Flatness detection device

By designing the planeness detection device for spherical probes and support parts, the problems of insufficient flatness of the traditional die plate and easy-to-jack probe slot are solved, and high-precision and high-efficiency planarity detection is achieved to meet the high-precision processing of optical components need.

CN222364536UActive Publication Date: 2025-01-17CDGM OPTICAL GLASS
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Patent Information

Application Number
CN202420796103.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-04-17
Publication Date
2025-01-17
Estimated Expiration
2034-04-17

AI Technical Summary

Technical Problem

The plane degree of traditional planar die discs is insufficient, which affects the processing accuracy of optical components. The existing probes are prone to stuck in the grid slots of the die discs, resulting in a decrease in measurement accuracy and low detection efficiency.

Method used

Design a planarity detection device including a base, a detection component and a support structure, and use a spherical probe and a spherical support to make multi-point contact, and determine the plane through three spherical support parts whose geometric center is not on the same straight line to ensure the base Parallelism with the die plate to be detected, and a spherical structure is used to avoid embedding the lattice slot to improve detection accuracy and efficiency.

Benefits of technology

Accurate detection of the plane degree of the plane module disk is achieved, the processing accuracy of the optical components is improved, the impact of the grid groove on the detection accuracy is avoided, and the detection efficiency is improved, reaching the micron-level indexing value.

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Abstract

The utility model relates to a flatness detection device. The flatness detection device comprises a base, a detection assembly and a supporting structure. The base is provided with at least three mounting holes; the detection assemblies are in one-to-one correspondence with the mounting holes, each detection assembly comprises a dial indicator and a measuring head structure, each dial indicator comprises a dial plate part and a measuring rod part connected with the dial plate part, at least part of each measuring rod part is fixed in the corresponding mounting hole, and each measuring head structure comprises a connecting part and a spherical measuring head which are connected with each other. Part of the connecting part is located in the mounting hole and connected with the measuring rod part, and the spherical measuring head is located on the side, opposite to the dial plate part, of the base. The at least three supporting structures comprise mounting parts and spherical supporting parts, the mounting parts are fixed to the base and located on the side where the spherical measuring head is located, and the spherical supporting parts are connected to the ends, away from the base, of the mounting parts. According to the flatness detection device, high-precision and high-efficiency flatness detection can be realized.
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Description

Technical Field

[0001] The present application relates to the technical field of measuring instruments, and in particular to a flatness detection device. Background Art

[0002] The optical cold processing industry mainly produces optical components and provides optical components such as lenses and lenses for downstream industries such as optical instruments and optoelectronic image information processing products. It is in the middle link of producing semi-finished products in the entire industrial chain. Optical cold processing usually involves a whole set of processes such as cutting, rough grinding, fine grinding, polishing, edging, coating, gluing, etc. of optical glass raw materials to finally obtain optical components with the required precision. In the process of grinding or polishing optical glass, a mold is usually used to grind the surface of the optical glass. In some grinding or polishing scenarios, a mold with a flat surface is required for grinding. However, the flatness of traditional flat molds is insufficient, which affects the precision of the processed optical components. Summary of the invention

[0003] Based on this, it is necessary to provide a flatness detection device to address the problem that the traditional flat mold plate has insufficient flatness, which affects the accuracy of the processed optical elements.

[0004] A flatness detection device, comprising:

[0005] A base having at least three spaced apart mounting holes;

[0006] at least three detection components, each of which corresponds to the mounting holes one by one, the detection components comprising a dial gauge and a probe structure, the dial gauge comprising a dial portion and a measuring rod portion connected to the dial portion, at least a portion of the measuring rod portion being fixed in the mounting hole, the probe structure comprising a connecting portion and a spherical probe connected to each other, a portion of the connecting portion being located in the mounting hole and connected to the measuring rod portion, and the spherical probe being located on a side of the base facing away from the dial portion; and,

[0007] At least three supporting structures, the supporting structures include a mounting portion and a spherical supporting portion, the mounting portion is fixed to the base and is located on the side where the spherical probe is located, the spherical supporting portion is connected to an end of the mounting portion away from the base, and the geometric center of any spherical supporting portion is outside the line connecting the geometric centers of the other two spherical supporting portions.

