Ceramic substrate coating device

Abstract

The utility model relates to a ceramic substrate coating device which comprises a working table, a conveying belt is arranged on the working table, a plurality of supporting devices are arranged on the conveying belt, the supporting devices are arranged at equal intervals, and ceramic substrates are placed on the supporting devices. The device is characterized in that a laser generation assembly, an auxiliary demolding assembly, an air cooling assembly and a second auxiliary demolding assembly are arranged on the workbench at equal intervals, a ceramic substrate sequentially passes through the positions under the assemblies, and the distance between the assemblies is equal to the arrangement distance between every two adjacent supporting devices; the ceramic substrate can be preliminarily demoulded under the matching action of the supporting device and the auxiliary demoulding assembly; the utility model has the benefits that the structure is relatively simple, and the cost is lower.

Description

Technical Field

[0001] The utility model relates to the technical field of ceramic substrate processing, in particular to a ceramic substrate coating device. Background Art

[0002] Ceramic substrate is a thin sheet supported by ceramic material, which is used to connect and support microelectronic components. In order to improve the performance of the substrate, meet the packaging requirements, adapt to the needs of high current transmission and high temperature applications, and adapt to extreme temperature conditions, the ceramic substrate often needs to be coated;

[0003] In the prior art, a ceramic plate vacuum sputtering coating device is disclosed, and its document number is: CN211112195U. The device includes a vacuum chamber, a revolving workpiece rack, an inner cylindrical sputtering target, an inner planar sputtering target, an inner ion source, an outer cylindrical sputtering target, an outer planar sputtering target and an outer ion source; the inner and outer ion sources are used for cleaning the substrate surface before coating and auxiliary deposition, which effectively improves the wettability and bonding strength of the coating with the ceramic substrate; the inner and outer cylindrical sputtering targets and the inner and outer planar sputtering targets are provided, which can realize the efficient deposition of composite thin films, and can also simultaneously perform single-sided and double-sided coating processing on flat or curved ceramic substrates, greatly improving work efficiency.

[0004] However, in the above scheme, vacuum sputtering is used when coating the ceramic substrate, and the process is complicated and delicate, and the cost is relatively high. Utility Model Content

[0005] In order to solve the above problems, the utility model provides a ceramic substrate coating device with a relatively simple structure and relatively low cost.

[0006] To achieve the above-mentioned purpose, the technical solution of the utility model is: a ceramic substrate coating device, including a workbench, a conveyor belt is arranged on the workbench, a supporting device is arranged on the conveyor belt, a plurality of supporting devices are arranged at equal intervals, a ceramic substrate is placed on the supporting device, a laser generating component and an auxiliary demolding component are arranged on the workbench, the ceramic substrate can pass under the laser generating component and the auxiliary demolding component, when the supporting device cooperates with the auxiliary demolding component, the ceramic substrate is controlled to move upward, the auxiliary demolding component includes a driving device and a positioning frame, the driving device is located directly below the positioning frame, the ceramic substrate can be moved between the positioning frame and the driving device, the driving device applies an upward thrust to the ceramic substrate, so that the ceramic substrate passes through the positioning frame.

[0007] Furthermore, the supporting device includes a printing table, a first sleeve is provided on the printing table, a cover plate is provided on the upper end of the first sleeve, a vertical axis passes through the center of the cover plate, the lower end of the vertical axis is connected to a flat support plate, the upper end of the vertical axis is connected to a support plate, and the support plate is connected to a side guard device.

[0008] Furthermore, a side cutout is provided on the first sleeve, and the driving device can enter the first sleeve through the side cutout, and at this time the driving device is located below the flat support plate.

[0009] Furthermore, the side guard device includes a second sleeve, the cross section of the second sleeve is in the shape of a U, the inner diameter of the second sleeve is matched with the size and shape of the supporting plate, and the supporting plate is located in the second sleeve.

[0010] Furthermore, a connecting plate is provided on the inner side surface of the second sleeve, and a through hole is provided at the center of the connecting plate. A connecting rod is inserted into the through hole. The upper end of the connecting rod is connected to the supporting plate, and the lower end of the connecting rod is connected to the limiting plate. A compression return spring is provided on the connecting rod, and the compression return spring is located between the limiting plate and the connecting plate.

[0011] Furthermore, an anti-slip plate is provided on the vertical axis, and the anti-slip plate is located above the cover plate.

[0012] Furthermore, the positioning frame is connected with a crank arm, the crank arm is connected to the workbench, the crank arm is connected with a supporting plate, and the driving device is arranged on the supporting plate.

