Buckle type wafer brush

Abstract

The utility model relates to a buckle type wafer brush which comprises a base, a fixing buckle is arranged on the upper side of the base, the base is detachably or fixedly connected with the fixing buckle, a brush head is arranged on the upper side of the base, the brush head is limited at the position of the upper side of the base after the fixing buckle and the base are fixed, an open hole is formed in the top of the fixing buckle, and the open hole is communicated with the open hole. The brush head extends to the outer side of the fixing buckle at the opening position of the fixing buckle, the base and the fixing buckle are fixedly connected together, then the brush head in the middle is limited between the base and the fixing buckle, the brush head is fixed, at the moment, the brush head can be fixed without glue, no glue is dissolved out in the using process, and therefore in the wafer cleaning process, the service life of the brush head is prolonged. And the cleaning effect can be improved.

Description

Technical Field

[0001] The utility model relates to the field of wafer cleaning precision parts, in particular to a snap-on wafer brush which can avoid particle pollution caused by adhesive materials and has a cleaning body structure that improves the wafer cleaning yield. Background Art

[0002] In the wafer cleaning process, the brush head is a crucial component. The brush head generally adopts a base and a sponge brush head. The sponge brush head is fixed to the base, and then the whole is fixed on the cleaning equipment. At this time, in order to ensure the cleaning quality, the sponge brush head and the base need to be firmly fixed, and there should be no looseness between the two. Therefore, in the prior art, glue is generally used to fix the sponge brush head and the base together, but at this time, glue will be introduced. Even if the brush head with glue is treated many times in the early stage, since the brush head needs to be cleaned with cleaning fluid during use, part of the glue will be debonded and dissolved during the cleaning process, thereby contaminating the cleaning fluid and the wafer surface, resulting in low cleaning efficiency, poor yield, and high rework cost. Utility Model Content

[0003] Based on this, it is necessary to provide a snap-on wafer brush to address the problems in the prior art.

[0004] A clip-on wafer brush, characterized in that it includes a base, a fixing buckle is provided on the upper side of the base, the base and the fixing buckle are detachably connected or fixedly connected, a brush head is provided on the upper side of the base, and the brush head is limited to the upper position of the base after the fixing buckle is fixed to the base, an opening is provided on the top of the fixing buckle, and the brush head extends to the outside of the fixing buckle at the position of the fixing buckle opening.

[0005] In one embodiment, the base is provided with a positioning platform, and the brush head is located at an upper side of the positioning platform.

[0006] In one embodiment, the fixing buckle includes a clamping portion at the top position, a connecting portion connected to the base is provided around the clamping portion, the connecting portion is adapted to the shape of the base, and the opening is provided in the middle position of the clamping portion.

[0007] In one embodiment, the brush head includes a fixing part and a brush head part. The size of the brush head part is smaller than that of the fixing part, and a step is formed at the connection. When the fixing buckle is connected to the base, the fixing part is located in the accommodating space formed by the base and the fixing buckle. The brush head part extends from the opening position of the fixing buckle to the outside of the fixing buckle, and the clamping part of the fixing buckle is located on the upper side of the step at the connection.

[0008] In one of the embodiments, an annular groove is provided between the positioning platform and the outer side wall of the base, and when the fixing buckle is fixed to the base, the connecting portion of the fixing buckle is located in the annular groove.

[0009] In one of the embodiments, a plurality of first fixing concave points are provided on the surface of the connection portion of the fixing buckle, and a corresponding second fixing convex point is provided in the annular groove of the base. When the fixing seat is fixed to the base, the first fixing concave points and the second fixing convex points are engaged with each other, thereby fixing the fixing seat and the base together.

[0010] In one of the embodiments, a protrusion matching the shape of the bottom of the brush head is provided on the top of the positioning platform.

[0011] In one embodiment, the top surface of the positioning platform is a curved surface that is higher in the middle and lower around the periphery.

[0012] In one of the embodiments, a plurality of limiting protrusions are provided on the inner side surface of the fixing buckle, and when the brush head is between the base and the fixing buckle, the positioning protrusions abut against the outer surface of the brush head.

