Electric activation getter structure

Abstract

The utility model relates to the technical field of getter activation, in particular to an electrically activated getter structure which comprises a substrate bearing a getter film layer, the substrate is arranged to be of a three-dimensional structure, and a plurality of film coating cavities concaved inwards from the surface are formed in the substrate; the getter film layer comprises an outer coating layer distributed on the outer surface of the substrate and a filling coating layer covering the surface of a coating cavity in the substrate. According to the utility model, the substrate is constructed into the three-dimensional structure, the coating cavity is constructed in the substrate, and the getter is coated on the surface of the coating cavity and the outer surface of the substrate under the condition that the cross section is not increased, so that the surface area of the getter is greatly increased, and the getter on all the surface areas can be efficiently activated and utilized; the high vacuum degree in the infrared device is effectively maintained for a long time, the use performance of the infrared device is improved, and the service life of the infrared device is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of getter activation, in particular to an electrically activated getter structure. Background Art

[0002] An infrared detector is a device that converts incident infrared radiation signals into electrical signal outputs. Currently, infrared devices have increasingly higher requirements for performance and life, and electronic devices are becoming increasingly miniaturized. How to effectively maintain the vacuum degree of vacuum devices for a long time to meet their performance and extend their life has become a technical challenge.

[0003] In order to maintain the internal vacuum degree of the infrared device, a getter is usually installed inside the device to maintain the vacuum. When the performance of the getter is consistent, the increased surface area can effectively absorb the internal residual gas, so that the vacuum degree of the infrared detector can be maintained longer, thereby extending the service life of the infrared detector.

[0004] At present, the forms of getters in infrared devices are generally divided into two categories:

[0005] 1. The coating is applied on the germanium window or silicon window of the device and activated by heat during the packaging process. The coating area is small, the activation efficiency is low, the air absorption effect is poor, the scrap rate is high, and the cost is high.

[0006] Second, by adding a getter for electrical activation, the shape is generally divided into flake or columnar, such as attached Figure 5 and attached Figure 6 As shown in the figure, the sheet getter has poor air absorption performance due to its small coating area, and the columnar getter is large in size. As existing products are becoming increasingly miniaturized, the product compatibility is less and less. In addition, the area of ​​the columnar getter that is actually effectively utilized during the electrical activation process is only the surface layer (1-3um thickness). Because it is too thick, it is actually unable to achieve a good activation effect.

[0007] Based on the problems in the prior art, the utility model provides an electrically activated getter structure. Utility Model Content

[0008] The utility model aims to provide an electrically activated getter structure to solve the technical problem in the prior art that the effective air absorption area of ​​the getter is small and it is difficult to effectively maintain the vacuum degree inside the infrared device for a long time.

[0009] The technical solution of the utility model is: an electrically activated getter structure, comprising a substrate carrying a getter film layer, the substrate being arranged as a three-dimensional structure made of metal, and a plurality of coating cavities recessed inward from the surface are arranged on the substrate;

[0010] The getter film layer includes an outer coating layer distributed on the outer surface of the substrate, and a filling coating layer covering the surface of the coating cavity inside the substrate.

[0011] Preferably, the outer coating covers at least the top surface and the bottom surface of the substrate.

[0012] Preferably, the plurality of coating cavities are distributed along the thickness direction of the substrate and form a stacked distribution structure.

[0013] Preferably, the coating cavity is constructed by interlayer gaps hollowed out in the substrate in sequence along the horizontal direction, adjacent interlayer gaps are separated by partitions, and a getter is sputtered to cover the upper and lower surfaces of the partitions.

[0014] Preferably, each layer of the coating cavity is arranged through the substrate.

[0015] Preferably, the outer coating layer is sputtered on at least two-thirds of the surface of the top and bottom of the substrate, respectively.

[0016] Preferably, the cross-sectional shape of the end of the interlayer gap can be configured into any shape.

[0017] Preferably, the substrate includes a functional area with a thickened shape in the middle, and extended areas at both ends; the coating cavity is formed in the functional area, and the extended area is used to achieve the fixed connection of the substrate and the electrical connection for electrical activation.

[0018] Compared with the prior art, the advantages of the utility model are:

[0019] The utility model constructs the substrate into a three-dimensional multi-layer structure. Without increasing the cross section, a coating cavity is constructed inside the substrate, and a getter is coated on the coating cavity surface and the outer surface of the substrate, thereby greatly increasing the surface area of ​​the getter. The coated getter on all surface areas can be efficiently activated and utilized, so as to effectively maintain a high vacuum degree inside the infrared device for a long time, improve the performance of the infrared device, and extend the service life of the infrared device. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The utility model is further described below in conjunction with the accompanying drawings and embodiments:

[0021] Figure 1 It is an overall three-dimensional schematic diagram of the electrically activated getter structure of the utility model;

[0022] Figure 2 This is a schematic diagram of the planar structure of the first embodiment of the utility model;

[0023] Figure 3 This is a schematic diagram of the planar structure of the second embodiment of the utility model;

[0024] Figure 4 This is a schematic diagram of the planar structure of the third embodiment of the utility model;

[0025] Figure 5 A schematic diagram of the structure of a columnar getter in the prior art provided by the utility model;

[0026] Figure 6 A schematic diagram of the structure of a sheet-like getter in the prior art provided by the utility model;

[0027] Wherein: 1. Getter film layer; 2. Substrate;

[0028] 11. Outer coating; 12. Filling coating; 21. Separator; 22. Slot. DETAILED DESCRIPTION

[0029] The following is a further detailed description of the present invention in conjunction with specific embodiments:

[0030] like Figure 1 As shown, an electrically activated getter structure includes a substrate 2, which is made of a sheet of metal material and is constructed into a three-dimensional structure.