[0013] Compared with the prior art, the utility model has the following beneficial effects: the utility model comprises a workbench, a conveyor belt is arranged on the workbench, a supporting device is arranged on the conveyor belt, a plurality of supporting devices are arranged at equal intervals, a ceramic substrate is placed on the supporting device, a laser generating component, an auxiliary demoulding component, an air cooling component, and a second auxiliary demoulding component are arranged at equal intervals on the workbench, the ceramic substrate passes directly under the above components in sequence, and the spacing between the above components is equal to the arrangement spacing between two adjacent supporting devices; a side guard device is connected to the supporting device, and the setting of the side guard device reduces to a certain extent the possibility that the metal coating flows to the side of the ceramic substrate to be coated when the printing component is coating the upper surface of the ceramic substrate to be coated;

[0014] The ceramic substrate can be initially demoulded with the cooperation of the supporting device and the auxiliary demoulding assembly, avoiding the possibility of the metal coating on the surface of the ceramic substrate being separated from the side protection device after cooling, so that the formed film on the surface of the ceramic substrate may be torn; the device has a simple structure and relatively low cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the main structure of the utility model;

[0016] Figure 2 This is a schematic diagram of the side view structure of the printing assembly of the utility model;

[0017] Figure 3 It is a schematic diagram of the front cross-sectional structure of the connection between the supporting device and the side guard device of the utility model;

[0018] Figure 4 This is a schematic diagram of the three-dimensional structure of the first sleeve of the utility model;

[0019] Figure 5 This is a schematic diagram of the three-dimensional structure of the second sleeve of the utility model;

[0020] Figure 6 This is a schematic diagram of the side view of the auxiliary demoulding component of the utility model;

[0021] Figure 7 This is a schematic diagram of the top view structure of the positioning frame of the utility model;

[0022] In the figure, 1-working table, 2-pillar, 3-conveyor belt, 4-supporting device, 401-printing table, 402-through hole, 403-cover plate, 404-side incision, 405-vertical axis, 406-flat support plate, 407-support plate, 408-anti-slip plate, 5-ceramic substrate, 6-laser generating component, 7-air cooling component, 8-auxiliary demoulding component, 801-positioning frame, 802-vertical plate, 803-horizontal plate, 804-first inclined rod, 805-supporting plate, 806-electric push rod, 807-push plate, 9-11-collection box, 12-scraper, 13-vertical arm, 14-horizontal arm, 15-knife seat, 16-side guard device, 1601-second sleeve, 1602-connecting plate, 1603-connecting rod, 1604-limiting plate, 1605-compression return spring. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the utility model, and are not used to limit the utility model. Obviously, the described embodiments are only a part of the embodiments of the utility model, rather than all of the embodiments. The components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various configurations. Based on the embodiments of the utility model, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the utility model. In the embodiment, the components of the embodiments of the application described and shown in the drawings here can be arranged and designed in various configurations. Therefore, the following detailed description of the embodiments of the application provided in the drawings is not intended to limit the scope of the application claimed for protection, but only represents the selected embodiments of the application.

[0024] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "front", "back" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0025] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection", and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection; it can be an electrical connection; it can be a hydraulic oil circuit connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0026] See also Figure 1 As shown, a ceramic substrate coating device comprises a workbench 1, a support 2 is connected below the workbench 1, a conveyor belt 3 is arranged on the workbench 1, a supporting device 4 is arranged on the conveyor belt 3, a ceramic substrate 5 to be coated that has been preliminarily cleaned is placed on the supporting device 4, a printing component is arranged above the supporting device 4, when the ceramic substrate 5 to be coated moves to below the printing component, the printing component makes the surface of the ceramic substrate 5 to be coated evenly covered with metal coating, a laser generating component 6 is arranged next to the printing component, and the laser generating component 6 is also connected to the side of the workbench 1, the ceramic substrate 5 to be coated can be moved to the bottom of the laser generating component 6, when the ceramic substrate When the laser generating assembly 5 moves to the bottom of the laser generating assembly 6, the high-energy laser decomposes the ceramic substrate and the metal, and then combines them in an ionic state; an air cooling assembly 7 and an auxiliary demoulding assembly 8 are arranged on the side of the laser generating assembly 6, and the auxiliary demoulding assembly 8 is located between the laser generating assembly 6 and the air cooling assembly 7. The air cooling assembly 7 can accelerate the cooling of the ceramic substrate 5 and the metal coating that have been combined in an ionic state. Before being cooled by the air cooling assembly 7, the auxiliary demoulding assembly 8 is required to be used to initially separate the ceramic substrate 5 from the supporting device 4. After being completely cooled by the air cooling assembly 7, the ceramic substrate 5 falls into the collection box connected to the end of the workbench along with the conveyor belt 3.