[0008] The above-mentioned flatness detection device supports the base through at least three spherical support parts whose geometric centers are not on the same straight line, and determines a plane based on the three points, which can effectively support the base and ensure the parallelism between the base and the mold disc to be detected. The spherical probes of at least three detection components can make point contact with different positions on the surface of the mold disc to be detected. By reading the values ​​of multiple dial parts, the flatness difference of at least three positions of the mold disc to be detected can be obtained, thereby realizing accurate detection of the flatness of the plane mold disc, which is beneficial to improving the accuracy of the optical element obtained by mold disc processing. In addition, multiple spaced spherical probes can simultaneously contact multiple spaced positions of the mold disc to be detected, so as to simultaneously perform flatness detection on multiple positions of the mold disc to be detected, which is beneficial to improving detection efficiency. At the same time, both the spherical probe and the spherical support part adopt a spherical structure. While contacting the mold to be inspected with square grooves, it is not easy to embed into the square grooves of the mold to be inspected, which can avoid the influence of the square grooves on the flatness detection accuracy. The minimum graduation value of the micrometer can usually reach 0.001mm, so that the flatness detection device can detect the flatness of the mold to be inspected at the micron level, meeting the needs of high-precision processing of optical components.

[0009] In one embodiment, the spherical support parts of the plurality of support structures are flush with one side facing away from the base, and in a calibration state, the plurality of spherical support parts are flush with one side facing away from the base of the plurality of spherical probes.

[0010] In one embodiment, the base includes a plate body and a plurality of fixing parts arranged on the same side of the plate body, the mounting hole passes through the plate body and the fixing parts, the measuring rod part at least partially corresponds to the position of the fixing part, and the flatness detection device also includes a fixing member, which passes through the fixing part to press against the measuring rod part.

[0011] In one embodiment, the flatness detection device further comprises a transition structure, wherein the transition structure is located between the measuring rod portion and the fixing portion and covers at least two opposite sides of the measuring rod portion, and the fixing member is pressed against the transition structure.

[0012] In one embodiment, the transition structure comprises two sets of arc-shaped cross-sections, and the two sets are symmetrically arranged on two opposite sides of the measuring rod; and / or,

[0013] The material of the transition structure is copper.

[0014] In one embodiment, the flatness detection device also includes a handle, which includes a horizontal bar and two vertical bars, the two vertical bars are spaced apart and fixed on the base, and the two ends of the horizontal bar are respectively connected to the two vertical bars and are located on the side of the dial part facing away from the base.

[0015] In one of the embodiments, the flatness detection device is used to perform flatness detection on a flat mold plate having square grooves, and the diameters of the spherical probe and the spherical support portion are larger than the width of the square grooves.

[0016] In one embodiment, the diameter of the spherical probe and the spherical support portion is greater than or equal to 8 mm; and / or,

[0017] The material of the spherical probe and the spherical support portion includes stainless steel, or the surface of the spherical probe and the spherical support portion is plated with chrome.

[0018] In one of the embodiments, in a calibrated state, the geometric centers of the three spherical probes are located on the same straight line.

[0019] In one of the embodiments, in the calibration state, two of the spherical support portions are located at one end of the line connecting the three spherical probes and are respectively located on opposite sides of the line connecting the three spherical probes, and one of the spherical support portions is located at the other end of the line connecting the three spherical probes, and its geometric center is located on the line connecting the three spherical probes. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] FIG. 1 is a schematic diagram of the structure of a flatness detection device in some embodiments.

[0021] FIG. 2 is a schematic structural diagram of a flatness detection device at another angle in some embodiments.

[0022] FIG. 3 is a cross-sectional schematic diagram of a flatness detection device in some embodiments.

[0023] Figure 4 Schematic diagram of the structure of the probe in some embodiments.

[0024] FIG. 5 is a schematic diagram of the structure of a base in some embodiments.

[0025] FIG. 6 is a schematic diagram of a transition structure in some embodiments.

[0026] Reference numerals:

[0027] 10. Flatness detection device; 11. Base; 111. Plate; 112. Fixing part; 113. Mounting hole; 114. Mounting position; 115. Positioning hole; 12. Detection assembly; 121. Micrometer; 1211. Dial part; 1212. Measuring rod part; 122. Probe structure; 1221. Connecting part; 1222. Spherical probe; 13. Support structure; 131. Mounting part; 132. Spherical supporting part; 14. Fixing piece; 15. Transition structure; 151. Kit; 16. Handle; 161. Crossbar; 162. Vertical bar. DETAILED DESCRIPTION

[0028] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0029] In the description of the present application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0030] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0031] In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0032] In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or similar descriptions appear, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0033] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.

