Heat preservation furnace door device

Abstract

The heat preservation furnace door device comprises a driving part, a furnace door, a base, a translation mechanism and a lifting mechanism, the translation mechanism is matched with the base in a reciprocating motion mode in the first direction, the driving part is arranged on the base, the driving end of the driving part is connected with the translation mechanism, and the lifting mechanism is matched with the translation mechanism in a reciprocating motion mode in the second direction. The furnace door is arranged on the lifting mechanism, the base is provided with a first guide hole and a second guide hole which are communicated with each other, the first guide hole and the second guide hole form a guide channel, the lifting mechanism is provided with a guide piece, and one end of the guide piece penetrates through the translation mechanism, extends into the guide channel and is in guide fit with the guide channel. According to the technical scheme, the problems that in the prior art, two driving mechanisms increase the assembling complexity of the furnace door opening and closing device, and the production cost is also increased can be solved.

Description

Technical Field

[0001] The utility model relates to the technical field of diffusion furnaces, in particular to a heat-insulating furnace door device. Background Art

[0002] The diffusion process of the cell includes phosphorus diffusion, boron diffusion, etc. At present, there are many related equipment in the industry, such as diffusion furnaces, chemical vapor deposition furnaces, etc. In the use of the above equipment, the furnace door is usually opened first, the boat carrying silicon wafers is allowed to enter the furnace tube of the above equipment, and then the furnace door is closed. The furnace door of the furnace tube is required to have good insulation and / or sealing effect.

[0003] In the related art, the furnace door opening and closing device drives the furnace door to move through two driving mechanisms in different directions. Specifically, the operation of blocking the furnace tube is to first drive the furnace door to move to a position opposite to the feed port of the furnace tube, and then drive the furnace door close to the feed port of the furnace tube to block it. The above steps can be reversed to separate the furnace door from the furnace tube. However, the two driving mechanisms not only increase the complexity of the assembly of the entire device structure, but also increase the production cost. Utility Model Content

[0004] The purpose of the utility model is to provide a heat-insulating furnace door device to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an insulation furnace door device, comprising a driving member, a furnace door, a base, a translation mechanism and a lifting mechanism, the translation mechanism and the base reciprocatingly move in a first direction, the driving member is arranged on the base, the driving end of the driving member is connected to the translation mechanism, the lifting mechanism and the translation mechanism reciprocatingly move in a second direction, the first direction is perpendicular to the second direction, the furnace door is arranged on the lifting mechanism, the base is provided with a first guide hole and a second guide hole connected to each other, the guiding direction of the first guide hole is parallel to the first direction, the first direction and the second direction both intersect with the guiding direction of the second guide hole, the first guide hole and the second guide hole form a guide channel, the lifting mechanism is provided with a guide member, one end of the guide member passes through the translation mechanism, extends into the guide channel, and guides and cooperates.

[0006] Preferably, it also includes a limiting member, which is arranged at one end of the base adjacent to the second guide hole. When the furnace door moves to a preset position and the guide member moves to limit engagement with the second guide hole, the translation mechanism limits engagement with the limiting member.

[0007] Preferably, the translation mechanism includes a connecting plate and a first slider group, the base is provided with a first guide rail group, the first slider group is arranged on the connecting plate, the first slider group is slidably matched with the first guide rail group, and the driving end of the driving member is connected to the connecting plate.

[0008] Preferably, the lifting mechanism includes a support plate and a second slider group, the translation mechanism is provided with a second guide rail group, the second slider group is arranged on the support plate, the second slider group and the second guide rail group are slidably matched, and the furnace door is arranged on the support plate.

[0009] Preferably, the translation mechanism is provided with a strip hole, one end of the guide member passes through the strip hole and extends into the guide channel, and the guide member and the strip hole are matched in upper limit positioning along the first direction.

[0010] Preferably, the guide member includes a connecting column and a bearing, the connecting column is arranged on the lifting mechanism, one end of the connecting column passes through the translation mechanism and extends into the guide channel, the bearing is sleeved on one end of the connecting column, and the bearing is rollingly fitted with the guide channel.

