Drainage structure of snake belly protective curtain component and scribing machine equipment

Abstract

The utility model relates to the technical field of semiconductor material processing, and discloses a drainage structure of a bellows-shaped protective curtain component and scribing machine equipment, and a plurality of drainage components are arranged in the bellows-shaped protective curtain component close to the moving end of a wafer cutting processing platform in the scribing machine equipment. In the working process of the moving end of the wafer cutting machining platform, water flow can smoothly wash away wafer fragments or broken glass, accumulation in a V-shaped groove of a snake-belly-shaped protective curtain of an original structure is avoided, abrasion of a snake-belly-shaped protective curtain component is reduced, the probability of component damage is reduced, the purpose of prolonging the service life of the snake-belly-shaped protective curtain component of the scribing machine is achieved, and the service life of the snake-belly-shaped protective curtain component of the scribing machine is prolonged. The drainage structure can effectively protect the snake belly protection curtain component under the condition of more flying materials in the glass cutting and wafer scribing processes.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor material processing, in particular to a drainage structure of an accordion protection curtain component and a dicing machine device. Background Art

[0002] The dicing machine is a precision CNC equipment that integrates water-gas-electric, air-static high-speed spindle, precision mechanical transmission, sensor and automatic control technologies. It is mainly used for cutting and processing materials such as silicon integrated circuits, piezoelectric ceramics, aluminum oxide, iron oxide, quartz, glass, ceramics, solar cells, etc. Its working principle is to use strong grinding as the cutting mechanism, and drive the cutting line direction of the contact point between the blade and the workpiece through the air-static electric spindle to move in a straight line, so as to separate each unit on the workpiece sheet. Using water flow to cool down and immerse the workpiece in water makes processing more convenient and takes away the cutting debris. The accordion protection curtain (waterproof curtain) protects the X-axis of the dicing machine equipment and the rotating axis of the processing platform from water during movement.

[0003] When the dicing machine is cutting the wafer, the first few slots of the bellows curtain close to the working platform are prone to accumulate chip fragments washed over by the water flow, such as Figure 1 As shown, it will cause the accordion protection curtain component to be damaged during the movement of the motion axis, seriously affecting the service life of the accordion protection curtain component. Utility Model Content

[0004] In order to overcome the defects of the above-mentioned prior art, the purpose of the utility model is to provide a drainage structure of an accordion protection curtain component and a dicing machine equipment, so as to solve the technical problem in the prior art that chip fragments are easily accumulated in the accordion protection curtain component, causing the accordion protection curtain component to be easily damaged during operation, thereby affecting the service life of the accordion protection curtain component.

[0005] The utility model is realized by the following technical solutions:

[0006] A drainage structure of an accordion protection curtain component is used for a dicing machine device, comprising an accordion protection curtain component and a plurality of drainage components, wherein the accordion protection curtain component is provided with a plurality of rows of V-shaped grooves in sequence along the moving end of a wafer cutting processing platform in the dicing machine device, and both sides of the V-shaped groove are single-leaf sheets, and a plurality of drainage components are distributed one by one in the V-shaped groove close to the moving end of the wafer cutting processing platform and are in contact with the single-leaf sheets on both sides of the V-shaped groove, and are used to divert water and wafer fragments output from the wafer cutting processing platform to both ends of the V-shaped groove.

[0007] Preferably, the drainage component is embedded in the V-shaped groove, and its structure is arranged corresponding to the notch structure of the V-shaped groove.

[0008] Preferably, the length of the drainage component is set corresponding to the length of the V-shaped groove.

[0009] Preferably, the drainage component includes a first waterproof sheet and a second waterproof sheet, one side edge of the first waterproof sheet and the second waterproof sheet are integrated, and the connecting line is the center line, and the other side edges are opening and closing edges, forming a strip V-shaped groove structure.

[0010] Furthermore, the inner side of the top of the opening and closing edge of the first waterproof sheet is attached to the outer side of the top of the single-leaf sheet on one side of the V-shaped groove through waterproof tape, and the inner side of the top of the opening and closing edge of the second waterproof sheet is attached to the outer side of the top of the single-leaf sheet on the other side of the V-shaped groove through waterproof tape.

[0011] Furthermore, the top outer side of the opening and closing edge of the first waterproof sheet is attached to the top inner side of the single-leaf sheet on one side of the V-shaped groove by waterproof glue, and the top outer side of the opening and closing edge of the second waterproof sheet is attached to the top inner side of the single-leaf sheet on the other side of the V-shaped groove by waterproof glue.

[0012] Furthermore, the middle arch of the strip V-shaped groove structure is used to divert the water source and chip fragments output by the chip cutting processing platform to the two ends of the V-shaped groove. The middle arched part is provided with a folding structure along the opening and closing direction of the V-shaped groove, which is used to make the first waterproof sheet and the second waterproof sheet open and close to the maximum angle as the V-shaped groove opens and closes.

