Wafer box loading device driven by air cylinder

Abstract

The utility model provides a wafer box loading device driven by an air cylinder, and belongs to the technical field of semiconductor processing. A wafer box loading device driven by an air cylinder comprises a supporting frame, and the supporting frame is provided with a loading platform and a door opening and closing lifting mechanism. The loading platform comprises a mounting plate and a clamping device driven by a first cylinder; the door opening and closing lifting mechanism is perpendicular to the loading platform and located in the discharging direction of the loading platform. The door opening and closing lifting mechanism comprises a mounting back plate and a lifting door movably arranged on the mounting back plate in the vertical direction, the mounting back plate is provided with an access and a second air cylinder used for driving the lifting door, and the access can be covered with the lifting door; an anti-pinch protection mechanism is installed at the lower end of the lifting door. The second air cylinder drives the lifting door to ascend, the material taking opening can be opened, the lifting door can stop descending if encountering people or devices when the lifting door descends, and therefore the people and the devices are protected.

Description

Technical Field

[0001] The present application relates to semiconductor processing, and more particularly to a cylinder-driven wafer box loading device. Background Art

[0002] Wafer boxes are common equipment in the semiconductor manufacturing process. Wafer boxes are generally fixed on a special loading device to ensure the stability of the wafer box itself when placing and removing wafers. When the position of the wafer box needs to be moved during the wafer automation production process, the wafer box loading device plays the role of receiving the wafer box. The wafer box can be regarded as a bridge connecting the internal semiconductor process equipment.

[0003] During the placement process, the wafer box needs to be fixed to ensure the stability of the wafer box and protect the wafer box inside.

[0004] A utility model patent with application number CN202320586372.1 discloses an automatic loading platform device for wafer boxes, which can realize the positioning and fixation of wafer boxes, avoid the overturning of wafer boxes during feeding, and improve the safety of feeding; it can realize precise positioning, automatic detection, judgment, and automatic opening of wafer boxes, and ensure the accuracy of wafer retrieval.

[0005] However, the above patent places the drive of the lifting door at the lower end of the device, which makes the lower end of the device too large, resulting in too little space for workers or machines to place wafer boxes, inconvenient operation, or the inability to approach the mechanical structure. Although the servo motor drive is precise in operation, the production cost is high. If a cylinder drive is used, due to the low control accuracy of the cylinder, there are safety hazards to personnel and equipment when descending. Summary of the invention

[0006] The purpose of the present application is to solve the problems in the prior art that the servo motor used in the wafer box loading device is costly and that the lifting door mechanism is not equipped with a protective device, posing a potential safety hazard. The driving device of the lifting door is moved to the top to leave an escape space below. Since the lifting door and the clamping device are both driven by cylinders, the two cylinders can be controlled at the same time, allowing the lifting door and the clamping device to operate simultaneously.

[0007] The embodiment of the present application provides a cylinder-driven wafer box loading device, including a support frame, wherein the support frame is provided with a loading platform and a door opening and closing lifting mechanism;

[0008] The loading platform includes a mounting plate and a clamping device driven by a first cylinder, wherein the mounting plate is arranged on the supporting frame for receiving the wafer box, and the clamping device is arranged below the mounting plate for fixing the wafer box;

[0009] The door opening and closing lifting mechanism is arranged perpendicularly to the loading platform and is located in the unloading direction of the loading platform;

[0010] The door lifting mechanism includes a mounting back plate and a lifting door movably arranged on the mounting back plate in a vertical direction. The mounting back plate is provided with an entrance and an exit and a second cylinder for driving the lifting door, and the lifting door can cover the entrance and exit.

[0011] In one embodiment, the lifting door is equipped with an anti-pinch protection mechanism, which includes a movable plate and a travel switch that controls the second cylinder. The movable plate is movably arranged at the lower edge of the lifting door through a connecting rod, and the travel switch is fixedly arranged at the edge of the lifting door and located above the movable plate; the rising of the movable plate will trigger the travel switch.

