Ultrasonic centrifugal photoresist stripping device for micro-nano machining

Abstract

The utility model relates to an ultrasonic centrifugal photoresist stripping device for micro-nano machining, which comprises a machine body, a vertical shaft is assembled on the machine body, a transverse frame is connected to the vertical shaft, an oscillation barrel is connected to the tail end of the transverse frame, the axis of the oscillation barrel obliquely extends towards the axis direction of the vertical shaft from bottom to top, and the oscillation barrel is provided with an inner hole for containing stripping liquid. The inner hole comprises an oscillation section, a necking section and a containing section which sequentially extend from top to bottom, the diameter of the containing section and the diameter of the oscillation section are larger than the size of the necking section, and an ultrasonic vibration rod used for being inserted into the oscillation barrel from the end opening of the oscillation barrel is further fixed to the transverse frame; one end of the vertical shaft is in transmission connection with a rotary driving mechanism, and the rotary driving mechanism drives the vertical shaft to rotate around the axis of the vertical shaft so as to drive the falling photoresist in the oscillation barrel to do centrifugal motion to move into the necking section. Small particles stripped in the centrifugation process can be collected, and a better overall removal effect on samples with fine structures and photoresist denatured due to processing is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of micro-nano processing, in particular to an ultrasonic centrifugal photoresist stripping device for micro-nano processing. Background Art

[0002] Micro-nano processing technology is the foundation of cutting-edge scientific research in national needs, such as superconducting quantum computing, semiconductor chip preparation, and new surface materials. In micro-nano processing, the lift-off method is a common pattern transfer process, which generally requires the application of different photoresists, because these photoresists will affect the accuracy of subsequent processing and even affect the performance of the final sample, and the lift-off process requires the removal of the remaining photoresist as much as possible.

[0003] The commonly used stripping method at present is the ultrasonic oscillation method, which uses ultrasound to shatter the photoresist under the large area of ​​metal film and then mechanically strip it off. For samples with fine structures on the surface of the sample, if the power is large during ultrasonic oscillation, it is very likely that the fine structure will be removed together with the photoresist during stripping, resulting in failure of the stripping process. If the power is too small, the large area of ​​photoresist may not be shattered and removed, which will also cause stripping failure. In particular, in some stripping processes, the photoresist will denature due to the absorption of more heat when the metal film is grown for a long time, and it is even less likely to be shattered by ultrasonic oscillation. At this time, the use of ultrasonic oscillation will increase the possibility of stripping failure; at the same time, the fine photoresist after stripping will re-attach to the surface of the metal film after being separated from the metal film by oscillation, resulting in incomplete stripping. Utility Model Content

[0004] The utility model aims to provide an ultrasonic centrifugal photoresist stripping device for micro-nano processing, so as to solve the problems in the prior art that the photoresist and the metal film cannot be effectively stripped, and the photoresist is easy to re-adhere to the metal film after stripping.

[0005] In order to solve the above problems, the ultrasonic centrifugal photoresist stripping device for micro-nano processing involved in the utility model adopts the following technical solutions:

[0006] The invention discloses an ultrasonic centrifugal photoresist stripping device for micro-nano processing, comprising a machine body, a vertical shaft is mounted on the machine body, the axis of the vertical shaft extends in the up-down direction, a horizontal frame extending in the radial direction of the vertical shaft is connected to the vertical shaft, an oscillation barrel is connected to the tail end of the horizontal frame, the axis of the oscillation barrel extends obliquely from bottom to top toward the axis of the vertical shaft, the oscillation barrel has an inner hole for containing a stripping liquid, the inner hole comprises an oscillation section for containing a sample, a necking section and a containing section for containing stripped photoresist extending in sequence from top to bottom, the diameters of the containing section and the oscillation section are larger than the size of the necking section, an ultrasonic vibrating rod for inserting into the oscillation barrel from a port of the oscillation barrel is also fixed on the horizontal frame; one end of the vertical shaft is transmission-connected to a rotary drive mechanism, the rotary drive mechanism drives the vertical shaft to rotate around its own axis to drive the detached photoresist in the oscillation barrel to move to the necking section by centrifugal motion.

