Tank body device for placing double-layer graphite boat

Abstract

The utility model discloses a groove body device for placing a double-layer graphite boat, which comprises a groove body, a first supporting assembly is arranged at the bottom of the inner wall of the groove body, a supporting column is rotatably connected in the groove body, a fixing plate is rotatably connected to the surface of the supporting column, the fixing plate is fixedly connected with the groove body, a second supporting assembly is arranged on the surface of the supporting column, and the second supporting assembly is fixedly connected with the groove body. A mounting cover is fixedly mounted on the inner wall of the groove body, an air cylinder is arranged in the mounting cover, a connecting rod assembly is arranged at the output end of the air cylinder, and the connecting rod assembly is connected to the surface of the supporting column. Through cooperative use of an air cylinder, a connecting rod assembly, a first supporting assembly and a second supporting assembly, the groove body device can conveniently limit and place graphite boats, a boat frame for washing can be discarded, and therefore the load of the mechanical arm is effectively reduced, and the graphite boats can be placed in the groove body device in a double-layer mode; therefore, the groove body device can conveniently clean the double-layer graphite boat at a time, and the cleaning speed of the graphite boat is increased.

Description

Technical Field

[0001] The utility model relates to the technical field of graphite boat cleaning, in particular to a tank device for placing a double-layer graphite boat. Background Art

[0002] In the production process of crystalline silicon solar cells, the coating process is one of the most important processes, which requires the silicon wafer to be coated. The coating process is usually carried out with the help of tubular coating equipment. During the operation of tubular coating equipment, a graphite boat is needed as a carrier of the silicon wafer to facilitate the coating process. After the graphite boat carries the silicon wafer and continuously coats it for a certain number of times, too much silicon nitride adheres to its surface, which will cause abnormal conditions such as coating color difference on the silicon wafer. Therefore, the graphite boat needs to be cleaned after a certain number of uses.

[0003] The existing patent (publication number: CN216563041U) discloses a boat rack for automatic cleaning of a graphite boat, specifically, a manipulator can grab the boat rack through a grabbing part, and after placing the graphite boat in the boat rack, the manipulator can take and place the boat rack and the graphite boat in the cleaning tank to realize automatic cleaning of the graphite boat. However, we found in actual application that the boat rack itself increases the weight of the manipulator, making it inconvenient for the manipulator to move. Therefore, the utility model provides a tank device for placing a double-layer graphite boat. Utility Model Content

[0004] In view of the deficiencies of the prior art, the utility model provides a tank device for placing a double-layer graphite boat, which is used to solve the problems raised in the above background technology.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A trough device for placing a double-layer graphite boat comprises a trough body, a first support assembly is arranged at the bottom of the inner wall of the trough body, a support column is rotatably connected inside the trough body, a fixing plate is rotatably connected to the surface of the support column, and the fixing plate is fixedly connected to the trough body, a second support assembly is arranged on the surface of the support column, a mounting cover is fixedly installed on the inner wall of the trough body, a cylinder is arranged inside the mounting cover, a connecting rod assembly is arranged at the output end of the cylinder, and the connecting rod assembly is connected to the surface of the support column.

[0007] Preferably, the first supporting assembly comprises a first support member and a second support member disposed at the bottom of the inner wall of the tank body, and a first hole supporting plate is fixedly mounted on the facing surfaces of the first support member.

[0008] Preferably, the second support assembly comprises a whistle-shaped PP plate arranged on the surface of the support column, and a second hole support plate is fixedly mounted on the facing surface of the whistle-shaped PP plate.

[0009] Preferably, the connecting rod assembly includes a fixed seat arranged at the output end of the cylinder, an active arm is fixedly installed inside the fixed seat, a first pin is fixedly installed inside the active arm, a connecting rod is rotatably connected to the surface of the first pin, a second pin is rotatably connected to the inside of the connecting rod, a driven arm is fixedly installed on the surface of the second pin, and the driven arm is fixedly connected to the support column.

[0010] Preferably, a support plate block is fixedly installed inside the trough body, a middle reinforcing rib is fixedly installed on the surface of the trough body, and the height of the middle reinforcing rib is the same as the height of the fixed plate, and a bottom reinforcing rib is fixedly installed on the surface of the trough body.

[0011] Preferably, there are multiple fixing plates, and a through hole for connecting with a support column is provided through the surface of the fixing plate, and the support column is rotatably connected to the through hole.

[0012] Preferably, there are multiple connecting rods, which are symmetrically distributed at the fulcrums at both ends of the active arm, and the fixing seat is located in the middle of the active arm.