[0034] In the field of optical cold processing, it is usually necessary to use a flat mold to grind or polish the surface of the optical glass. The flatness of the flat mold will affect the accuracy of the processed optical components. Therefore, during the optical cold processing process, it is necessary to detect the flatness of the flat mold to ensure the accuracy of the optical components. The grinding or polishing surfaces of flat molds such as current fine grinding disks and polishing molds may be provided with square grooves to store sand liquid or polishing liquid. The sand liquid and polishing liquid are evenly distributed in the square grooves and have fluidity, which can improve the grinding or polishing efficiency and accuracy. The probe currently used for flatness detection of molds is usually V-shaped or has a small diameter, which is easy to get stuck in the square groove on the surface of the mold, resulting in a decrease in measurement accuracy. Even if the probe is adjustable, the position of the probe needs to be frequently adjusted during the measurement process, resulting in a decrease in detection efficiency.

[0035] In order to solve the above problems, the present application provides a flatness detection device.

[0036] Please refer to Figures 1, 2 and 3. Figure 1 is a schematic diagram of the structure of the flatness detection device 10 in some embodiments, Figure 2 is a schematic diagram of the structure of the flatness detection device 10 at another angle in some embodiments, and Figure 3 is a schematic cross-sectional diagram of the flatness detection device 10 in some embodiments. The flatness detection device 10 provided in the present application can be used to detect the flatness of flat molds such as fine grinding disks and polishing disks used to grind optical elements in optical cold processing. For example, before grinding or polishing, or during use, the mold to be detected is regularly tested for flatness, so that when the flatness deviation exceeds the required accuracy, the mold is promptly trimmed by the mold correction wheel, and after trimming, the flatness detection device 10 is used to perform flatness detection on the mold to be detected again until the flatness deviation reaches the required accuracy, so as to improve the accuracy of the processed optical element. Of course, the application of the flatness detection device 10 of the present application is not limited to this, and can also be used for grinding disks and polishing disks for sheet products such as filter glass and cover glass, or for detecting the surface flatness of brittle materials and amorphous materials. It can be set according to the detection requirements. The flatness detection device 10 provided in the present application can meet the flatness detection requirements of various planar products.

[0037] In some embodiments, the flatness detection device 10 includes a base 11, a detection assembly 12, and a support structure 13. The base 11 is provided with at least three spaced mounting holes 113, and the detection assembly 12 is provided with at least three, the number of the detection assemblies 12 is equal to the number of the mounting holes 113, and the detection assemblies 12 are arranged at the mounting holes 113 in a one-to-one correspondence. Figure 4As shown, each detection assembly 12 includes a micrometer 121 and a probe structure 122. The micrometer 121 includes a dial portion 1211 connected to each other and a measuring rod portion 1212 connected to the dial portion 1211. At least a portion of the measuring rod portion 1212 is fixed in the mounting hole 113. The probe structure 122 includes a connecting portion 1221 connected to each other and a spherical probe 1222. A portion of the connecting portion 1221 is located in the mounting hole 113 and connected to the measuring rod portion 1212. The spherical probe 1222 is located on the side of the base 11 facing away from the dial portion 1211. It can be understood that the probe structure 122 serves as the probe of the micrometer 121. The connecting portion 1221 can move relative to the measuring rod portion 1212 to generate displacement. The dial portion 1211 is provided with a pointer and a scale. The pointer can rotate to point to different scales. The displacement of the connecting portion 1221 relative to the measuring rod portion 1212 can be reflected in the change of the scale pointed to by the pointer. When the multiple spherical probes 1222 are in contact with the mold to be inspected on the side facing away from the base 11, if they are subjected to pressure from the mold to be inspected due to the flatness deviation of the surface of the mold to be inspected, the probe structure 122 of the pointed part will be displaced as a whole relative to the measuring rod part 1212. By reading the change in the scale pointed by the pointer of the dial part 1211, or reading the difference in the scales pointed by the pointers of the dial parts 1211 of multiple micrometers 121, the flatness difference of the surface of the mold to be inspected can be known.

[0038] In some embodiments, at least three support structures 13 are provided, and the support structures 13 include a mounting portion 131 and a spherical support portion 132. The mounting portion 131 is fixed on the base 11 and is located on the same side of the base 11 as the spherical probe 1222, and the spherical support portion 132 is connected to the end of the mounting portion 131 away from the base 11. The geometric center of any spherical support portion 132 is located outside the line connecting the geometric centers of the other two spherical support portions 132, and the sides of the multiple spherical support portions 132 facing away from the base 11 are flush. In other words, the plane on which the sides of the multiple spherical support portions 132 facing away from the base 11 are located is parallel to the base 11. According to the principle that three points determine a plane, three support structures 13 are provided to support the base 11. When the sides of at least three spherical support portions 132 facing away from the base 11 are in point contact with the mold disc to be detected, the parallelism between the base 11 and the mold disc to be detected can be guaranteed, which is conducive to improving the accuracy of the detection component 12 in flatness detection.