[0007] Furthermore, the connection between the necking section and the oscillating section and the accommodating section is connected through a smooth arc transition.

[0008] Furthermore, the horizontal frame is provided with an adjustment structure for adjusting the angle between the axis of the oscillation barrel and the axis of the vertical shaft.

[0009] Furthermore, the cross frame includes a first support rod fixed on the vertical axis, the adjustment structure includes a first clamp connected to the first support rod, the oscillation barrel is fixed in the first clamp, and a first locking structure for limiting the relative angle between the first clamp and the first support rod is also provided between the first clamp and the first support rod.

[0010] Furthermore, the first support rod includes a first sleeve for sleeved on the vertical shaft, and also includes a first cross bar connected to the side wall of the first sleeve, and the first clamp is connected to the tail end of the first cross bar.

[0011] Furthermore, there are more than two first cross bars, which are evenly spaced around the circumference of the first sleeve.

[0012] Furthermore, the cross frame also includes a second support rod fixed on the vertical shaft, the second support rod includes a second shaft sleeve mounted on the vertical shaft, a second cross rod is connected to the side wall of the second shaft sleeve, a second clamp is hinged at the tail end of the second cross rod, and the ultrasonic vibration rod is fixedly inserted in the second clamp.

[0013] Furthermore, the second cross bar comprises two single rods matched with the guiding telescopic sleeves, and the second cross bar is provided with a telescopic locking structure for limiting the telescopic length thereof.

[0014] Furthermore, the machine body includes an operating box, the vertical shaft is rotatably assembled in the operating box, the rotary drive mechanism is connected to the bottom of the operating box, and a controller is also provided on the operating box, which is control-connected to the rotary drive mechanism and the ultrasonic vibration rod.

[0015] Furthermore, the vertical shaft is also provided with a laser thermometer for monitoring the internal temperature of the operating box, and the laser thermometer is connected to the controller signal.

[0016] The beneficial effects of the utility model are as follows: the ultrasonic centrifugal photoresist stripping device for micro-nano processing involved in the utility model, by utilizing the oscillation effect of the ultrasonic vibration rod, oscillates and separates impurities such as photoresist attached to the sample, and at the same time, under the driving force of the rotary drive mechanism, drives the vertical shaft to rotate around its own axis, so that impurities such as photoresist perform centrifugal motion, and under the action of centrifugal rotation, they are away from the sample to protect the sample with a fine structure; adopts an oscillation plus centrifugal coupling mode, and utilizes the centrifugal phenomenon to remove a large area of ​​photoresist and its surface metal from the sample surface while ultrasonic oscillating. Due to the increased centrifugal effect, the present application can reduce the power of ultrasonic oscillation during the stripping process, and can realize automatic and rapid separation of photoresist and sample without the need for precise control of the oscillation power; at the same time, the bottom of the oscillation barrel is designed to be a necked section structure, which can collect small particles stripped off during the centrifugal process, so that the sample is not contaminated for the second time, and has a better overall removal effect on samples with fine structures and photoresists denatured due to processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solution of the embodiment of the utility model, the following is a brief introduction to the drawings required for use in the embodiment:

[0018] Figure 1 It is a schematic structural diagram of a specific embodiment of the ultrasonic centrifugal photoresist stripping device of the utility model;

[0019] Figure 2 for Figure 1 The schematic diagram of the internal structure without the operation box;

[0020] Figure 3 for Figure 2 A front view of

[0021] Figure 4 for Figure 3 Schematic diagram of the structure of the oscillating barrel;

[0022] Figure 5 for Figure 3 Half section view.