[0027] See also Figure 2As shown, the printing assembly includes a scraper 12 and a discharging device, wherein the scraper 12 is connected to the workbench 1 through a fixed frame, and the fixed frame includes a vertical arm 13, the vertical arm 13 is connected to the workbench 1, and the free end of the vertical arm 13 is connected to a horizontal arm 14, the horizontal arm 14 is located at the high end and is perpendicular to the vertical arm 13, and the horizontal arm 14 is connected to a knife seat 15, and the knife seat 15 is provided with the scraper 12, and the scraper 12 is located directly above the supporting device 4, and the scraper 12 and the ceramic substrate to be coated on the supporting device 4 are connected. The upper surfaces are in contact with each other. When the ceramic substrate to be coated moves with the conveyor belt 3, the scraper 12 scrapes the upper surface of the ceramic substrate to be coated. A horizontal pull plate is arranged on the vertical arm, and the discharge device includes an ink tray arranged on the horizontal pull plate. The scraper is located between the ink tray and the laser generating component. A plurality of material guide pipes are arranged on the ink tray. The material guide pipes are located between the ink tray and the scraper. The height of the material guide pipes is slightly greater than the height of the bottom edge of the scraper. The metal coating can flow to the surface of the ceramic substrate to be coated through the material guide pipes.

[0028] See also Figures 3 to 5 As shown, the supporting device 4 includes a printing table 401, a first sleeve is connected to the printing table 401, the cross section of the first sleeve is square, a cover plate 403 is integrally connected to the upper end of the first sleeve, a side cutout 404 is provided on the first sleeve, a through hole 402 is provided at the center of the cover plate 403, the through hole 402 extends downward to communicate with the side cutout 404, a vertical shaft 405 is inserted into the through hole 402, and the vertical shaft 405 can slide along the length direction of the through hole 402, a flat supporting plate 406 is connected to the lower end of the vertical shaft 405, and a supporting plate 407 is connected to the upper end of the vertical shaft 405, the supporting plate 407 is square, and the supporting plate 407 is adapted to the shape and size of the ceramic substrate to be coated, and an anti-slip plate 408 is also sleeved on the vertical shaft 405, and the anti-slip plate 408 is integrally connected to the vertical shaft 405. In the initial state, the anti-slip plate 408 is placed on the cover plate 403;

[0029] The supporting plate 407 is connected to a side guard device 16, which includes a second sleeve 1601. The second sleeve 1601 is adapted to the supporting plate 407, that is, the second sleeve 1601 is sleeved on the supporting plate 407. Connecting plates 1602 are arranged on two opposite sides of the second sleeve 1601. A through hole is arranged at the center of the connecting plate 1602. A connecting rod 1603 is inserted into the through hole. The upper end of the connecting rod 1603 is connected to the supporting plate 407, and the lower end of the connecting rod 1603 is connected to a limit plate 1604. A compression return spring 1605 is sleeved on the connecting rod 1603. The two ends of the compression return spring 1605 are respectively connected to the limit plate 1604 and the connecting plate 160 2 connection, in the initial state, the compression return spring 1605 is in a natural state, after the ceramic substrate to be coated is placed on the supporting plate 407, the distance from the upper surface of the supporting plate 407 to the high end of the second sleeve 1601 is equal to the thickness of the ceramic substrate to be coated, the space above the supporting plate 407 is the accommodating space, and the ceramic substrate to be coated is placed in the accommodating space, when the ceramic substrate to be coated is placed in the accommodating space, the top end of the second sleeve 1601 on the upper surface of the ceramic substrate to be coated is flush, and the setting of the side guard device reduces to a certain extent the possibility that the metal coating flows to the side of the ceramic substrate to be coated when the printing component is coating the upper surface of the ceramic substrate to be coated.

