Compact short-stroke motion platform structure

Abstract

The utility model discloses a compact short-stroke motion platform structure which comprises an installation bottom plate, an X-axis servo motor and a Y-axis servo motor are arranged on the upper surface of the installation bottom plate, and motor shafts of the X-axis servo motor and the Y-axis servo motor penetrate through the installation bottom plate and then are connected with an X-axis cam and a Y-axis cam respectively. An X-axis transmission assembly driven by the X-axis cam is arranged on the lower surface of the mounting bottom plate, a Y-axis transmission assembly driven by the Y-axis cam is arranged on the lower surface of the mounting bottom plate, a motion platform X-axis moving assembly is arranged at the front end of the X-axis transmission assembly, and a motion platform is arranged at the front end of the motion platform X-axis moving assembly; the rear end of the X-axis moving assembly of the moving platform is in non-rigid connection with the Y-axis transmission assembly. The two servo motors which are arranged side by side are adopted to directly drive the corresponding cam structures, movement of the motion platform in the X-axis direction and the Y-axis direction is independently achieved, efficiency is improved, the size is reduced, material waste is reduced, and installation and debugging difficulty is lowered.

Description

Technical Field

[0001] The utility model belongs to the field of semiconductor processing and motion platforms, and in particular relates to a compact short-stroke motion platform structure. Background Art

[0002] In the semiconductor manufacturing process, the chip is usually calibrated or moved. Whether it is position calibration or position adjustment, it is necessary to use a motion platform to move in the X and Y directions to achieve vertical alignment between the calibration block and the chip, or to adjust the position of the chip. Since the chip is smaller in size than products in other fields, the travel of the motion platform required in the semiconductor processing field is relatively much smaller, and the short-stroke mobile platform plays an important role.

[0003] At present, most of the short-stroke motion platforms on the market used for chip position calibration or handling and transplanting use double ball screws or single ball screws plus cams. Since the use of ball screws requires the installation of angular contact ball bearings, this will inevitably increase the overall structure of the motion platform, occupy a large space, and be difficult to install. In addition, the use of ball screws will also affect the efficiency of the motion platform to a certain extent. Utility Model Content

[0004] In view of the deficiencies in the prior art, the utility model provides a compact short-stroke motion platform structure, which reduces the size of the equipment and reduces the difficulty of installation while ensuring that the platform can achieve short-distance motion.

[0005] In order to solve the above technical problems and achieve the above technical effects, the present invention is implemented through the following technical solutions:

[0006] A compact short-stroke motion platform structure comprises a mounting base plate, wherein an X-axis servo motor and a Y-axis servo motor are arranged on the upper surface of the mounting base plate, and the motor shafts of the X-axis servo motor and the Y-axis servo motor are respectively connected to an X-axis cam and a Y-axis cam after passing through the mounting base plate from top to bottom; a group of X-axis transmission components capable of realizing short-stroke reciprocating motion in the X-axis direction under the rotation of the X-axis cam are arranged on the lower surface of the mounting base plate, a group of Y-axis transmission components capable of realizing short-stroke reciprocating motion in the Y-axis direction under the rotation of the Y-axis cam are arranged on the lower surface of the mounting base plate, a motion platform X-axis moving component is arranged at the front end of the X-axis transmission component, a motion platform is arranged at the front end of the motion platform X-axis moving component, and the rear end of the motion platform X-axis moving component is non-rigidly connected to the Y-axis transmission component.

[0007] Furthermore, the X-axis servo motor and the Y-axis servo motor are arranged side by side along the Y-axis direction on the upper surface of the mounting base plate, and the X-axis servo motor is positioned at the back and the Y-axis servo motor is positioned at the front. Although this makes the Y-axis direction of the entire motion platform structure appear longer, it saves space in the X-axis direction and is more convenient for use in specific places.

