Electronic-grade hydrogen peroxide production device

Abstract

The utility model discloses an electronic-grade hydrogen peroxide production device, and relates to the technical field of electronic-grade chemicals. The electronic-grade hydrogen peroxide production device comprises a storage tank, a filtering device, a resin adsorption assembly and a first finished product tank which are sequentially communicated, and the resin adsorption assembly comprises at least one anion exchange resin column and at least one cation exchange resin column. The anion exchange resin columns and the cation exchange resin columns are sequentially and alternately communicated. According to the electronic-grade hydrogen peroxide production device, particulate matters and moisture in the raw material hydrogen peroxide are filtered out through the filtering device, and anion and cation impurities in the raw material hydrogen peroxide are adsorbed and separated out by alternately arranging the anion exchange resin columns and the cation exchange resin columns; meanwhile, ion impurities in the resin adsorption assembly equipment are prevented from polluting the hydrogen peroxide, and the electronic-grade hydrogen peroxide product finally entering the first finished product tank is lower in impurity content and higher in purity.

Description

Technical Field

[0001] The present application relates to the technical field of electronic-grade chemicals, and in particular to an electronic-grade hydrogen peroxide production device. Background Art

[0002] The research and development of ultrapure chemicals abroad had matured at the end of the last century, and its product level had reached 100ppt, which can be used in the manufacture of ultra-large-scale integrated circuits (12-inch chips). Due to the late start of research and development in China and the weak industry foundation, only a few units have developed some electronic chemicals based on the original chemical reagent process, but there have been no real breakthroughs in production processes and technologies. After unremitting efforts by domestic peers, many new processes and new products have emerged in recent years, such as Solvay's electronic-grade hydrogen peroxide reaching 0.001ppb, and Grinda's tetramethylammonium hydroxide reaching 1ppb. However, in general, more than 90% of the wet chemicals used on 12-inch chips need to be imported.

[0003] Due to the rapid development of the integrated circuit field in recent years, the precision of chip production has become higher and higher. The role of electronic-grade hydrogen peroxide is mainly used to clean semiconductor silicon wafers to remove possible contaminants. These contaminants will affect the performance, conductivity and life of the wafers. This has put forward higher and higher requirements for the purity of hydrogen peroxide production.

[0004] In existing electronic-grade hydrogen peroxide production devices, generally only particulate impurities and water in the hydrogen peroxide raw materials are separated. As a result, the produced hydrogen peroxide often contains ionic impurities, resulting in the purity of the hydrogen peroxide failing to meet customer requirements. Summary of the invention

[0005] The purpose of the present application is to provide an electronic grade hydrogen peroxide production device to solve the technical problems existing in the above-mentioned background technology to at least a certain extent.

[0006] To achieve the above purpose, the present application provides the following technical solution: an electronic grade hydrogen peroxide production device, comprising:

[0007] A storage tank, loaded with hydrogen peroxide raw material;

[0008] A filtering device, arranged in communication with the liquid outlet of the storage tank along the liquid flow direction;

[0009] A resin adsorption component connected to the liquid outlet of the filter device along the liquid flow direction;

[0010] The resin adsorption assembly comprises at least one anion exchange resin column and at least one cation exchange resin column, wherein the anion exchange resin column and the cation exchange resin column are alternately connected and arranged in sequence;

[0011] The first finished product tank is connected to the liquid outlet end of the resin adsorption component and is used to collect the finished product.

[0012] Furthermore, a pressurizer is provided at the liquid outlet end of the storage tank for pressurizing and transporting the raw materials in the storage tank.

[0013] Furthermore, the filtering device comprises:

[0014] The primary filter membrane group includes a primary filter membrane;

[0015] The secondary filter membrane group is arranged in series at the liquid outlet end of the primary filter membrane group along the liquid flow direction, and the secondary filter membrane is arranged in the secondary filter membrane group.

[0016] Furthermore, the pore size of the primary filter membrane in the primary filter membrane group is larger than the pore size of the secondary filter membrane in the secondary filter membrane group.

[0017] Furthermore, the pore size of the primary filter membrane in the primary filter membrane group is 0.001 micron.

[0018] Furthermore, the pore size of the secondary filtration membrane in the secondary filtration membrane group is 0.0001 micron.

[0019] Furthermore, it also includes a second finished product tank, which is connected to the liquid outlet end of the filtering device.

[0020] Furthermore, the resin adsorption component includes two anion exchange resin columns and two cation exchange resin columns, and the anion exchange resin column, the cation exchange resin column, the anion exchange resin column and the cation exchange resin column are sequentially connected and arranged along the liquid flow direction.