[0031] The exposed surface of the substrate 2 is subjected to sputtering coating of a getter, which can absorb the active gas in the electric vacuum device, provide the vacuum required after the device is packaged, and can maintain the vacuum for a long time, thereby ensuring the life, stability and reliability of the device.

[0032] In a specific usage scenario, the substrate 2 is connected to the wall of the packaging tube shell of the packaging shell electric vacuum device (such as an infrared device), and is electrically connected to the outside through a conductive column. The heating effect of the current heats the getter sputtered on the substrate 2 and activates the getter to absorb air.

[0033] The exposed surface on the substrate 2 includes an outer surface and a plurality of surfaces recessed inwardly to form a coating cavity. The corresponding getter film layer 1 includes an outer coating layer 11 distributed on the outer surface of the substrate 2 and a filling coating layer 12 covering the surface of the coating cavity inside the substrate 2.

[0034] The outer coating layer 11 at least covers the top surface and the bottom surface of the substrate 2, and at least two-thirds of the surface area of ​​the top surface and the bottom surface of the substrate 2 should be sputtered.

[0035] In one embodiment, Figure 1 , Figure 2 As shown, the substrate 2 includes a functional area with thickened molding in the middle, and extended areas at both ends; the coating cavity 3 is formed in the functional area, and the extended area is used to achieve the fixed connection of the substrate 2 and the electrical connection for electrical activation.

[0036] The plurality of coating cavities 3 are distributed along the thickness direction of the substrate 2 and form a stacked structure; the coating cavities 3 are constructed by the interlayer gaps hollowed out in the horizontal direction in sequence inside the substrate 2, and the adjacent interlayer gaps are separated by the partitions 21, and the getter is sputtered and covers the upper and lower surfaces of the partitions 21. The number of interlayer gaps is not fixed and depends on the specific situation. The specific three-dimensional stereogram is shown in the attached figure. Figure 1 As shown in the figure, the plan is as attached Figure 2 as shown in .

[0037] In another embodiment, as shown in the attached Figure 3 As shown, multiple coating cavities 3 can also be distributed along the thickness direction perpendicular to the substrate 2, and the getter is sputtered to cover the left and right surfaces of the partition 21, and the interlayer gap depends on the specific situation of the substrate 2.

[0038] At the same time, in order to ensure the maximum utilization of the getter, the interlayer gaps penetrate the substrate 2 regardless of whether they are set in the vertical thickness direction or the parallel thickness direction, so that the corresponding coating cavity 3 forms a through cavity, which can better contact with the gas, realize absorption, and ensure the vacuum degree of the packaging space.

[0039] In other embodiments, the cross-sectional shape of the end of the interlayer gap can be configured into any shape. Figure 4 The cross section of the hollow coating cavity 3 is fan-shaped.

[0040] Compared with the surface-plated getter of the sheet structure and columnar structure in the prior art (see attached Figure 5 , Attachment Figure 6 ), compared with the three-dimensional substrate structure in this embodiment, the outer surface and the internal coating cavity can be coated, which greatly increases the surface area of ​​the getter, and can efficiently activate and utilize the coated getter on all surface areas, so as to effectively maintain the high vacuum degree inside the infrared device for a long time, improve the performance of the infrared device, and extend the service life of the infrared device.

[0041] The above embodiments are only for illustrating the technical concept and features of the utility model, and their purpose is to enable people familiar with this technology to understand the content of the utility model and implement it accordingly, and they cannot be used to limit the protection scope of the utility model. For those skilled in the art, it is obvious that the utility model is not limited to the details of the above exemplary embodiments, and the utility model can be implemented in other specific forms without departing from the spirit or basic features of the utility model. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the utility model is limited by the attached claims rather than the above description, so it is intended to include all changes within the meaning and scope of the equivalent elements of the claims in the utility model.

Claims

1. An electrically activated getter structure, comprising a substrate (2) carrying a getter film layer (1), characterized in that: The substrate (2) is configured as a three-dimensional metal structure, and a plurality of coating cavities (3) recessed inward from the surface are provided on the substrate (2); The getter film layer (1) comprises an outer coating layer (11) distributed on the outer surface of the substrate (2), and a filling coating layer (12) covering the surface of the coating cavity (3) inside the substrate (2).

2. An electrically activated getter structure according to claim 1, characterized in that: The outer coating layer (11) covers at least the top surface and the bottom surface of the substrate (2).

3. An electrically activated getter structure according to claim 1, characterized in that: The plurality of coating cavities (3) are distributed along the thickness direction of the substrate (2) and form a stacked distribution structure.

4. An electrically activated getter structure according to claim 3, characterized in that: The coating cavity (3) is constructed by interlayer gaps that are hollowed out in the horizontal direction in sequence inside the substrate (2), adjacent interlayer gaps are separated by separators (21), and a getter is sputtered to cover the upper and lower surfaces of the separators (21).

5. An electrically activated getter structure according to claim 4, characterized in that: Each layer of the coating cavity (3) is arranged to penetrate the substrate (2).

6. An electrically activated getter structure according to claim 2, characterized in that: The outer coating layer (11) is sputtered on at least two-thirds of the surface of the top and bottom of the substrate (2).

7. An electrically activated getter structure according to claim 4, characterized in that: The cross-sectional shape of the end of the interlayer gap can be configured into any shape.

8. An electrically activated getter structure according to any one of claims 1 to 7, characterized in that: The substrate (2) comprises a functional area with a thickened shape in the middle, and extended areas at both ends; the coating cavity (3) is formed in the functional area, and the extended area is used to achieve the fixed connection of the substrate (2) and to achieve the electrical connection for electrical activation.

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