[0008] Furthermore, the X-axis moving assembly of the motion platform includes a first Y-axis slide rail, a Y-axis moving plate, a motion platform support, and a first Y-axis contact roller. The first Y-axis slide rail is arranged at the front of the X-axis transmission assembly, the upper surface of the Y-axis moving plate is connected to the slider of the first Y-axis slide rail, the front end of the Y-axis moving plate is provided with the motion platform through the motion platform support, and the rear end of the Y-axis moving plate is in sliding contact with the front end of the Y-axis transmission assembly through the first Y-axis contact roller.

[0009] Furthermore, the X-axis transmission assembly includes an X-axis transmission connecting rod, an X-axis slide rail, an X-axis contact roller, and an X-axis tension spring. The X-axis slide rail is arranged at the front part of the lower surface of the mounting base plate, the X-axis transmission connecting rod is located between the X-axis slide rail and the X-axis cam, the front end upper surface of the X-axis transmission connecting rod is fixedly connected to the slider of the X-axis slide rail, the front end lower surface of the X-axis transmission connecting rod is connected to the track of the first Y-axis slide rail, the rear end upper surface of the X-axis transmission connecting rod is in rolling contact with the side circumferential surface of the X-axis cam through the X-axis contact roller, the X-axis tension spring is side by side with the X-axis cam in the Y-axis direction and parallel to the X-axis slide rail, and one end of the X-axis tension spring is connected to the rear part of the X-axis transmission connecting rod through a corresponding spring locating pin, and the other end of the X-axis tension spring is connected to the rear part of the lower surface of the mounting base plate through a corresponding spring locating pin.

[0010] Furthermore, the X-axis transmission connecting rod is in the shape of an "axe" with a slender rear portion and a wide front portion. The rear portion of the X-axis transmission connecting rod is located on the left or right side of the Y-axis transmission assembly, and the front portion of the X-axis transmission connecting rod is located on the front side of the Y-axis transmission assembly. An avoidance gap for avoiding the installation position of the Y-axis transmission assembly is formed between the front and rear portions of the X-axis transmission connecting rod to improve the compactness between the X-axis transmission assembly and the Y-axis transmission assembly.

[0011] Furthermore, the Y-axis transmission assembly includes a Y-axis transmission connecting rod, a second Y-axis slide rail, a Y-axis slide rail mounting cover, a second Y-axis contact roller, a Y-axis top block, a first Y-axis tension spring and a second Y-axis tension spring, the Y-axis slide rail mounting cover is located below the Y-axis cam and is fixedly connected to the lower surface of the mounting base plate, the second Y-axis slide rail is arranged on the lower surface of the Y-axis slide rail mounting cover, the middle part of the lower surface of the Y-axis transmission connecting rod is connected to the slider of the second Y-axis slide rail, the Y-axis top block is arranged at the front end of the Y-axis transmission connecting rod, and the Y-axis top block is in sliding contact with the rear end of the Y-axis movable plate through the first Y-axis contact roller; the second Y-axis contact roller is arranged at the rear end of the Y-axis transmission connecting rod, the rear half of the Y-axis cam is exposed to the rear end of the Y-axis slide rail mounting cover, and the Y-axis transmission connecting rod The rear end upper surface of the rod is in rolling contact with the rear end circumferential surface of the Y-axis cam through the second Y-axis contact roller; the first Y-axis tension spring is located on one of the left or right sides of the Y-axis transmission connecting rod and is parallel to the second Y-axis slide rail, the front end of the first Y-axis tension spring is connected to the side surface of the Y-axis movable plate through the corresponding spring locating pin, and the rear end of the first Y-axis tension spring is connected to the side surface of the Y-axis transmission connecting rod through the corresponding spring locating pin; the second Y-axis tension spring is located on the other side of the left or right side of the Y-axis transmission connecting rod and is parallel to the second Y-axis slide rail, the front end of the second Y-axis tension spring is connected to the lower surface of the Y-axis slide rail mounting cover through the corresponding spring locating pin, and the rear end of the second Y-axis tension spring is connected to the rear end of the side of the Y-axis transmission connecting rod through the corresponding spring locating pin.

[0012] Furthermore, the convex curvature on the X-axis cam satisfies that the motion platform can stay at any position within a certain short stroke range in the X-axis direction. Similarly, the convex curvature on the Y-axis cam satisfies that the motion platform can stay at any position within a certain short stroke range in the Y-axis direction.

