Radial-driven pneumatic cathode baffle

Abstract

The utility model relates to the technical field of electroplating, in particular to a radially-driven pneumatic cathode baffle which comprises a vacuum air cylinder, the upper end of the vacuum air cylinder is fixedly connected with a transmission connecting rod, the transmission connecting rod comprises a crankshaft connecting rod, a Y-shaped sleeve rod and a fixing shaft, and the fixing shaft is installed in the middle of the upper end of the Y-shaped sleeve rod in a limiting mode. Equipment is fixed to coating equipment through the fixing shaft, a center turning point is provided for rotation of the Y-shaped sleeve rod, and the crankshaft connecting rod is movably installed at the lower end of the Y-shaped sleeve rod. When the device is used, compressed air provided by the outside is transmitted into the vacuum cylinder in the vacuum cavity through the compressed air connector and the sealed stainless steel pipe, and the vacuum cylinder stretches out and draws back, so that the crankshaft connecting rod pushes the Y-shaped sleeve rod to rotate around the fixed shaft; the connecting rod on the Y-shaped sleeve rod and the bowl-shaped baffle do circular motion around the fixed shaft, so that axial rotation is completed, transverse plane rotation of an original baffle is replaced, space is saved, reliability is achieved, convenience is brought to arrangement of other parts in a cavity, and in the moving process, curved bar linkage replaces a universal joint, so that the problems of transmission clamping stagnation and inflexibility are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of electroplating, in particular to a radially driven pneumatic cathode baffle. Background Art

[0002] In a small magnetron sputtering coating system, the sputtering source generally uses a circular cathode, and a coating device is often equipped with multiple cathodes to coat different materials or composite coatings. When one cathode is working, other non-working cathodes are generally shielded to avoid contaminating the target material and affecting the coating quality. This target shielding mechanism is the cathode baffle.

[0003] The cathode baffle should be able to move flexibly to keep the target in a shielded or unshielded state. The movement of the baffle is controlled by the staff outside the vacuum chamber and does not affect the vacuum state of the system. In order to achieve this requirement, the baffle system should have a transmission and sealing structure to transmit the operator's control action to the baffle actuator in the vacuum chamber.

[0004] However, the connecting rod of the rotary cylinder and the connecting rod of the sealing mechanism currently used are easy to fall off, causing the baffle to fail to open or close, and the universal joint transmission inside the structure is not flexible, which easily causes transmission jamming. In addition, the baffle moves horizontally, occupying a large space in the vacuum chamber, which brings inconvenience to the equipment design. Therefore, those skilled in the art provide a radially driven pneumatic cathode baffle to solve the problems raised in the above background technology. Utility Model Content

[0005] In order to solve the above technical problems, the utility model provides a radially driven pneumatic cathode baffle, including a vacuum cylinder, the upper end of the vacuum cylinder is fixedly connected to a transmission connecting rod, the transmission connecting rod includes a crankshaft connecting rod, a Y-shaped sleeve rod and a fixed shaft, the fixed shaft is limitedly installed in the middle of the upper end of the Y-shaped sleeve rod, the equipment is fixed on the coating equipment by the fixed shaft, and a center turning point is provided for the rotation of the Y-shaped sleeve rod, the crankshaft connecting rod is movably installed at the lower end of the Y-shaped sleeve rod, and the crankshaft connecting rod is an arc-shaped connecting rod as a whole, so as to avoid the fixed shaft in the linkage process, and the lower end of the crankshaft connecting rod is directly and fixedly connected to the cylinder head of the vacuum cylinder, and the belt replaces the universal joint structure in the traditional structure, thereby avoiding the problems of transmission jamming and inflexibility.

[0006] Preferably, the upper end of the transmission connecting rod is fixed by a bolt, and a bowl-shaped baffle is fixedly mounted on the upper end of the connecting rod.