[0023] Description of reference numerals: 1-operation box; 11-switch door; 12-installation hole; 13-control panel;

[0024] 2-vertical shaft; 3-reduction motor; 4-first support rod; 41-first sleeve; 42-first cross bar; 43-first clamp; 44-first locking structure;

[0025] 5-second support rod; 51-second shaft sleeve; 52-second cross bar; 53-second clamp; 54-telescopic locking structure; 55-second locking structure;

[0026] 6-oscillation barrel; 61-inner hole; 62-oscillation section; 63-neck section; 64-accommodation section;

[0027] 7-ultrasonic vibrating rod; 8-anti-rotation locking structure; 9-laser thermometer. DETAILED DESCRIPTION

[0028] In order to make the technical purpose, technical solution and beneficial effects of the utility model clearer, the technical solution of the utility model is further described below in conjunction with the drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the utility model and are not used to limit the utility model, that is, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. The components of the embodiments of the utility model described and shown in the drawings can be arranged and designed in various different configurations.

[0029] The specific embodiment of the ultrasonic centrifugal photoresist stripping device for micro-nano processing involved in the utility model is as follows: Figures 1 to 5 As shown, the device includes an operation box 1, the front side of the operation box 1 has a switch door 11, the middle position of the bottom wall of the operation box 1 is provided with a mounting hole 12, the mounting hole 12 is rotatably mounted with a vertical shaft 2 through a bearing, the axis of the vertical shaft 2 extends in the up and down direction, and the bottom of the operation box 1 is fixedly connected with a rotary drive mechanism connected to the vertical shaft 2 in a transmission manner. In this embodiment, the rotary drive mechanism is a reduction motor 3. In the actual working process, the reduction motor 3 controls the rotary motion of the vertical shaft 2.

[0030] The vertical shaft 2 is connected with a horizontal frame extending in the radial direction of the vertical shaft 2, and the tail end of the horizontal frame is connected with an oscillation barrel 6. The horizontal frame is also fixed with an ultrasonic vibration rod 7 for inserting into the oscillation barrel 6 from the port of the oscillation barrel 6. The vertical shaft 2 rotates to drive the horizontal frame to swing. During the swinging process of the horizontal frame, the oscillation barrel 6 rotates around the axis of the vertical shaft 2, so that the material inside the oscillation barrel 6 can be centrifuged, and the ultrasonic vibration rod 7 can oscillate and separate the photoresist on the surface of the material.

[0031] The structure of the oscillating barrel 6 is shown in the figure, and the whole structure is a barrel-shaped structure with a bottom seal. The oscillating barrel 6 has an inner hole 61 for accommodating a stripping liquid. The inner hole 61 includes an oscillating section 62, a necking section 63 and a holding section 64 for accommodating the photoresist after stripping, which extend sequentially from top to bottom. The diameters of the holding section 64 and the oscillating section 62 are larger than the size of the necking section 63. Specifically, the connection between the necking section 63 and the oscillating section 62 and the holding section 64 is connected by a smooth arc transition. The sample is placed in the oscillating barrel 6 and is above the necking section 63. The photoresist is cleaned by the oscillation of the ultrasonic vibrating rod 7. At the same time, the reduction motor 3 is controlled to drive the oscillating barrel 6 to rotate, so that the photoresist that falls off can be centrifuged and cannot be attached to the surface of the sample. The two parts of the necking mode of the designed oscillating barrel 6 are connected up and down, and a smooth transition process is performed at the upper and lower transition points of the necking position, so that the lower particles and residues peeled off during the centrifugation process can be collected inside the holding section 64, so as to avoid floating and contaminating the sample again in the deceleration stage.

[0032] Of course, preferably, the minimum diameter of the necking section 63 is not greater than half of the diameter of the oscillating section 62, which can effectively prevent impurities from floating up and achieve the separation of small particles of photoresist from the material body.

[0033] The structure and working principle of the ultrasonic vibration rod 7 are consistent with the prior art, and those skilled in the art may select them arbitrarily according to actual needs without making any specific limitation.

[0034] The horizontal frame includes two support rods fixed on the vertical axis 2 at intervals along the up and down directions. The two support rods are defined as the first support rod 4 and the second support rod 5. The first support rod 4 is located below the second support rod 5. The oscillation barrel 6 is connected to the first support rod 4, and the ultrasonic vibration rod 7 is connected to the second support rod 5.