[0039] In some embodiments, in the calibration state, the side of the multiple spherical probes 1222 facing away from the base 11 is flush, and the side of the multiple spherical probes 1222 facing away from the base 11 is flush with the side of the multiple spherical support parts 132 facing away from the base 11. In other words, in the calibration state, the multiple spherical probes 1222 and the side of the multiple spherical support parts 132 facing away from the base 11 are located in the same plane, and the plane is parallel to the base 11. Thus, the accuracy of the height of the spherical support parts 132 and the spherical probes 1222 of the flatness detection device 10 relative to the base 11 can be guaranteed, which is conducive to improving the accuracy of the flatness detection of the mold plate to be detected.

[0040] It should be noted that, in the present application, the description of the flatness detection device 10 in the calibration state can be understood as the state of the flatness detection device 10 after calibration. When the flatness detection device 10 is used to perform flatness detection on the mold to be detected, it is usually necessary to calibrate the flatness detection device 10 first to improve the accuracy of flatness detection. For example, the flatness detection device 10 can be placed on a double zero-level marble standard platform or a standard plane such as a standard plane flat crystal, so that the side of each spherical support part 132 and the spherical probe 1222 facing away from the base 11 is in point contact with the standard plane, and the zero position of the pointer on the dial part 1211 of the micrometer 121 is calibrated. After the calibration is completed, the flatness detection device 10 is in the calibration state, the spherical support part 132 and the spherical probe 1222 are highly accurate relative to the base 11, and the pointer points to the zero position, which can achieve high-precision detection of the flatness of the mold to be detected.

[0041] The above-mentioned flatness detection device 10 supports the base 11 through at least three spherical support parts 132 whose geometric centers are not on the same straight line. A plane is determined according to three points, and the base 11 can be effectively supported to ensure the parallelism between the base 11 and the mold disc to be detected. The spherical probes 1222 of at least three detection components 12 can make point contact with different positions on the surface of the mold disc to be detected. By reading the values ​​of multiple dial parts 1211, the flatness difference of at least three positions of the mold disc to be detected can be obtained, thereby realizing accurate detection of the flatness of the plane mold disc, which is beneficial to improving the accuracy of the optical element obtained by mold disc processing. In addition, multiple spaced spherical probes 1222 can simultaneously contact multiple spaced positions of the mold disc to be detected, so as to simultaneously perform flatness detection on multiple positions of the mold disc to be detected, which is beneficial to improving detection efficiency. At the same time, the spherical probe 1222 and the spherical support part 132 both adopt a spherical structure. When they are in contact with the mold to be inspected with square grooves, it is not easy to embed into the square grooves of the mold to be inspected. It is also easier to find the detection position and avoid the square grooves, which is beneficial to avoid the influence of the square grooves on the flatness detection accuracy. The minimum graduation value of the micrometer 121 can usually reach 0.001mm, so that the flatness detection device 10 can detect the flatness of the mold to be inspected at the micron level, meeting the needs of high-precision processing of optical components.

[0042] Referring to FIG. 1 and FIG. 5 , in some embodiments, in the calibration state, the geometric centers of the three spherical probes 1222 are located on the same straight line, and the three spherical probes 1222 are sequentially arranged at intervals on the straight line. Thus, multiple positions in one direction can be detected by the three detection components 12, for example, the middle position, edge position and waist position of the mold plate to be detected can be detected at the same time, which is conducive to improving the detection efficiency while reducing the size and preparation cost of the flatness detection device 10.