[0012] Using the above technical solution, the second cylinder drives the lifting door to rise and the material taking port can be opened. If the lifting door encounters a person or a device when descending, the movable plate will be blocked and rise. When the movable plate triggers the travel switch, the lifting door will stop descending, thereby protecting the person and the device. The device uses the cylinder to drive the lifting door and the clamping device, which reduces the cost of the device and has an anti-clamping function to make up for the shortcoming of poor control accuracy of the cylinder. The clamping device can fix the wafer box when the wafer box is not needed, which is convenient for subsequent removal of the wafer box.

[0013] In one embodiment, the support frame is arranged in an "L" shape, including a vertical support portion and a mounting plate support portion; the vertical support portion is arranged on one side of the mounting plate support portion, and an escape space is formed below the mounting plate support portion; the mounting back plate is correspondingly arranged above the vertical support portion.

[0014] By adopting the above technical solution, the mounting back plate is arranged above the supporting frame, and the driving structure of the lifting door is installed on the mounting back plate. The supporting frame below only plays a load-bearing role, which saves the space below while meeting the usage requirements. There is an avoidance space in front of the supporting frame, which is convenient for personnel operation and the passage of equipment. At the same time, when the handling machinery or manpower places the wafer box, this space can facilitate the approach of people and handling machinery.

[0015] In one embodiment, an inspection opening may be provided on the support frame beside the avoidance space.

[0016] An inspection port is arranged on the supporting frame. The loading platform can be repaired from below by opening the inspection port. Meanwhile, the avoidance space provides space for personnel to carry out maintenance, which is convenient for personnel to carry out maintenance.

[0017] In one embodiment, a material taking space for unloading is provided between the mounting plate and the clamping device, the material taking space is communicated with the entrance and exit, and the lifting door can cover the material taking space.

[0018] Using the above technical solution, the robotic arm can enter the material retrieval space. After the robotic arm reaches under the wafer box, it takes out the wafer box by lifting it upwards. The secondary space can accommodate the entry of the robotic arms of most wafer box transfer robots.

[0019] In one embodiment, a support plate is disposed on the mounting plate, a detection unit, a positioning pin and an RFID reader are disposed on the support plate, and the support plate is disposed on the upper surface of the support frame.

[0020] Using the above technical solution, multiple detection units are arranged on the support plate to detect the presence of a wafer box, the positioning pins can position the wafer box, and the RFID can read the wafer box data. At the same time, the support plate is installed on the mounting plate, and fine-tuning can be performed by adjusting the mounting position and the mounting angle so that it can more stably receive the wafer box.

[0021] In one embodiment, the support plate is arranged in a "U" shape, which can stably receive the wafer box on one hand, and on the other hand, leaves space in the center so that the clamping device can fix the wafer box from below.

[0022] In one embodiment, the support plate is also provided with waist holes and top screw holes.

[0023] By using the above technical solution, the horizontal position of the support plate can be adjusted by selecting different waist holes for installation, and the horizontal angle of the support plate can be adjusted by screwing screws into the top screw holes, so as to fine-tune the structure and eliminate the influence caused by the processing or assembly errors of the equipment.

[0024] In one embodiment, the clamping device includes a fastener and a first cylinder, the fastener includes a rotating shaft, the first cylinder drives the fastener to rotate around the rotating shaft, so that the fastener fixes and unlocks the wafer box by rotation, and the fastener and the first cylinder are arranged on the mounting plate support part.

[0025] Using the above technical solution, when the wafer box needs to be locked, the first cylinder pushes and pulls to drive the fastener to rotate around the rotation axis. The fastener can fasten the bottom of the wafer box by rotating to fix the wafer box. Reverse rotation can release the fixation of the wafer box.

[0026] In one embodiment, the connecting rod is vertically arranged, the lower end of the connecting rod is fixedly connected to the movable plate, the upper end passes through the lower end of the lifting door, and a stopper is provided at the upper end of the connecting rod, so that the movable plate can move up and down within a certain range.