[0013] Furthermore, the short travel range of the motion platform in the X-axis direction and in the Y-axis direction is less than 5 mm.

[0014] Furthermore, a chip calibration block for calibrating the position of the chip is embedded on the upper surface of the motion platform.

[0015] Furthermore, a chip mounting block for accommodating a chip is embedded on the upper surface of the motion platform.

[0016] The beneficial effects of the utility model are:

[0017] The utility model adopts two servo motors to directly drive the corresponding cam structure, and independently realizes the movement of the X-axis and Y-axis directions of the motion platform, thereby improving the efficiency of the mechanism. At the same time, the two servo motors are arranged side by side, which reduces the volume of the mechanism, reduces the waste of materials, and reduces the difficulty of installation and debugging. Although the utility model has a small structure and a short motion stroke, it can meet the characteristics of most chip movement requirements, and therefore plays an important role in the positioning process of chips or other small products.

[0018] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiment of the utility model with the accompanying drawings. The specific implementation method of the utility model is given in detail by the following embodiments and their drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present application. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:

[0020] Figure 1 It is a top three-dimensional diagram of the overall structure of the utility model;

[0021] Figure 2 It is a bottom stereogram of the overall structure of the utility model;

[0022] Figure 3 It is a bottom perspective view of the second half of the utility model;

[0023] Figure 4 It is a bottom perspective view of the front half of the utility model;

[0024] Figure 5 This is an enlarged view of one side of the Y-axis transmission assembly in the utility model;

[0025] Figure 6 It is an enlarged view of the other side of the Y-axis transmission assembly in the utility model;

[0026] Figure 7 This is an enlarged view of the motion platform in the utility model when loading the chip calibration block. DETAILED DESCRIPTION

[0027] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments. The descriptions herein are used to provide a further understanding of the present invention and constitute a part of this application. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention.

[0028] See also Figure 1-7 As shown, a compact short-stroke motion platform structure includes a mounting base plate 1, and an X-axis servo motor 2 and a Y-axis servo motor 3 are arranged on the upper surface of the mounting base plate 1. As an embodiment of the utility model, the X-axis servo motor 2 and the Y-axis servo motor 3 are arranged side by side on the upper surface of the mounting base plate 1 along the Y-axis direction, and the X-axis servo motor 2 is located at the rear, and the Y-axis servo motor 3 is located at the front. Although this makes the Y-axis direction of the entire motion platform structure appear longer, it saves space in the X-axis direction and is more convenient for use in specific places.

[0029] The motor shafts of the X-axis servo motor 2 and the Y-axis servo motor 3 are respectively connected to the X-axis cam 4 and the Y-axis cam 5 after passing through the mounting base plate 1 from top to bottom, and the X-axis cam 4 is located at the back and the Y-axis cam 5 is located at the front.

[0030] The lower surface of the mounting base plate 1 is provided with a group of X-axis transmission components that can realize short-stroke reciprocating motion in the X-axis direction under the rotation of the X-axis cam 4. The lower surface of the mounting base plate 1 is provided with a group of Y-axis transmission components that can realize short-stroke reciprocating motion in the Y-axis direction under the rotation of the Y-axis cam 5. The front end of the X-axis transmission component is provided with a motion platform X-axis moving component, and the front end of the motion platform X-axis moving component is provided with a motion platform 6, and the rear end of the motion platform X-axis moving component is non-rigidly connected to the Y-axis transmission component. The short-stroke range of the motion platform in the X-axis direction and in the Y-axis direction is less than 5mm.

[0031] When the utility model is used for chip position calibration, a chip calibration block 22 for calibrating the chip position is embedded on the upper surface of the motion platform 6 .

[0032] When the utility model is used for transporting and transplanting chips, a chip mounting block for accommodating chips is embedded on the upper surface of the motion platform 6 .

