Cargo loading table and testing machine table

Abstract

The utility model provides a cargo loading table and a testing machine table. The cargo loading table comprises a loading table body, a front cover, a locking device and a supporting device, one end of the front cover is connected with the loading table body to form a rotating shaft, and the front cover can rotate around the rotating shaft to open or close the cargo loading table; the locking device is arranged on the front cover and the loading table body and is used for locking when the front cover and the loading table body are mutually clamped; the supporting device is arranged at the end, away from the rotating shaft, of the front cover and used for supporting the front cover to reduce deformation of the front cover in the process of opening or closing the cargo loading table. According to the configuration, the supporting device is arranged at the end, away from the rotating shaft, of the front cover, the situation that the front cover is prone to deformation due to gravity in the practical process of frequent opening and closing is reduced, and the service life of the front cover is prolonged.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor production, in particular to a cargo loading platform and a testing machine. Background Art

[0002] The front cover of the existing WAT (wafer acceptable test) cargo loading station is connected to the cargo loading station body by a hinge on only one side (such as Figure 1 As shown in the figure, the front cover is easily deformed by gravity and tilted downward during frequent opening and closing. After the front cover is deformed, it must be manually lifted up when closing the front cover, otherwise the door lock device at the tilted position will hit the sensor, causing damage to the door lock device and the sensor. Utility Model Content

[0003] The utility model aims to provide a cargo loading platform and a testing machine to solve the problem that the front cover of the cargo loading platform is deformed or tilted downward during frequent opening and closing, thereby affecting closing and causing damage to the door lock device and the sensor.

[0004] In order to achieve the above-mentioned purpose, the utility model provides a cargo loading platform, including: a loading platform body, a front cover, a locking device and a supporting device;

[0005] One end of the front cover is connected to the loading platform body to form a rotation axis, and the front cover can rotate around the rotation axis to open or close the cargo loading platform;

[0006] The locking device is arranged on the front cover and the loading platform body, and is used to lock the front cover and the loading platform body when they are engaged with each other;

[0007] The supporting device is arranged at one end of the front cover away from the rotating shaft, and is used for supporting the front cover to reduce deformation of the front cover during the process of opening or closing the cargo loading platform.

[0008] Optionally, the supporting device includes a supporting rod, which is arranged in a direction parallel to the rotation axis, and the length of the supporting rod in the direction parallel to the rotation axis is adapted to the length of the front cover in the direction parallel to the rotation axis.

[0009] Optionally, the supporting device further includes a universal wheel, which is disposed at the bottom of the front cover and can move along the rotation direction of the front cover to support the front cover.

[0010] Optionally, the universal wheel is coaxially arranged with the support rod.

[0011] Optionally, the locking device includes a latch and a driving member, both of which are arranged on the front cover, and the latch is arranged on the surface of the front cover close to the loading platform body, and the driving member is arranged on the surface of the front cover away from the loading platform body, and the driving member is used to drive the latch to engage with the loading platform body during the process of closing the cargo loading platform.

[0012] Optionally, the locking device also includes a sensor, which is arranged on the loading platform body, and the sensor is used to collect position information of the latch when closing the cargo loading platform; and when the latch is in the target position, confirm that the cargo loading platform is closed.

[0013] Optionally, the target position includes: a position when the latch is engaged with the loading platform body.

[0014] Optionally, one end of the front cover is hinged to the loading platform body.

[0015] Optionally, the cargo loading platform further includes a plurality of supporting feet, and the plurality of supporting feet are evenly distributed on the bottom surface of the loading platform body.

[0016] In order to achieve the above object, the utility model also provides a testing machine, comprising: a testing device and the cargo loading platform as described above;

[0017] The cargo loading platform is used to store wafers, and the testing device is connected to the cargo loading platform and is used to test the wafers.

[0018] Compared with the existing cargo loading platform, the cargo loading platform provided by the present application has the following advantages:

[0019] By arranging a supporting device at the end of the front cover away from the rotating shaft, the deformation of the front cover caused by gravity during the frequent opening and closing process is reduced, thereby improving the service life of the front cover; the supporting device includes a supporting rod and a universal wheel, wherein the supporting rod is arranged in a direction parallel to the rotating shaft, and supports the front cover during the opening or closing process of the front cover, thereby further reducing the deformation of the front cover during use; the universal wheel is located at the bottom of the front cover and can move along the moving direction of the front cover, providing an upward supporting force to the front cover during the movement, and also making the front cover smoother during the opening or closing process, thereby improving the service life of the front cover and the practical performance of the cargo loading platform. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A schematic diagram of an existing cargo loading platform;

[0021] Figure 2This is a schematic structural diagram of a cargo loading platform proposed in an embodiment of the utility model.