[0013] Compared with the prior art, the beneficial effects of the utility model are as follows: the trough device for placing the double-layer graphite boat, through the coordinated use of the cylinder and the connecting rod assembly, makes the second support assembly flip upward 90 degrees, and the boat foot of the graphite boat is placed in the first support assembly by a manipulator, and then the second support assembly is flipped downward 90 degrees through the coordinated use of the cylinder and the connecting rod assembly, and the boat foot of the graphite boat is placed in the second support assembly by a manipulator, and then the double-layered graphite boat can be cleaned by the clean water inside the trough body, so that the trough device itself can limit the placement of the graphite boat, and the boat rack for washing can be discarded, thereby effectively reducing the load on the manipulator, and the graphite boat can be placed in the trough device in double layers, so that the trough device can clean the double-layer graphite boat at one time, thereby speeding up the cleaning speed of the graphite boat. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a three-dimensional stereogram of the utility model;

[0015] Figure 2 It is a front view of the structure of the utility model;

[0016] Figure 3 It is a top view of the structure of the utility model;

[0017] Figure 4 It is a side view of the structure of the utility model.

[0018] In the figure: 1. trough body; 2. first horseman; 3. first hole support plate; 4. second horseman; 5. support column; 6. fixed plate; 7. whistle-shaped PP plate; 8. second hole support plate; 9. support plate block; 10. middle reinforcement rib; 11. mounting cover; 12. cylinder; 13. fixing seat; 14. active arm; 15. first pin shaft; 16. connecting rod; 17. second pin shaft; 18. driven arm; 19. bottom reinforcement rib. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0020] Reference Figure 1-4A tank device for placing a double-layer graphite boat comprises a tank 1, wherein a first support assembly is arranged at the bottom of the inner wall of the tank 1, wherein the first support assembly comprises a first support member 2 and a second support member 4 arranged at the bottom of the inner wall of the tank 1, and a first hole support plate 3 is fixedly installed on the facing surface of the first support member 2, and the boat foot of the bottom graphite boat can be supported by the first hole support plate 3, and at this time, the boat foot of the graphite boat just fits with the first support member 2, which is convenient for limiting the boat foot of the graphite boat, and avoids the phenomenon that the boat foot of the bottom graphite boat will fall off from the first hole support plate 3, so as to facilitate the cleaning of the bottom graphite boat more stably, and a support column 5 is rotatably connected inside the tank 1, and a fixed plate 6 is rotatably connected to the surface of the support column 5, and the fixed plate 6 is fixedly connected to the tank 1, and the fixed plate 6 There are multiple numbers of them, and the surface of the fixed plate 6 is penetrated with a through hole for connecting with the support column 5, and the support column 5 is rotatably connected to the through hole, which is convenient for supporting the support column 5 and reducing the possibility of bending of the support column 5, so that the support column 5 can rotate more stably. A second support component is arranged on the surface of the support column 5, and the second support component includes a whistle-shaped PP plate 7 arranged on the surface of the support column 5. The second hole support plate 8 is fixedly installed on the opposite surface of the whistle-shaped PP plate 7. The high-level graphite boat foot can be supported by the second hole support plate 8, that is, the high-level graphite boat foot can better fit with the whistle-shaped PP plate 7, which is convenient for limiting the high-level graphite boat. At the same time, the support plate stopper 9 is fixedly connected to the slot body 1, and is highly arranged when the second support component is in a flat state. Directly below, it is convenient to provide support for the second support assembly after placing the high-level graphite boat, so that the high-level graphite boat can be cleaned more stably. A mounting cover 11 is fixedly installed on the inner wall of the tank body 1, and a cylinder 12 is arranged inside the mounting cover 11. A connecting rod assembly is arranged at the output end of the cylinder 12, and the connecting rod assembly is connected to the surface of the support column 5. The connecting rod assembly includes a fixed seat 13 arranged at the output end of the cylinder 12, and an active arm 14 is fixedly installed inside the fixed seat 13. A first pin shaft 15 is fixedly installed inside the active arm 14, and a connecting rod 16 is rotatably connected to the surface of the first pin shaft 15. There are multiple connecting rods 16, and the connecting rods 16 are symmetrically distributed at the fulcrums at both ends of the active arm 14. The fixed seat 13 is located in the middle of the active arm 14. The second support column 5 is rotatably connected with a second pin shaft 17, and a driven arm 18 is fixedly installed on the surface of the second pin shaft 17, and the driven arm 18 is fixedly connected to the support column 5. The support column 5 can be rotated by the cooperation of the cylinder 12 and the connecting rod assembly. The second support assembly can be turned upward by 90 degrees through the rotation of the support column 5, so that the bottom graphite boat can be placed more conveniently. A support plate block 9 is fixedly installed inside the trough body 1, and a middle reinforcing rib 10 is fixedly installed on the surface of the trough body 1, and the height of the middle reinforcing rib 10 is the same as that of the fixed plate 6. A bottom reinforcing rib 19 is fixedly installed on the surface of the trough body 1. The trough body device for placing the double-layer graphite boat can be turned upward by 90 degrees through the cooperation of the cylinder 12 and the connecting rod assembly.The boat foot of the graphite boat is placed in the first support assembly by the manipulator, and then the second support assembly is turned down 90 degrees by the cooperation of the cylinder 12 and the connecting rod assembly, and the boat foot of the graphite boat is placed in the second support assembly by the manipulator, and then the double-layered graphite boat can be cleaned by the clean water inside the tank body 1, so that the tank body device itself can limit the placement of the graphite boat, and the boat rack for washing can be discarded, thereby effectively reducing the load of the manipulator, and the graphite boat can be placed in the tank body device in double layers, so that the tank body device can clean the double-layered graphite boat at one time, thereby speeding up the cleaning speed of the graphite boat.