[0030] See also Figure 6 and Figure 7 As shown, the auxiliary demoulding assembly 8 includes a power device and a positioning frame 801. The positioning frame is arranged just above the conveyor belt 3. The positioning frame 801 is connected to the workbench 1 through a crank arm. The cross section of the crank arm is "L" shaped. The crank arm includes a vertical plate 802 and a horizontal plate 803. The vertical plate 802 and the horizontal plate 803 are connected in one piece. The vertical plate 802 is connected to the workbench 1, and the positioning frame 801 is connected to the horizontal plate 803. The cross section of the positioning frame 801 is in the shape of a "U". The positioning frame 801 is the same size and shape as the supporting plate 407, that is, the inner diameter of the positioning frame 801 is the same size and shape as the ceramic substrate to be coated. When the side guard device moves to the bottom of the positioning frame 801 along with the supporting device 4, the side guard device is just vertically aligned with the positioning frame 801 but the two are not in contact.

[0031] The power device includes a support plate 805 fixed on the vertical plate 902, the support plate 805 is located directly below the positioning frame 801, and an electric push rod 806 is connected above the support plate 805. The electric push rod 806 is vertically arranged, and a push plate 807 is arranged at the free end of the electric push rod 806. In the initial state, the electric push rod 806 is in a retracted state, and the vertical height of the push plate 807 is less than the vertical height of the flat support plate 407; the ceramic substrate completes the initial separation from the side guard device under the cooperation of the auxiliary demoulding component 8 and the supporting device 4, avoiding the separation of the metal coating on the surface of the ceramic substrate from the side guard device after cooling, so that the film formed on the surface of the ceramic substrate may be torn. In addition, a first inclined rod 804 is connected between the vertical plate 802 and the support plate 805. The arrangement of the first inclined rod 804 makes the electric push rod 806 more stable; the cooperation process of the side guard device and the auxiliary demoulding component 8 is as follows:

[0032] When the supporting device 4 moves the ceramic substrate to the first auxiliary demoulding assembly, the conveyor belt 3 stops working. At this time, the driving device just enters the first sleeve through the side cutout 404, and the central axis of the electric push rod and the vertical shaft are on the same vertical line. The electric push rod 806 is started. When the electric push rod 806 is extended, the flat support plate 407 moves vertically upward under the action of the push plate 807, and the support plate 407 moves vertically upward accordingly, that is, the ceramic substrate moves upward. In this process, the compression return spring 1605 moves upward, and the connecting plate 1602 moves vertically upward with the side guard device under the action of the compression return spring 1605. When the side guard device is aligned with the positioning frame 801, due to the positioning frame 8 01 has an obstructive effect on the side guard device. The side guard device no longer moves upward with the supporting plate 407, and the compression reset spring 1605 begins to compress. As the ceramic substrate continues to move upward, the ceramic substrate passes through the positioning frame 801 and disengages from the side guard device 16. At this time, the compression reset spring 1605 reaches the maximum deformation, and then the electric push rod 806 begins to shrink, that is, the push plate 807 no longer applies an upward thrust to the flat supporting plate 407. The supporting plate 407 returns to its initial position with the flat supporting plate 407 under the action of the reset force of the compression reset spring 1605. When the electric push rod 806 shrinks to the initial state, the conveyor belt 3 is started, and the first sleeve can move to the bottom of the air-cooling component 7 and be completely cooled by the air-cooling component 7.

[0033] In addition, a plurality of supporting devices 4 can be provided on the conveyor belt 3, and a ceramic substrate to be coated is placed on each supporting device 4, and the plurality of supporting devices 4 are arranged at equal intervals, and the structure of each supporting device 4 is the same; a laser generating component 6, an auxiliary demoulding component 8, and an air cooling component 7, and the spacing between them is equal to the arrangement spacing between the supporting devices 4, and a photoelectric sensor is provided on the workbench 1 at the same time, and when the supporting device is aligned with the photoelectric sensor, the photoelectric sensor sends a signal to the driving system controlling the operation of the conveyor belt 3, so that the conveyor belt 3 stops conveying (the specific driving system is an existing product and will not be described in detail), and at this time, different supporting devices 4 are aligned with the laser generating component 6 or the first auxiliary demoulding component or the air cooling component or the second auxiliary demoulding component;

[0034] In order to control stability, it is also possible to manually observe the support device 4 moving to the corresponding position, and then manually control the conveyor belt 3 to align each component with the support device 4, but in this case, the manual labor intensity is relatively large.

[0035] See also Figure 1 As shown, when using the above-mentioned ceramic substrate coating device, the ceramic substrate to be coated is placed on the printing table 401. When the ceramic substrate to be coated moves with the conveyor belt 3 to the bottom of the printing assembly, the metal coating is first applied from the ink tray to the side of the surface of the ceramic substrate to be coated close to the scraper. When the ceramic substrate to be coated passes directly under the scraper 12, the metal coating is evenly spread. Then, the ceramic substrate to be coated will move with the conveyor belt 3 to the bottom of the laser generating assembly 6. In this utility model, the order in which the ceramic substrates pass through the laser generating assembly 6 is divided into the first ceramic substrate, the second ceramic substrate, the third ceramic substrate, the fourth ceramic substrate, the fifth ceramic substrate, etc.