[0033] As an embodiment of the present utility model, the X-axis moving assembly of the motion platform includes a first Y-axis slide rail 7, a Y-axis moving plate 8, a motion platform support 9, and a first Y-axis contact roller 10. The first Y-axis slide rail 7 is arranged at the front of the X-axis transmission assembly, the upper surface of the Y-axis moving plate 8 is connected to the slider of the first Y-axis slide rail 7, the front end of the Y-axis moving plate 8 is provided with the motion platform 6 through the motion platform support 9, and the rear end of the Y-axis moving plate 8 is in sliding contact with the front end of the Y-axis transmission assembly through the first Y-axis contact roller 10.

[0034] As an embodiment of the present utility model, the X-axis transmission assembly includes an X-axis transmission connecting rod 11, an X-axis slide rail 12, an X-axis contact roller 13, and an X-axis tension spring 14. The X-axis slide rail 12 is arranged at the front part of the lower surface of the mounting base plate 1, and the X-axis transmission connecting rod 11 is located between the X-axis slide rail 12 and the X-axis cam 4. The front end upper surface of the X-axis transmission connecting rod 11 is fixedly connected to the slider of the X-axis slide rail 12, the front end lower surface of the X-axis transmission connecting rod 11 is connected to the track of the first Y-axis slide rail 7, and the rear end upper surface of the X-axis transmission connecting rod 11 is connected to the track of the first Y-axis slide rail 7. The surface is in rolling contact with the side circumferential surface of the X-axis cam 4 through the X-axis contact roller 13, and the convex curvature on the X-axis cam 4 satisfies that the motion platform 6 can stay at any position within a certain short stroke range in the X-axis direction. The X-axis tension spring 14 is side by side with the X-axis cam 4 in the Y-axis direction and parallel to the X-axis slide rail 12, and one end of the X-axis tension spring 14 is connected to the rear of the X-axis transmission connecting rod 11 through a corresponding spring locating pin, and the other end of the X-axis tension spring 14 is connected to the rear of the lower surface of the mounting base plate 1 through a corresponding spring locating pin.

[0035] As a further preferred embodiment, the X-axis transmission link 11 is in an "axe" shape with a slender rear portion and a wide front portion, the rear portion of the X-axis transmission link 11 is located on the left or right side of the Y-axis transmission assembly, and the front portion of the X-axis transmission link 11 is located on the front side of the Y-axis transmission assembly, and an avoidance gap for avoiding the installation position of the Y-axis transmission assembly is formed between the front and rear portions of the X-axis transmission link 11 to improve the compactness between the X-axis transmission assembly and the Y-axis transmission assembly.

[0036] As an embodiment of the present utility model, the Y-axis transmission assembly includes a Y-axis transmission connecting rod 15, a second Y-axis slide rail 16, a Y-axis slide rail mounting cover 17, a second Y-axis contact roller 18, a Y-axis top block 19, a first Y-axis tension spring 20 and a second Y-axis tension spring 21, the Y-axis slide rail mounting cover 17 is located below the Y-axis cam 5 and is fixedly connected to the lower surface of the mounting base plate 1, the second Y-axis slide rail 16 is arranged on the lower surface of the Y-axis slide rail mounting cover 17, the Y-axis transmission connecting rod The middle part of the lower surface of the Y-axis cam 5 is connected to the slider of the second Y-axis slide rail 16, the Y-axis top block 19 is arranged at the front end of the Y-axis transmission connecting rod 15, and the Y-axis top block 19 is in sliding contact with the rear end of the Y-axis moving plate 8 through the first Y-axis contact roller 10; the second Y-axis contact roller 18 is arranged at the rear end of the Y-axis transmission connecting rod 15, the rear half of the Y-axis cam 5 is exposed to the rear end of the Y-axis slide rail mounting cover 17, and the rear end upper surface of the Y-axis transmission connecting rod 15 is through the first Y-axis contact roller 10. The second Y-axis contact roller 18 is in rolling contact with the rear end circumferential surface of the Y-axis cam 5, and the convex curvature on the Y-axis cam 5 satisfies that the motion platform 6 can stay at any position within a certain short stroke range in the Y-axis direction; the first Y-axis tension spring 20 is located on one side of the left side or the right side of the Y-axis transmission connecting rod 15, and is parallel to the second Y-axis slide rail 16, the front end of the first Y-axis tension spring 20 is connected to the side surface of the Y-axis movable plate 8 through a corresponding spring locating pin, and the rear end of the first Y-axis tension spring 20 is connected to the side surface of the Y-axis transmission connecting rod 15 through a corresponding spring locating pin; the second Y-axis tension spring 21 is located on the other side of the left side or the right side of the Y-axis transmission connecting rod 15, and is parallel to the second Y-axis slide rail 16, the front end of the second Y-axis tension spring 21 is connected to the lower surface of the Y-axis slide rail mounting cover 17 through a corresponding spring locating pin, and the rear end of the second Y-axis tension spring 21 is connected to the rear end of the side of the Y-axis transmission connecting rod 15 through a corresponding spring locating pin.