[0013] Furthermore, the edge of the strip-shaped V-shaped groove structure is aligned with the edge of the V-shaped groove of the accordion protection curtain component.

[0014] Preferably, the material of the drainage component includes any one of polycarbonate, polypropylene, polyethylene, polyethylene terephthalate, polyurethane, silicone, Teflon and all polyester materials.

[0015] A dicing machine device is provided with a drainage structure of the accordion protective curtain component as described above.

[0016] Compared with the prior art, the utility model has the following beneficial technical effects:

[0017] The utility model provides a drainage structure of an accordion protection curtain component, in which a plurality of drainage components are arranged in the accordion protection curtain component near the moving end of a chip cutting and processing platform in a dicing machine device, so that during the operation of the moving end of the chip cutting and processing platform, water flow can smoothly wash away chip fragments or broken glass, avoiding accumulation in the V-shaped groove of the accordion protection curtain of the original structure, thereby reducing the wear of the accordion protection curtain component and reducing the probability of component damage, so as to achieve the purpose of increasing the service life of the accordion protection curtain component of the dicing machine. The drainage structure can effectively protect the accordion protection curtain component in the case of a large number of flying materials during glass cutting and wafer dicing.

[0018] Furthermore, the drainage component is embedded in the V-shaped groove, and its structure is arranged corresponding to the notch structure of the V-shaped groove, which effectively protects the V-shaped groove in the accordion protection curtain component and avoids accumulation in the V-shaped groove of the original structure accordion protection curtain.

[0019] Furthermore, the length of the drainage component is set corresponding to the length of the V-shaped groove, so that the water flow can smoothly wash away the chip fragments or broken glass, avoiding accumulation at both ends of the V-shaped groove of the original structure accordion protection curtain.

[0020] Furthermore, the drainage component includes a first waterproof sheet and a second waterproof sheet. One side edge of the first waterproof sheet and the second waterproof sheet are integrated, and the connecting line is the center line. The other side edges are opening and closing edges, forming a strip V-shaped groove structure. The first waterproof sheet and the second waterproof sheet are an integrated structure and are attached to the V-shaped groove. The sheet is light in weight and does not affect the operation of the accordion protective curtain while protecting the accordion protective curtain.

[0021] Furthermore, the inner side of the top of the opening and closing edge of the first waterproof sheet is attached to the outer side of the top of the single-leaf sheet on one side of the V-shaped groove by waterproof tape, and the inner side of the top of the opening and closing edge of the second waterproof sheet is attached to the outer side of the top of the single-leaf sheet on the other side of the V-shaped groove by waterproof tape, thereby improving the stability of the attachment of the first waterproof sheet and the second waterproof sheet to the V-shaped groove and improving the drainage efficiency.

[0022] Furthermore, the top outer side of the opening and closing edge of the first waterproof sheet is attached to the top inner side of the single-leaf sheet on one side of the V-shaped groove by waterproof glue, and the top outer side of the opening and closing edge of the second waterproof sheet is attached to the top inner side of the single-leaf sheet on the other side of the V-shaped groove by waterproof glue, thereby improving the stability of the attachment of the first waterproof sheet and the second waterproof sheet to the V-shaped groove and improving the drainage efficiency.

[0023] Furthermore, the middle arch of the strip V-shaped groove structure is used to divert the water source and chip fragments output from the chip cutting and processing platform to the two ends of the V-shaped groove, effectively improving the protection of the accordion protection curtain component, and at the same time guiding the water flow flowing into the strip V-shaped groove structure to discharge crystal fragments or glass to both sides. The middle arched part is provided with a folding structure along the opening and closing direction of the V-shaped groove, which is used to make the first waterproof sheet and the second waterproof sheet open and close to the maximum angle as the V-shaped groove opens and closes, so as to avoid affecting the normal operation of the accordion protection curtain. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 This is a schematic diagram of the structure of a conventional bellows protective curtain component in a dicing machine device;

[0025] Figure 2 It is a schematic diagram of the structure of the drainage structure of the bellows protection curtain component in the utility model in the dicing machine equipment;

[0026] Figure 3It is a schematic diagram of the drainage structure of the accordion protection curtain component in the utility model;

[0027] Figure 4 It is a schematic diagram of the structure of the waterproof sheet in the utility model.

[0028] In the figure: 1-wafer cutting and processing platform; 2-bellows protection curtain component; 3-drainage component; 31-first waterproof sheet; 32-second waterproof sheet. DETAILED DESCRIPTION

[0029] In order to enable those skilled in the art to better understand the solution of the utility model, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is only a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the utility model.