[0043] In some embodiments, in the calibration state, two spherical support portions 132 are located at one end of the line connecting the geometric centers of the three spherical probes 1222, and are respectively located on opposite sides of the line connecting the geometric centers of the three spherical probes 1222. The distances from the geometric centers of the two spherical support portions 132 to the line connecting the geometric centers of the three spherical probes 1222 can be equal. One spherical support portion 132 is located at the other end of the line connecting the geometric centers of the three spherical probes 1222, and the geometric center of the spherical support portion 132 is located on the line connecting the geometric centers of the three spherical probes 1222. In this arrangement, the geometric centers of the three spherical support portions 132 are distributed in an isosceles triangle. The three spherical support portions 132 can be used to form effective support for the base 11, improve the parallelism between the base 11 and the mold plate to be tested, and at the same time help to compress the size of the flatness detection device 10 and reduce the manufacturing cost. It should be noted that, for ease of understanding, the three smallest circles in FIG. 5 show the installation positions 114 of the three support structures 13 on the base 11. In the embodiment, the installation portion 131 may penetrate the base 11 and be exposed on the side where the dial portion 1211 is located, and the installation portion 131 may also be connected to the side of the base 11 facing the spherical probe 1222 and not penetrate the base 11. Of course, the specific number and setting orientation of the support structure 13 and the detection component 12 of the flatness detection device 10 are not limited to the records in the drawings of this application. As long as they can provide effective support for the base 11 and meet the high-precision requirements of flatness detection, they are not limited in this application.

[0044] Please refer to Figures 1 and 3 again. In some embodiments, the base 11 includes a plate body 111 and a plurality of fixing portions 112 disposed on the same side of the plate body 111. The mounting hole 113 penetrates the plate body 111 and the fixing portion 112. The fixing portion 112 may be roughly in the shape of a hollow cylinder, and the fixing portion 112 may be integrally formed with the plate body 111. The measuring rod portion 1212 at least partially corresponds to the position of the fixing portion 112. The flatness detection device 10 may further include a fixing member 14, which passes through the fixing portion 112 and presses the measuring rod portion 1212 against the mounting hole 113. The fixing member 14 may be a screw, and the fixing portion 112 may be provided with a threaded hole perpendicular to the axial direction for the fixing member 14 to pass through.

[0045] As shown in combination with FIG. 3 and FIG. 6 , in some embodiments, the flatness detection device 10 further includes a transition structure 15, which is located between the measuring rod portion 1212 and the fixing portion 112 and covers at least two opposite sides of the measuring rod portion 1212, and the fixing member 14 is pressed against the transition structure 15. The material of the transition structure 15 includes but is not limited to a soft metal material such as copper. By setting the transition structure 15, when the fixing piece 14 presses the measuring rod portion 1212 into the mounting hole 113, the fixing piece 14 contacts the side of the transition structure 15 facing away from the measuring rod portion 1212, and in the pressing direction of the fixing piece 14, the two opposite sides of the measuring rod portion 1212 both contact the transition structure 15 with a softer texture, which can prevent the fixing piece 14 from directly acting on the measuring rod portion 1212 and prevent the measuring rod portion 1212 from directly acting on the hole wall of the mounting hole 113, thereby preventing the measuring rod portion 1212 from being slightly deformed by the fixing piece 14 and the hole wall of the mounting hole 113, thereby preventing the accuracy of the flatness detection from being affected.

[0046] In some embodiments, the transition structure 15 includes two sets 151 with arc-shaped cross sections, which are arranged on opposite sides of the measuring rod 1212 and are arranged in mirror symmetry with respect to a plane passing through the axis of the measuring rod 1212. The two sets 151 respectively cover the opposite sides of the measuring rod 1212 and are arranged at intervals from each other, which can isolate the measuring rod 1212 from the fixing member 14 and the hole wall of the mounting hole 113 to avoid deformation of the measuring rod 1212, and also reserve sufficient installation space to facilitate the installation of the measuring rod 1212 in the mounting hole 113.

[0047] Referring to FIG. 1 and FIG. 5 , in some embodiments, the flatness detection device 10 further includes a handle 16, which includes a crossbar 161 and two vertical bars 162. The axis of the crossbar 161 may be substantially parallel to the base 11, and the vertical bars 162 may be substantially perpendicular to the base 11. The two vertical bars 162 are arranged at intervals and fixed on the base 11. For example, two positioning holes 115 may be provided on the base 11, and the two vertical bars 162 are respectively provided with corresponding positioning holes 115 on the side where the dial portion 1211 is located, and the vertical bars 162 are fixed to the base 11 on the side of the base 11 facing away from the dial portion 1211 by means of screws, nuts and other structures. The two ends of the crossbar 161 are respectively connected to the ends of the vertical bars 162, and are located on the side of the dial portion 1211 facing away from the base 11. The handle 16 is provided to facilitate the user to lift or move the flatness detection device 10 by holding the horizontal bar 161, making it more convenient to carry and transport the flatness detection device 10, and also to conveniently move the flatness detection device 10 during the detection process to detect different positions of the mold plate to be detected. The two vertical bars 162 can be located at the two ends of the connection direction of the three detection components 12, or at any other suitable position, as long as the flatness detection device 10 can be lifted or moved by the handle 16.

