Vacuum coating machine

Abstract

The utility model provides a vacuum coating machine which comprises a body, plating pots, a plating source and heating lamps, an evaporation cavity is formed in the body, a plurality of plating pots which can rotate and revolve are arranged in the circumferential direction of the evaporation cavity at intervals, the plating source is arranged in the evaporation cavity and located below the plating pots, a plurality of heating lamps are arranged in the circumferential direction of the evaporation cavity at intervals, and the plurality of heating lamps surround the plating source. The heating lamps are used for irradiating a substrate on the plating pot, a baffle is arranged at the edge of a light emitting area of each heating lamp, and the baffles are used for preventing gaseous coating particles from leading to the light emitting areas of the heating lamps. According to the utility model, the glass sheets do not need to be frequently replaced or arranged, so that the production cost is reduced, and the evaporation efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of evaporation equipment, in particular to a vacuum coating machine. Background Art

[0002] A vacuum evaporator is a device that evaporates materials in a vacuum environment. Its working principle is to vaporize the coating material by heating and evaporating it, and quickly transport the particles to the substrate surface under low pressure to condense into a thin film. This technology can achieve high-purity and dense film layers with unique film structure and performance, and is widely used in optical components, electronic products and other fields.

[0003] At present, the heating device in the vacuum evaporation machine usually adopts quartz lamp. When the plating source evaporates, it will cover the quartz lamp tube and cause the lamp circuit to short-circuit, or cover the lampshade and affect the heating effect of the quartz lamp. Therefore, glass sheets are generally used to protect the quartz lamp. When the heating effect of the quartz lamp decreases, only a new glass sheet needs to be replaced to ensure the normal use of the quartz lamp. However, this method requires frequent replacement of glass sheets, which not only reduces the efficiency of the vacuum evaporation machine, but also increases the production cost. Utility Model Content

[0004] Based on this, the purpose of the utility model is to provide a vacuum coating machine, aiming to solve the technical problem of frequent replacement of glass sheets in the prior art.

[0005] The utility model provides a vacuum coating machine, comprising a main body, a coating pot, a coating source, and a heating lamp. A coating chamber is formed in the main body. The coating pot is arranged in the coating chamber, and a plurality of coating pots are arranged at intervals along the circumference of the coating chamber. Each coating pot can rotate and revolve. The coating pot is used to install a substrate. The coating source is arranged in the coating chamber and is located below the coating pot. The coating source is used to generate coating particles that can rise to the surface of the substrate. A plurality of heating lamps are arranged at intervals along the circumference of the coating chamber. The plurality of heating lamps surround the coating source. The heating lamps are used to irradiate the substrate on the coating pot. A baffle is provided at the edge of the light emitting area of ​​each heating lamp. The coating source is located below the light emitting area. A first connecting plane is formed between the lower edge of the light emitting area and the plating source, a second connecting plane is formed between the upper edge of the light emitting area and the plating source, a third connecting plane is formed between the lower edge of the light emitting area and the lower edge of the plating pot that revolves farthest relative to the current heating lamp, and a fourth connecting plane is formed between the lower edge of the plating pot that revolves closest relative to the current heating lamp and the plating source. The baffle is located on the third connecting plane or between the first connecting plane and the third connecting plane, and the end of the baffle away from the heating lamp extends to the second connecting plane, or extends to the fourth connecting plane, or extends between the second connecting plane and the fourth connecting plane.

[0006] The beneficial effects of the utility model include at least: by rotating the plating pot around a fixed central axis while rotating itself, it helps to improve the uniformity of the coating on the substrate, and by reasonably setting the position and length of the baffle, it is ensured that the baffle does not block the passage of the gaseous coating particles to the plating pot, but blocks the passage of the gaseous coating particles to the light output area of ​​the heating lamp. In this way, there is no need to frequently replace the glass sheet or to set the glass sheet, thereby reducing production costs and improving the evaporation efficiency.

[0007] In addition, the vacuum coating machine according to the utility model may also have the following additional technical features:

[0008] Furthermore, a rotating drive member and a circular guide rail are provided on the main body, a rack is provided along the circumference of the guide rail, the plating pot is meshed with the rack through a gear fixed thereon, and the rotating drive member and the gear are connected through a bracket transmission.

[0009] Furthermore, the rotary drive member is fixedly connected to the middle of the top of the main body, and the plating source is located directly below the rotation center of the plurality of plating pots.

[0010] Furthermore, the center of each heating lamp is equidistant from the center of the plating source.

[0011] Furthermore, a plurality of plating pots are evenly spaced along the circumference of the evaporation chamber.

[0012] Furthermore, a plurality of heating lamps are evenly spaced along the circumference of the evaporation chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the structure of an embodiment of the utility model;

[0014] Description of main component symbols:

[0015] The main body 100 , the evaporation chamber 110 , the rotating driving member 120 , the circular guide rail 130 , the bracket 140 , the plating pot 200 , the plating source 300 , the heating lamp 400 , and the baffle 410 .