[0013] In one of the embodiments, the base is provided with a plurality of fixing grooves, the bottom of the brush head is provided with a connecting protrusion extending into the fixing groove, and the brush head and the connecting protrusion are integrally formed.

[0014] The above-mentioned clip-on wafer brush has a base and a fixing buckle fixedly connected together, thereby restricting the brush head in the middle position between the two, thereby fixing the brush head. At this time, there is no need to use glue to fix the brush head. During use, no glue will be dissolved, thereby improving the cleaning effect during the wafer cleaning process. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the overall structure of the clip-on wafer brush of the utility model;

[0016] Figure 2 This is a schematic diagram of the structure of the clip-on wafer brush base of the utility model;

[0017] Figure 3 This is a cross-sectional structural bottom view of the clip-on wafer brush base of the utility model;

[0018] Figure 4 This is a schematic diagram of the structure of the clip-on wafer brush fixing buckle of the utility model;

[0019] Figure 5 This is a schematic diagram of the structure of the clip-on wafer brush head of the utility model;

[0020] Among them, 1, base; 11, positioning platform; 12, annular groove; 13, second fixed protrusion; 14, protrusion; 15, arc surface; 16, fixed groove;

[0021] 2. fixing buckle; 21. opening; 22. pressing part; 23. connection; part 24. first fixing concave point; 25. limiting protrusion;

[0022] 3. Brush head; 31. Fixing part; 32. Brush head; 33. Connecting protrusion. DETAILED DESCRIPTION

[0023] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the utility model. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below.

[0024] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may also be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. In contrast, when an element is referred to as being "directly on" another element, there is no intermediate element. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only."

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art in the technical field of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0026] like Figures 1 to 5 As shown, a snap-on wafer brush is characterized in that it includes a base 1, a fixing buckle 2 is provided on the upper side of the base 1, the base 1 and the fixing buckle 2 are detachably connected or fixedly connected, a brush head 3 is provided on the upper side of the base 1, and the brush head 3 is limited to the upper position of the base 1 after the fixing buckle 2 is fixed to the base 1, an opening 21 is provided on the top of the fixing buckle 2, and the brush head 3 extends to the outside of the fixing buckle 2 at the position of the opening 21 of the fixing buckle 2.

[0027] Compared with the glue fixing method used in the prior art, the base 1 and the fixing buckle 2 are fixedly connected together, thereby restricting the brush head 3 in the middle position between the two, thereby fixing the brush head 3. At this time, the brush head 3 can be fixed without using glue. During use, no glue will be dissolved, thereby improving the cleaning effect during the wafer cleaning process.

[0028] At this time, the brush head 3 is located at the upper side of the base 1 . Therefore, in order to position the brush head 3 , in this embodiment, the base 1 is provided with a positioning platform 11 , and the brush head 3 is located at the upper side of the positioning platform 11 .

[0029] After the base 1 is fixed, the fixing buckle 2 limits the brush head 3 between the two. In the present embodiment, the fixing buckle 2 includes a clamping portion 22 at the top position, and a connecting portion 23 connected to the base 1 is provided around the clamping portion 22. The connecting portion 23 is adapted to the shape of the base 1, and the opening 21 is arranged in the middle position of the clamping portion 22.

[0030] The brush head 3 is a structure for cleaning wafers, so the brush head 3 needs to be partially exposed. In this embodiment, the brush head 3 includes a fixing portion 31 and a brush head portion 32. The size of the brush head portion 32 is smaller than that of the fixing portion 31, and a step is formed at the connection. When the fixing buckle 2 is connected to the base 1, the fixing portion 31 is located in the accommodating space formed by the base 1 and the fixing buckle 2. The brush head portion 32 extends from the opening 21 of the fixing buckle 2 to the outside of the fixing buckle 2. The clamping portion 22 of the fixing buckle 2 is located on the upper side of the step at the connection. At this time, the brush head 3 is composed of two sections of cylinders with different diameters. The size of the opening 21 at the clamping portion 22 corresponds to the size of the brush head portion 32. The brush head portion 32 can extend to the outside of the fixing buckle 2 at the opening 21. At the same time, the clamping portion 22 of the fixing buckle 2 restricts the brush head 3 from falling out of the opening position of the fixing buckle 2, thereby fixing the brush head 3.

