Wiring structure, jacking device and coating equipment

Abstract

The utility model relates to the technical field of coating equipment, in particular to a wiring structure, a jacking device and coating equipment. Comprising a connecting flange connected to a vacuum cavity in a sealed mode and a plurality of connecting female heads embedded in the connecting flange, the ends, located in the vacuum cavity, of the connecting female heads are connected with first male heads, and the ends, located outside the vacuum cavity, of the connecting female heads are connected with second male heads. The power lines on the first male head and the second male head are electrically connected through the connecting female head. An existing small flange and welding installation sealing mode is replaced by a male head and female head connection mode, the sealing performance of the vacuum cavity is guaranteed, wiring connection and replacement of power lines inside and outside the vacuum cavity can be achieved at the same time, and maintenance operation is convenient.

Description

Technical Field

[0001] The present application relates to the technical field of coating equipment, and in particular to a wiring structure, a lifting device and a coating equipment. Background Art

[0002] In the existing PECVD coating process, contact heating is usually used to heat the carrier in a vacuum chamber. The power cord of the carrier is usually routed in a hollow lifting rod on the lifting mechanism, and the lifting rod is placed on a lifting seat. When routing the wires, a corresponding number of through holes must be opened on the lifting seat for multiple power wires to pass through in sequence, and a flange structure is set at the through hole and the through hole is sealed by a welding process. This routing method has high requirements on the welding process, and during maintenance, the operation is cumbersome and the sealing is difficult to ensure. Utility Model Content

[0003] In order to solve one of the above technical problems, the present application provides a wiring structure, including a connection flange sealed and connected to a vacuum chamber, and a plurality of female connection heads mounted on the connection flange, wherein one end of the female connection head located in the vacuum chamber is connected to a first male head, and one end of the female connection head located outside the vacuum chamber is connected to a second male head, and the power lines on the first male head and the second male head are electrically connected through the female connection head. The connection between the male head and the female head replaces the existing sealing method of the small flange and the welding installation, and the wiring connection and replacement of the power lines inside and outside the vacuum chamber can be realized while ensuring the sealing of the vacuum chamber, which is convenient for maintenance operations.

[0004] Preferably, a cooling water channel for cooling the female connector, the first male connector and the second male connector is provided in the connecting flange, and a plurality of water joints connected to the cooling water channel are provided on one side of the connecting flange. The female connector and the sealing ring in the connecting flange are cooled, and the first male connector and the second male connector on the female connector are cooled at the same time, thereby extending the service life of each component.

[0005] Preferably, the cooling water channel includes an annular waterway, an inlet channel and an outlet channel, a blocking block is arranged in the annular waterway, and the annular waterway is located on both sides of the blocking block and is respectively connected to the inlet channel and the outlet channel. The inlet channel and the outlet channel are respectively connected to the water joint, so that the cooling water enters the annular waterway from the inlet channel, flows around in the annular waterway and then flows out from the outlet channel, thereby cooling the connecting flange.

[0006] Preferably, an annular groove is provided on one surface of the connecting flange, and a first sealing ring and a cover plate are sequentially arranged at the opening of the annular groove to seal the opening, thereby forming an annular water channel in the annular groove. The annular groove can be descaled by removing the cover plate, which facilitates subsequent cleaning and maintenance.

[0007] Preferably, it further comprises a first hollow wiring tube and a second wiring tube, one end of the first wiring tube is placed through the vacuum chamber, and the other end of the first wiring tube is connected to the second wiring tube through the connecting flange. Then, the power line inside the vacuum chamber passes through the first hollow wiring tube and is connected to the first male connector on the connecting flange, and the power line on the first male connector is then electrically connected to the external power line through the connecting flange and the second male connector, so as to realize quick connection and quick replacement of the power line.

[0008] Preferably, a second sealing ring is provided at the connection between the first wiring pipe and the connecting flange, and at the connection between the second wiring pipe and the connecting flange, so that the first wiring pipe and the second wiring pipe are respectively sealed and connected to the connecting flange.

[0009] Preferably, a regular male connector is provided at the end of the second wiring tube away from the connecting flange, and several power lines can enter the second wiring tube from the regular male connector and be connected to the second male connector, so as to facilitate the collection and arrangement of external power lines.

[0010] Preferably, a bellows is provided between the connection flange and the bottom of the vacuum chamber, and both ends of the bellows are respectively sealed and connected to the connection between the connection flange and the bottom of the vacuum chamber, so that the first wiring pipe is sealed inside the bellows, and the connection flange can be lifted and moved relative to the vacuum chamber while ensuring sealing.

