Auxiliary chamber centering tool for single crystal furnace

Abstract

The utility model discloses an auxiliary chamber centering tool for a single crystal furnace, which particularly relates to the technical field of single crystal manufacturing equipment and comprises a base, a limit block arranged on the surface of the base, two centering components movably arranged on the surface of the limit block, a main chamber arranged on one side of the limit block, and an auxiliary chamber arranged on the top of the main chamber. According to the utility model, by arranging the centering assembly, the lifting head can be centered and calibrated by adjusting the auxiliary chamber in the operation process of the coil base, so that the centering deviation is reduced, and the occurrence of anomalies such as crystal arc scratching and the like is effectively avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal manufacturing equipment, and more specifically, to a sub-chamber centering tool for a single crystal furnace. Background Art

[0002] In the field of semiconductor production, silicon single crystal furnace is a commonly used production equipment. During specific production, the silicon rod needs to be placed in the center of the heat shield in the silicon single crystal furnace. If the center of the silicon rod is offset in the heat shield, it will mainly cause the following effects: 1. The large-diameter silicon single crystal rod is not in the center of the heat shield, which will lead to uneven inert protective gas flow rate in a negative pressure environment, thereby causing fluctuations in the liquid surface temperature and affecting the growth of silicon single crystals; 2. The center offset will cause the crystal rod to shake when the crystal rotation is in the opposite direction to the quartz crucible, which will also affect the growth of silicon single crystals; 3. When the center of the silicon single crystal rod is offset, the crucible position and rotation speed remain unchanged, which will cause changes in the heat convection exchange area in the silicon liquid, and the resistance uniformity of the silicon single crystal rod will be affected. In summary, when the silicon single crystal rod is hoisted to the heat shield in the silicon single crystal furnace through the tungsten wire rope of the silicon single crystal furnace pulling system, it is necessary to perform centering measurement in advance to ensure that the silicon single crystal rod is in the center of the heat shield in the silicon single crystal furnace.

[0003] The invention patent with patent application publication number CN202011258162.7 discloses a single crystal furnace straight pulling alignment calibration system and calibration method. The structure includes a calibration part placed inside the main chamber of the single crystal furnace and suspended in the air; a monitoring part; and a processor connected to the monitoring part; wherein the pulling steel wire is stretched straight; the calibration part is connected to the weight at the lower end of the pulling steel wire, and the lower end face of the calibration part is at a certain distance from the upper end face of the quartz crucible. The advantage of this structure is that the alignment calibration can be repeated quickly and accurately many times, and the results are stable and consistent, which lays the foundation for ensuring the coincidence of the rotation centers of the crystal rod and the quartz crucible during subsequent crystal growth, reduces the solid-liquid interface abnormalities caused by the jitter of the molten silicon liquid level, and maximizes the normal growth of the crystal. The overall error rate is reduced from the current 10% to 5%, the detection efficiency is increased by about 5%, the reproduction consistency is good, and the crystal growth qualification rate is improved.

[0004] However, in actual use, since the structure is aligned by straightening the steel wire, it is easy for the steel wire to be moved during the operation of the single crystal furnace and there may be centering deviations, which may cause abnormalities such as crystal arcing and thus cannot be repaired in time, thus easily affecting the stability of subsequent crystal pulling. Utility Model Content

[0005] In order to overcome the above-mentioned defects of the prior art, the utility model provides a sub-chamber centering tool for a single crystal furnace to solve the problems raised in the above-mentioned background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a sub-chamber centering tool for a single crystal furnace, comprising a base, a limit block is arranged on the surface of the base, two centering components are movably arranged on the surface of the limit block, a main chamber is arranged on one side of the limit block, and a sub-chamber is arranged on the top of the main chamber; the centering component comprises two brackets vertically movably arranged on one side of the limit block, the inner cavities of the two brackets are each provided with a cross bar, the outer sides of the cross bars are symmetrically threaded with two telescopic rods, the top ends of the two cross bars are connected with handles through the brackets, wherein the top ends of the two telescopic rods are fixedly provided with a first clamping frame, and the top ends of the other two telescopic rods are fixedly provided with a second clamping frame, the two first clamping frames and the second clamping frames are respectively detachably connected to the sub-chamber and the main chamber, and the above-mentioned technical solution is adopted so that the first clamping frame can be moved to move the sub-chamber, thereby achieving the function of adjusting the centering of the main chamber during operation.

