Throwing mechanism for silicon wafer
By using a lifting frame and a rotating motor-driven throwing mechanism in silicon wafer cleaning, the flower basket is driven to move up and down, and the problem of low cleaning efficiency in the prior art is solved, and the cleaning effect and efficiency are significantly improved.
CN222338237UActive Publication Date: 2025-01-10SHENGDA SEMICON EQUIP (JIANGSU) CO LTD
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Patent Information
- Application Number
- CN202421069808.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-16
- Publication Date
- 2025-01-10
- Estimated Expiration
- 2034-05-16
AI Technical Summary
Technical Problem
The existing silicon wafer cleaning technology is inefficient and has poor results, and it is difficult to achieve efficient cleaning in traditional flower basket cleaning methods.
Method used
The drive mechanism including a lifting frame, a support frame and a rotating motor is adopted. The rotating block of the inclined surface drives the rollers and vertical plates to move up and down, and drives the flower baskets on the lifting frame to clean up and down.
Benefits of technology
The cleaning effect and cleaning efficiency of silicon wafers are improved, and better cleaning effect and higher efficiency are achieved.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure CN222338237U_ABST
Abstract
The throwing mechanism comprises a lifting frame, a supporting frame and a rotating motor, a long hole is vertically formed in the supporting frame, a connecting arm is arranged in the long hole, the connecting arm and the long hole are matched and connected in an up-and-down sliding mode, the lifting frame is arranged on one side of the supporting frame, and a vertical plate is arranged on the side, away from the lifting frame, of the supporting frame; the two ends of the connecting arm are fixedly connected with the lifting frame and the vertical plate respectively, the bottom end of the vertical plate is rotationally connected with a roller, a rotating block is arranged below the roller, a slope is arranged at the top end of the rotating block, the roller abuts against the slope, and the rotating motor is fixed to the supporting frame and drives the rotating block to rotate. According to the throwing mechanism, the rotating motor drives the rotating block with the inclined face to rotate so as to drive the rolling wheel abutting against the inclined face to move up and down, so that the vertical plate and the lifting frame are driven to move up and down, a flower basket placed on the lifting frame can be driven to move up and down, the cleaning effect is better, and the cleaning efficiency is improved.
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