connected via a connecting box, which is convenient for disassembly and replacement, making the device more convenient to use. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Figure 1 It is a structural schematic diagram of a double-sided grinding machine of the utility model;
[0019] Figure 2 It is a schematic diagram of the structure inside the workbench of the utility model;
[0020] Figure 3 It is a structural schematic diagram of the fixed cover of the utility model;
[0021] Figure 4 It is a structural schematic diagram of the grinding mechanism of the utility model.
[0022] In the figure: 1. workbench; 2. hydraulic power unit; 3. bracket body; 4. drive motor; 5. fixed cover; 6. grinding mechanism; 7. placement groove; 11. protective shell; 12. servo motor; 13. bottom grinding disc; 14. discharge hole groove; 15. dust suction device; 16. connecting pipe; 17. dust collecting box; 51. first connecting component; 52. drive box; 53. pulling mechanism; 54. cover plate; 61. second connecting component; 62. connecting frame; 63. side grinding plate; 64. connecting box; 65. top grinding disc. DETAILED DESCRIPTION
[0023] The present invention is further described in detail below in conjunction with the embodiments: Example 1
[0024] like Figure 1-4 As shown, the utility model provides a double-sided grinder, including a workbench 1, a hydraulic power unit 2 is fixedly connected to one side of the top of the workbench 1, the output end of the hydraulic power unit 2 is transmission-connected to a bracket body 3, the top of one end of the bracket body 3 is fixedly connected to a drive motor 4, the bottom of the drive motor 4 is fixedly connected to a fixed cover 5, the output end of the drive motor 4 is transmission-connected to a grinding mechanism 6, and a placement groove 7 is provided on the top of the workbench 1.
[0025] In this embodiment, through the joint action of the hydraulic power unit 2, the bracket body 3, the drive motor 4 and the placement groove 7, the device can be made more convenient to use. The top transmission connection of the hydraulic power unit 2 is connected to the bracket body 3, which can adjust the device to move up and down. The outer wall of the drive motor 4 is connected and fixed with a support frame, which makes the device connection and operation more convenient, and can make the fixed cover 5 aligned with the placement groove 7, so that the internal device can complete the work. Example 2
[0026] like Figure 1-4 As shown, on the basis of Example 1, the utility model provides a technical solution: preferably, the workbench 1 includes a protective shell 11, and a servo motor 12 is fixedly connected to the inside of the protective shell 11, and the servo motor 12 is installed inside the placement groove 7, and the output end of the servo motor 12 is transmission-connected to a bottom grinding disc 13, and discharge holes 14 are provided around the bottom grinding disc 13. A dust suction device 15 is embedded in the placement groove 7, and one end of the bottom of the dust suction device 15 is fixedly connected to a connecting pipe 16, and one end of the connecting pipe 16 is fixedly connected to a dust collection box 17.
[0027] The dust collecting device 15 is sleeved on the outer wall of the bottom grinding disc 13 , and the dust collecting box 17 can be movably drawn out from one side of the protective shell 11 .
[0028] In this embodiment, through the joint action of the servo motor 12, the bottom grinding disc 13, the dust suction device 15 and the dust collecting box 17, the device can be made more convenient to use. The servo motor 12 controls the bottom grinding disc 13 at the top to rotate and grind. The bottom grinding disc 13 is provided with a discharge hole groove 14, which can enable the dust generated by grinding to be discharged from the discharge hole groove 14 and absorbed into the inside by the dust suction device 15 on the outside. A connecting pipe 16 is installed at the bottom of the dust suction device 15, and one end of the connecting pipe 16 is connected to the dust collecting box 17, so that the dust generated inside the device can be collected, making the working environment cleaner, the grinding cleaner, and the surface of the object will not be attached to dust, making it cleaner. Example 3
[0029] like Figure 1-4 As shown, based on Example 1, the utility model provides a technical solution: preferably, the fixed cover 5 includes a first connecting component 51, the inner wall of the first connecting component 51 is connected to the bottom of the driving motor 4, the outer wall of the first connecting component 51 is fixedly connected to the driving box 52, the bottom of the driving box 52 is fixedly connected to the pulling mechanism 53, and the bottom of the pulling mechanism 53 is fixedly connected to the cover plate 54.
[0030] The cover plate 54 can be connected to the top of the placement groove 7 through the pulling mechanism 53 , and the interior of the cover plate 54 passes through the output end of the driving motor 4 .
[0031] In this embodiment, through the joint action of the first connecting component 51, the pulling mechanism 53 and the cover plate 54, the device can be made more convenient to use. The first connecting component 51 is connected to the bottom of the driving motor 4, and the pulling mechanism 53 is controlled by the driving box 52 to pull the bottom cover plate 54 up and down, so that the cover plate 54 can be stably installed on the top of the placement groove 7, making the device more convenient to use and making the working environment cleaner. Example 4
[0032] like Figure 1-4 As shown, on the basis of Example 1, the utility model provides a technical solution: preferably, the grinding mechanism 6 includes a second connecting component 61, the interior of the second connecting component 61 is threadedly connected to the output end of the driving motor 4, the outer wall of the second connecting component 61 is fixedly connected to a connecting frame 62, one end of the connecting frame 62 is fixedly connected to an edge grinding plate 63, the output end of the driving motor 4 is fixedly connected to a connecting box 64, and the bottom of the connecting box 64 is threadedly connected to a top grinding disc 65.