[0027] Using the above technical solution, a connecting rod is used to connect the lifting door and the movable plate. When the lifting door rises, the movable plate is located at the bottom due to its own gravity. When the lifting door descends, when the movable plate is blocked by foreign objects below, the movable plate will rise.

[0028] In one embodiment, the mounting back plate is provided with a guide rail along the vertical direction, and the lifting door is movably arranged on the guide rail; the mounting back plate is also provided with a second cylinder, a buffer and a detection device.

[0029] Using the above technical solution, a guide rail is arranged in the vertical direction on the mounting back plate, and the lifting door can slide along the guide rail to be lifted and lowered more smoothly. The detection device can detect whether the lifting door has reached the topmost position, and the buffer buffers at the topmost position of the lifting door to eliminate the influence of poor cylinder control accuracy.

[0030] In one embodiment, a detachable wheel set is mounted on the lower end of the support frame.

[0031] By using the above technical solution, before the device is installed, the wheel set can be used to move the device to the installation position, and the wheel set can be removed after installation to save space.

[0032] In one embodiment, the support frame is made of sheet metal welding or threaded connection with built-in reinforcement ribs.

[0033] Using the above technical solution makes the structure lighter.

[0034] Other features and corresponding beneficial effects of the present invention are described in the latter part of the specification, and it should be understood that at least part of the beneficial effects become obvious from the description in the specification of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 : A front elevation view of a cylinder-driven wafer box loading device provided by an embodiment of the present invention;

[0036] Figure 2 : A rear elevation view of a cylinder-driven wafer box loading device provided by an embodiment of the present invention;

[0037] Figure 3 : An elevation view of a mounting plate in a cylinder-driven wafer box loading device provided by an embodiment of the present invention;

[0038] Figure 4 : An elevation view of a clamping device in a cylinder-driven wafer box loading device provided by an embodiment of the present invention;

[0039] Figure 5 : A rear elevation view of a door opening and closing lifting mechanism in a cylinder-driven wafer box loading device provided by an embodiment of the present invention;

[0040] Figure 6 : A front elevation view of a door opening and closing lifting mechanism in a cylinder-driven wafer box loading device provided by an embodiment of the present invention;

[0041] Figure 7 : A vertical view of an anti-pinch protection mechanism in a cylinder-driven wafer box loading device provided in an embodiment of the present invention.

[0042] Description of reference numerals:

[0043] 1. Support frame;

[0044] 11. Mounting plate support; 12. Vertical support;

[0045] 2. Loading platform;

[0046] 21. Mounting plate;

[0047] 211, support plate; 212, RFID reader; 213, detection unit; 214, positioning pin;

[0048] 22. Clamping device;

[0049] 221, first cylinder; 222, buckle member;

[0050] 3. Door opening and closing lifting mechanism;

[0051] 31. Second cylinder; 32. Lifting door; 33. Guide rail; 34. Anti-pinch protection mechanism; 35. Install back plate;

[0052] 341, movable plate; 342, connecting rod; 343, travel switch; 344, buffer; 345, detection device;

[0053] 4. Wheel set. DETAILED DESCRIPTION

[0054] The following specific embodiments illustrate the implementation of the present invention, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. Although the description of the present invention will be introduced in conjunction with the preferred embodiment, this does not mean that the features of this invention are limited to this implementation. On the contrary, the purpose of introducing the invention in conjunction with the implementation is to cover other options or modifications that may extend based on the claims of the present invention. In order to provide a deep understanding of the present invention, the following description will include many specific details. The present invention can also be implemented without using these details. In addition, in order to avoid confusion or blurring the focus of the present invention, some specific details will be omitted in the description. It should be noted that the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict.