[0022] The description of each reference numeral is as follows:

[0023] 1- loading platform body; 2- front cover; 3- rotating shaft;

[0024] 4-locking device; 41-bolt; 42-sensor;

[0025] 5-support device; 51-support rod; 52-universal wheel;

[0026] 6-Supporting foot; 7-Hinge. DETAILED DESCRIPTION

[0027] In order to make the purpose, advantages and features of the utility model clearer, the utility model is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and are not drawn to scale, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the utility model. In addition, the structure shown in the drawings is often a part of the actual structure. In particular, the emphasis of each drawing is different, and sometimes different scales are used.

[0028] As used in this specification, the singular forms "a", "an" and "the" include plural objects, the term "or" is generally used to include the meaning of "and / or", the term "several" is generally used to include the meaning of "at least one", and the term "at least two" is generally used to include the meaning of "two or more". In addition, the terms "first", "second" and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first", "second" and "third" may explicitly or implicitly include one or at least two of the features, "one end" and "the other end" and "the proximal end" and "the distal end" generally refer to two corresponding parts, which include not only the endpoints, and the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral body; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. In addition, as used in this specification, an element disposed on another element generally only indicates that there is a connection, coupling, cooperation or transmission relationship between the two elements, and the connection, coupling, cooperation or transmission between the two elements may be direct or indirect through an intermediate element, and it cannot be understood as indicating or implying the spatial position relationship between the two elements, that is, one element may be in any orientation such as inside, outside, above, below or on one side of another element, unless the content clearly indicates otherwise. The terms "upper", "lower", "top" and "bottom" are generally relative position relationships arranged in the direction of gravity; the terms "vertical, vertical direction" generally refer to the direction of gravity, which is generally perpendicular to the ground, and "horizontal, horizontal plane direction" generally refers to the direction parallel to the ground; for ordinary technicians in this field, the specific meanings of the above terms in this specification can be understood according to specific circumstances.

[0029] The utility model aims to provide a cargo loading platform and a testing machine to solve the problem that the front cover of the cargo loading platform is deformed or tilted downward during frequent opening and closing, thereby affecting closing and causing damage to the door lock device and the sensor.

[0030] The following description is given with reference to the accompanying drawings.

[0031] Please refer to Figure 1 As can be understood by those skilled in the art, the front cover of the existing WAT (wafer acceptable test) cargo loading platform is connected to the cargo loading platform body by a hinge on only one side (e.g. Figure 1As shown in the figure, the front cover is easily deformed and tilted downward due to the influence of gravity during frequent opening and closing. After the front cover is deformed, it must be manually lifted up when closing the front cover, otherwise the door lock device located at the tilted position will hit the sensor, causing damage to the door lock device and the sensor. Based on this, the present application provides a cargo loading platform and a test machine, which support the force of the front cover during the rotation process by adding a support device, thereby reducing the force deformation of the front cover.

[0032] Please refer to Figure 2 The utility model provides a cargo loading platform, including: a loading platform body 1, a front cover 2, a locking device 4 and a supporting device 5; one end of the front cover 2 is connected to the loading platform body 1 to form a rotating shaft 3, and the front cover 2 can rotate around the rotating shaft 3 to realize the opening or closing of the cargo loading platform; the locking device 4 is arranged on the front cover 2 and the loading platform body 1, and is used to lock when the front cover 2 and the loading platform body 1 are engaged with each other; the supporting device 5 is arranged at one end of the front cover 2 away from the rotating shaft 3, and is used to support the front cover 2 to reduce the deformation of the front cover 2 during the process of opening or closing the cargo loading platform. It should be noted that in Figure 2 In the illustrated example, the cargo loading platform is a rectangular component, the front cover 2 is one surface of the cargo loading platform, one end of the front cover 2 is connected to the loading platform body 1 by a hinge 7, and the other end is a free end, which can rotate around the rotation axis 3 and drive the other end of the front cover 2 to rotate. When the other end of the front cover 2 is engaged with the loading platform body 1, the interior of the cargo loading platform is a closed space; when the other end of the front cover 2 is separated from the loading platform body 1, the interior of the cargo loading platform is an open space. In other embodiments, the cargo loading platform can also be a component of other shapes, such as a cylinder, a prism, etc., and those skilled in the art can configure this according to actual conditions. In this embodiment, a support device 5 is provided at one end of the front cover 2 away from the rotation axis 3 to support the front cover 2 during the process of opening or closing the cargo loading platform, thereby reducing the deformation of the front cover 2 caused by gravity during frequent opening and closing, and improving the service life of the front cover 2.