[0007] Preferably, the first clamping frame and the second clamping frame are both arranged in a V shape, an L-shaped positioning bracket is fixedly provided on the bottom of the two first clamping frames, and a vertical positioning bracket is fixedly provided on the surface of the two second clamping frames. The above technical solution is adopted to assist the centering function by aligning the L-shaped positioning bracket with the vertical positioning bracket.

[0008] Preferably, three slide rails are provided on the surface of the limit block, and vertical rods are provided inside the three slide rails, and both ends of the vertical rods are fixedly connected to the inner walls of the slide rails; two connecting rods are movably provided on the surfaces of the three vertical rods, and one end of the connecting rods is fixedly connected to the bracket. The above technical solution is adopted to facilitate the adjustment of the height of the first clamping frame and the second clamping frame, thereby achieving multi-angle adjustment and improving accuracy.

[0009] Technical effects and advantages of the utility model:

[0010] 1. By setting a centering component, when the centering of the lifting head needs to be adjusted and calibrated during the use of the auxiliary chamber and the main chamber, the telescopic rod arranged outside the first clamping frame is adjusted to extend and retract, so that the output end of the telescopic rod drives the first clamping frame so that the L-shaped positioning bracket can be aligned with the vertical positioning bracket, thereby achieving the centering function. Compared with the prior art, the advantage of this device is that the centering calibration of the lifting head can be performed by adjusting the auxiliary chamber during the operation of the furnace, thereby reducing the centering deviation and effectively avoiding the occurrence of abnormalities such as crystal arcing;

[0011] 2. By arranging a connecting rod inside the slide rail, when adjusting the centering calibration of the lifting head, the bracket arranged on one side of the first clamping frame can drive the first clamping frame to move vertically up and down. Compared with the prior art, the feature of this device is that it can drive the first clamping frame to move vertically up and down through the bracket, thereby improving the accuracy of calibration. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0013] Figure 2 It is a schematic diagram of the centering component structure of the utility model.

[0014] Figure 3 It is a side structural schematic diagram of the centering component of the present utility model.

[0015] Figure 4 For this utility model Figure 3 A schematic diagram of the enlarged structure in the middle.

[0016] The accompanying drawings are marked as follows: 1. limit block; 2. slide rail; 3. connecting rod; 4. vertical rod; 5. bracket; 6. horizontal rod; 7. handle; 8. first clamping frame; 9. second clamping frame; 10. L-shaped positioning bracket; 11. vertical positioning bracket; 12. telescopic rod; 13. auxiliary chamber; 14. main chamber; 15. base; 16. roller. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0018] As attached Figure 1-4The illustrated auxiliary chamber centering tool for a single crystal furnace comprises a base 15, a limit block 1 is arranged on the surface of the base 15, two centering components are movably arranged on the surface of the limit block 1, a main chamber 14 is arranged on one side of the limit block 1, and an auxiliary chamber 13 is arranged on the top of the main chamber 14; the centering component comprises two brackets 5 vertically movably arranged on one side of the limit block 1, the inner cavities of the two brackets 5 are both provided with cross bars 6, the outer surfaces of the cross bars 6 are symmetrically threaded with two telescopic rods 12, the top ends of the two cross bars 6 are connected to handles 7 through the brackets 5, wherein the top ends of the two telescopic rods 12 are both fixedly provided with a first clamping frame 8, and the top ends of the other two telescopic rods 12 are both fixedly provided with a second clamping frame 9, the two first clamping frames 8 and the second The clamping frame 9 is detachably connected to the auxiliary chamber 13 and the main chamber 14 respectively. The limit block 1 is moved to one side of the main chamber 14 and then the cross bar 6 is rotated by turning the handle 7, so as to achieve the function of adjusting the distance between the two telescopic rods 12, so that the auxiliary chamber 13 and the main chamber 14 can be clamped and fixed by the first clamping frame 8 and the second clamping frame 9 respectively. When the auxiliary chamber 13 and the main chamber 14 need to adjust the centering of the calibrated lifting head during use, the telescopic rod 12 arranged outside the first clamping frame 8 is adjusted to be telescopic, so that the output end of the telescopic rod 12 drives the first clamping frame 8 so that the L-shaped positioning bracket 10 can be aligned with the vertical positioning bracket 11, thereby achieving the centering function.