[0011] Preferably, a lifting device comprises the above-mentioned wiring structure, a heating plate and a lifting assembly, wherein the heating plate is placed in the vacuum chamber, the driving end of the lifting assembly is connected to the heating plate, and the power line of the heating plate is connected to the connecting female end on the connecting flange through the first male end. Thus, the wiring arrangement is optimized to avoid wiring in the hollow lifting rod on the lifting assembly.

[0012] Preferably, a coating device comprises the above-mentioned lifting device, wherein the heating plate is raised and lowered by the lifting device to adjust the heating plate to achieve the best coating process spacing of the heating plate and improve the coating quality.

[0013] Compared with the prior art, the beneficial effects of the present application are as follows: the present application installs a plurality of connecting female heads on the connecting flange, a first male head is connected to one end of the connecting female head located in the vacuum chamber, and a second male head is connected to one end of the connecting female head located outside the vacuum chamber, so that the power line inside the vacuum chamber is connected to the first male head, and the external power line is connected to the second male head. After the first male head and the second male head are respectively connected to the connecting female head, the power lines on the first male head and the second male head are electrically connected through the connecting female head. The connection method between the male head and the female head replaces the existing sealing method of the small flange and welding installation, so that the wiring connection and replacement of the power lines inside and outside the vacuum chamber can be realized while ensuring the sealing of the vacuum chamber, which is convenient for maintenance operations. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings required for use in the description of the embodiments of the present application or the prior art are briefly introduced below. Obviously, the drawings described below are only part of the embodiments of the present application, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative labor.

[0015] Figure 1 This is a schematic diagram of the wiring structure of an embodiment of the present application;

[0016] Figure 2 This is a schematic diagram of the connecting flange structure of an embodiment of the present application;

[0017] Figure 3 A longitudinal cross-sectional view of a connecting flange according to an embodiment of the present application;

[0018] Figure 4 For the embodiment of this application Figure 3 A magnified view of part A;

[0019] Figure 5 This is a transverse cross-sectional view of the connecting flange according to an embodiment of the present application.

[0020] Reference numerals

[0021] 10. Connecting flange; 11. Cooling water channel; 111. Annular water channel; 112. Water inlet channel; 113. Water outlet channel; 114. Blocking block; 115. Annular groove; 116. Cover plate; 117. First sealing ring; 12. Water joint; 20. Connecting female connector; 30. First male connector; 40. Second male connector; 50. First wiring pipe; 51. Bellows; 60. Second wiring pipe; 61. Regular male connector; 1. Vacuum chamber; 2. Heating plate. DETAILED DESCRIPTION

[0022] The following will disclose multiple embodiments of the present application with drawings. For the purpose of clear description, many practical details will be described together in the following description. However, it should be understood that these practical details should not be used to limit the present application. In other words, in some embodiments of the present application, these practical details are not necessary. In addition, in order to simplify the drawings, some conventional structures and components will be depicted in a simple schematic manner in the drawings.

[0023] It should be noted that all directional indications such as up, down, left, right, front, back... in the embodiments of the present application are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture as shown in the accompanying drawings. If the specific posture changes, the directional indication will also change accordingly.

[0024] In addition, in the present application, the descriptions of "first", "second", etc. are only used for descriptive purposes, and do not specifically refer to the order or sequence, nor are they used to limit the present application. They are only used to distinguish components or operations described with the same technical terms, and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in the field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present application.

[0025] In order to further understand the content, features and effects of the present application, the following embodiments are given as examples and described in detail with reference to the accompanying drawings:

[0026] In order to solve the above technical problems, this embodiment provides a wiring structure, such as Figure 1 As shown, it includes a connecting flange 10 sealed and connected to the vacuum chamber 1, and a plurality of connecting female heads 20 mounted on the connecting flange 10. A first male head 30 is connected to one end of the connecting female head 20 located in the vacuum chamber 1, and a second male head 40 is connected to one end of the connecting female head 20 located outside the vacuum chamber 1, so that the power line inside the vacuum chamber 1 is connected to the first male head 30, and the external power line is connected to the second male head 40. After the first male head 30 and the second male head 40 are respectively connected to the connecting female head 20, the power lines on the first male head 30 and the second male head 40 are electrically connected through the connecting female head 20. The sealing effect between the first male head 30, the second male head 40 and the connecting female head 20 is good. The connection method of the male head and the female head replaces the existing sealing method of the small flange and the welding installation. While ensuring the sealing of the vacuum chamber 1, the connection and replacement of the power lines inside and outside the vacuum chamber 1 can be realized, which is convenient for maintenance operations.

[0027] In some embodiments, the connecting flange 10 is connected to the bottom wall of the vacuum chamber 1 , and a corresponding sealing ring is provided on the connecting surface between the connecting flange 10 and the vacuum chamber 1 , so that the connecting flange 10 and the bottom wall of the vacuum chamber 1 are sealed and connected.

