Polishing jig for temperature sensing probe

Abstract

The utility model provides a polishing jig for a temperature sensing probe. The polishing jig comprises a positioning disc and a fixing part. The positioning disc comprises an upper surface and a lower surface which are parallel to each other, a second through hole is formed in the positioning disc, and the second through hole penetrates through the upper surface and the lower surface of the positioning disc; the shapes and the areas of the cross sections of the second through hole and the first through hole are the same, and the second through hole and the first through hole are coaxially arranged; and the fixing part is arranged on the positioning disc and is used for fixing the positioning disc on the reflecting plate. When the temperature sensing probe needs to be polished, the temperature probe does not need to be disassembled, the positioning disc can be directly placed on the reflecting plate, then the grinding head is inserted into the second through hole, the grinding head cannot abrade the upper surface of the reflecting plate when polishing the temperature sensing probe, the efficiency of polishing the temperature sensing probe can be obviously improved, and the workload of operators is reduced; after the temperature sensing probe is polished, the sealing ring does not need to be replaced or a leakage test does not need to be carried out, the efficiency of polishing the temperature sensing probe is further improved, and the production cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a grinding jig for a temperature sensing probe. Background Art

[0002] In the semiconductor manufacturing process, film forming equipment is required to process the wafer in order to form a thin film on the wafer. Figure 1 to Figure 4 As shown, the film forming equipment includes a radiance chamber (radiance chamber), in which a reflector 1 (reflector) and a plurality of temperature probes 2 (probes) for monitoring temperature are arranged; a plurality of first through holes 101 are arranged on the reflector 1, and a temperature sensing probe 201 made of sapphire is arranged at the head of the temperature probe 2, the temperature sensing probe 201 and the first through hole 101 correspond one to one, each temperature sensing probe 201 passes through the corresponding first through hole 101, and the upper surface of the temperature sensing probe 201 and the upper surface of the reflector 1 are located on the same plane; the temperature sensing probe 201 and the first through hole 101 have the same shape, and there is a clearance fit between the temperature sensing probe 201 and the first through hole 101, and the diameter of the temperature sensing probe 201 is slightly smaller than the diameter of the first through hole 101. After the temperature sensing probe 201 has been used for a period of time, a thin film will adhere to its surface, which will affect the temperature monitoring result of the temperature probe 2, so the temperature sensing probe 201 should be polished regularly; or, when the film of the wafer is abnormal, if it is found that there is a foreign object in the temperature sensing probe 201, the machine should be stopped and the temperature sensing probe 201 should be polished.

[0003] At present, the efficiency of grinding the temperature sensing probe 201 is low, and the sealing ring between the temperature sensing probe 201 and the first through hole 101 is consumed. The reasons are as follows: since the upper surface of the reflecting plate 1 is a smooth surface, the smooth surface cannot be worn. When the temperature sensing probe 201 needs to be polished, the corresponding temperature probe 2 must be removed, and then the temperature probe 2 is fixed, and then the temperature sensing probe 201 is cleaned with sandpaper; if the temperature probe 2 is close to the inner circle, the temperature probe 2 of the outer circle must be removed first before the temperature probe 2 of the inner circle can be removed, which takes a long time; after the temperature sensing probe 201 is cleaned, the temperature probe 2 must be reinstalled, and the sealing ring must be replaced, and finally a leakage test of the cavity must be performed. If the cavity does not leak, the film forming equipment can be used normally; if the cavity leaks, the temperature probe 2 and the sealing ring must be reinstalled, and then a leakage test of the cavity must be performed until the cavity does not leak. Utility Model Content

[0004] The utility model provides a grinding jig for a temperature sensing probe, which is used to solve the technical problems of low efficiency and consumption of sealing rings in grinding the temperature sensing probe.

[0005] In order to solve the above technical problems, the utility model provides a grinding jig for a temperature sensing probe, wherein the temperature sensing probe is arranged at the head of the temperature probe, the temperature sensing probe passes through a first through hole on a reflecting plate, the upper surface of the temperature sensing probe and the upper surface of the reflecting plate are located on the same plane, and the jig includes a positioning plate and a fixing component;

[0006] The positioning plate comprises an upper surface and a lower surface which are parallel to each other, and a second through hole is arranged on the positioning plate, and the second through hole penetrates the upper surface and the lower surface of the positioning plate; the second through hole and the first through hole have the same cross-sectional shape and area, and the second through hole and the first through hole are coaxially arranged;

[0007] The fixing component is disposed on the positioning plate, and the fixing component is used to fix the positioning plate on the reflecting plate.

[0008] Optionally, the second through holes are all cylindrical in shape.

[0009] Optionally, a plurality of the temperature probes and a plurality of the first through holes are provided on the reflecting plate, and the temperature sensing probes correspond to the first through holes one-to-one; a plurality of the second through holes are provided on the positioning plate, and the second through holes correspond to the first through holes one-to-one.

