Auxiliary device facilitating rapid installation of annealing furnace base

Abstract

The utility model relates to the technical field of annealing furnaces, and discloses an auxiliary device facilitating rapid installation of an annealing furnace base, which comprises an equipment main body, the equipment main body comprises a base, the bottom end of the base is fixedly connected with a plurality of universal wheels, one side of each universal wheel is provided with a brake part, and the brake parts are fixed on the two sides of the base; by arranging universal wheels and brake pieces, the auxiliary device is moved to a designated position through the universal wheels so that the annealing furnace can be conveniently installed, the brake pieces can be used for fixing the universal wheels and preventing movement, by arranging electric telescopic rods, the height of the auxiliary device can be adjusted according to annealing furnaces of different heights, and the application range of the device is effectively widened; by arranging the positioning shaft, the supporting seat, the first through hole, the second through hole and the plug pin, when the auxiliary device is assembled, after the movable seat is aligned to the cross rod and penetrates through the cross rod, the supporting seat is moved to the position below the cross rod, the supporting seat is fixed through the plug pin, assembling is convenient, and the working efficiency is effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of annealing furnaces, in particular to an auxiliary device which is convenient for quickly installing an annealing furnace base. Background Art

[0002] Annealing furnace is a process used in semiconductor device manufacturing that involves heating multiple semiconductor wafers to affect their electrical properties. The thermal treatment is designed for different effects. The wafers can be heated to activate dopants, convert thin films into thin films or convert thin films into wafer substrate interfaces, make densely deposited films, change the state of growing films, repair implanted damage, move dopants or transfer dopants from one film to another or from a thin film into the wafer substrate.

[0003] The existing auxiliary device for quickly installing the annealing furnace base cannot adjust the height according to annealing furnace devices of different heights, has a narrow applicability range, and easily increases the production cost of the auxiliary device. Therefore, improvement is needed, and an auxiliary device for quickly installing the annealing furnace base is proposed. Utility Model Content

[0004] The purpose of the utility model is to provide an auxiliary device which is convenient for the quick installation of the annealing furnace base, so as to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above object, the utility model provides the following technical solution: an auxiliary device for facilitating the rapid installation of an annealing furnace base, comprising a device body, wherein the device body comprises:

[0006] The base has a plurality of universal wheels fixedly connected to the bottom end of the base, a brake component is arranged on one side of the universal wheel, and the brake component is fixed to two sides of the base.

[0007] Furthermore, the top end of the base is fixedly connected to an electric telescopic rod, and the top end of the electric telescopic rod is fixedly connected to a workbench.

[0008] Furthermore, a fixing seat is fixedly connected to the upper left of the workbench, and a plurality of cross bars are fixedly connected to the right side of the fixing seat.

[0009] Furthermore, a fixed shaft is fixedly connected to the upper right end of the workbench, a support seat is rotatably connected to the middle of the fixed shaft, and a plurality of arc grooves are arranged on the top of the support seat.

[0010] Furthermore, a first through hole is formed at the front end of the support seat, and a second through hole is formed at the bottom end of the first through hole at a position corresponding to the workbench.

[0011] Furthermore, a latch is passed through the middle of the first through hole and the second through hole.

[0012] Furthermore, a movable seat is connected to the middle of the crossbar, and a handle is fixedly connected to the upper left of the movable seat.

[0013] Furthermore, a support plate is fixedly connected to the top of the movable seat, and a positioning rod is fixedly connected to one side of the support plate.

[0014] Furthermore, a positioning disc is connected through one side of the positioning rod.

[0015] Furthermore, positioning circular tubes are fixedly connected to both sides of the lower end of the positioning circular disc.

[0016] Compared with the prior art, the beneficial effects of the utility model are:

[0017] By providing universal wheels and brake parts, the auxiliary device can be moved to a designated position using the universal wheels for easy installation of the annealing furnace. The brake parts can be used to fix the universal wheels to prevent movement. By providing an electric telescopic rod, the height of the auxiliary device can be adjusted according to annealing furnaces of different heights, thereby effectively increasing the applicability of the device. By providing a positioning shaft, a support seat, a first through hole, a second through hole and a latch, when assembling the auxiliary device, after aligning the movable seat with the cross bar and passing through it, the support seat is moved to the bottom of the cross bar, and the support seat is fixed with the latch, thereby facilitating assembly and effectively improving work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following is a brief introduction to the drawings required for use in the description of the embodiments. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can also be obtained based on these drawings without creative work. In all drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, each element or part is not necessarily drawn according to the actual scale.

[0019] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;

[0020] Figure 2 This is a front structural schematic diagram of the utility model;

[0021] Figure 3 It is a right side cross-sectional structural schematic diagram of the utility model.