[0007] Preferably, a trachea sealing joint is arranged at the lower end of the vacuum cylinder, and a compressed air joint is arranged at the lower side of the trachea sealing joint.

[0008] Preferably: the compressed air joint and the trachea sealing joint, as well as the trachea sealing joint and the vacuum cylinder are connected via stainless steel pipes, so that the vacuum cylinder is driven to expand and contract by compressed air in the vacuum chamber, and only a static sealing structure is used, without a complex and fault-prone dynamic sealing structure, and the structure is simple and reliable.

[0009] Preferably, the upper end of the Y-shaped sleeve rod is sleeved with the connecting rod, and the connecting rod is telescopically locked on the Y-shaped sleeve rod by bolts to adjust the use length range of the bowl-shaped baffle.

[0010] Technical effects and advantages of the utility model:

[0011] 1. When the utility model is used, the compressed air joint and the trachea sealing joint, as well as the trachea sealing joint and the vacuum cylinder are connected through stainless steel pipes, so that the vacuum cylinder is extended and retracted by compressed air in the vacuum chamber. A static sealing structure is adopted, and a dynamic sealing structure with a complex structure and prone to failure is not required. The structure is simple and reliable.

[0012] 2. When the utility model is used, the compressed air provided from the outside is transmitted to the vacuum cylinder in the vacuum chamber through the compressed air joint through the sealed stainless steel pipe, and the vacuum cylinder is extended and retracted, so that the crankshaft connecting rod will push the Y-shaped sleeve rod to rotate around the fixed axis, and the connecting rod on the Y-shaped sleeve rod and the bowl-shaped baffle will perform circular motion around the fixed axis, thereby completing the axial rotation, replacing the original baffle to rotate in the horizontal plane, saving space and being reliable, and also bringing convenience to the arrangement of other components in the chamber, and in the process of movement, the crankshaft linkage is used instead of the universal joint to avoid the problems of transmission jamming and inflexibility. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the structure provided by this application;

[0014] Figure 2 It is a structural schematic diagram of the transmission connecting rod provided by the present application;

[0015] In the figure: 1. Compressed air joint; 2. Stainless steel pipe; 3. Air pipe sealing joint; 4. Vacuum cylinder; 5. Transmission connecting rod; 6. Connecting rod; 7. Bowl-shaped baffle;

[0016] 51. Crankshaft connecting rod; 52. Y-type sleeve rod; 53. Fixed shaft. DETAILED DESCRIPTION

[0017] The present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations are obvious to those of ordinary skill in the art. The embodiments are selected and described in order to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and design various embodiments with various modifications suitable for specific purposes.

[0018] See also Figures 1-2 In this embodiment, a radially driven pneumatic cathode baffle is provided, including a vacuum cylinder 4, wherein the upper end of the vacuum cylinder 4 is fixedly connected to a transmission connecting rod 5, the upper end of the transmission connecting rod 5 is fixed to a connecting rod 6 by a bolt, and a bowl-shaped baffle 7 is fixedly installed on the upper end of the connecting rod 6, and an air pipe sealing joint 3 is provided at the lower end of the vacuum cylinder 4, and a compressed air joint 1 is provided at the lower side of the air pipe sealing joint 3, and the compressed air joint 1 and the air pipe sealing joint 3, and the air pipe sealing joint 3 and the vacuum cylinder 4 are all connected through a stainless steel pipe 2, so that the vacuum cylinder 4 is driven to expand and contract by compressed air in the vacuum chamber, and only a static sealing structure is used, and a dynamic sealing structure with a complex structure and prone to failure is not required, and the structure is simple and reliable;