[0011] Preferably, the second guide hole is an arc-shaped hole.

[0012] The technical solution adopted in this application can achieve the following beneficial effects:

[0013] In an insulation furnace door device disclosed in the present application, a translation mechanism cooperates with a base to reciprocate along a first direction, a driving member is arranged on the base, a driving end of the driving member is connected to the translation mechanism, a lifting mechanism cooperates with the translation mechanism to reciprocate along a second direction, the first direction is perpendicular to the second direction, the furnace door is arranged on the lifting mechanism, the base is provided with a first guide hole and a second guide hole that are interconnected, the guiding direction of the first guide hole is parallel to the first direction, the first direction and the second direction both intersect with the guiding direction of the second guide hole, the first guide hole and the second guide hole form a guide channel, the lifting mechanism is provided with a guide member, one end of the guide member passes through the translation mechanism, extends into the guide channel, and cooperates with the guide.

[0014] In the process of the heat-insulating furnace door device blocking the furnace tube, the driving member drives the translation mechanism to move in the first direction, the lifting mechanism and the furnace door move with the translation mechanism, and the guide member cooperates with the first guide hole. When the guide member moves to cooperate with the second guide hole, the translation mechanism still moves in the first direction, and because the first direction and the second direction both intersect with the guiding direction of the second guide hole, the lifting mechanism moves in the first direction and the second direction at the same time, and the furnace door moves accordingly to seal and cooperate with the furnace tube; in the process of the heat-insulating furnace door device moving away from the furnace tube, the guide member cooperates with the guiding of the second guide hole, and the lifting mechanism not only moves in the direction opposite to the first direction as the translation mechanism is driven by the driving member, but also moves in the direction opposite to the second direction, and the furnace door is separated from the furnace tube. When the guide member moves to cooperate with the first guide hole, the driving member drives the translation mechanism to move in the direction opposite to the first direction, and the lifting mechanism and the furnace door move with the translation mechanism.

[0015] The above structure forms a guiding channel through the guiding cooperation of the guiding member and the first guiding hole and the second guiding hole, so that the furnace door can be moved in two different directions only by the driving force of one driving member. While meeting the requirements for the combination and separation of the furnace door and the furnace tube, the number of driving members is reduced, the structural design is simplified, the installation is facilitated, and the production cost is reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0017] Figure 1 A schematic diagram of the structure of the heat preservation furnace door device disclosed in the embodiment of the present application;

[0018] Figure 2 It is a front view of the heat preservation furnace door device disclosed in the embodiment of the present application;

[0019] Figure 3 A rear view of the heat preservation furnace door device disclosed in an embodiment of the present application;

[0020] Figure 4 for Figure 2 sectional view of .

[0021] In the figure: 100, driving member; 200, furnace door; 300, base; 400, translation mechanism; 410, connecting plate; 420, first slider group; 500, lifting mechanism; 510, support plate; 520, second slider group; 530, guide member; 531, connecting column; 532, bearing; 600, limit member; 700, first guide rail group; 800, second guide rail group; A, first guide hole; B, second guide hole; C, strip hole. DETAILED DESCRIPTION

[0022] In order to facilitate the understanding of the present invention, the present invention will be described more comprehensively with reference to the relevant drawings. The drawings provide preferred embodiments of the present invention. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thoroughly and comprehensively understood.

[0023] It should be noted that when an element is referred to as being "disposed on" another element, it may be directly on the other element or there may be an intermediate element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element at the same time.

[0024] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention.

[0025] like Figures 1 to 4 As shown, the present application discloses a heat-insulating furnace door device, which includes a driving member 100 , a furnace door 200 , a base 300 , a translation mechanism 400 and a lifting mechanism 500 .

[0026] Specifically, the translation mechanism 400 cooperates with the base 300 to reciprocate along the first direction, the driving member 100 is arranged on the base 300, and the driving end of the driving member 100 is connected to the translation mechanism 400. The lifting mechanism 500 cooperates with the translation mechanism 400 to reciprocate along the second direction. The first direction is perpendicular to the second direction. The furnace door 200 is arranged on the lifting mechanism 500. The base 300 is provided with a first guide hole A and a second guide hole B that are interconnected. The guiding direction of the first guide hole A is parallel to the first direction, and the first direction and the second direction both intersect with the guiding direction of the second guide hole B. The first guide hole A and the second guide hole B form a guide channel. The lifting mechanism 500 is provided with a guide member 530, and one end of the guide member 530 passes through the translation mechanism 400, extends into the guide channel, and cooperates with the guide.