[0048] In another embodiment, when the flatness detection device 10 is used to detect the flatness of a flat mold plate with square grooves, the diameter of the spherical probe 1222 and the spherical support portion 132 is greater than the width of the square grooves, which can prevent the spherical probe 1222 or the spherical support portion 132 from getting stuck in the square grooves and affecting the detection accuracy. In some embodiments, the diameter of the spherical probe 1222 and the spherical support portion 132 is greater than or equal to 8 mm, for example, it can be 10 mm. Of course, the diameter of the spherical probe 1222 and the spherical support portion 132 is not limited thereto, and can be specifically designed according to the width of the square grooves.

[0049] In some embodiments, the spherical probe 1222 and the spherical support 132 are made of stainless steel, or the surfaces of the spherical probe 1222 and the spherical support 132 are plated with chrome. The use of stainless steel with good corrosion resistance or chrome-plated surface design can prevent the probe and the spherical support 132 from being corroded and rusted due to residual moisture in the grinding liquid or polishing liquid during the detection process, thereby ensuring the detection accuracy of the flatness detection device 10.

[0050] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0051] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. A flatness detection device, characterized in that: include: A base having at least three spaced apart mounting holes; at least three detection components, each of which corresponds to the mounting holes one by one, the detection components comprising a dial gauge and a probe structure, the dial gauge comprising a dial portion and a measuring rod portion connected to the dial portion, at least a portion of the measuring rod portion being fixed in the mounting hole, the probe structure comprising a connecting portion and a spherical probe connected to each other, a portion of the connecting portion being located in the mounting hole and connected to the measuring rod portion, and the spherical probe being located on a side of the base facing away from the dial portion; and, At least three supporting structures, the supporting structures include a mounting portion and a spherical supporting portion, the mounting portion is fixed to the base and is located on the side where the spherical probe is located, the spherical supporting portion is connected to an end of the mounting portion away from the base, and the geometric center of any spherical supporting portion is outside the line connecting the geometric centers of the other two spherical supporting portions.

2. The flatness detection device according to claim 1, characterized in that: The spherical support parts of the plurality of support structures are flush with one side facing away from the base. In a calibration state, the plurality of spherical support parts are flush with one side facing away from the base of the plurality of spherical probes.

3. The flatness detection device according to claim 1, characterized in that: The base includes a plate body and a plurality of fixing parts arranged on the same side of the plate body, the mounting hole passes through the plate body and the fixing parts, the measuring rod part at least partially corresponds to the position of the fixing parts, and the flatness detection device also includes a fixing piece, which passes through the fixing part to press against the measuring rod part.

4. The flatness detection device according to claim 3, characterized in that: The flatness detection device further comprises a transition structure, which is located between the measuring rod portion and the fixing portion and covers at least two opposite sides of the measuring rod portion, and the fixing member is pressed against the transition structure.

5. The flatness detection device according to claim 4, characterized in that: The transition structure comprises two sets of arc-shaped cross sections, and the two sets are symmetrically arranged on two opposite sides of the measuring rod; and / or, The material of the transition structure is copper.

6. The flatness detection device according to claim 1, characterized in that: The flatness detection device also includes a handle, which includes a crossbar and two vertical bars. The two vertical bars are spaced apart and fixed on the base. The two ends of the crossbar are respectively connected to the two vertical bars and are located on the side of the dial part facing away from the base.

7. The flatness detection device according to claim 1, characterized in that: The flatness detection device is used to detect the flatness of a flat mold plate with square grid grooves, and the diameters of the spherical probe and the spherical support portion are larger than the width of the square grid grooves.

8. The flatness detection device according to claim 1, characterized in that: The diameter of the spherical probe and the spherical support portion is greater than or equal to 8 mm; and / or, The material of the spherical probe and the spherical support portion includes stainless steel, or the surface of the spherical probe and the spherical support portion is plated with chrome.

9. The flatness detection device according to claim 1, characterized in that: In a calibrated state, the geometric centers of the three spherical probes are located on the same straight line.

10. The flatness detection device according to claim 9, characterized in that: In the calibration state, two of the spherical support portions are located at one end of the line connecting the three spherical probes and are respectively located on opposite sides of the line connecting the three spherical probes. One of the spherical support portions is located at the other end of the line connecting the three spherical probes, and its geometric center is located on the line connecting the three spherical probes.