[0010] Optionally, the reflective plate and the positioning plate are both disc-shaped, and the diameter of the positioning plate is equal to the diameter of the reflective plate.

[0011] Optionally, the fixture further includes a handle, and the handle is disposed on the upper surface of the positioning plate.

[0012] Optionally, there are two handles, and the two handles are arranged at intervals on the upper surface of the positioning plate.

[0013] Optionally, a line connecting the two handles passes through the center of the upper surface of the positioning plate.

[0014] Optionally, a first positioning hole and a second positioning hole are provided on the reflective plate, and a first positioning pin and a second positioning pin are provided on the lower surface of the positioning plate, wherein the first positioning pin cooperates with the first positioning hole, and the second positioning pin cooperates with the second positioning hole.

[0015] Optionally, the number of the fixing components is more than two, and the more than two fixing components are arranged at intervals on the upper surface of the positioning plate; the fixing component includes a fixed arm and a rotating arm, one end of the fixed arm is fixed to the upper surface of the positioning plate, and the other end of the fixed arm is provided with a rotating shaft; one end of the rotating arm is rotatably connected to the other end of the fixed arm through the rotating shaft, and the other end of the rotating arm is provided with a slot for connecting the reflective plate.

[0016] Optionally, the two or more fixing components are evenly distributed along the circumference of the positioning plate.

[0017] The utility model provides a grinding jig for a temperature probe. When the temperature probe needs to be ground, the temperature probe does not need to be disassembled. The positioning plate can be directly placed on the reflective plate, the second through hole is aligned with the first through hole, and the positioning plate is fixed on the reflective plate with a fixing component. Then the grinding head is inserted into the second through hole. The grinding head will not wear the upper surface of the reflective plate when grinding the temperature probe. The unexpected effect is that the jig can significantly improve the efficiency of grinding the temperature probe and reduce the workload of the operator; and after grinding the temperature probe, the sealing ring does not need to be replaced, and no leakage test is required, which further improves the efficiency of grinding the temperature probe and reduces the production cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic top view of a reflector in the prior art.

[0019] Figure 2 It is a side view schematic diagram of a reflector in the prior art.

[0020] Figure 3 It is a side view schematic diagram of a temperature probe in the prior art.

[0021] Figure 4 The present invention is a side view schematic diagram of a temperature probe installed on a transmitting plate in the prior art.

[0022] Figure 5 The utility model is a top view schematic diagram of a grinding fixture for a temperature sensing probe provided in one embodiment.

[0023] Figure 6 The utility model is a side view schematic diagram of a grinding fixture for a temperature sensing probe provided in one embodiment.

[0024] Figure 7 The utility model is a side view schematic diagram of a grinding fixture of a temperature sensing probe provided by an embodiment of the present invention installed on a launching plate.

[0025] [Description of reference numerals is as follows]:

[0026] Reflector-1, temperature probe-2;

[0027] A first through hole 101, a first positioning hole 102, and a second positioning hole 103;

[0028] Temperature probe-201;

[0029] Positioning plate-11, fixing part-12, handle-13;

[0030] The second through hole 111, the first positioning pin 112, and the second positioning pin 113;

[0031] Fixed arm-121, rotating arm-122. DETAILED DESCRIPTION

[0032] In order to make the purpose, advantages and features of the present invention clearer, the following is a further detailed description of a temperature sensing probe grinding jig proposed by the present invention in conjunction with the accompanying drawings. It should be noted that the accompanying drawings are in a very simplified form and are not in precise proportions, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention.

[0033] In the description of the present invention, the terms "first", "second", etc. are added for the convenience of description and reference, and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined by the terms "first", "second", etc. may explicitly or implicitly include one or more of the features.

[0034] refer to Figure 4 to Figure 7 As shown, this embodiment provides a grinding jig for a temperature sensing probe 201, wherein the temperature sensing probe 201 is arranged at the head of the temperature probe 2, and the temperature sensing probe 201 passes through the first through hole 101 on the reflecting plate, and the upper surface of the temperature sensing probe 201 and the upper surface of the reflecting plate 1 are located on the same plane, and the jig includes a positioning plate 11 and a fixing component 12; the positioning plate 11 includes an upper surface and a lower surface parallel to each other, and a second through hole 111 is provided on the positioning plate 11, and the second through hole 111 passes through the upper surface and the lower surface of the positioning plate 11; the cross-sectional shape and area of ​​the second through hole 111 and the first through hole 101 are the same, and the second through hole 111 and the first through hole 101 are coaxially arranged; the fixing component 12 is arranged on the positioning plate 11, and the fixing component 12 is used to fix the positioning plate 11 on the reflecting plate 1.