[0027] In the process of the heat preservation furnace door device blocking the furnace tube, the driving member 100 drives the translation mechanism 400 to move along the first direction, the lifting mechanism 500 and the furnace door 200 move with the translation mechanism 400, and the guide member 530 is guided and matched with the first guide hole A. When the guide member 530 moves to be guided and matched with the second guide hole B, the translation mechanism 400 still moves along the first direction. Since the first direction and the second direction both intersect with the guiding direction of the second guide hole B, the lifting mechanism 500 moves along the first direction and the second direction at the same time, and the furnace door 200 moves accordingly to be sealed and matched with the furnace tube. In the process of the heat-insulating furnace door device moving away from the furnace tube, the guide member 530 cooperates with the second guide hole B, and the lifting mechanism 500 not only moves in the direction opposite to the first direction as the translation mechanism 400 is driven by the driving member 100, but also moves in the direction opposite to the second direction, and the furnace door 200 is separated from the furnace tube. When the guide member 530 moves to cooperate with the first guide hole A, the driving member 100 drives the translation mechanism 400 to move in the direction opposite to the first direction, and the lifting mechanism 500 and the furnace door 200 move with the translation mechanism 400.

[0028] The above structure forms a guiding channel through the guide member 530 and the first guide hole A and the second guide hole B, so that the furnace door 200 can be moved in two different directions only by the driving force of one driving member 100. While meeting the requirements for combining and separating the furnace door 200 and the furnace tube, the number of driving members 100 is reduced, the structural design is simplified, installation is facilitated, and production costs are reduced.

[0029] In addition, the driving member 100 may be a specific driving structure such as a telescopic electric cylinder, a telescopic air cylinder, a synchronous belt, etc., and this application does not impose any limitation on this.

[0030] In the embodiment of the present application, the disclosed heat-insulating furnace door device may further include a stopper 600. Specifically, the stopper 600 is disposed at one end of the base 300 near the second guide hole B. When the furnace door 200 moves to a preset position (referring to a position relative to the furnace tube) and the guide member 530 moves to a position-limiting match with the second guide hole B, the translation mechanism 400 is position-limitingly matched with the stopper 600. The above structure improves the accuracy of the furnace door 200 moving to a position relative to the furnace tube through two position-limiting matching structures.

[0031] In an embodiment of the present application, the translation mechanism 400 may include a connecting plate 410 and a first slider group 420. Specifically, the base 300 is provided with a first guide rail group 700, the first slider group 420 is provided on the connecting plate 410, the first slider group 420 is slidably matched with the first guide rail group 700, and the driving end of the driving member 100 is connected to the connecting plate 410.

[0032] Compared with the meshing cooperation between the chain and the sprocket and the rolling cooperation between the roller and the guide rail, the sliding cooperation between the first slider group 420 and the first guide rail group 700 in the above structure has the characteristics of good stability and high precision.

[0033] In an embodiment of the present application, the lifting mechanism 500 may include a support plate 510 and a second slider group 520. Specifically, the translation mechanism 400 is provided with a second guide rail group 800, the second slider group 520 is provided on the support plate 510, the second slider group 520 slides in cooperation with the second guide rail group 800, and the furnace door 200 is provided on the support plate 510.

[0034] In the embodiment of the present application, the translation mechanism 400 may be provided with a strip hole C. Specifically, one end of the guide member 530 passes through the strip hole C and extends into the guide channel. The guide member 530 cooperates with the strip hole C in the upper limit position along the first direction so that the lifting mechanism 500 can only move back and forth along the second direction relative to the translation mechanism 400, thereby improving the movement accuracy of the lifting mechanism 500. At the same time, the design of providing the strip hole C in the translation mechanism 400 is conducive to optimizing the structural design. The translation mechanism 400 and the lifting mechanism 500 can be stacked and spaced apart to reduce space occupancy.