[0021] Compared with the prior art, the beneficial effects of this application include at least:

[0022] Since the electronic-grade hydrogen peroxide production device provided by the present application includes a storage tank, a filtering device, a resin adsorption component and a first finished product tank which are connected in sequence, wherein the resin adsorption component includes at least one anion exchange resin column and at least one cation exchange resin column, and the anion exchange resin column and the cation exchange resin column are connected and arranged alternately in sequence. The electronic-grade hydrogen peroxide production device filters out particulate matter and water in the raw hydrogen peroxide through the filtering device, and by alternately arranging the anion exchange resin column and the cation exchange resin column, anion and cation impurities in the raw hydrogen peroxide are adsorbed and separated, and at the same time, the contamination of hydrogen peroxide by ionic impurities in the resin adsorption component equipment is also avoided, and the electronic-grade hydrogen peroxide product that finally enters the first finished product tank has less impurities and higher purity. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1This is a schematic diagram of the electronic grade hydrogen peroxide production device of the present application;

[0024] Figure 2 This is a schematic diagram of the structure of the primary filtration membrane group of the present application;

[0025] Figure 3 This is a schematic diagram of the structure of the primary filtration membrane group of the present application;

[0026] Figure 4 It is a schematic diagram of the structure of the anion exchange resin column of the present application. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0028] The present application provides an electronic grade hydrogen peroxide production device, combined with Figure 1-4 , comprising a storage tank 1, a filtering device 2, a resin adsorption assembly 3 and a first finished product tank 4, wherein:

[0029] Storage tank 1 is loaded with hydrogen peroxide raw material, which contains a lot of impurities and needs to be produced into high-purity electronic-grade hydrogen peroxide finished product with an impurity content of less than 10 ppb.

[0030] The filtering device 2 is arranged in communication with the liquid outlet end of the storage tank 1 along the liquid flow direction, and performs preliminary purification and filtering treatment on the hydrogen peroxide, thereby filtering and separating particulate impurities and water in the hydrogen peroxide.

[0031] The resin adsorption component 3 is connected to the liquid outlet end of the filter device 2 along the liquid flow direction, and the anionic and cationic impurities in the hydrogen peroxide are adsorbed by the resin adsorption component 3 .

[0032] The resin adsorption assembly 3 includes at least one anion exchange resin column 31 and at least one cation exchange resin column 32 , and the anion exchange resin column 31 and the cation exchange resin column 32 are alternately connected in sequence.

[0033] The first finished product tank 4 is connected to the liquid outlet end of the resin adsorption component 3 and is used to collect the finished product.

[0034] The electronic grade hydrogen peroxide production device filters out particulate matter and water in the raw hydrogen peroxide through the filtering device 2, and by alternately arranging the anion exchange resin column 31 and the cation exchange resin column 32, anionic and cationic impurities such as chloride ions, sulfate ions, nitrate ions, sodium ions, magnesium ions, calcium ions, etc. in the raw hydrogen peroxide are adsorbed and separated.

[0035] Specifically, when hydrogen peroxide passes through anion exchange resin, anion impurities in hydrogen peroxide are adsorbed by the alkaline groups on the anion exchange resin. Inevitably, a very small amount of anion exchange resin impurities will be dissolved in hydrogen peroxide. At this time, hydrogen peroxide passes through a cation exchange resin column, and the acidic groups on the cation exchange resin column adsorb alkaline ions and anion exchange resin. Then, hydrogen peroxide passes through anion exchange resin and cation exchange resin in turn, which work on the same principle. In this way, ion impurities in hydrogen peroxide are removed while resin impurities are prevented from mixing into hydrogen peroxide. Finally, the electronic-grade hydrogen peroxide product that enters the first finished product tank 4 has less impurities and higher purity.

[0036] In one of the embodiments, a pressurizer is provided at the liquid outlet end of the storage tank 1, and the pressurizer is used to pressurize and transport the raw materials in the storage tank 1, wherein the pressurizer is not shown in the figure.

[0037] In one embodiment, the filtering device 2 includes a primary filtering membrane group 21 and a secondary filtering membrane group 22, wherein: a primary filtering membrane 211 is arranged in the primary filtering membrane group 21; the secondary filtering membrane group 22 is arranged in series at the liquid outlet end of the primary filtering membrane group 21 along the liquid flow direction, and a secondary filtering membrane 221 is arranged in the secondary filtering membrane group 22.

[0038] In one embodiment, the pore size of the primary filter membrane 211 in the primary filter membrane group 21 is larger than the pore size of the secondary filter membrane 221 in the secondary filter membrane group 22 .

[0039] In one embodiment, the pore size of the primary filter membrane 211 in the primary filter membrane group 21 is 0.001 micrometer.

[0040] In one embodiment, the pore size of the secondary filter membrane 221 in the secondary filter membrane group 22 is 0.0001 micrometer.