[0035] The first support rod 4 includes a first cross bar 42, the axis of the first cross bar 42 is perpendicular to the axis of the vertical axis 2, and the tail end thereof extends outward. In order to realize the fixed assembly of the oscillation barrel 6, a first clamp 43 is connected to the tail end of the first cross bar 42, and the oscillation barrel 6 is fixedly inserted in the first clamp 43. Thus, the oscillation barrel 6 can be fixedly clamped, and in order to meet the adjustment of the tilt angle of the oscillation barrel 6, in this embodiment, the first clamp 43 is hingedly assembled with the first cross bar 42, and a first locking structure 44 for limiting the relative angle between the two is provided between the two; in this embodiment, the first locking structure 44 can be a fastening screw connected between the first cross bar 42 and the first clamp 43, and the hinge axis of the two can be directly designed as a bolt and nut connection. By screwing the bolt after adjusting the angle, the hinge position of the first cross bar 42 and the first clamp 43 is relatively pressed and pressed, and the anti-rotation locking is realized by friction. No specific limitation is made here.

[0036] The second support rod 5 includes a second cross bar 52, the axis of which is perpendicular to the axis of the vertical axis 2, and the tail end thereof extends outward. At the same time, in order to adapt to the position and inclination angle of the oscillation barrel 6, so as to facilitate the insertion of the ultrasonic vibration rod 7 wire into the oscillation barrel 6, the second cross bar 52 includes two single rods matched with the guide telescopic sleeves, the tail end of the second cross bar 52 is connected to a second clamp 53, the ultrasonic vibration rod is fixedly inserted in the second clamp 53, and the second cross bar 52 is provided with a telescopic locking structure 54 for limiting the telescopic length of the second cross bar 52. Specifically in this embodiment, the telescopic locking structure 54 is a screw screw inserted on the outer single rod. In actual use, the telescopic length of the second cross bar 52 is adjusted according to the position of the oscillation barrel 6, and then the screw is manually operated to relatively lock the two single rods of the second cross bar 52 along the axial direction.

[0037] In order to further adapt the tilt angle of the oscillation barrel 6, it is also necessary to adjust the axis of the second clamp 53 to be consistent with the axis of the oscillation barrel 6. In this embodiment, the second clamp 53 is hingedly assembled with the second cross bar 52, and a second locking structure 55 for limiting the relative angle between the two is provided between the two. In this embodiment, the second locking structure 55 can be a fastening screw connected between the second cross bar 52 and the second clamp 53, and the hinge axis of the two can be directly designed as a bolt and nut connection. By screwing the bolt after adjusting the angle, the hinge position of the second cross bar 52 and the second clamp 53 is relatively pressed and pressed, and the anti-rotation locking is achieved by friction. No specific limitation is made here.

[0038] During the actual clamping and fixing process, the oscillation barrel 6 is first fixed on the first clamp 43, and then the first clamp 43 is rotated according to the process requirements, and the first clamp 43 is rotated relative to the first cross bar 42. After the angle of the oscillation barrel 6 is determined, the first clamp 43 and the first cross bar 42 are relatively locked by the first locking structure 44, so that the installation of the vibration barrel can be achieved. After that, the ultrasonic vibration rod 7 is partially inserted into the second clamp 53, the telescopic length of the second cross bar 52 is adjusted, and the relative angle between the second cross bar 52 and the second clamp 53 is adjusted to make the axis of the second clamp 53 consistent with the axis of the oscillation barrel 6, and then the ultrasonic vibration rod 7 is inserted into the oscillation barrel 6. After it is in place, the second locking structure 55 and the telescopic locking structure 54 are locked front and back to meet the fixation and clamping of the ultrasonic vibration rod 7.