[0035] In an embodiment of the present application, the guide member 530 may include a connecting column 531 and a bearing 532. Specifically, the connecting column 531 is arranged on the lifting mechanism 500, one end of the connecting column 531 passes through the translation mechanism 400 and extends into the guide channel, the bearing 532 is sleeved on one end of the connecting column 531, and the bearing 532 rolls with the guide channel.

[0036] The above structure reduces the friction loss of the guide member 530 by rolling fit. If the guide member 530 is a guide shaft, the guide shaft and the guide channel are slidably fitted, and the damaged position of the guide shaft is always the position in contact with the guide channel, thereby shortening the service life of the guide member 530.

[0037] In the embodiment of the present application, the second guide hole B may be an arc-shaped hole, which is beneficial for gradually increasing the component force of the driving force of the driving member 100 along the second direction, thereby facilitating increasing the moving speed of the lifting mechanism 500.

[0038] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A heat preservation furnace door device, characterized in that: The invention comprises a driving member (100), a furnace door (200), a base (300), a translation mechanism (400) and a lifting mechanism (500), wherein the translation mechanism (400) cooperates with the base (300) to move back and forth in a first direction, the driving member (100) is arranged on the base (300), the driving end of the driving member (100) is connected to the translation mechanism (400), the lifting mechanism (500) cooperates with the translation mechanism (400) to move back and forth in a second direction, the first direction is perpendicular to the second direction, the furnace door (200) is arranged at the base (300), and the lifting mechanism (500) cooperates with the translation mechanism (400) to move back and forth in a second direction. On the lifting mechanism (500), the base (300) is provided with a first guide hole (A) and a second guide hole (B) which are interconnected, the guide direction of the first guide hole (A) is parallel to the first direction, the first direction and the second direction both intersect with the guide direction of the second guide hole (B), the first guide hole (A) and the second guide hole (B) form a guide channel, and the lifting mechanism (500) is provided with a guide member (530), one end of the guide member (530) passes through the translation mechanism (400) and extends into the guide channel for guiding cooperation.

2. The heat-insulating furnace door device according to claim 1, characterized in that: It also includes a limiting member (600), which is arranged at one end of the base (300) adjacent to the second guide hole (B). When the furnace door (200) moves to a preset position and the guide member (530) moves to a limiting position with the second guide hole (B), the translation mechanism (400) is limitedly matched with the limiting member (600).

3. The heat-insulating furnace door device according to claim 1, characterized in that: The translation mechanism (400) comprises a connecting plate (410) and a first slider group (420); the base (300) is provided with a first guide rail group (700); the first slider group (420) is provided on the connecting plate (410); the first slider group (420) and the first guide rail group (700) are slidably matched; and the driving end of the driving member (100) is connected to the connecting plate (410).

4. The heat-insulating furnace door device according to claim 1, characterized in that: The lifting mechanism (500) comprises a support plate (510) and a second slider group (520); the translation mechanism (400) is provided with a second guide rail group (800); the second slider group (520) is provided on the support plate (510); the second slider group (520) is slidably matched with the second guide rail group (800); and the furnace door (200) is provided on the support plate (510).

5. The heat-insulating furnace door device according to claim 1, characterized in that: The translation mechanism (400) is provided with a strip hole (C), one end of the guide member (530) passes through the strip hole (C) and extends into the guide channel, and the guide member (530) cooperates with the strip hole (C) in an upper limit position along the first direction.

6. The heat-insulating furnace door device according to claim 1, characterized in that: The guide member (530) includes a connecting column (531) and a bearing (532), wherein the connecting column (531) is disposed on the lifting mechanism (500), one end of the connecting column (531) passes through the translation mechanism (400) and extends into the guide channel, and the bearing (532) is sleeved on one end of the connecting column (531), and the bearing (532) is in rolling engagement with the guide channel.

7. The heat-insulating furnace door device according to claim 1, characterized in that: The second guide hole (B) is an arc-shaped hole.

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