[0041] When the hydrogen peroxide gradually passes through the primary filter membrane 21 and the secondary filter membrane 22, the particulate impurities and water in the hydrogen peroxide can separate most of the impurities in the raw hydrogen peroxide.

[0042] One of the embodiments further includes a second finished product tank 6, which is connected to the liquid outlet of the filtering device 2, so that when ultra-high purity hydrogen peroxide is not needed, it can be directly transported to the second finished product tank 6 after filtering through the filter membrane group 2.

[0043] In one embodiment, the resin adsorption component 3 includes two anion exchange resin columns 31 and two cation exchange resin columns 32, and the anion exchange resin column 31, the cation exchange resin column 32, the anion exchange resin column 31 and the cation exchange resin column 32 are sequentially connected along the liquid flow direction. The anion exchange resin column adsorbs anions such as chloride ions, sulfate ions, and nitrate ions in hydrogen peroxide, and the cation exchange resin column adsorbs sodium ions, magnesium ions, and calcium ions in hydrogen peroxide.

[0044] Resin columns use ion exchange to separate ionic impurities in hydrogen peroxide. The filler of the resin column is usually a resin with ion exchange groups. When hydrogen peroxide containing ionic impurities passes through the resin column, the ion exchange groups on the surface of the resin interact with the ionic impurities in the hydrogen peroxide, so that the ionic impurities are adsorbed in the resin column, while the hydrogen peroxide passes through the resin column normally.

[0045] Each pipeline and equipment inlet and outlet port in the production device is respectively provided with a switch valve, a hydraulic valve and a thermometer, which are conventional settings in the field and will not be described in detail in this application.

[0046] In the present application, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0047] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise" and "counterclockwise" indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0048] It should be noted that all directional indications in the embodiments of the present application are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.

[0049] In this application, unless otherwise clearly specified and limited, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0050] In addition, the descriptions of "first", "second", etc. in this application are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" or "second" may explicitly or implicitly include one or more features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0051] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine different embodiments or examples described in this specification.

[0052] In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the fact that they can be implemented by ordinary technicians in this field. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by this application.

[0053] Although the embodiments of the present application have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present application, and that the scope of the present application is defined by the claims and their equivalents.

Claims

1. An electronic grade hydrogen peroxide production device, characterized in that: include: A storage tank (1) is loaded with hydrogen peroxide raw material; A filtering device (2) is arranged in communication with the liquid outlet end of the storage tank (1) along the liquid flow direction; A resin adsorption component (3) connected to the liquid outlet end of the filter device (2) along the liquid flow direction; The resin adsorption component (3) comprises at least one anion exchange resin column (31) and at least one cation exchange resin column (32), wherein the anion exchange resin column (31) and the cation exchange resin column (32) are arranged in an alternating manner and in communication with each other; The first finished product tank (4) is connected to the liquid outlet end of the resin adsorption component (3) and is used to collect the finished product.

2. An electronic grade hydrogen peroxide production device according to claim 1, characterized in that: A pressurizer is provided at the liquid outlet end of the storage tank (1), and the pressurizer is used to pressurize and transport the raw materials in the storage tank (1).

3. An electronic grade hydrogen peroxide production device according to claim 1, characterized in that: The filtering device (2) comprises: A primary filter membrane group (21) is provided with a primary filter membrane (211); The secondary filter membrane group (22) is arranged in series at the liquid outlet end of the primary filter membrane group (21) along the liquid flow direction, and a secondary filter membrane (221) is arranged in the secondary filter membrane group (22).

4. An electronic grade hydrogen peroxide production device according to claim 3, characterized in that: The pore size of the primary filter membrane (211) in the primary filter membrane group (21) is larger than the pore size of the secondary filter membrane (221) in the secondary filter membrane group (22).

5. An electronic grade hydrogen peroxide production device according to claim 4, characterized in that: The pore size of the primary filter membrane (211) in the primary filter membrane group (21) is 0.001 micrometer.

6. An electronic grade hydrogen peroxide production device according to claim 4, characterized in that: The pore size of the secondary filtration membrane (221) in the secondary filtration membrane group (22) is 0.0001 micrometer.

7. An electronic grade hydrogen peroxide production device according to claim 1, characterized in that: It also includes a second finished product tank (6), which is connected to the liquid outlet end of the filtering device (2).

8. An electronic grade hydrogen peroxide production device according to claim 1, characterized in that: The resin adsorption component (3) comprises two anion exchange resin columns (31) and two cation exchange resin columns (32), wherein the anion exchange resin column (31), the cation exchange resin column (32), the anion exchange resin column (31) and the cation exchange resin column (32) are sequentially connected and arranged along the liquid flow direction.

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