[0035] This embodiment provides a grinding jig for the temperature probe 201. When the temperature probe 201 needs to be ground, the temperature probe 2 does not need to be disassembled. The positioning plate 11 can be directly placed on the reflective plate 1, the second through hole 111 is aligned with the first through hole 101, and the positioning plate is fixed on the reflective plate 1 with the fixing component 12. Then the grinding head is inserted into the second through hole, and the grinding head will not wear the upper surface of the reflective plate 1 when grinding the temperature probe 201. The unexpected effect is that the jig can significantly improve the efficiency of grinding the temperature probe 201 and reduce the workload of the operator; and after grinding the temperature probe 201, the sealing ring does not need to be replaced, and no leakage test is required, which further improves the efficiency of grinding the temperature probe 201 and reduces the production cost.

[0036] When grinding the temperature sensing probe 201, an electric grinder can be used for grinding. The strength of the electric grinder is adjustable, which can avoid poor grinding results due to differences in operator skills. The grinding head of the electric grinder can be made into a sanding ring using sandpaper. The cross-sections of the sanding ring, the temperature sensing probe 201, the first through hole, and the second through hole can have the same shape and area, so as to improve grinding efficiency.

[0037] Optional, such as Figure 5 and Figure 6 As shown in FIG. 1 , the second through holes 111 are all cylindrical in shape. Figure 4 As shown, the shapes of the temperature sensing probe 201 and the first through hole 101 are generally cylindrical. The second through hole 111 is designed to be cylindrical, so that the grinding head and the temperature sensing probe are fully in contact and the upper surface of the reflective plate 1 is prevented from being worn. In other embodiments, if the shapes of the temperature sensing probe 201 and the first through hole 101 are other shapes, the shape of the second through hole 111 can be adjusted according to the shapes of the temperature sensing probe 201 and the first through hole 101.

[0038] Optional, reference Figure 4 and Figure 7 As shown, the reflector 1 is provided with a plurality of the temperature probes 2 and a plurality of the first through holes 101, and the temperature probes 201 correspond to the first through holes 101 one by one; the positioning plate 11 is provided with a plurality of the second through holes 111, and the second through holes 111 correspond to the first through holes 101 one by one. Figure 7 As shown, a plurality of eight temperature probes 2 are mounted on the reflector 1, and correspondingly, the number of the second through holes 111 is also eight. When any temperature probe 201 needs to be polished, the operator can use the jig to polish the temperature probe 201 that needs to be polished.

[0039] Optional, such as Figure 5 and Figure 7 As shown, the reflector 1 and the positioning plate 11 are both in the shape of a disc, and the diameter of the positioning plate 11 is equal to the diameter of the reflector 1. The shape of the existing reflector 1 is usually disc-shaped, and the shape and diameter of the positioning plate 11 are the same as those of the reflector 1, so that the positioning plate 11 can be conveniently fixed on the reflector 1. In other embodiments, the shape of the positioning plate 11 can be different from that of the reflector 1.

[0040] Optional, such as Figure 5 and Figure 6 As shown, the fixture further includes a handle 13, and the handle 13 is disposed on the upper surface of the positioning plate 11. The handle 13 is provided so that the operator can move the positioning plate 11 through the handle 13 conveniently.

[0041] Optional, such as Figure 5 and Figure 6As shown, there are two handles 13 , and the two handles 13 are arranged at intervals on the upper surface of the positioning plate 11 , so that it is convenient for operators to move the positioning plate 11 through the two handles 13 .

[0042] Optional, such as Figure 5 As shown, the line between the two handles 13 passes through the center of the upper surface of the positioning plate 11 , which can prevent the positioning plate 11 from tilting when the positioning plate 11 is lifted by the handles 13 .

[0043] Optional, such as Figure 1 and Figure 6 As shown, the reflector 1 is provided with a first positioning hole 101 and a second positioning hole 102, and the lower surface of the positioning plate 11 is provided with a first positioning pin 112 and a second positioning pin 113, the first positioning pin 112 matches with the first positioning hole 101, and the second positioning pin 113 matches with the second positioning hole 102. The diameter of the first positioning pin 112 is slightly smaller than the diameter of the first positioning hole 101 and can be inserted into the first positioning hole 101, and the diameter of the second positioning pin 113 is slightly smaller than the diameter of the second positioning hole 102 and can be inserted into the second positioning hole 102. Through the positioning of the first positioning pin 112 and the second positioning pin 113, the positioning plate 11 can be prevented from moving relative to the reflector 1.