[0037] Taking the utility model used for chip position calibration as an example, its working principle is:

[0038] The utility model is arranged below the turret chip sorting machine, and a chip calibration block 22 is embedded on the upper surface of the motion platform 6 .

[0039] When the turret chip sorter picks up a chip from the wafer and prepares to transfer it to the next process, the chip will first be rotated to the top of the motion platform 6 of the present invention.

[0040] Since the chip calibration block 22 on the motion platform 6 and the chip on the turret chip sorting machine do not always correspond to each other in the upper and lower positions, the utility model needs to adjust the moving distance of the motion platform 6 in the X-axis and Y-axis directions by short strokes, so as to align the chip calibration block 22 with the chip from bottom to top.

[0041] The utility model uses an X-axis servo motor 2 and a Y-axis servo motor 3 to independently drive a motion platform 6 to position in the X-axis and Y-axis directions.

[0042] When adjusting the upward movement distance of the X-axis, the X-axis servo motor 2 drives the X-axis cam 4 to rotate. When the convex arc surface of the X-axis cam 4 rotates to contact with the X-axis contact roller 13, the X-axis cam 4 pushes the rear end of the X-axis transmission connecting rod 11 to one side away from the axis of the X-axis cam 4. At the same time, since the front end of the X-axis transmission connecting rod 11 is provided with an X-axis slide rail 12, the front end of the X-axis transmission connecting rod 11 will also move to one side away from the axis of the X-axis cam 4; and when the non-convex arc surface of the X-axis cam 4 rotates to contact with the X-axis contact roller 13, under the tension of the X-axis tension spring 14, the rear end of the X-axis transmission connecting rod 11 automatically approaches the axis of the X-axis cam 4. At the same time, the front end of the X-axis transmission connecting rod 11 will also approach the axis of the X-axis cam 4 along the X-axis slide rail 12, thereby realizing the short-stroke movement of the chip calibration block 22 in the X-axis direction by the motion platform 6.

[0043] When adjusting the upward moving distance of the Y-axis, the Y-axis servo motor 3 drives the Y-axis cam 5 to rotate. When the convex arc surface of the Y-axis cam 5 rotates to contact the second Y-axis contact roller 18, the Y-axis cam 5 pushes the Y-axis transmission connecting rod 15 as a whole backward along the second Y-axis slide rail 16. At the same time, since the second Y-axis tension spring 21 is connected between the Y-axis moving plate 8 and the Y-axis transmission connecting rod 15, the Y-axis transmission connecting rod 15 pulls the Y-axis moving plate 8 as a whole to move backward along the first Y-axis slide rail 7, and the Y-axis moving plate 8 drives the moving platform 6 as a whole to move backward along the first Y-axis slide rail 7 through the moving platform support 9. ; When the non-convex arc surface of the Y-axis cam 5 rotates to contact the second Y-axis contact roller 18, under the tension of the first Y-axis tension spring 20, the Y-axis transmission connecting rod 15 moves forward along the second Y-axis slide rail 16 as a whole, and the Y-axis transmission connecting rod 15 pushes the first Y-axis contact roller 10 through the Y-axis top block 19 at its front end, driving the Y-axis moving plate 8 to move forward along the first Y-axis slide rail 7 as a whole, and the Y-axis moving plate 8 drives the moving platform 6 to move forward along the first Y-axis slide rail 7 as a whole through the moving platform support 9, thereby realizing the short-stroke movement of the chip calibration block 22 in the Y-axis direction driven by the moving platform 6.