[0016] The following specific implementation manner will further illustrate the present utility model in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0017] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the relevant drawings. Several embodiments of the present invention are given in the drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0018] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art in the technical field of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0019] Reference Figure 1 , which is a vacuum coating machine provided by the utility model, includes a main body 100, a coating pot 200, a coating source 300, and a heating lamp 400.

[0020] A vapor deposition chamber 110 is formed in the body 100. The shape of the vapor deposition chamber 110 can be circular, rectangular, or other shapes, which are not specifically limited here. A plurality of plating pots 200 capable of self-rotation and revolution are arranged at intervals along the circumference of the vapor deposition chamber 110. That is, while the plating pot 200 moves around a circular orbit, the plating pot 200 itself also rotates around a central axis thereon. The plating pot 200 is used to install the substrate. Preferably, the plurality of plating pots 200 are evenly spaced along the circumference of the vapor deposition chamber 100.

[0021] The plating source 300 is disposed in the evaporation chamber 110 and below the plating pot 200. The plating source 300 is used to generate coating particles that can rise to the surface of the substrate. For example, in a vacuum environment, the coating material is evaporated or sublimated by resistance heating, electron beam heating, etc. to form gaseous coating particles. The gaseous coating particles rise from the bottom of the evaporation chamber 110 to the surface of the substrate and are deposited.

[0022] A plurality of heating lamps 400 are arranged at intervals along the circumference of the evaporation chamber 110, and the plating source 300 is located below the light emitting area of ​​the heating lamps 400. The plurality of heating lamps 400 are arranged around the plating source 300. Preferably, the plurality of heating lamps 400 are evenly spaced along the circumference of the evaporation chamber 110. The heating lamps 400 are used to irradiate the substrate on the plating pot 200. The heating effect of the heating lamps 400 can help improve the adhesion between the film layer and the substrate, and make the deposited film layer have better forming quality. Optionally, the heating lamps 400 can be quartz lamps.

[0023] In order to prevent the rising gaseous coating particles from covering the lampshade of the heating lamp 400 or the glass sheet in the light emitting area of ​​the heating lamp 400 , a baffle 410 is provided at the edge of the light emitting area of ​​each heating lamp 400 . Specifically, a first connecting plane is formed between the lower edge of the light emitting area of ​​the heating lamp 400 and the center of the plating source 300, a second connecting plane is formed between the upper edge of the light emitting area of ​​the heating lamp 400 and the center of the plating source 300, a third connecting plane is formed between the lower edge of the light emitting area of ​​the heating lamp 400 and the lower edge of the plating pot 200 that is farthest from the current revolution of the heating lamp 400, and a fourth connecting plane is formed between the lower edge of the plating pot 200 that is closest to the current revolution of the heating lamp 400 and the center of the plating source 300, the baffle 410 is located on the third connecting plane, or the baffle 410 is located in the area between the first connecting plane and the third connecting plane, and the end of the baffle 410 away from the heating lamp 400 extends to the fourth connecting plane, or extends to the second connecting plane, or extends to the area between the second connecting plane and the fourth connecting plane. In this way, the passage of the gaseous coating particles rising from the plating source 300 to the plating pot 200 will not be blocked by the baffle 410.

[0024] It should be noted that the number and installation positions of the plating pot 200 and the heating lamps 400 should ensure that the substrate on the plating pot 200 is heated evenly so that the deposited film layer has better forming quality.

[0025] In order to better understand the influence of the installation position and size of the baffle 410 on the gaseous coating particles, for example, the line segment from the lower edge of the light emitting area of ​​the left heating lamp 400 to the center of the coating source 300 is marked as A, and the line segment A is located on the first connecting plane. The line segment from the upper edge of the light emitting area of ​​the left heating lamp 400 to the center of the coating source 300 is marked as B, and the line segment B is located on the second connecting plane. The line segment from the center of the coating source 300 to the lower edge of the coating pot 200 directly above the left heating lamp 400 is It is marked as C, line segment C is located on the fourth connecting plane, and the line segment from the lower edge of the right plating pot 200 farthest from the left heating lamp 400 to the lower edge of the light emitting area of ​​the left heating lamp 400 is marked as D. Line segment D is located on the third connecting plane, and the line segment from the center of the light emitting area of ​​the heating lamp 400 to the center of the plating pot 200 is marked as E. Line segments C and D intersect with line segment B to form a line segment of length a and a line segment of length b, and the angle between line segment A and line segment D is marked as ∠1. The length of the baffle 410 is marked as L. When a≤L≤a+b, and the length direction of the baffle 410 coincides with line segment D, the baffle 410 will not block the passage of gaseous coating particles to the left plating pot 200. Of course, it can also be understood that when the length direction of the baffle 410 does not coincide with the line segment D but is within the range of the angle ∠1, as long as the baffle 410 passes through the line segment B but not the line segment C, it will not block the passage of the gaseous coating particles to the left plating pot 200. Since the angle ∠1 corresponds to the angle between the line segment D and the line segment A formed when the plating pot 200 revolves at the farthest point, the angle between the line segment D and the line segment A formed by other plating pots 200 close to the left heating lamp 400 will be greater than the angle ∠1. At this time, the position and length setting of the baffle 410 can also ensure that it will not block the passage of the gaseous coating particles to the left plating pot 200.