[0055] It should be noted that in this specification, similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0056] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0057] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0058] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0059] In order to make the objectives, technical solutions and advantages of the present invention more clear, the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

[0060] See also Figure 1 and Figure 2 , Figure 1 A front elevation view of a cylinder-driven wafer box loading device provided by an embodiment of the present invention; Figure 2 A rear elevation view of a cylinder-driven wafer box loading device provided in an embodiment of the present invention.

[0061] like Figure 1 and Figure 2As shown, a cylinder-driven wafer box loading device comprises a support frame 1: the support frame 1 is provided with a loading platform 2 and a door opening and closing lifting mechanism 3;

[0062] The loading platform 2 includes a mounting plate 21 and a clamping device 22 driven by a first cylinder 221. The mounting plate 21 is arranged on the support frame 1 for receiving the wafer box, and the clamping device 22 is arranged below the mounting plate 21 for fixing the wafer box.

[0063] The door opening and closing lifting mechanism 3 is arranged perpendicularly to the loading platform 2 and is located in the unloading direction of the loading platform 2;

[0064] The door lifting mechanism 3 includes a mounting back plate 35 and a lifting door 32 movably arranged on the mounting back plate 35 in a vertical direction. The mounting back plate 35 is provided with an entrance and an exit and a second cylinder 31 for driving the lifting door, and the lifting door 32 can cover the entrance and exit.

[0065] The lifting door 32 is equipped with an anti-pinch protection mechanism 34, which includes a movable plate 341 and a travel switch 343 for controlling the second cylinder 31. The movable plate 341 is movably arranged at the lower edge of the lifting door 32 through a connecting rod 342, and the travel switch 343 is fixedly arranged at the edge of the lifting door 32 and located above the movable plate 341; the lifting of the movable plate 341 will trigger the travel switch 343.

[0066] Due to the high cost and complex structure of the servo motor, this device provides a wafer box loading device driven by a cylinder. Due to the low control accuracy of the cylinder, it may cause damage to personnel or equipment during operation. Therefore, an anti-pinch protection mechanism 34 is set under the lifting door. When a foreign object is encountered, the lifting door 32 automatically stops. The first cylinder and the second cylinder are controlled by a control machine, which saves the cost of the device. When the lifting door is raised, the clamping device can unlock the wafer box, and when the lifting door is lowered, the clamping device fixes the wafer box. This device installs the driving device of the lifting door 32 on the upper mounting backplate 35, which saves space at the bottom of the device, optimizes the structure, and makes the bottom volume smaller.

[0067] During operation, the wafer box is placed on the mounting plate 21, and the first cylinder 221 drives the clamping device 22 to operate and fix the wafer box. When the wafer box needs to be taken out, the second cylinder 31 operates to drive the lifting door 32 to rise, and the entrance and exit are opened. The first cylinder 221 drives the clamping device 22 to operate, unlocks the wafer box, and the robot arm takes out the wafer box from the entrance and exit. The second cylinder 31 drives the lifting door 32 to descend. If an obstacle is encountered during the descent, the movable plate 341 rises and triggers the travel switch 343. At this time, the second cylinder 31 stops running to achieve the anti-pinch function.

[0068] In one embodiment, the support frame 1 is arranged in an "L" shape, including a vertical support portion 12 and a mounting plate support portion 11; the vertical support portion 12 is arranged on one side of the mounting plate support portion 11, and an escape space is formed below the mounting plate support portion 11; the mounting back plate 35 is correspondingly arranged above the vertical support portion 12 by bolts.

[0069] In one embodiment, the support frame 1 is formed by welding steel materials, and reinforcing ribs are arranged inside the support frame 1, so that the support frame 1 has a stronger load-bearing capacity and a lighter weight.

[0070] In one usage scenario, the wafer box can be transported to the loading platform 2 by a transport device or manually, the mounting plate 21 on the loading platform 2 locks the wafer box, and then the wafer box is transferred to other usage scenarios, such as a storage warehouse, a processing workshop, etc., through the transport robot arm on the other side of the door opening and closing lifting mechanism 3.