[0030] It should be noted that the terms "first", "second", etc. in the specification and claims of the utility model and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the utility model described here can be implemented in an order other than those illustrated or described here. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, products or devices.

[0031] The utility model is further described in detail below with reference to the accompanying drawings:

[0032] The purpose of the utility model is to provide a drainage structure of an accordion protection curtain component and a dicing machine device, so as to solve the technical problem in the prior art that chip fragments are easily accumulated in the accordion protection curtain component, causing the accordion protection curtain component to be easily damaged during operation, thus affecting the service life of the accordion protection curtain component.

[0033] See also Figure 2 and Figure 3The utility model provides a drainage structure of an accordion protection curtain component, which is used for a dicing machine device, including an accordion protection curtain component 2 and a plurality of drainage components 3. The accordion protection curtain component 2 is provided with a plurality of rows of V-shaped grooves in sequence along the moving end of a wafer cutting processing platform 1 in the dicing machine device, and both sides of the V-shaped groove are single-leaf sheets. The plurality of drainage components 3 are distributed one by one in the V-shaped groove near the moving end of the wafer cutting processing platform 1, and are in contact with the single-leaf sheets on both sides of the V-shaped groove, so as to divert the water source and wafer fragments output from the wafer cutting processing platform 1 to both ends of the V-shaped groove.

[0034] For details, see Figure 2 and Figure 3 The drainage component 3 is embedded in the V-shaped groove, and its structure is arranged corresponding to the notch structure of the V-shaped groove, which effectively protects the V-shaped groove in the accordion protection curtain component and avoids accumulation in the V-shaped groove of the original structure accordion protection curtain.

[0035] For details, see Figure 2 and Figure 3 The length of the drainage component 3 is set corresponding to the length of the V-shaped groove, so that the water flow can smoothly wash away the chip fragments or broken glass, and avoid accumulation at both ends of the V-shaped groove of the original structure accordion protection curtain.

[0036] For details, see Figure 4 The drainage component 3 includes a first waterproof sheet 31 and a second waterproof sheet 32. One side edge of the first waterproof sheet 31 and the second waterproof sheet 32 ​​is integrated, and the connecting line is the center line. The other side edges are opening and closing edges, forming a strip V-shaped groove structure. The first waterproof sheet and the second waterproof sheet are an integrated structure and are attached to the V-shaped groove. The sheet is light in weight and does not affect the operation of the accordion protection curtain while protecting the accordion protection curtain.

[0037] Among them, the inner side of the top of the opening and closing edge of the first waterproof sheet 31 is attached to the outer side of the top of the single-leaf sheet on one side of the V-shaped groove through waterproof tape, and the inner side of the top of the opening and closing edge of the second waterproof sheet 32 ​​is attached to the outer side of the top of the single-leaf sheet on the other side of the V-shaped groove through waterproof tape.

[0038] Among them, the top outer side of the opening and closing edge of the first waterproof sheet 31 is attached to the top inner side of the single-leaf sheet on one side of the V-shaped groove by waterproof glue, and the top outer side of the opening and closing edge of the second waterproof sheet 32 ​​is attached to the top inner side of the single-leaf sheet on the other side of the V-shaped groove by waterproof glue.

[0039] In the utility model, the opening and closing edges of the first waterproof sheet 31 and the second waterproof sheet 32 ​​are attached to the single leaves on both sides of the V-shaped groove by waterproof tape or waterproof glue, wherein the attachment width of the opening and closing edges of the first waterproof sheet 31 and the second waterproof sheet 32 ​​does not exceed one quarter of the width of the single leaf, that is, at the top of the single leaf, to avoid affecting the opening and closing action of the single leaf of the accordion protective curtain.

[0040] Among them, see Figure 3 and Figure 4 The middle part of the strip V-shaped groove structure is arched, which is used to divert the water source and chip fragments output by the chip cutting and processing platform 1 to the two ends of the V-shaped groove, effectively improving the protection of the accordion protection curtain component, and at the same time guiding the water flow flowing into the strip V-shaped groove structure to discharge the crystal fragments or glass to both sides. The middle arched part is provided with a folding structure along the opening and closing direction of the V-shaped groove, which is used to make the first waterproof sheet 31 and the second waterproof sheet 32 ​​open and close to the maximum angle as the V-shaped groove opens and closes.

[0041] The slopes on both sides of the strip V-shaped groove structure are greater than 7%, that is, the slopes on both sides are greater than 4°.

[0042] The edge of the strip-shaped V-shaped groove structure is aligned with the edge of the V-shaped groove of the accordion protection curtain component 2 .

[0043] The sizes of the first waterproof sheet 31 and the second waterproof sheet 32 ​​in the present invention correspond to the sizes of the single leaf sheet of the accordion protection curtain.