[0019] The transmission connecting rod 5 includes a crankshaft connecting rod 51, a Y-shaped sleeve rod 52 and a fixed shaft 53. The upper end of the Y-shaped sleeve rod 52 is sleeved with the connecting rod 6, and the connecting rod 6 is telescopically locked on the Y-shaped sleeve rod 52 by bolts, and the length range of the bowl-shaped baffle 7 is adjusted. The fixed shaft 53 is limitedly installed in the middle of the upper end of the Y-shaped sleeve rod 52. The equipment is fixed on the coating equipment by the fixed shaft 53, and a center turning point is provided for the rotation of the Y-shaped sleeve rod 52. The crankshaft connecting rod 51 is movably installed at the lower end of the Y-shaped sleeve rod 52. The crankshaft connecting rod 51 is an arc-shaped connecting rod as a whole, so as to avoid the fixed shaft 53 during the linkage process. The lower end of the crankshaft connecting rod 51 is directly fixedly connected to the cylinder head of the vacuum cylinder 4, and the belt replaces the universal joint structure in the traditional structure, thereby avoiding the problems of transmission jamming and inflexibility.

[0020] The working principle of the utility model is:

[0021] When the utility model is used, compressed air provided from the outside is transmitted to the vacuum cylinder 4 in the vacuum chamber through the compressed air joint 1 through the sealed stainless steel pipe 2, and the vacuum cylinder 4 is extended and retracted, so that the crankshaft connecting rod 51 will push the Y-shaped sleeve rod 52 to rotate around the fixed axis 53, and the connecting rod 6 and the bowl-shaped baffle 7 on the Y-shaped sleeve rod 52 will perform circular motion around the fixed axis 53, thereby completing the axial rotation, replacing the original baffle to perform horizontal plane rotation, saving space and being reliable, and also bringing convenience to the arrangement of other components in the chamber, and in the process of movement, the crankshaft linkage is used instead of the universal joint to avoid the problems of transmission jamming and inflexibility.

[0022] Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field and related fields without creative work should fall within the scope of protection of the present invention. Structures, devices and operating methods not specifically described and explained in the present invention shall be implemented according to conventional means in the field unless otherwise specified and limited.

Claims

1. A radially driven pneumatic cathode baffle, comprising a vacuum cylinder (4), characterized in that: The upper end of the vacuum cylinder (4) is fixedly connected to a transmission connecting rod (5), and the transmission connecting rod (5) comprises a crankshaft connecting rod (51), a Y-shaped sleeve rod (52) and a fixed shaft (53). The fixed shaft (53) is limitedly installed in the middle of the upper end of the Y-shaped sleeve rod (52), and the device is fixed on the coating device by means of the fixed shaft (53), and a central turning point is provided for the rotation of the Y-shaped sleeve rod (52). The lower end of the Y-shaped sleeve rod (52) is movably installed with a crankshaft connecting rod (51), and the crankshaft connecting rod (51) is an arc-shaped connecting rod as a whole, so as to avoid the fixed shaft (53) during the linkage process. The lower end of the crankshaft connecting rod (51) is directly fixedly connected to the cylinder head of the vacuum cylinder (4).

2. A radially driven pneumatic cathode baffle according to claim 1, characterized in that: The upper end of the transmission connecting rod (5) is fixed to the connecting rod (6) by means of a bolt, and the upper end of the connecting rod (6) is fixedly mounted with a bowl-shaped baffle (7).

3. A radially driven pneumatic cathode baffle according to claim 1, characterized in that: The lower end of the vacuum cylinder (4) is provided with an air pipe sealing joint (3), and the lower side of the air pipe sealing joint (3) is provided with a compressed air joint (1).

4. A radially driven pneumatic cathode baffle according to claim 3, characterized in that: The compressed air joint (1) and the air pipe sealing joint (3), as well as the air pipe sealing joint (3) and the vacuum cylinder (4) are all connected via a stainless steel pipe (2).

5. A radially driven pneumatic cathode baffle according to claim 2, characterized in that: The upper end of the Y-shaped sleeve rod (52) is sleeved with the connecting rod (6), and the connecting rod (6) is telescopically locked on the Y-shaped sleeve rod (52) by means of bolts.

Images