[0071] During the process of transporting the goods to the loading platform 2 by the transport device or manually, the avoidance space formed under the mounting plate support portion 11 can avoid collision with the transport personnel or the moving mechanism of the transport device, thereby ensuring flexibility and safety during the transport process and preventing the transport personnel or the transport device from interfering with the loading platform 2 during the transport process.

[0072] In one embodiment, an inspection port is provided below the mounting plate support portion 11, so that when a problem occurs with the device, maintenance personnel can inspect the interior of the entire device in the avoidance space.

[0073] In one embodiment, the mounting plate support portion 11 has two layers, the upper layer is equipped with a mounting plate 21, and the lower layer is equipped with a clamping device 22. A material taking space for convenient unloading is provided between the mounting plate 21 and the clamping device 22. The material taking space is connected to the entrance and exit, and the lifting door 32 can cover the material taking space.

[0074] When working, the robotic arm that takes the wafer box can extend into the material taking space, lift it upward, and then take the wafer box out through the entrance and exit. This can be applied to most robotic arms.

[0075] See also Figure 3 , Figure 3 This is a vertical view of a mounting plate 21 in a cylinder-driven wafer box loading device provided in an embodiment of the present invention.

[0076] In one embodiment, the support plate 211 is also provided with waist holes and top screw holes, and the top screw holes are arranged at the four corners of the support plate 211 .

[0077] By using the above technical solution, after the equipment is installed, the horizontal position of the support plate 211 can be adjusted by selecting different waist holes for installation, and the horizontal angle of the support plate can be adjusted by screwing screws into the top screw holes around it, so as to fine-tune the structure and eliminate the influence caused by the processing or assembly errors of the equipment.

[0078] like Figure 3 As shown, in one embodiment, a support plate 211 is disposed on the mounting plate 21 , and an RFID reader 212 , a detection unit 213 and a positioning pin 214 are mounted on the support plate 211 ; the support plate 211 is disposed on the upper surface of the support frame 1 .

[0079] The detection unit 213 can detect the presence of a wafer box, the positioning pin 214 realizes the positioning of the wafer box so that the wafer box can be placed in an accurate position, and the RFID can read the wafer box data. When the wafer box is placed on the mounting plate 21, the detection unit 213 will send a signal to operate the clamping device to fix the wafer box.

[0080] In one embodiment, the support plate 211 is set in a "U" shape, which can stably accommodate the wafer box, and the space reserved in the center allows the clamping device 22 to fix the wafer box from below. The space reserved in the center can also be used to take the support plate 211 and install it on the mounting plate 21 by bolts. The mounting plate 21 is fixed to the mounting plate support portion 11 by bolts or welding.

[0081] In one embodiment, a cushion layer is disposed on the upper surface of the support plate 211 , and the cushion layer can cushion and protect the wafer box when the wafer box falls.

[0082] See also Figure 4 , Figure 4 This is a vertical view of a clamping device 22 in a cylinder-driven wafer box loading device provided in an embodiment of the present invention.

[0083] like Figure 4 As shown, in one embodiment, the clamping device 22 includes a pressing member 222 and a first cylinder 221, the pressing member 222 and the first cylinder 221 are arranged on the mounting plate support portion 11, the length of the pressing member 222 matches the distance between the clamping device 22 and the support plate 211, the pressing member 222 includes a rotating shaft, and the first cylinder 221 drives the pressing member 222 to rotate around the rotating shaft;

[0084] A hook is provided at one end of the pressing member 222, and the shape of the hook is set corresponding to the shape of the lower part of the wafer box. When the end of the pressing member 222 with the hook rotates upward, the hook will hook the wafer box, and the other end of the pressing member 222 is connected to the output end of the first cylinder 221. When the first cylinder 221 is pushed forward, the pressing member 222 rotates around the rotation axis and locks the wafer box. When the first cylinder 221 is pulled back, the pressing member 222 rotates in the opposite direction around the rotation axis, and the pressing member 222 moves away from the wafer box to unlock.