[0028] Further, such as Figure 2 As shown, a plurality of mounting holes are opened through the connecting flange 10, and the connecting female connector 20 is sealed and installed in the mounting holes. The two ends of the connecting female connector 20 are respectively inserted and matched with the first male connector 30 and the second male connector 40, so that the power lines on the first male connector 30 and the second male connector 40 are electrically connected through the connecting female connector 20.

[0029] During the heating operation, a high temperature will be formed in the vacuum chamber 1. In order to realize cooling of the female connector 20 and the sealing ring in the connecting flange 10, as shown in FIG. Figure 3-5 As shown, a cooling water channel 11 for cooling the female connector 20, the first male connector 30 and the second male connector 40 is provided in the connecting flange 10, and a plurality of water joints 12 connected to the cooling water channel 11 are provided on one side of the connecting flange 10. The water joints 12 are used for water inlet and outlet, thereby cooling the female connector 20 and the sealing ring in the connecting flange 10, and cooling the first male connector 30 and the second male connector 40 on the female connector 20, thereby extending the service life of each component.

[0030] Specifically, Figure 4 As shown, the cooling water channel 11 includes an annular water channel 111, an inlet channel 112 and an outlet channel 113. A blocking block 114 is provided in the annular water channel 111. The annular water channel 111 is located on both sides of the blocking block 114 and is respectively connected to the inlet channel 112 and the outlet channel 113. The inlet channel 112 and the outlet channel 113 are respectively connected to the water joint 12, so that the cooling water enters the annular water channel 111 from the inlet channel 112, flows around in the annular water channel 111, and then flows out from the outlet channel 113, thereby realizing cooling of the connecting flange 10.

[0031] Furthermore, in order to facilitate processing, an annular groove 115 is provided on one surface of the connecting flange 10, and a first sealing ring 117 and a cover plate 116 are sequentially provided at the opening of the annular groove 115. The first sealing ring 117 is installed at the opening of the annular groove 115, and the cover plate 116 is covered on the first sealing ring 117, and the cover plate 116 is connected to the connecting flange 10 by bolts, so that the opening is sealed, and the annular groove 115 forms an annular waterway 111. By removing the cover plate 116, the annular groove 115 can be descaled, which is convenient for subsequent cleaning and maintenance.

[0032] As a preferred embodiment, it also includes a hollow first wiring tube 50 and a second wiring tube 60, one end of the first wiring tube 50 is inserted into the vacuum chamber 1, and the other end of the first wiring tube 50 is connected to the second wiring tube 60 through the connecting flange 10. The first male connector 30 on the connecting flange 10 is located in the first wiring tube 50, and the second male connector 40 on the connecting flange 10 is located in the second wiring tube 60. One end of the first wiring tube 50 is connected to the connecting flange 10, and the other end of the first wiring tube 50 passes through the bottom wall of the vacuum chamber 1 and is connected to the heating plate 2 inside the vacuum chamber 1, and then the power line of the heating plate 2 passes through the hollow first wiring tube 50 and is connected to the first male connector 30 on the connecting flange 10, and the power line on the first male connector 30 is then electrically connected to the external power line through the connecting flange 10 and the second male connector 40, so as to realize the quick connection and quick replacement of the power line.

[0033] Furthermore, a second sealing ring is provided at the connection between the first wiring tube 50 and the connection flange 10, and at the connection between the second wiring tube 60 and the connection flange 10. Two second sealing rings are provided inside and outside, thereby forming a double sealing structure, so that the first wiring tube 50 and the second wiring tube 60 are respectively sealed and connected to the connection flange 10.

[0034] Furthermore, a regular male connector 61 is provided at the end of the second wiring tube 60 away from the connecting flange 10, and several external power lines can enter the second wiring tube 60 from the regular male connector 61 and be connected to the second male connector 40, so as to facilitate the collection and arrangement of the external power lines.

[0035] One end of the first wiring pipe 50 is passed through the vacuum chamber 1 and connected to the heating plate 2 inside the vacuum chamber 1. In order to achieve a sealed connection between the first wiring pipe 50, the connecting flange 10 and the vacuum chamber 1, as a preferred embodiment, a bellows 51 is arranged between the connecting flange 10 and the bottom of the vacuum chamber 1, and the two ends of the bellows 51 are respectively sealed to the connection between the connecting flange 10 and the bottom of the vacuum chamber 1, so that the first wiring pipe 50 is sealed inside the bellows 51. While ensuring the sealing, the connecting flange 10 can be lifted and lowered relative to the vacuum chamber 1.