[0039] Preferably, in the present embodiment, in order to facilitate the fixed connection between the support frame and the vertical shaft 2, the above-mentioned first support rod 4 includes a first shaft sleeve 41 sleeved on the vertical shaft 2, and the above-mentioned first cross bar 42 is fixed on the side wall of the first shaft sleeve 41. In order to achieve the anti-rotation of the vertical shaft 2 and the shaft sleeve, a rotation-stop locking structure 8 is connected between the two. Correspondingly, the second support rod 5 includes a second shaft sleeve 51 sleeved on the vertical shaft 2, and the second cross bar 52 is fixed on the side wall of the second shaft sleeve 51. At the same time, a rotation-stop locking structure 8 is also provided between the second cross bar 52 and the second shaft sleeve 51. In the present embodiment, the rotation-stop locking structure 8 is implemented in the form of a locking pin. Of course, in other embodiments, a keyway can be provided between the two and a key can be inserted to implement it, or the two can be implemented by threaded assembly or the like, or the shaft sleeve and the vertical shaft 2 can be welded and fixed therebetween, without specific limitation.

[0040] In order to achieve synchronous centrifugation of multiple samples and ensure the balance of the overall device, there are two oscillation barrels 6, which are evenly spaced around the circumference of the vertical shaft 2. Taking the first support rod 4 as an example, the first sleeve 41 is connected to the opposite sides with the first cross bar 42, and the tail ends of the first cross bar 42 are connected to the first clamp 43. An oscillation barrel 6 is fixed to each first clamp 43, and the two oscillation barrels 6 are relatively symmetrically arranged with the axis of the vertical shaft 2 as the axis.

[0041] Of course, in other embodiments, the number of the oscillation barrels 6 and the first cross bars 42 may be greater, and no specific limitation is made.

[0042] The vertical shaft 2 is also provided with a laser thermometer 9 for monitoring the internal temperature of the operating box 1. At the same time, a control panel 13 is provided on one side of the operating box 1. The control panel 13 is integrated with a controller. Specifically, the control panel 13 is integrated with a main control module, a speed module, a speed regulation module, a position initialization module, etc., which are used for signal transmission with various electrical components, wherein the controller is connected to the reduction motor 3 to control the start and stop, the speed size, etc. of the reduction motor 3. The laser thermometer 9 is connected to the controller signal, so that the real-time monitoring of the internal temperature of the box can be achieved to ensure the process requirements of the ambient temperature. Of course, the laser thermometer 9 can also adopt other temperature measurement forms, and it can also be fixed on the box wall of the operating box 1, without specific limitation. The above-mentioned main control module is used to connect with the signals of each module, receive and process data, the speed module is used to display the working state of the reduction motor 3, the speed regulation module is used to adjust the working state of the reduction motor 3, and the position initialization module is used to adjust the position of the oscillation barrel 6 when the box door is opened, so that each time the box door is opened, the oscillation barrel 6 is facing the box door, which is convenient for taking. Furthermore, the main control module is also signal-connected to an ultrasonic display module and an ultrasonic control module, which are respectively signal-connected to the ultrasonic vibration rod 7 . The ultrasonic display module displays the working status of the ultrasonic vibration rod 7 , and the ultrasonic control module is used to control the working status of the ultrasonic vibration rod 7 .

[0043] In the actual working process, an oscillating liquid (such as glycerin, water, etc.) is poured into the oscillation barrel 6, and ultrasonic oscillation is used to detach impurities such as photoresist attached to the sample, and under the action of centrifugal rotation, the impurities are separated from the sample to protect the sample with a fine structure. At the same time, the above-mentioned ultrasonic oscillation function, centrifugal rotation function, and temperature control function are respectively controlled by independent components and can be adjusted independently to meet a variety of different process requirements. The oscillation barrel 6 is combined with centrifugal force to remove a large area of ​​photoresist and its surface metal from the sample surface by centrifugal phenomenon while ultrasonic oscillating. Due to the increased centrifugal effect, the present application can reduce the power of ultrasonic oscillation during the stripping process, and has a better overall removal effect on samples with fine structures and photoresists denatured due to processing.