[0085] When the wafer box is placed, the pressing member 222 locks the wafer box, and when it needs to be taken out, the pressing member 222 is unlocked, and the locking and unlocking methods are quick.

[0086] In one embodiment, a support block is provided at the end of the rotation of the buckle 222, which can prevent the buckle 222 from being misplaced and can also provide buffering at the end of the movement of the buckle 222. The support block can be a rubber block or a sponge block or other elastic material.

[0087] See also Figure 5 and Figure 6 , Figure 5 This is a rear elevation view of a door opening and closing lifting mechanism 3 in a cylinder-driven wafer box loading device provided in an embodiment of the present invention, Figure 6 A front elevation view of a door opening and closing lifting mechanism 3 in a cylinder-driven wafer box loading device provided in an embodiment of the present invention;

[0088] like Figure 5 and Figure 6 As shown, in one embodiment, the second cylinder 31 is fixedly mounted on the mounting back plate 35, a guide rail 33 is vertically arranged on the mounting back plate 35, a slider is fixed on the lifting door 32, and the lifting door 32 is mounted in the guide rail 33 through the slider. When working, the second cylinder 31 drives the lifting door 32 to slide up and down along the guide rail 33.

[0089] In one embodiment, the slider may be a pulley, and a plurality of pulleys are fixed on the left and right sides of the lifting door 32 . The pulleys slide along the guide rail 33 , thereby reducing the friction between the lifting door 32 and the guide rail 33 .

[0090] The mounting back plate 35 is provided with a buffer 344 and a detection device 345. When the lifting door 32 reaches the top, the detection device 345 is triggered, and the second cylinder 31 stops running. Since the cylinder control precision is low, in order to prevent the lifting door 32 from colliding when it rises to the end, a buffer 344 is provided at the highest point where the lifting door 32 rises to protect the lifting door 32. The buffer 344 can be a rubber block or a sponge block or other elastic material.

[0091] Using the above technical solution, the lifting door 32 slides up and down along the guide rail 33. When the lifting door 32 reaches the uppermost position, the detection device 345 will be triggered and the second cylinder 31 will stop moving.

[0092] In one embodiment, the guide rails 33 are located on both sides of the lifting door 32, and the guide rails 33 allow the left and right side edges of the lifting door 32 to slide along the vertical direction, and the guide rails 33 fit the left and right side edges of the lifting door 32, so that the lifting door 32 slides smoothly.

[0093] In one embodiment, two connecting rods 342 are vertically arranged and evenly distributed on the movable plate 341. The lower end of the connecting rod 342 is fixedly connected to the movable plate 341, and the upper end passes through the lower end of the lifting door 32. The upper end of the connecting rod 342 is provided with a fastening bolt, so that the movable plate 341 can move up and down within a certain range.

[0094] During operation, the movable plate 341 will move away from the lifting door 32 under the action of gravity, and the fastening bolts at the upper end of the connecting rod 342 will be stuck on the lifting door 32 to prevent the movable plate 341 from falling off. When the movable plate 341 is blocked, the movable plate 341 moves upward to trigger the travel switch 343.

[0095] In other alternative embodiments, multiple short ropes are used to connect the movable plate and the lifting door 32. The multiple short ropes are evenly distributed on the lifting door 32. One end of the short rope is fixedly connected to the lifting door 32, and the other end is fixedly connected to the movable plate, so that the movable plate 341 can move up and down within a certain range.

[0096] In one embodiment, a detachable wheel set 4 is installed at the lower end of the support frame 1, and the wheel set 4 is fixed on the bracket. The wafer box loading device is placed on the bracket, and the wafer box loading device can be pushed to the installation position, and then the bracket can be removed to save space. After the wheel set 4 is removed, it can be placed in the avoidance space for easy access next time.