[0019] As attached Figure 1-2 As shown, the first clamping frame 8 and the second clamping frame 9 are both arranged in a V shape, and an L-shaped positioning bracket 10 is fixedly arranged at the bottom of the two first clamping frames 8, and a vertical positioning bracket 11 is fixedly arranged on the surface of the two second clamping frames 9. The shapes of the first clamping frame 8 and the second clamping frame 9 can improve the stability of the main chamber 14 and the auxiliary chamber 13 when the auxiliary chamber 13 and the main chamber 14 are clamped and limited.

[0020] As attached Figure 1-3 As shown, three slide rails 2 are provided on the surface of the limit block 1, and vertical rods 4 are provided inside the three slide rails 2, and both ends of the vertical rods 4 are fixedly connected to the inner walls of the slide rails 2; two connecting rods 3 are movably provided on the surface of the three vertical rods 4, and one end of the connecting rods 3 is fixedly connected to the bracket 5. The connecting rods 3 are limited by the slide rails 2, thereby improving the stability of the bracket 5 when moving.

[0021] As attached Figure 1 As shown, a plurality of rollers 16 are provided at the bottom of the base 15 , and the rollers 16 are rotated by pushing the limiting block 1 , thereby achieving the function of convenient movement of the limiting block 1 .

[0022] Working principle of the utility model: when the device is in use, the limit block 1 is first moved to one side of the main chamber 14, and then the handle 7 is turned to allow the cross bar 6 to rotate, thereby achieving the function of adjusting the distance between the two telescopic rods 12, so that the auxiliary chamber 13 and the main chamber 14 can be clamped and fixed by the first clamping frame 8 and the second clamping frame 9 respectively. When the auxiliary chamber 13 and the main chamber 14 need to adjust the centering of the calibration lifting head during use, the telescopic rod 12 arranged outside the first clamping frame 8 is adjusted to be telescopic, so that the output end of the telescopic rod 12 drives the first clamping frame 8 so that the L-shaped positioning bracket 10 can be aligned with the vertical positioning bracket 11, thereby achieving the centering function.

[0023] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A sub-chamber centering tool for a single crystal furnace, comprising a base (15), characterized in that: A limit block (1) is disposed on the surface of the base (15); two centering components are movably disposed on the surface of the limit block (1); a main chamber (14) is disposed on one side of the limit block (1); and a secondary chamber (13) is disposed on the top of the main chamber (14); The centering assembly comprises two brackets (5) vertically movably arranged on one side of the limit block (1), the inner cavities of the two brackets (5) are each provided with a cross bar (6), the outer surfaces of the cross bars (6) are each symmetrically threaded with two telescopic rods (12), the top ends of the two cross bars (6) pass through the brackets (5) and are connected to handles (7), wherein the top ends of the two telescopic rods (12) are each fixedly provided with a first clamping frame (8), and the top ends of the other two telescopic rods (12) are each fixedly provided with a second clamping frame (9), and the two first clamping frames (8) and the two second clamping frames (9) are respectively detachably connected to the auxiliary chamber (13) and the main chamber (14); The first clamping frame (8) and the second clamping frame (9) are both arranged in a V shape, an L-shaped positioning bracket (10) is fixedly arranged at the bottom of the two first clamping frames (8), and a vertical positioning bracket (11) is fixedly arranged on the surface of the two second clamping frames (9).

2. The auxiliary chamber centering tool for a single crystal furnace according to claim 1, characterized in that: The surface of the limit block (1) is provided with three slide rails (2), and vertical rods (4) are arranged inside the three slide rails (2), and both ends of the vertical rods (4) are fixedly connected to the inner wall of the slide rails (2).

3. The auxiliary chamber centering tool for a single crystal furnace according to claim 2, characterized in that: Two connecting rods (3) are movably provided on the surfaces of the three vertical rods (4), and one end of the connecting rod (3) is fixedly connected to the bracket (5).

4. The auxiliary chamber centering tool for a single crystal furnace according to claim 1, characterized in that: A plurality of rollers (16) are arranged at the bottom of the base (15).

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