Pneumatic valve and electroplating equipment

Abstract

The utility model relates to the field of electroplating liquid spraying, in particular to a pneumatic valve and electroplating equipment, at least one part of a liquid flow channel in a pneumatic valve body is a circuitous section for guiding the flowing direction of chemical liquid to change, and a flexible component opposite to the circuitous section and an execution part for extruding the flexible component to deform are further arranged in the body. The flexible component blocks the chemical liquid in the circuitous section through deformation under the compression of the execution part; the aim that the circuitous section changes the flowing direction of the chemical liquid is achieved, it is ensured that the deformation direction of the flexible component and the flowing direction of the chemical liquid are staggered, and in short, external force applied by the execution part enables the flexible component to deform in the direction of the circuitous section till the chemical liquid in the circuitous section is cut off; according to the novel structure, the use of a spring is eliminated, and the problem of corrosion does not need to be considered, so that the stability of long-term use of the pneumatic valve is ensured, and the closure of chemical liquid cannot be influenced.

Description

Technical Field

[0001] The utility model relates to the field of electroplating liquid spraying, in particular to a pneumatic valve and electroplating equipment. Background Art

[0002] In conventional electroplating equipment, the valve that controls the electrolyte spraying is a pneumatic diaphragm valve. This pneumatic diaphragm valve, such as patent number 202210087145.4, is called a chemical pneumatic diaphragm valve. Although this diaphragm valve has stated that the chemical medium is only in contact with the valve body and the valve core, when the piston moves up and down, it is inevitable that a small amount of chemical liquid will penetrate into the spring from the gap. The chemical liquid is corrosive and will corrode the spring, which will eventually affect the cutoff of the chemical liquid. Utility Model Content

[0003] In order to solve the above problems, the utility model provides a pneumatic valve and electroplating equipment, adopting a new physical structure to replace the spring, thereby solving the problem that the interception effect is affected due to the corrosion of the spring.

[0004] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0005] A pneumatic valve, characterized in that at least a portion of the liquid flow channel in the main body is a detour section that guides the change in the flow direction of the chemical liquid. The main body is also provided with a flexible component opposite to the detour section, and an actuator that squeezes the flexible component to deform. Under the pressure of the actuator, the flexible component isolates the chemical liquid in the detour section by deformation.

[0006] Furthermore, the detour section is formed by a gap between the first liquid flow channel, the second liquid flow channel and the flexible component located on the same side of the body in a state where there is no deformation change.

[0007] Furthermore, the interior of the main body has a liquid injection groove and a guide channel arranged in the liquid injection groove, the flexible component covers the liquid injection groove, and there is a gap between the guide channel and the flexible component. The space between the liquid injection groove and the guide channel is the first liquid flow channel, and the interior of the guide channel is the second liquid flow channel.

[0008] Furthermore, the partition of the flexible component is that the flexible component is tightly attached to the edge of the end of the flow guide channel through deformation.

[0009] Furthermore, the actuator end includes a gas flow channel located in the body and outputting positive pressure to the flexible component.

[0010] Furthermore, the flexible member is sealed on the opening at the end of the gas flow channel.

[0011] Furthermore, a piston is provided in the gas flow channel, and under the action of positive pressure, the piston squeezes the flexible component to make close contact with the edge of the pipeline.

[0012] Furthermore, the flexible component is a thin film sheet.

[0013] Furthermore, a nozzle is provided, which includes a first rotary cover, a second rotary cover, and a nozzle. The first rotary cover is rotatably connected to the main body, a plurality of first latch teeth are provided in the first rotary cover, and a second latch tooth engaged with the first latch teeth is provided on the main body. When the first rotary cover rotates, the deformation between the latch teeth causes the plurality of first latch teeth to engage with adjacent second latch teeth. The nozzle is installed on the second rotary cover, and an arc groove is provided on the outer periphery of the first rotary cover, corresponding to the lug on the inner annular surface of the second rotary cover.

[0014] Beneficial effects of the utility model:

[0015] The pneumatic valve of the utility model includes two technical features: a flexible component and a detour section. The purpose of the detour section is to change the flow direction of the chemical liquid and ensure that the deformation direction of the flexible component is staggered with the flow direction of the chemical liquid. In short, the external force applied by the actuator causes the flexible component to deform in the direction of the detour section until the chemical liquid in the detour section is cut off. This new structure eliminates the use of springs and there is no need to consider the problem of corrosion, thereby ensuring the stability of the pneumatic valve in long-term use without affecting the interception of the chemical liquid. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a stereogram of the utility model in use state.

[0017] Figure 2 yes Figure 1 Another perspective view.

[0018] Figure 3 It is a cross-sectional view of the utility model.

[0019] Figure 4 It is a cross-sectional view of another viewing surface of the utility model.