[0033] Furthermore, the support device 5 includes a support rod 51, which is arranged in a direction parallel to the rotation axis 3, and the length of the support rod 51 in a direction parallel to the rotation axis 3 is adapted to the length of the front cover 2 in a direction parallel to the rotation axis 3. It should be noted that the support rod 51 is a metal rod with a certain strength, and the support rod 51 is arranged in a direction parallel to the rotation axis 3, and the length of the support rod 51 is adapted to the size of the front cover 2, so that the two ends of the support rod 51 are respectively against the upper end and the lower end of the front cover 2, which plays a supporting role on the front cover 2, thereby reducing the deformation of the front cover 2 caused by the force during the opening or closing process.

[0034] Furthermore, the supporting device 5 further includes a universal wheel 52, which is disposed at the bottom of the front cover 2 and can move along the rotation direction of the front cover 2 to support the front cover 2. It should be noted that the universal wheel 52 is disposed at the bottom of the front cover 2 and can move along the rotation direction of the front cover 2. When the front cover 2 is opened or closed, the universal wheel 52 rolls on the ground and provides an upward support force to the front cover 2, which not only improves the service life of the front cover 2, but also makes the front cover 2 smoother during the opening or closing process, thereby improving the practical performance of the cargo loading platform.

[0035] As an optional embodiment, the universal wheel 52 is coaxially arranged with the support rod 51. Figure 2 In the illustrated example, the universal wheel 52 is disposed at one end of the support rod 51, and the universal wheel 52 and the support rod 51 are disposed along the same axis. With this configuration, the upward supporting force provided by the universal wheel 52 is coaxial with the support rod 51, further enhancing the supporting effect of the universal wheel 52 and the support rod 51, and reducing or even avoiding the force deformation of the front cover 2 during the rotation process.

[0036] Please continue to refer to Figure 2 In an optional embodiment, the locking device 4 includes a latch 41 and a driving member (not shown in the figure), the latch 41 and the driving member are both arranged on the front cover 2, and the latch 41 is arranged on the surface of the front cover 2 close to the loading platform body 1, and the driving member is arranged on the surface of the front cover 2 away from the loading platform body 1, and the driving member is used to drive the latch 41 to engage with the loading platform body 1 during the process of closing the cargo loading platform. It can be understood by those skilled in the art that the latch 41 can be a long strip of metal component, which can engage with the inner wall of the loading platform body 1 during the process of closing the cargo loading platform. As an alternative embodiment, the driving member can be a driving knob, and the operator can drive the latch 41 to rotate by turning the driving knob, so that the latch 41 engages with the inner wall of the loading platform body 1; in another optional embodiment, the driving member can be a driving knob, and the operator can drive the latch 41 to extend and retract by turning the driving knob, so that the latch 41 abuts against the inner wall of the loading platform body 1, thereby achieving engagement. Those skilled in the art may configure the locking device 4 according to actual conditions, and this embodiment is not limited thereto.

[0037] Furthermore, the locking device 4 also includes a sensor 42, which is arranged on the loading platform body 1. The sensor 42 is used to collect the position information of the latch 41 when closing the cargo loading platform; and confirm that the cargo loading platform is closed when the latch 41 is in the target position. It can be understood by those skilled in the art that the sensor 42 can be a position sensor, specifically a Keyence LJ-X8000 series sensor 42, which can collect the position information of the latch 41, and when the latch 41 is in the target position, send information to the operator to confirm that the cargo loading platform is closed. It can be connected to a mobile host or a software program such as an APP to achieve data transmission. The specific structure and use principle of the position sensor can be referred to the prior art, and this application will not go into details.

[0038] Furthermore, the target position includes: the position when the latch 41 is engaged with the loading platform body 1. In an alternative embodiment, a groove or a latch hole may be provided on the inner wall of the loading platform body 1, and when the driving member drives the latch 41 to rotate to the groove, or when the driving member drives the latch 41 to extend into the latch hole, the sensor 42 confirms that the latch 41 is in the target position and sends a message to the operator confirming that the cargo loading platform is closed.

[0039] As an optional embodiment, the cargo loading platform further includes a plurality of supporting feet 6, and the plurality of supporting feet 6 are evenly distributed on the bottom surface of the loading platform body 1. Figure 2 In the illustrated example, the loading table body 1 is a rectangular parallelepiped component, and therefore, the bottom surface of the loading table body 1 is a rectangular surface, and four supporting feet 6 are provided, which are respectively located at the four vertices of the rectangular surface; in other embodiments, the loading table body 1 may also be a cylindrical component or a component of other shapes. In this case, the number of supporting feet 6 may also be other reasonable numbers, which may be evenly distributed along the circumference of the bottom surface of the loading table body 1, or may be distributed irregularly. However, what needs to be satisfied is that the loading table body 1 needs to be flatly set on the ground or other foundation under the support of the supporting feet 6, and technical personnel in this field may reasonably configure the supporting feet 6 according to actual conditions.