[0044] like Figure 6 and Figure 7 As shown, the number of the fixing parts 12 is more than two, and the more than two fixing parts 12 are arranged at intervals on the upper surface of the positioning plate; the fixing part 12 includes a fixing arm 121 and a rotating arm 122, one end of the fixing arm 121 is fixed on the upper surface of the positioning plate, and the other end of the fixing arm 121 is provided with a rotating shaft; one end of the rotating arm 122 is rotatably connected to the other end of the fixing arm 121 through the rotating shaft, and the other end of the rotating arm 122 is provided with a slot for connecting the reflector. Before placing the positioning plate 11 on the reflector 1, the rotating arm 122 can be opened; after placing the positioning plate 11 on the reflector 1, the rotating arm 122 is rotated downward so that the slot at the other end of the rotating arm 122 clamps the reflector 1 to prevent the positioning plate 11 from moving relative to the reflector 1. In other embodiments, the positioning plate 11 and the reflector 1 can be connected by components such as a clamp.

[0045] Optional, such as Figure 6 and Figure 7 As shown, the two or more fixing components 12 are evenly distributed along the circumference of the positioning plate 11, so that the force on the positioning plate 11 can be more even.

[0046] In summary, the utility model provides a grinding jig for the temperature probe 201. When the temperature probe 201 needs to be ground, the temperature probe 2 does not need to be disassembled. The positioning plate 11 can be directly placed on the reflective plate 1, the second through hole 111 is aligned with the first through hole 101, and the positioning plate is fixed on the reflective plate 1 with the fixing component 12. Then the grinding head is inserted into the second through hole, and the grinding head will not wear the upper surface of the reflective plate 1 when grinding the temperature probe 201. The unexpected effect is that the jig can significantly improve the efficiency of grinding the temperature probe 201 and reduce the workload of the operator; and after grinding the temperature probe 201, the sealing ring does not need to be replaced, and no leakage test is required, which further improves the efficiency of grinding the temperature probe 201 and reduces the production cost.

[0047] The above description is only a description of the preferred embodiment of the utility model, and is not any limitation to the scope of the utility model. Any changes and modifications made by ordinary technicians in this field based on the above disclosure are within the protection scope of the utility model.

Claims

1. A grinding jig for a temperature sensing probe, wherein the temperature sensing probe is arranged at the head of a temperature probe, the temperature sensing probe passes through a first through hole on a reflective plate, and the upper surface of the temperature sensing probe and the upper surface of the reflective plate are located on the same plane, characterized in that: The fixture includes a positioning plate and a fixing component; The positioning plate comprises an upper surface and a lower surface which are parallel to each other, and a second through hole is arranged on the positioning plate, and the second through hole penetrates the upper surface and the lower surface of the positioning plate; the second through hole and the first through hole have the same cross-sectional shape and area, and the second through hole and the first through hole are coaxially arranged; The fixing component is disposed on the positioning plate, and the fixing component is used to fix the positioning plate on the reflecting plate.

2. A grinding jig for a temperature sensing probe as claimed in claim 1, characterized in that: The second through holes are all cylindrical in shape.

3. A grinding jig for a temperature sensing probe as claimed in claim 1, characterized in that: The reflection plate is provided with a plurality of the temperature probes and a plurality of the first through holes, and the temperature sensing probes correspond to the first through holes one by one; the positioning plate is provided with a plurality of the second through holes, and the second through holes correspond to the first through holes one by one.

4. A grinding jig for a temperature sensing probe as claimed in claim 1, characterized in that: The reflection plate and the positioning plate are both in the shape of a circular disc, and the diameter of the positioning plate is equal to the diameter of the reflection plate.

5. A grinding jig for a temperature sensing probe as claimed in claim 1, characterized in that: The fixture further includes a handle, which is disposed on the upper surface of the positioning plate.

6. A grinding jig for a temperature sensing probe as claimed in claim 5, characterized in that: The number of the handles is two, and the two handles are arranged on the upper surface of the positioning plate at an interval.

7. A grinding jig for a temperature sensing probe as claimed in claim 6, characterized in that: The connecting line between the two handles passes through the center of the upper surface of the positioning plate.

8. A grinding jig for a temperature sensing probe as claimed in claim 1, characterized in that: The reflective plate is provided with a first positioning hole and a second positioning hole, and the lower surface of the positioning plate is provided with a first positioning pin and a second positioning pin, the first positioning pin matches with the first positioning hole, and the second positioning pin matches with the second positioning hole.

9. A grinding jig for a temperature sensing probe as claimed in claim 1, characterized in that: The number of the fixing components is more than two, and the more than two fixing components are arranged at intervals on the upper surface of the positioning plate; the fixing component includes a fixed arm and a rotating arm, one end of the fixed arm is fixed to the upper surface of the positioning plate, and the other end of the fixed arm is provided with a rotating shaft; one end of the rotating arm is rotatably connected to the other end of the fixed arm through the rotating shaft, and the other end of the rotating arm is provided with a slot for connecting the reflector.

10. A grinding jig for a temperature sensing probe as claimed in claim 9, characterized in that: The two or more fixing components are evenly distributed along the circumference of the positioning plate.

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