[0036] On the other hand, the present embodiment provides a lifting device, including the above-mentioned wiring structure, a heating plate 2 and a lifting assembly (not shown in the figure), the heating plate 2 is placed in the vacuum chamber 1, the lifting rod of the lifting assembly passes through the bottom of the vacuum chamber 1 and is connected to the heating plate 2, the heating plate 2 is driven to move up and down by the lifting assembly, and then the optimal process spacing of the heating plate 2 is adjusted, the power cord of the heating plate 2 is connected to the first male head 30 on the connecting flange 10 through the first wiring tube 50, thereby optimizing the wiring layout and avoiding wiring in the hollow lifting rod on the lifting assembly.

[0037] On the other hand, the present embodiment also includes a coating device, including the above-mentioned lifting device. The heating plate 2 is raised and lowered by the lifting device to adjust the optimal coating process spacing of the heating plate 2 and improve the coating quality.

[0038] To summarize, in one or more embodiments of the present application, the present application installs a plurality of connecting female heads on a connecting flange, a first male head is connected to one end of the connecting female head located in the vacuum chamber, and a second male head is connected to one end of the connecting female head located outside the vacuum chamber, and then a power line inside the vacuum chamber is connected to the first male head, and an external power line is connected to the second male head. After the first male head and the second male head are respectively connected to the connecting female head, the power lines on the first male head and the second male head are electrically connected through the connecting female head. The connection method between the male head and the female head replaces the existing sealing method of the small flange and welding installation, so that the connection and replacement of the power lines inside and outside the vacuum chamber can be realized while ensuring the sealing of the vacuum chamber, which facilitates maintenance operations.

[0039] The above-described implementation methods do not constitute a limitation on the protection scope of the technical solution. Any modification, equivalent replacement and improvement made within the spirit and principle of the above-described implementation methods shall be included in the protection scope of the technical solution.

Claims

1. A wiring structure, characterized in that: The invention comprises a connection flange (10) sealedly connected to a vacuum chamber (1), and a plurality of connection female heads (20) mounted on the connection flange (10); one end of the connection female head (20) located inside the vacuum chamber (1) is connected to a first male head (30); and one end of the connection female head (20) located outside the vacuum chamber (1) is connected to a second male head (40); power lines on the first male head (30) and the second male head (40) are electrically connected via the connection female head (20).

2. The wiring structure according to claim 1, characterized in that: A cooling water channel (11) for cooling the female connection head (20) is provided in the connection flange (10), and a plurality of water joints (12) connected to the cooling water channel (11) are provided on one side of the connection flange (10).

3. The wiring structure according to claim 2, characterized in that: The cooling water channel (11) comprises an annular water channel (111), an inlet channel (112) and an outlet channel (113); a blocking block (114) is arranged in the annular water channel (111); the annular water channel (111) is located on both sides of the blocking block (114) and is respectively connected to the inlet channel (112) and the outlet channel (113).

4. The wiring structure according to claim 3, characterized in that: A surface of the connecting flange (10) is provided with an annular groove (115), and a first sealing ring (117) and a cover plate (116) are sequentially arranged at the opening of the annular groove (115).

5. The wiring structure according to claim 1, characterized in that: It also includes a hollow first wiring pipe (50) and a second wiring pipe (60), wherein one end of the first wiring pipe (50) is inserted into the vacuum chamber (1), and the other end of the first wiring pipe (50) is connected to the second wiring pipe (60) via the connecting flange (10).

6. The wiring structure according to claim 5, characterized in that: A second sealing ring is provided at the connection point between the first wiring pipe (50) and the connecting flange (10), and at the connection point between the second wiring pipe (60) and the connecting flange (10).

7. The wiring structure according to claim 5, characterized in that: A regular male connector (61) is provided at the end of the second wiring tube (60) away from the connecting flange (10), and a plurality of power lines can enter the second wiring tube (60) from the regular male connector (61) and be connected to the second male connector (40).

8. The wiring structure according to claim 5, characterized in that: A bellows (51) is arranged between the connecting flange (10) and the bottom of the vacuum chamber (1), and two ends of the bellows (51) are respectively sealed and connected to the connecting flange (10) and the bottom of the vacuum chamber (1).

9. A lifting device, characterized in that: It comprises the wiring structure, heating plate (2) and lifting assembly as described in any one of claims 1 to 8, wherein the heating plate is placed in the vacuum chamber (1), the driving end of the lifting assembly is connected to the heating plate (2), and the power cord of the heating plate (2) is connected to the connecting female connector (20) on the connecting flange (10) through the first male connector (30).

10. A coating device, characterized in that: Including the jacking device described in claim 9.

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