[0022] In the figure: 1. Equipment body; 101. First through hole; 102. Second through hole; 103. Latch; 104. Moving seat; 105. Handle; 106. Support plate; 107. Positioning rod; 108. Positioning disc; 109. Positioning tube; 11. Base; 12. Universal wheel; 13. Brake; 14. Electric telescopic rod; 15. Workbench; 16. Fixed seat; 17. Cross bar; 18. Fixed shaft; 19. Support seat. DETAILED DESCRIPTION

[0023] In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front end", "rear end", "two ends", "one end", "the other end" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0024] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "provided with", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0025] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0026] See also Figure 1-3The utility model provides a technical solution of an auxiliary device for facilitating the rapid installation of an annealing furnace base: an auxiliary device for facilitating the rapid installation of an annealing furnace base, comprising an equipment main body 1, the equipment main body 1 comprising: a base 11, a plurality of universal wheels 12 are fixedly connected to the bottom end of the base 11, the universal wheels 12 and brake components 13 are provided, the auxiliary device is moved to a designated position by using the universal wheels 12 to facilitate the installation of the annealing furnace, the brake components 13 can be used to fix the universal wheels 12 to prevent movement, a brake component 13 is provided on one side of the universal wheel 12, the brake component 13 is fixed to both sides of the base 11, an electric telescopic rod 14 is fixedly connected to the top of the base 11, by providing the electric telescopic rod 14, the height of the auxiliary device can be adjusted according to annealing furnaces of different heights, effectively increasing the applicability of the device, a workbench 15 is fixedly connected to the top of the electric telescopic rod 14, a fixed seat 16 is fixedly connected to the upper left of the workbench 15, and a plurality of cross bars 17 are fixedly connected to the right side of the fixed seat 16;

[0027] The upper right end of the workbench 15 is fixedly connected with a fixed shaft 18. By setting a positioning shaft, a support seat 19, a first through hole 101, a second through hole 102 and a latch 103, when assembling the auxiliary device, the movable seat 104 is aligned with the cross bar 17 and penetrated, and then the support seat 19 is moved to the bottom of the cross bar 17, and the support seat 19 is fixed with the latch 103, which is convenient for assembly and effectively improves work efficiency. The middle of the fixed shaft 18 is rotatably connected with the support seat 19, and the top of the support seat 19 is provided with a plurality of arc grooves. The front end of the support seat 19 is provided with a first through hole 101, and the second through hole 102 is provided with a latch 103. A second through hole 102 is provided at the bottom end of a through hole 101 corresponding to the position of the workbench 15, a latch 103 penetrates the middle of the first through hole 101 and the second through hole 102, a movable seat 104 is connected to the middle of the cross bar 17, a handle 105 is fixedly connected to the upper left of the movable seat 104, a support plate 106 is fixedly connected to the top of the movable seat 104, a positioning rod 107 is fixedly connected to one side of the support plate 106, a positioning disc 108 is penetrated and connected to one side of the positioning rod 107, and positioning circular tubes 109 are fixedly connected to the lower ends of the positioning disc 108.

[0028] The utility model is provided with an equipment body 1. When in use, the auxiliary device is moved to a specified position by using the universal wheel 12 to facilitate the installation of the annealing furnace. The brake member 13 can be used to fix the universal wheel 12 to prevent movement. The electric telescopic rod 14 is started to adjust the height of the auxiliary device according to annealing furnaces of different heights, thereby effectively increasing the applicability of the device. When assembling the auxiliary device, after the movable seat 104 is aligned with the cross bar 17 and penetrated, the support seat 19 is moved to the bottom of the cross bar 17, and the support seat 19 is fixed by the latch 103, which is convenient for assembly and effectively improves work efficiency.

[0029] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An auxiliary device for facilitating the rapid installation of an annealing furnace base, comprising a device body (1), characterized in that: The device body (1) comprises: A base (11), wherein a plurality of universal wheels (12) are fixedly connected to the bottom end of the base (11), a brake component (13) is provided on one side of the universal wheel (12), and the brake component (13) is fixed to two sides of the base (11); The top of the base (11) is fixedly connected to an electric telescopic rod (14), the top of the electric telescopic rod (14) is fixedly connected to a workbench (15), the upper left of the workbench (15) is fixedly connected to a fixing seat (16), and the right side of the fixing seat (16) is fixedly connected to a plurality of cross bars (17).

2. The auxiliary device for facilitating the rapid installation of the annealing furnace base according to claim 1, characterized in that: The upper right end of the workbench (15) is fixedly connected to a fixed shaft (18), the middle of the fixed shaft (18) is rotatably connected to a support seat (19), and the top end of the support seat (19) is provided with a plurality of arc grooves.

3. The auxiliary device for facilitating quick installation of the annealing furnace base according to claim 2, characterized in that: A first through hole (101) is provided at the front end of the support seat (19), and a second through hole (102) is provided at the bottom end of the first through hole (101) at a position corresponding to the workbench (15).

4. The auxiliary device for facilitating quick installation of the annealing furnace base according to claim 3, characterized in that: A latch pin (103) passes through the middle of the first through hole (101) and the second through hole (102).

5. The auxiliary device for facilitating the rapid installation of the annealing furnace base according to claim 1, characterized in that: The middle of the crossbar (17) is also connected to a movable seat (104), and the upper left portion of the movable seat (104) is fixedly connected to a handle (105).

6. The auxiliary device for facilitating quick installation of the annealing furnace base according to claim 5, characterized in that: A support plate (106) is fixedly connected to the top of the movable seat (104), and a positioning rod (107) is fixedly connected to one side of the support plate (106).

7. The auxiliary device for facilitating the rapid installation of the annealing furnace base according to claim 6, characterized in that: A positioning disc (108) is connected through one side of the positioning rod (107).

8. The auxiliary device for facilitating quick installation of the annealing furnace base according to claim 7, characterized in that: Positioning circular tubes (109) are fixedly connected to both sides of the lower end of the positioning circular disc (108).

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