[0020] Figure 5 yes Figure 4 An enlarged schematic diagram of point A.

[0021] Figure 6 This is an exploded view of the sprinkler head.

[0022] Figure 7 It is a three-dimensional diagram of the second screw cap.

[0023] Figure 8 It is a three-dimensional diagram of the first rotary cover.

[0024] Fig. 9 It is a relationship diagram of the first latching tooth and the second latching tooth corresponding to each other.

[0025] Fig.10 is a cross-sectional view of this embodiment.

[0026] Fig.11 yes Fig.10 An enlarged schematic diagram of point B. DETAILED DESCRIPTION

[0027] See also Figure 1-9 , which is a three-dimensional view of the pneumatic valve 100 .

[0028] The pneumatic valve 100 of the utility model is composed of a gas valve part and a flow channel part.

[0029] The gas valve part is mainly used to cut off the chemical liquid from flowing out of the flow channel part through gas.

[0030] The gas valve part includes a gas valve body 1, which has a gas flow channel 1a for unidirectional gas flow. The gas flow channel 1a has a groove that fits the outer periphery of the piston 2 in the area corresponding to the end of the flow. When compressed gas is introduced into the gas flow channel 1a, the piston 2 is pushed to seal the flexible component 3 at the end of the flow and stop the chemical liquid in the flow channel part through deformation. In short, by maintaining a positive pressure in the gas flow channel 1a, the flexible component 3 can always block the liquid flow channel in the flow channel part and stop the chemical liquid from flowing out through the flow channel part.

[0031] There is a part of the liquid flow channel in the flow channel part, which forms a detour section with a changed flow direction after being connected to the air valve body 1, and when the flow channel part is connected to the air valve part, the flexible component 3 and the detour section maintain a relative positional relationship, and the flexible component 3, under the extrusion of the piston 2, cuts off the chemical liquid passing through the detour section by means of deformation.

[0032] It can be seen that the pneumatic valve 100 in the utility model adopts a liquid flow channel in a specific direction and a deformable flexible component 3, which replaces the use of a spring, thereby solving the problem of spring corrosion. For the pneumatic valve 100 that does not use a spring, the chemical liquid cannot cause any chemical erosion to the pneumatic valve 100, and the stability related to the life span can also be clearly guaranteed.

[0033] The detour section on the liquid flow channel is a main body 4 having an injection groove 41 and a guide channel 42 arranged in the injection groove 41. The flexible member 3 seals the entire injection groove 41. As can be seen from the figure, the guide channel 42 extends in the direction of the flexible member 3, and after approaching the flexible member 3, the chemical liquid in the injection groove 41 flows into the guide channel 42 through the gap d between the guide channel 42 and the flexible member 3. The space between the injection groove 41 and the guide channel 42 is a part of the liquid flow channel (the first liquid flow channel s1), and the interior of the guide channel 42 is the second liquid flow channel s2; it is not difficult to see that the formation of the detour section is based on the gap d between the guide channel 42 and the flexible member 3 when no deformation occurs, and the space between the outer wall of the guide channel 42 and the inner wall of the injection groove 41. This allows the flexible member 3 to participate in a part of the liquid flow channel, which can reduce the adjustment amplitude required for the flexible member 3 to cut off the liquid flow channel, and the cutoff effect has a fast response.

[0034] In the embodiment, the flexible member 3 is a thin film sheet. When cutting, the entire thin film sheet is in close contact with the edge of the flow guide channel 42 through the action of the piston 2.

[0035] It should be noted that the piston 2 is used to reduce the deformation amplitude of the diaphragm so that the diaphragm is not excessively squeezed and deformed by the positive pressure. Therefore, the use of the piston 2 can reduce the loss of the life of the diaphragm. In fact, even without using the piston 2, the chemical liquid can be cut off by gas.

[0036] In an embodiment, the thickness of the film sheet is ±2 cm.

[0037] A sealing ring 5 is sleeved on the outer periphery of the piston 2 , and the sealing ring 5 is in close contact with the end of the flow, which prevents the compressed gas from flowing out from the edge of the piston 2 , so as not to affect the sealing effect of the film and the guide channel 42 .

[0038] The surface of the air valve body 1 is covered with a threaded cover 6 corresponding to the end of the flow. The ends of the liquid injection groove 41 and the flow guide channel 42 extend outside the air valve body 1. The outer periphery of the liquid injection groove 41 is provided with threads, and the liquid injection groove 41 is tightly connected to the air valve body 4 through the threaded cover 6.

[0039] A liquid inlet hole 43 is provided on the side of the main body 4 and communicated with the first liquid flow channel s1.

[0040] The bottom of the main body 4 is connected with a nozzle, and the flow guide channel 42 is connected with the nozzle. In this embodiment, the chemical liquid is sprayed out in a straight line.