[0097] Wafer box placement process:

[0098] The wafer box is placed on the support plate 211 under the positioning of the positioning pin 214, and the first cylinder 221 drives the fastener 222 to rotate, and the fastener 222 hooks the bottom of the wafer box to lock the wafer box; when the system receives the instruction to take the wafer box, the first cylinder 221 drives the fastener 222 to rotate, and the fastener 222 releases the fixation of the wafer box. At the same time, the second air rod 31 drives the lifting door 32 to rise, the entrance and exit open, and the robotic arm extends in and takes out the wafer box.

[0099] Wafer box removal process:

[0100] The second cylinder 31 drives the lifting door 32 to rise, and the robot arm places the wafer box on the support plate 211. The second cylinder 31 drives the lifting door 32 to descend, and at the same time, the first cylinder 221 drives the fastener 222 to rotate, and the fastener 222 locks the wafer box; when executing the instruction to take the wafer box, the first cylinder 221 runs, and the fastener 222 releases the lock on the wafer box, and the worker or machine can directly move the wafer box back.

[0101] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A cylinder-driven wafer box loading device, comprising a support frame, characterized in that: The support frame is provided with a loading platform and a door opening and closing lifting mechanism; The loading platform includes a mounting plate and a clamping device driven by a first cylinder, wherein the mounting plate is arranged on the supporting frame for receiving the wafer box, and the clamping device is arranged below the mounting plate for fixing the wafer box; The door opening and closing lifting mechanism is arranged perpendicularly to the loading platform and is located in the unloading direction of the loading platform; The door lifting mechanism includes a mounting back plate and a lifting door movably arranged on the mounting back plate in a vertical direction. The mounting back plate is provided with an entrance and an exit and a second cylinder for driving the lifting door, and the lifting door can cover the entrance and exit.

2. A cylinder-driven wafer box loading device as claimed in claim 1, characterized in that: The lifting door is equipped with an anti-pinch protection mechanism, which includes a movable plate and a travel switch that controls the second cylinder. The movable plate is movably arranged at the lower edge of the lifting door through a connecting rod, and the travel switch is fixedly arranged at the edge of the lifting door and is located above the movable plate; the rise of the movable plate will trigger the travel switch.

3. A cylinder-driven wafer box loading device as claimed in claim 1, characterized in that: The support frame is arranged in an "L" shape, and includes a vertical support portion and a mounting plate support portion; the vertical support portion is arranged on one side of the mounting plate support portion, and forms an escape space below the mounting plate support portion; The mounting back plate is correspondingly arranged above the vertical supporting portion.

4. The cylinder-driven wafer box loading device according to claim 1, characterized in that: A material taking space for convenient material unloading is arranged between the mounting plate and the clamping device, the material taking space is communicated with the entrance and exit, and the lifting door can cover the material taking space.

5. The cylinder-driven wafer box loading device according to claim 1, characterized in that: A support plate is installed on the mounting plate, an RFID reading and detecting unit and a positioning pin are arranged on the support plate, and the support plate is arranged on the upper surface of the supporting frame.

6. The cylinder-driven wafer box loading device according to claim 1, characterized in that: The clamping device includes a fastener and a first cylinder, the fastener includes a rotating shaft, the first cylinder drives the fastener to rotate around the rotating shaft, so that the fastener fixes and unlocks the wafer box by rotation, and the fastener and the first cylinder are arranged on the mounting plate support part.

7. The cylinder-driven wafer box loading device according to claim 1, characterized in that: The mounting back plate is provided with a guide rail along the vertical direction, and the lifting door is movably arranged on the guide rail; The mounting back plate is also provided with a second cylinder, a buffer and a detection device.

8. The cylinder-driven wafer box loading device according to claim 2, characterized in that: The connecting rod is vertically arranged, the lower end of the connecting rod is fixedly connected to the movable plate, the upper end of the connecting rod passes through the lower end of the lifting door, and a stopper is arranged at the upper end of the connecting rod, so that the movable plate can move up and down within a certain range.

9. The cylinder-driven wafer box loading device according to claim 1, characterized in that: A detachable wheel set is installed on the supporting frame.

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