[0044] It should be particularly noted that, since the Y-axis moving plate 8 is arranged on the X-axis transmission link 11, when the X-axis transmission link 11 moves a short distance in the X-axis direction, the Y-axis moving plate 8 will have a slight X-direction misalignment with the Y-axis transmission link 15 behind it. However, since the Y-axis moving plate 8 and the Y-axis transmission link 15 are non-rigidly connected, specifically, they are simultaneously connected through the second Y-axis tension spring 21 and the first Y-axis contact roller 10, the Y-axis transmission link 15 will not only not interfere with the fine-tuning of the Y-axis moving plate 8 in the X-axis direction, but also can properly pull the Y-axis moving plate 8 through the second Y-axis tension spring 21, and overcome the friction through the first Y-axis contact roller 10.

[0045] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A compact short-stroke motion platform structure, characterized in that: The invention comprises a mounting base plate (1), wherein an X-axis servo motor (2) and a Y-axis servo motor (3) are arranged on the upper surface of the mounting base plate (1), and the motor shafts of the X-axis servo motor (2) and the Y-axis servo motor (3) are respectively connected to an X-axis cam (4) and a Y-axis cam (5) after passing through the mounting base plate (1) from top to bottom; a group of X-axis transmission components capable of realizing short-stroke reciprocating motion in the X-axis direction under the rotation of the X-axis cam (4) are arranged on the lower surface of the mounting base plate (1), and a group of Y-axis transmission components capable of realizing short-stroke reciprocating motion in the Y-axis direction under the rotation of the Y-axis cam (5) are arranged on the lower surface of the mounting base plate (1); a motion platform X-axis moving component is arranged at the front end of the X-axis transmission component, a motion platform (6) is arranged at the front end of the motion platform X-axis moving component, and the rear end of the motion platform X-axis moving component is non-rigidly connected to the Y-axis transmission component.

2. The compact short-stroke motion platform structure according to claim 1, characterized in that: The X-axis servo motor (2) and the Y-axis servo motor (3) are arranged side by side along the Y-axis direction on the upper surface of the mounting base plate (1), with the X-axis servo motor (2) being located at the rear and the Y-axis servo motor (3) being located at the front.

3. The compact short-stroke motion platform structure according to claim 1, characterized in that: The motion platform X-axis moving assembly comprises a first Y-axis slide rail (7), a Y-axis moving plate (8), a motion platform support (9), and a first Y-axis contact roller (10); the first Y-axis slide rail (7) is arranged at the front of the X-axis transmission assembly; the upper surface of the Y-axis moving plate (8) is connected to a slider of the first Y-axis slide rail (7); the front end of the Y-axis moving plate (8) is provided with the motion platform (6) via the motion platform support (9); and the rear end of the Y-axis moving plate (8) is in sliding contact with the front end of the Y-axis transmission assembly via the first Y-axis contact roller (10).

4. The compact short-stroke motion platform structure according to claim 3, characterized in that: The X-axis transmission assembly comprises an X-axis transmission connecting rod (11), an X-axis slide rail (12), an X-axis contact roller (13), and an X-axis tension spring (14); the X-axis slide rail (12) is arranged at the front part of the lower surface of the mounting base plate (1); the X-axis transmission connecting rod (11) is located between the X-axis slide rail (12) and the X-axis cam (4); the front end upper surface of the X-axis transmission connecting rod (11) is fixedly connected to the slider of the X-axis slide rail (12); the front end lower surface of the X-axis transmission connecting rod (11) is fixedly connected to the track of the first Y-axis slide rail (7). The rear end upper surface of the X-axis transmission connecting rod (11) is in rolling contact with the side circumferential surface of the X-axis cam (4) through the X-axis contact roller (13); the X-axis tension spring (14) is arranged side by side with the X-axis cam (4) in the Y-axis direction and is parallel to the X-axis slide rail (12); one end of the X-axis tension spring (14) is connected to the rear of the X-axis transmission connecting rod (11) through a corresponding spring locating pin; and the other end of the X-axis tension spring (14) is connected to the rear of the lower surface of the mounting base plate (1) through a corresponding spring locating pin.