[0031] When the fixing buckle 2 is connected to the base 1, in order to facilitate positioning and fixing, in this embodiment, an annular groove 12 is provided between the positioning platform 11 and the outer wall of the base 1. When the fixing buckle 2 is fixed to the base 1, the connecting portion 23 of the fixing buckle 2 is located in the annular groove 12.

[0032] As for the detachable fixation of the fixing buckle 2 and the base 1, in this embodiment, the surface of the connection portion 23 of the fixing buckle 2 is provided with a plurality of first fixing concave points 24, and the annular groove 12 of the base 1 is provided with corresponding second fixing convex points 13. When the fixing seat is fixed to the base 1, the first fixing concave points 24 and the second fixing convex points 13 are engaged, thereby fixing the fixing seat to the base 1 together. By engaging the first fixing concave points 24 and the second fixing convex points 13, the fixing buckle 2 and the base 1 can be fixedly connected together. Of course, at this time, other buckle structures, such as cantilever buckles, etc., can also be used. At this time, after placing the brush head 3 on the upper side of the positioning platform 11 of the base 1, the fixing buckle 2 is moved downward, thereby fixing the fixing buckle 2 and the base 1 together, and then restricting the brush head 3 between the fixing buckle 2 and the base 1, thereby achieving the fixation of the brush head 3.

[0033] Since the brush head 3 is made of a material with a certain elasticity (sponge in this embodiment), the brush head 3 will be deformed to a certain extent when the brush head 3 is limited between the fixing buckle 2 and the base 1. At this time, in order to avoid the shape of the brush head 3 outside the brush head 3 affecting the shape of the brush portion 32 when the brush head 3 is deformed, in this embodiment, a protrusion 14 adapted to the shape of the bottom of the brush head 3 is provided on the top of the positioning platform 11. The brush head 3 is now composed of two sections of cylinders with different diameters. When the fixing buckle 2 is fixed to the base 1, the fixing buckle 2 will act downward on the brush head 3, and the action point is the contact position between the clamping portion 22 and the brush head 3, that is, at the upper side of the fixed portion 31 of the brush head 3. In this way, the brush head 3 will undergo a certain deformation due to uneven force, thereby causing the brush head portion 32 at the outer position to also undergo a certain deformation. Therefore, a protrusion 14 is provided on the positioning platform 11 of the base 1. In this way, the protrusion 14 acts on the bottom position of the fixed portion 31 of the brush head 3. When the fixing buckle 2 is clamped and fixed to the base 1 to fix the brush head 3, the upper and lower sides of the fixed portion 31 of the brush head 3 are both subjected to external force, thereby avoiding large deformation of the brush head 3 and thus avoiding affecting the normal use of the brush head 3.

[0034] Furthermore, in order to prevent the brush head 32 at the top of the brush head 3 from being deformed toward the axial position under the action of the clamping portion 22 of the fixing buckle 2, in the present embodiment, the top surface of the positioning platform 11 is an arc surface 15 which is higher in the middle and lower at the periphery. Setting the top surface of the positioning platform 11 as the arc surface 15 can further reduce the deformation of the brush head 3 caused by the fixing buckle 2.

[0035] In order to further limit the brush head 3 between the fixing port and the base 1, in this embodiment, the inner side surface of the fixing buckle 2 is provided with a plurality of limiting protrusions 25. When the brush head 3 is between the base 1 and the fixing buckle 2, the positioning protrusion 14 abuts against the outer surface of the brush head 3. The pressing portion 22 of the fixing portion 31 acts on the brush head 3 to prevent the brush head 3 from moving. However, since the inner side surface of the pressing portion 22 of the fixing buckle 2 is a plane, the brush head 3 rotates relative to the base 1 and the fixing buckle 2 during use of the brush head 3. Therefore, in order to avoid this situation, a limiting protrusion 25 is provided on the inner side surface of the fixing buckle 2. At this time, the limiting protrusion 25 can be located at the inner side surface of the pressing portion 22 and / or the inner side surface of the connecting portion 23, and abuts against the brush head 3. In this embodiment, the inner side surface of the limiting protrusion 25 pressing portion 22 is convenient for assembly after production. After assembly, the limiting protrusion 25 acts on the brush head 3, thereby further fixing the brush head 3.