[0033] The top grinding disc 65 can be disassembled and replaced, and is installed inside the edge grinding plate 63 .
[0034] The following is a detailed description of the working principle of the double-sided grinding machine.
[0035] like Figure 1-4As shown, when this double-sided grinder is in use, the top transmission of the hydraulic power unit 2 is connected to the bracket body 3, which can adjust the device to move up and down, and the outer wall of the driving motor 4 is connected and fixed with a support frame, which makes the device connection and operation more convenient, and can make the fixed cover 5 align with the placement groove 7, so that the internal device can complete the work, and the servo motor 12 controls the bottom grinding disc 13 on the top to rotate and grind, and the bottom grinding disc 13 is provided with a discharge hole groove 14 inside, which can make the dust generated by grinding be discharged from the discharge hole groove 14 and absorbed into the inside by the dust suction device 15 on the outside, and a connecting pipe 16 is installed at the bottom of the dust suction device 15, and one end of the connecting pipe 16 is connected to the dust collection box 17, so that the dust generated inside the device can be collected, so that the working environment is cleaner, the grinding is cleaner, and the surface of the object will not be attached to dust. Dust is removed, making it cleaner. The first connecting component 51 is connected to the bottom of the driving motor 4. The driving box 52 controls the pulling mechanism 53 to pull the bottom cover 54 to move up and down, so that the cover 54 can be stably installed on the top of the placement groove 7, making the device more convenient to use and making the working environment cleaner. The grinding mechanism 6 includes two parts, an edge grinding plate 63 and a top grinding disc 65. The edge grinding plate 63 is connected to the output end of the driving motor 4 through the second connecting component 61. When the output end rotates, the second connecting component 61 drives the edge grinding plate 63 to rotate and grind together. At the same time, the bottom of the output end is movably connected with the top grinding disc 65, which is connected through the connecting box 64 for easy disassembly and replacement, making the device more convenient to use. The two are carried out simultaneously to grind the silicon wafer more finely.
[0036] The above generally describes the present invention in detail, but it is obvious to a person skilled in the art that some modifications or improvements can be made to the present invention. Therefore, modifications or improvements that do not deviate from the spirit of the present invention are within the scope of protection of the present invention.
Claims
1. A double-sided grinding machine, comprising a workbench (1), characterized in that: A hydraulic power unit (2) is fixedly connected to one side of the top of the workbench (1); the output end of the hydraulic power unit (2) is drivingly connected to a bracket body (3); a driving motor (4) is fixedly connected to the top of one end of the bracket body (3); a fixed cover (5) is fixedly connected to the bottom of the driving motor (4); the output end of the driving motor (4) is drivingly connected to a grinding mechanism (6); and a placement groove (7) is provided on the top of the workbench (1); The workbench (1) comprises a protective shell (11), the interior of the protective shell (11) is fixedly connected to a servo motor (12), the servo motor (12) is installed inside the placement groove (7), the output end of the servo motor (12) is drivingly connected to a bottom grinding disc (13), the bottom grinding disc (13) is provided with discharge holes (14) around it, a dust suction device (15) is embedded inside the placement groove (7), one end of the bottom of the dust suction device (15) is fixedly connected to a connecting pipe (16), and one end of the connecting pipe (16) is fixedly connected to a dust collection box (17).
2. A double-sided grinding machine according to claim 1, characterized in that: The dust suction device (15) is sleeved on the outer wall of the bottom grinding disc (13), and the dust collection box (17) can be movably drawn out from one side of the protective shell (11).
3. A double-sided grinding machine according to claim 1, characterized in that: The fixed cover (5) comprises a first connecting component (51), the inner wall of the first connecting component (51) is connected to the bottom of the driving motor (4), the outer wall of the first connecting component (51) is fixedly connected to a driving box (52), the bottom of the driving box (52) is fixedly connected to a pulling mechanism (53), and the bottom of the pulling mechanism (53) is fixedly connected to a cover plate (54).
4. A double-sided grinding machine according to claim 3, characterized in that: The cover plate (54) can be connected to the top of the placement groove (7) via a pulling mechanism (53), and the interior of the cover plate (54) penetrates the output end of the drive motor (4).
5. A double-sided grinding machine according to claim 1, characterized in that: The grinding mechanism (6) comprises a second connecting component (61), the interior of the second connecting component (61) being threadedly connected to the output end of the driving motor (4), the outer wall of the second connecting component (61) being fixedly connected to a connecting frame (62), one end of the connecting frame (62) being fixedly connected to an edge grinding plate (63), the output end of the driving motor (4) being fixedly connected to a connecting box (64), and the bottom of the connecting box (64) being threadedly connected to a top grinding disc (65).
6. A double-sided grinding machine according to claim 5, characterized in that: The top grinding disc (65) is removable and replaceable, and the top grinding disc (65) is installed inside the edge grinding plate (63).