5. The compact short-stroke motion platform structure according to claim 4, characterized in that: The X-axis transmission connecting rod (11) is in the shape of an "axe" with a slender rear portion and a wide front portion. The rear portion of the X-axis transmission connecting rod (11) is located on the left or right side of the Y-axis transmission assembly, and the front portion of the X-axis transmission connecting rod (11) is located on the front side of the Y-axis transmission assembly. An avoidance gap is formed between the front and rear portions of the X-axis transmission connecting rod (11) for avoiding the installation position of the Y-axis transmission assembly.

6. The compact short-stroke motion platform structure according to claim 3, characterized in that: The Y-axis transmission assembly comprises a Y-axis transmission connecting rod (15), a second Y-axis slide rail (16), a Y-axis slide rail mounting cover (17), a second Y-axis contact roller (18), a Y-axis top block (19), a first Y-axis tension spring (20) and a second Y-axis tension spring (21); the Y-axis slide rail mounting cover (17) is located below the Y-axis cam (5) and is fixedly connected to the lower surface of the mounting base plate (1); the second Y-axis slide rail (16) is arranged on the lower surface of the Y-axis slide rail mounting cover (17); the Y The middle part of the lower surface of the Y-axis transmission connecting rod (15) is connected to the slider of the second Y-axis slide rail (16); the Y-axis top block (19) is arranged at the front end of the Y-axis transmission connecting rod (15); the Y-axis top block (19) is in sliding contact with the rear end of the Y-axis moving plate (8) through the first Y-axis contact roller (10); the second Y-axis contact roller (18) is arranged at the rear end of the Y-axis transmission connecting rod (15); the rear half of the Y-axis cam (5) is exposed from the rear of the Y-axis slide rail mounting cover (17); The rear end upper surface of the Y-axis transmission connecting rod (15) is in rolling contact with the rear end circumferential surface of the Y-axis cam (5) through the second Y-axis contact roller (18); the first Y-axis tension spring (20) is located on one of the left side or the right side of the Y-axis transmission connecting rod (15) and is parallel to the second Y-axis slide rail (16); the front end of the first Y-axis tension spring (20) is connected to the side surface of the Y-axis moving plate (8) through a corresponding spring positioning pin, and the rear end of the first Y-axis tension spring (20) is connected to the side surface of the Y-axis moving plate (8) through a corresponding spring positioning pin. The spring locating pin is connected to the side surface of the Y-axis transmission connecting rod (15); the second Y-axis tension spring (21) is located on the other side of the left side or the right side of the Y-axis transmission connecting rod (15) and is parallel to the second Y-axis slide rail (16); the front end of the second Y-axis tension spring (21) is connected to the lower surface of the Y-axis slide rail mounting cover (17) through the corresponding spring locating pin, and the rear end of the second Y-axis tension spring (21) is connected to the rear end of the side of the Y-axis transmission connecting rod (15) through the corresponding spring locating pin.

7. The compact short-stroke motion platform structure according to claim 1, characterized in that: The convex curvature on the X-axis cam (4) satisfies the requirement that the motion platform (6) can stay at any position within a certain short stroke range in the X-axis direction. Similarly, the convex curvature on the Y-axis cam (5) satisfies the requirement that the motion platform (6) can stay at any position within a certain short stroke range in the Y-axis direction.

8. The compact short-stroke motion platform structure according to claim 1, characterized in that: The short travel range of the motion platform in the X-axis direction and in the Y-axis direction is less than 5 mm.

9. The compact short-stroke motion platform structure according to claim 1, characterized in that: A chip calibration block (22) for calibrating the position of the chip is embedded on the upper surface of the motion platform (6).

10. The compact short-stroke motion platform structure according to claim 1, characterized in that: A chip mounting block for accommodating a chip is embedded on the upper surface of the motion platform (6).

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