[0026] It should be noted that the analysis and description of other heating lamps 400 are the same as above.

[0027] In this embodiment, by rotating the plating pot 200 around a fixed central axis while rotating itself, it helps to improve the uniformity of the coating on the substrate. At the same time, by reasonably setting the position and length of the baffle 410, it is ensured that the baffle 410 does not block the passage of the gaseous coating particles to the plating pot 200, but blocks the passage of the gaseous coating particles to the light emitting area of ​​the heating lamp 400. In this way, there is no need to frequently replace the glass sheet or to set the glass sheet, thereby reducing production costs and improving evaporation efficiency.

[0028] In order to realize that the plating pot 200 rotates around a fixed central axis while rotating itself, in some optional embodiments, such as Figure 1As shown, the body 100 is provided with a rotary drive member 120 and a circular guide rail 130, the guide rail 130 is provided with a rack (not shown in the drawings) along its circumference, a gear (not shown in the drawings) is fixedly connected to the plating pot 200, the gear is meshed on the rack, and the rotary drive member 120 and the gear are connected by a bracket 140, so that the bracket 140 can play a role in supporting the plating pot 200. When the rotary drive member 120 rotates, the bracket 140 will also rotate, thereby driving the gear to roll on the rack, so that the plating pot 200 moves along the guide rail 130 as a whole while rotating. Optionally, the rotary drive member 120 selects a motor, and during assembly, the rotating shaft of the motor is fixedly connected to the bracket 140, and the gear is rotatably arranged on the bracket 140 and the gear is meshed on the rack.

[0029] In some optional embodiments, such as Figure 1 As shown, the rotating drive member 120 is fixedly connected to the top middle part of the main body 100, and the plating source 300 is located directly below the rotation center of the multiple plating pots 200, so that the distance from the plating source 300 to the same position of each plating pot 200 is consistent, and the gaseous coating particles generated can be evenly deposited on the substrate on each plating pot 200.

[0030] In some optional embodiments, the center of each heating lamp 400 is at the same distance from the center of the plating source 300, so that a baffle 410 of the same specification can be set on each heating lamp 400, reducing the processing cost of the baffle 410 and improving the applicability of the baffle 410.

[0031] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0032] The above-mentioned embodiments only express several implementation methods of the utility model, and the descriptions are relatively specific and detailed, but they cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A vacuum coating machine, characterized in that: The vacuum coating machine comprises: A main body, wherein a vapor deposition chamber is formed in the main body; A plating pot is arranged in the evaporation chamber, and a plurality of the plating pots are arranged at intervals along the circumference of the evaporation chamber, each of the plating pots can rotate and revolve, and the plating pots are used to install substrates; A plating source is disposed in the evaporation chamber and below the plating pot, and is used to generate coating particles that can rise to the surface of the substrate; A plurality of heating lamps are arranged at intervals along the circumference of the evaporation chamber, the plurality of heating lamps surround the plating source, the heating lamps are used to irradiate the substrate on the plating pot, a baffle is provided at the edge of the light emitting area of ​​each heating lamp, the plating source is located below the light emitting area, a first connecting plane is formed between the lower edge of the light emitting area and the plating source, a second connecting plane is formed between the upper edge of the light emitting area and the plating source, a third connecting plane is formed between the lower edge of the light emitting area and the lower edge of the plating pot which is farthest from the current revolution of the heating lamp, a fourth connecting plane is formed between the lower edge of the plating pot which is closest to the current revolution of the heating lamp and the plating source, the baffle is located on the third connecting plane or between the first connecting plane and the third connecting plane, and an end of the baffle away from the heating lamp extends to the second connecting plane, or to the fourth connecting plane, or to between the second connecting plane and the fourth connecting plane.

2. The vacuum coating machine according to claim 1, characterized in that: The main body is provided with a rotating drive member and a circular guide rail, the guide rail is provided with a rack along its circumference, the plating pot is meshed with the rack through a gear fixed thereon, the rotating drive member and the gear are connected through a bracket transmission so that the gear rolls on the rack when the rotating drive member drives the bracket to rotate.

3. The vacuum coating machine according to claim 2, characterized in that: The rotating driving member is fixedly connected to the middle of the top of the main body, and the plating source is located directly below the rotation center of the plurality of plating pots.

4. The vacuum coating machine according to claim 3, characterized in that: The center of each heating lamp is equidistant from the center of the plating source.

5. The vacuum coating machine according to any one of claims 1 to 4, characterized in that: The plurality of plating pots are evenly spaced along the circumference of the evaporation chamber.

6. The vacuum coating machine according to any one of claims 1 to 4, characterized in that: The plurality of heating lamps are evenly spaced along the circumference of the evaporation chamber.

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