[0036] When the first ceramic substrate moves to the bottom of the laser generating assembly 6 along with the conveyor belt 3, the conveyor belt 3 stops working, and the high-energy laser emitted by the laser generating assembly 6 decomposes the surface of the first ceramic substrate and the metal coating, and after a period of decomposition, the two are combined in an ionic state, and then the conveyor belt 3 is manually made to continue working. When the second ceramic substrate moves to the bottom of the laser generating assembly 6, the conveyor belt 3 stops working. At this time, the first ceramic substrate just moves to the bottom of the auxiliary demolding assembly 8. The first ceramic substrate completes the initial demolding with the cooperation of the auxiliary demolding assembly 8 and the side guard device. When the third ceramic substrate moves to the bottom of the laser generating assembly 6, the conveyor belt 3 stops working. At this time, the first ceramic substrate just moves to the bottom of the air cooling component 7, and the second ceramic substrate just moves to the bottom of the auxiliary demolding component 8. The air cooling component 7 cools the first ceramic substrate. Under the action of the supporting device 4 and the auxiliary demolding component 8, the second ceramic substrate is initially separated from the side guard device. Then the conveyor belt 3 is started again. When the fourth ceramic substrate just moves to the bottom of the laser generating component 6, the conveyor belt 3 stops working, and the first ceramic substrate falls into the collecting box 11 with the movement of the conveyor belt 3. At this time, the second ceramic substrate moves to the bottom of the air cooling component 7, and the third ceramic substrate moves to the bottom of the auxiliary demolding component 8… and so on.

[0037] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the utility model, which should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.

Claims

1. A ceramic substrate coating device, comprising a workbench, a conveyor belt is arranged on the workbench, a supporting device is arranged on the conveyor belt, a plurality of supporting devices are arranged at equal intervals, and a ceramic substrate is placed on the supporting device, characterized in that: The workbench is provided with a laser generating component and an auxiliary demoulding component, and the ceramic substrate can pass under the laser generating component and the auxiliary demoulding component; When the supporting device cooperates with the auxiliary demoulding component, the ceramic substrate is controlled to move upward; The auxiliary demoulding assembly includes a driving device and a positioning frame. The driving device is located directly below the positioning frame. The ceramic substrate can be moved between the positioning frame and the driving device. The driving device applies an upward thrust to the ceramic substrate to allow the ceramic substrate to pass through the positioning frame.

2. A ceramic substrate coating device according to claim 1, characterized in that: The supporting device includes a printing platform, a first sleeve is arranged on the printing platform, a cover plate is arranged on the upper end of the first sleeve, a vertical axis passes through the center of the cover plate, the lower end of the vertical axis is connected to a flat supporting plate, the upper end of the vertical axis is connected to a supporting plate, and the supporting plate is connected to a side guard device.

3. A ceramic substrate coating device according to claim 2, characterized in that: The first sleeve is provided with a side cutout, and the driving device can enter the first sleeve through the side cutout, and at this time the driving device is located below the flat support plate.

4. The ceramic substrate coating device according to claim 2, characterized in that: The side guard device comprises a second sleeve, the cross section of the second sleeve is in the shape of a Chinese character U, the inner diameter of the second sleeve is matched with the size and shape of the supporting plate, and the supporting plate is located in the second sleeve.

5. The ceramic substrate coating device according to claim 4, characterized in that: The inner side surface of the second sleeve is provided with a connecting plate, and a through hole is provided at the center of the connecting plate. A connecting rod is inserted into the through hole. The upper end of the connecting rod is connected to the supporting plate, and the lower end of the connecting rod is connected to the limiting plate. A compression return spring is sleeved on the connecting rod, and the compression return spring is located between the limiting plate and the connecting plate.

6. The ceramic substrate coating device according to claim 2, characterized in that: An anti-slip plate is arranged on the vertical axis, and the anti-slip plate is located above the cover plate.

7. The ceramic substrate coating device according to claim 1, characterized in that: The positioning frame is connected with a crank arm, the crank arm is connected to the workbench, the crank arm is connected with a supporting plate, and the driving device is arranged on the supporting plate.

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