[0041] The nozzle can adjust the coverage of the chemical liquid sprayed. The nozzle has two functions of precise adjustment and rapid adjustment, so that the spraying area on the workpiece can be quickly changed. The nozzle includes a first rotary cover 51, a second rotary cover 52, and a nozzle 53. The first rotary cover 51 is used to achieve the effect of precise adjustment. It is mainly between the first rotary cover 51 and the main body 4. A plurality of first latch teeth 71 are provided on the stopper 7 on the inner ring surface of the first rotary cover 51. A second latch tooth 72 that meshes with the first latch tooth 71 is provided on the edge of the bottom of the main body 4. Both the first latch tooth 71 and the second latch tooth 72 are made of deformable materials. When the first rotary cover 51 rotates, the deformation between the latch teeth causes the plurality of first latch teeth 71 to mesh with the adjacent second latch teeth 72.

[0042] The nozzle 53 is installed on the second rotary cover 52. By rotating the second rotary cover 52, the spraying area can be greatly changed. The outer periphery of the first rotary cover 51 is provided with an arc groove 51', which corresponds to the lug 52' on the inner annular surface of the second rotary cover 52. The second rotary cover 52 can rotate freely in the arc groove 51', and the adjustment speed is fast.

[0043] The adjustment steps are: first, rotate the second rotary cover 52 into place, for example, rotate the second rotary cover 52 clockwise to make the injection surface of the chemical liquid close to the injection area, and then rotate the first rotary cover 51 counterclockwise. When the lug 52' is in contact with the end of the arc groove 51', the second rotary cover 52 is driven by the first rotary cover 51 to rotate slightly for precise adjustment.

[0044] like Figure 10-11 As shown, in the electroplating equipment of this specific embodiment, the utility model sprays a large amount of chemical liquid in the electroplating equipment to perform electroplating operations.

[0045] In addition, the film is made of corrosion-resistant material. Since there are too many types of this material to choose from and it belongs to the existing technology, it will not be described in detail.

[0046] The above implementation modes are merely descriptions of the preferred implementation modes of the present invention, and are not intended to limit the scope of the present invention. Without departing from the design spirit of the present invention, various modifications and improvements made to the technical solutions of the present invention by ordinary engineering and technical personnel in the field shall fall within the protection scope determined by the claims of the present invention.

Claims

1. A pneumatic valve, characterized in that: At least a part of the liquid flow channel in the main body is a detour section that guides the change of the flow direction of the chemical liquid. The main body is also provided with a flexible component opposite to the detour section, and an execution part that squeezes the flexible component to deform. Under the pressure of the execution part, the flexible component isolates the chemical liquid in the detour section by deformation.

2. A pneumatic valve according to claim 1, characterized in that: The detour section is formed by a gap between the first liquid flow channel, the second liquid flow channel and the flexible component located on the same side of the body in a state where there is no deformation change.

3. A pneumatic valve according to claim 2, characterized in that: The interior of the body has a liquid injection groove and a guide channel arranged in the liquid injection groove, the flexible component covers the liquid injection groove, and there is a gap between the guide channel and the flexible component. The space between the liquid injection groove and the guide channel is the first liquid flow channel, and the interior of the guide channel is the second liquid flow channel.

4. A pneumatic valve according to claim 3, characterized in that: The partition of the flexible component is that the flexible component is tightly attached to the edge of the end of the flow guide channel through deformation.

5. A pneumatic valve according to claim 1, characterized in that: The actuator end includes a gas flow channel located in the body and outputting positive pressure to the flexible component.

6. A pneumatic valve according to claim 5, characterized in that: The flexible member is sealed on the opening at the end of the gas flow channel.

7. A pneumatic valve according to claim 5, characterized in that: A piston is arranged in the gas flow channel. Under the action of positive pressure, the piston squeezes the flexible component to make it in close contact with the edge of the pipeline.

8. The pneumatic valve according to claim 1, characterized in that: The flexible member is a thin film sheet.

9. The pneumatic valve according to claim 1, characterized in that: A spray head is also provided, the spray head includes a first rotary cover, a second rotary cover, and a nozzle, the first rotary cover is rotatably connected to the body, a plurality of first latching teeth are provided in the first rotary cover, and a second latching tooth engaged with the first latching tooth is provided on the body, when the first rotary cover rotates, the deformation between the latching teeth causes the plurality of first latching teeth to engage with adjacent second latching teeth; The nozzle is mounted on the second rotary cover. The outer periphery of the first rotary cover is provided with an arc groove corresponding to the lug on the inner annular surface of the second rotary cover.

10. An electroplating device, characterized in that: The invention comprises a pneumatic valve as described in any one of claims 1 to 9.

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