[0036] The brush head 3 is fixed between the base 1 and the fixing buckle 2. At this time, in order to further prevent the brush head 3 from moving during use, in the present embodiment, the base 1 is provided with a plurality of fixing grooves 16, and the bottom of the brush head 3 is provided with a connecting protrusion 33 extending into the fixing groove 16. The brush head 3 and the connecting protrusion 33 are integrally formed. At this time, the fixing groove 16 can be a hole or a threaded hole or an irregular groove or a regular groove (such as a rectangular groove). The brush head 3 and the connecting protrusion 33 are integrally formed during production, thereby improving the firmness between the brush head 3 and the base 1, and further preventing the brush head 3 from moving during use.

[0037] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0038] The above-mentioned embodiments only express several implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A snap-on wafer brush, characterized in that: It includes a base, a fixing buckle is provided on the upper side of the base, the base and the fixing buckle are detachably connected or fixedly connected, a brush head is provided on the upper side of the base, and the brush head is limited to the upper side of the base after the fixing buckle is fixed to the base, an opening is provided on the top of the fixing buckle, and the brush head extends to the outside of the fixing buckle at the position of the fixing buckle opening.

2. The snap-on wafer brush according to claim 1, characterized in that: The base is provided with a positioning platform, and the brush head is located at the upper side of the positioning platform.

3. The snap-on wafer brush according to claim 2, characterized in that: The fixing buckle comprises a clamping portion at the top position, a connecting portion connected to the base is arranged around the clamping portion, the connecting portion is adapted to the shape of the base, and the opening is arranged in the middle position of the clamping portion.

4. The snap-on wafer brush according to claim 3, characterized in that: The brush head includes a fixing part and a brush head part. The size of the brush head part is smaller than that of the fixing part, and a step is formed at the connection. When the fixing buckle is connected to the base, the fixing part is located in the accommodating space formed by the base and the fixing buckle. The brush head part extends from the opening position of the fixing buckle to the outside of the fixing buckle, and the clamping part of the fixing buckle is located on the upper side of the step at the connection.

5. The snap-on wafer brush according to claim 4, characterized in that: An annular groove is provided between the positioning platform and the outer side wall of the base. When the fixing buckle is fixed to the base, the connecting portion of the fixing buckle is located in the annular groove.

6. The snap-on wafer brush according to claim 5, characterized in that: The surface of the connection part of the fixing buckle is provided with a plurality of first fixing concave points, and the annular groove of the base is provided with corresponding second fixing convex points. When the fixing buckle is fixed to the base, the first fixing concave points and the second fixing convex points are engaged with each other, thereby fixing the fixing buckle and the base together.

7. The snap-on wafer brush according to any one of claims 2 to 6, characterized in that: The top of the positioning platform is provided with a protrusion which is adapted to the shape of the bottom of the brush head.

8. The snap-on wafer brush according to any one of claims 2 to 6, characterized in that: The top surface of the positioning platform is a curved surface with a high middle and a low periphery.

9. The snap-on wafer brush according to any one of claims 1 to 6, characterized in that: A plurality of limiting protrusions are arranged on the inner side surface of the fixing buckle. When the brush head is between the base and the fixing buckle, the limiting protrusions abut against the outer surface of the brush head.

10. The snap-on wafer brush according to any one of claims 1 to 6, characterized in that: The base is provided with a plurality of fixing grooves, the bottom of the brush head is provided with a connecting protrusion extending into the fixing groove, and the brush head and the connecting protrusion are integrally formed.

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