[0044] The material of the drainage component 3 in the utility model includes polycarbonate, polypropylene, polyethylene, polyethylene terephthalate, polyurethane, silicone, Teflon and all polyester materials, as well as modified acrylic, modified silicone, modified epoxy resin, modified polyurethane and other modified waterproof coatings processed on the surface with related materials as the base.

[0045] To summarize, the utility model provides a drainage structure of an accordion protection curtain component, in which a plurality of drainage components are arranged in the accordion protection curtain component near the moving end of the chip cutting processing platform in the dicing machine equipment, so that during the operation of the moving end of the chip cutting processing platform, water flow can smoothly wash away chip fragments or broken glass, avoiding accumulation in the V-groove of the original structure accordion protection curtain, thereby reducing the wear of the accordion protection curtain component and reducing the probability of component damage, so as to achieve the purpose of increasing the service life of the accordion protection curtain component of the dicing machine. The drainage structure can effectively protect the accordion protection curtain component in the case of a large number of flying materials during glass cutting and wafer dicing.

[0046] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model rather than to limit it. Although the utility model is described in detail with reference to the above embodiments, ordinary technicians in the relevant field should understand that the specific implementation methods of the utility model can still be modified or replaced by equivalents, and any modification or equivalent replacement that does not depart from the spirit and scope of the utility model should be included in the scope of protection of the claims of the utility model.

Claims

1. A drainage structure of an accordion protection curtain component, used for a dicing machine, characterized in that: The invention comprises an accordion protection curtain component (2) and a plurality of drainage components (3), wherein the accordion protection curtain component (2) is provided with a plurality of rows of V-shaped grooves in sequence along the moving end of a wafer cutting processing platform (1) in a dicing machine device, and the two sides of the V-shaped groove are single-leaf sheets. The plurality of drainage components (3) are distributed one by one in the V-shaped groove close to the moving end of the wafer cutting processing platform (1) and are in contact with the single-leaf sheets on both sides of the V-shaped groove, and are used to divert water and wafer fragments outputted from the wafer cutting processing platform (1) to the two ends of the V-shaped groove.

2. The drainage structure of the accordion protection curtain component according to claim 1, characterized in that: The drainage component (3) is embedded in the V-shaped groove, and its structure is arranged corresponding to the notch structure of the V-shaped groove.

3. The drainage structure of the accordion protection curtain component according to claim 1, characterized in that: The length of the drainage component (3) is set corresponding to the length of the V-shaped groove.

4. The drainage structure of the accordion protection curtain component according to claim 1, characterized in that: The drainage component (3) comprises a first waterproof sheet (31) and a second waterproof sheet (32); one side edge of the first waterproof sheet (31) and the second waterproof sheet (32) are integrated, and the connection line is the center line; the other side edges are opening and closing edges, forming a strip V-shaped groove structure.

5. The drainage structure of the accordion protection curtain component according to claim 4, characterized in that: The inner side of the top of the opening and closing edge of the first waterproof sheet (31) is attached to the outer side of the top of the single-leaf sheet on one side of the V-shaped groove by means of waterproof tape, and the inner side of the top of the opening and closing edge of the second waterproof sheet (32) is attached to the outer side of the top of the single-leaf sheet on the other side of the V-shaped groove by means of waterproof tape.

6. The drainage structure of the accordion protection curtain component according to claim 4, characterized in that: The top outer side of the opening and closing edge of the first waterproof sheet (31) is attached to the top inner side of the single leaf sheet on one side of the V-shaped groove by waterproof glue, and the top outer side of the opening and closing edge of the second waterproof sheet (32) is attached to the top inner side of the single leaf sheet on the other side of the V-shaped groove by waterproof glue.

7. The drainage structure of the accordion protection curtain component according to claim 4, characterized in that: The middle part of the strip-shaped V-shaped groove structure is arched and used to divert water and chip fragments output from the chip cutting processing platform (1) to the two ends of the V-shaped groove. The middle arched part is provided with a folding structure along the opening and closing direction of the V-shaped groove, which is used to enable the first waterproof sheet (31) and the second waterproof sheet (32) to open and close to the maximum angle along with the V-shaped groove.

8. The drainage structure of the accordion protection curtain component according to claim 4, characterized in that: The edge of the strip-shaped V-shaped groove structure is aligned with the edge of the V-shaped groove of the accordion protection curtain component (2).

9. The drainage structure of the accordion protection curtain component according to claim 1, characterized in that: The material of the drainage component (3) includes any one of polycarbonate, polypropylene, polyethylene, polyethylene terephthalate, polyurethane, silicone, Teflon and all polyester materials.

10. A dicing machine device, characterized in that: The dicing machine equipment is provided with a drainage structure of an accordion protective curtain component as described in any one of claims 1-9.

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