[0040] In another embodiment, the utility model also provides a test machine, including: a test device (not shown in the figure) and a cargo loading platform as above; the cargo loading platform is used to store wafers, and the test device is connected to the cargo loading platform for testing the wafers. It should be noted that the test device can be a WAT ​​tester, and the cargo loading platform is used to store wafers. The wafers can be transferred to the cargo loading platform by a mechanical arm or a conveyor belt, or they can be transported to the cargo loading platform by other means. It can be understood by those skilled in the art that this embodiment only takes the WAT test machine as an example, and does not mean that the cargo loading platform provided in this application can only be used in the WAT test scenario. As long as the cargo loading platform is required to carry wafers, it can be used, and this application is not limited to this.

[0041] In summary, in the cargo loading platform and testing machine provided in the embodiments of the utility model, the cargo loading platform includes: a loading platform body, a front cover, a locking device and a supporting device; one end of the front cover is connected to the loading platform body to form a rotating shaft, and the front cover rotates around the rotating shaft to realize the opening or closing of the cargo loading platform; the locking device is arranged on the front cover and the loading platform body, and is used to lock when the front cover and the loading platform body are engaged with each other; the supporting device is arranged at one end of the front cover away from the rotating shaft, and is used to support the front cover to reduce deformation of the front cover during the process of opening or closing the cargo loading platform.

[0042] With such a configuration, by arranging a supporting device at the end of the front cover away from the rotating axis, the deformation of the front cover caused by gravity during the practical process of frequent opening and closing is reduced, thereby improving the service life of the front cover; the supporting device includes a support rod and a universal wheel, wherein the support rod is arranged in a direction parallel to the rotating axis, and supports the front cover during the opening or closing of the front cover, thereby further reducing the deformation of the front cover during use; the universal wheel is located at the bottom of the front cover and can move along the moving direction of the front cover, providing an upward supporting force to the front cover during the movement, and also making the front cover smoother during the opening or closing process, thereby improving the service life of the front cover and the practical performance of the cargo loading platform.

[0043] The above description is only a description of the preferred embodiment of the utility model, and is not any limitation on the scope of the utility model. Any changes and modifications made by ordinary technicians in the field of the utility model based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. A cargo loading platform, characterized in that: include: Loading station body, front cover, locking device and supporting device; One end of the front cover is connected to the loading platform body to form a rotation axis, and the front cover can rotate around the rotation axis to open or close the cargo loading platform; The locking device is arranged on the front cover and the loading platform body, and is used to lock the front cover and the loading platform body when they are engaged with each other; The supporting device is arranged at one end of the front cover away from the rotating shaft, and is used for supporting the front cover to reduce deformation of the front cover during the process of opening or closing the cargo loading platform.

2. The cargo loading platform according to claim 1, characterized in that: The supporting device comprises a supporting rod, which is arranged in a direction parallel to the rotation axis, and the length of the supporting rod in the direction parallel to the rotation axis is matched with the length of the front cover in the direction parallel to the rotation axis.

3. The cargo loading platform according to claim 2, characterized in that: The supporting device further comprises a universal wheel, which is arranged at the bottom of the front cover and can move along the rotation direction of the front cover to support the front cover.

4. The cargo loading platform according to claim 3, characterized in that: The universal wheel is coaxially arranged with the support rod.

5. The cargo loading platform according to claim 1, characterized in that: The locking device includes a latch and a driving member, both of which are arranged on the front cover, and the latch is arranged on the surface of the front cover close to the loading platform body, and the driving member is arranged on the surface of the front cover away from the loading platform body, and the driving member is used to drive the latch to engage with the loading platform body during the process of closing the cargo loading platform.

6. The cargo loading platform according to claim 5, characterized in that: The locking device also includes a sensor, which is arranged on the loading platform body. The sensor is used to collect position information of the latch when closing the cargo loading platform, and confirm that the cargo loading platform is closed when the latch is in the target position.

7. The cargo loading platform according to claim 6, characterized in that: The target position includes: a position when the latch is engaged with the loading platform body.

8. The cargo loading platform according to claim 1, characterized in that: One end of the front cover is hinged to the loading platform body.

9. The cargo loading platform according to claim 1, characterized in that: The cargo loading platform further comprises a plurality of supporting feet, and the plurality of supporting feet are evenly distributed on the bottom surface of the loading platform body.

10. A testing machine, characterized in that: include: A testing device and a cargo loading platform as claimed in any one of claims 1 to 9; The cargo loading platform is used to store wafers, and the testing device is connected to the cargo loading platform and is used to test the wafers.

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