[0021] The tank device for placing the double-layer graphite boat is connected to a 220V mains power supply, and the main controller can be a conventional known device such as a computer for control.

[0022] When in use: start the cylinder 12, so that the fixed seat 13 pushes the fixed seat 13 to move upward, so that the active arm 14 moves upward, and the connecting rod 16 is moved and flipped through the first pin shaft 15, and the driven arm 18 is flipped through the second pin shaft 17, so that the support column 5 can be rotated, so that the whistle-shaped PP plate 7 and the second hole support plate 8 are flipped upward, until the whistle-shaped PP plate 7 and the second hole support plate 8 are flipped upward 90 degrees, and then the boat foot of the graphite boat can be placed on the first hole support plate 3 through the mechanical arm. When the bottom graphite boat is placed, start the cylinder 12 in the reverse direction, so that the fixed The fixed seat 13 moves downward, driving the active arm 14 to move downward, and the connecting rod 16 is moved and flipped through the first pin shaft 15, and the driven arm 18 is flipped through the second pin shaft 17, so that the support column 5 can be rotated, so that the whistle-shaped PP plate 7 and the second hole support plate 8 are flipped downward, until the whistle-shaped PP plate 7 and the second hole support plate 8 are flipped downward 90 degrees, that is, the second hole support plate 8 is just in a horizontal state, and then the boat foot of the graphite boat is placed on the second hole support plate 8 through the robot arm, and the double-layer graphite boat can be cleaned by the clean water inside the trough body 1.

[0023] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0024] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A tank device for placing a double-layer graphite boat, comprising a tank (1), characterized in that: A first support assembly is arranged at the bottom of the inner wall of the trough body (1); a support column (5) is rotatably connected inside the trough body (1); a fixing plate (6) is rotatably connected to the surface of the support column (5), and the fixing plate (6) is fixedly connected to the trough body (1); a second support assembly is arranged on the surface of the support column (5); a mounting cover (11) is fixedly installed on the inner wall of the trough body (1); a cylinder (12) is arranged inside the mounting cover (11); a connecting rod assembly is arranged at the output end of the cylinder (12), and the connecting rod assembly is connected to the surface of the support column (5).

2. A tank device for placing a double-layer graphite boat according to claim 1, characterized in that: The first supporting assembly comprises a first support member (2) and a second support member (4) arranged at the bottom of the inner wall of the trough body (1), and a first hole supporting plate (3) is fixedly mounted on the facing surfaces of the first support member (2).

3. The tank device for placing a double-layer graphite boat according to claim 1, characterized in that: The second support assembly comprises a whistle-shaped PP plate (7) arranged on the surface of the support column (5), and a second hole support plate (8) is fixedly mounted on the facing surface of the whistle-shaped PP plate (7).

4. The tank device for placing a double-layer graphite boat according to claim 1, characterized in that: The connecting rod assembly comprises a fixing seat (13) arranged at the output end of the cylinder (12), a driving arm (14) is fixedly installed inside the fixing seat (13), a first pin shaft (15) is fixedly installed inside the driving arm (14), a connecting rod (16) is rotatably connected to the surface of the first pin shaft (15), a second pin shaft (17) is rotatably connected to the inside of the connecting rod (16), a driven arm (18) is fixedly installed on the surface of the second pin shaft (17), and the driven arm (18) is fixedly connected to the support column (5).

5. The tank device for placing a double-layer graphite boat according to claim 1, characterized in that: A support plate block (9) is fixedly installed inside the trough body (1), a middle reinforcing rib (10) is fixedly installed on the surface of the trough body (1), and the height of the middle reinforcing rib (10) is the same as that of the fixing plate (6), and a bottom reinforcing rib (19) is fixedly installed on the surface of the trough body (1).

6. The tank device for placing a double-layer graphite boat according to claim 1, characterized in that: There are a plurality of fixing plates (6), and a through hole for connecting with the support column (5) is provided through the surface of the fixing plate (6), and the support column (5) is rotatably connected to the through hole.

7. A tank device for placing a double-layer graphite boat according to claim 4, characterized in that: There are a plurality of connecting rods (16), and the connecting rods (16) are symmetrically distributed at the fulcrums at both ends of the active arm (14), and the fixing seat (13) is located in the middle of the active arm (14).

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