[0044] Finally, it should be noted that the above embodiments are only used to illustrate but not to limit the technical solutions of the present invention, and any equivalent substitutions of the present invention and any modifications or partial substitutions that do not depart from the spirit and scope of the present invention shall be included in the scope of protection of the claims of the present invention.

Claims

1. An ultrasonic centrifugal photoresist stripping device for micro-nano processing, characterized in that: The invention comprises a machine body, on which a vertical shaft is mounted, the axis of the vertical shaft extends in the up-down direction, a horizontal frame extending in the radial direction of the vertical shaft is connected to the vertical shaft, an oscillation barrel is connected to the tail end of the horizontal frame, the axis of the oscillation barrel extends obliquely from bottom to top toward the axis of the vertical shaft, the oscillation barrel has an inner hole for accommodating a stripping liquid, the inner hole comprises an oscillation section, a necking section and a containing section for accommodating a stripped photoresist extending in sequence from top to bottom, the diameters of the containing section and the oscillation section are larger than the size of the necking section, an ultrasonic vibrating rod for inserting into the oscillation barrel from the port of the oscillation barrel is also fixed on the horizontal frame; one end of the vertical shaft is transmission-connected to a rotary drive mechanism, the rotary drive mechanism drives the vertical shaft to rotate around its own axis, so as to drive the detached photoresist in the oscillation barrel to move to the necking section by centrifugal motion.

2. The ultrasonic centrifugal photoresist stripping device for micro-nano processing according to claim 1, characterized in that: The connection between the necking section and the oscillating section and the accommodating section is connected by a smooth arc transition.

3. The ultrasonic centrifugal photoresist stripping device for micro-nano processing according to claim 1 or 2, characterized in that: The horizontal frame is provided with an adjusting structure for adjusting the angle between the axis of the oscillation barrel and the axis of the vertical shaft.

4. The ultrasonic centrifugal photoresist stripping device for micro-nano processing according to claim 3, characterized in that: The cross frame includes a first support rod fixed on the vertical axis, the adjustment structure includes a first clamp connected to the first support rod, the oscillation barrel is fixed in the first clamp, and a first locking structure for limiting the relative angle between the first clamp and the first support rod is also provided between the first clamp and the first support rod.

5. The ultrasonic centrifugal photoresist stripping device for micro-nano processing according to claim 4, characterized in that: The first support rod comprises a first sleeve for sleeved on the vertical shaft, and also comprises a first cross bar connected to the side wall of the first sleeve, and a first clamp is connected to the tail end of the first cross bar.

6. The ultrasonic centrifugal photoresist stripping device for micro-nano processing according to claim 5, characterized in that: There are more than two first cross bars, which are evenly spaced around the circumference of the first sleeve.

7. The ultrasonic centrifugal photoresist stripping device for micro-nano processing according to claim 4, characterized in that: The cross frame also includes a second support rod fixed on the vertical shaft, the second support rod includes a second shaft sleeve sleeved on the vertical shaft, the side wall of the second shaft sleeve is connected to a second cross rod, the tail end of the second cross rod is hinged with a second clamp, and the ultrasonic vibration rod is fixedly inserted in the second clamp.

8. The ultrasonic centrifugal photoresist stripping device for micro-nano processing according to claim 7, characterized in that: The second cross bar comprises two single bars matched with the guiding telescopic sleeves, and the second cross bar is provided with a telescopic locking structure for limiting the telescopic length thereof.

9. The ultrasonic centrifugal photoresist stripping device for micro-nano processing according to claim 1 or 2, characterized in that: The machine body comprises an operating box, the vertical shaft is rotatably assembled in the operating box, the rotary drive mechanism is connected to the bottom of the operating box, and a controller is also arranged on the operating box, which is control-connected to the rotary drive mechanism and the ultrasonic vibration rod.

10. The ultrasonic centrifugal photoresist stripping device for micro-nano processing according to claim 9, characterized in that: The vertical shaft is also provided with a laser thermometer for monitoring the internal temperature of the operating box, and the laser thermometer is connected to the controller signal.

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