Semiconductor vacuum pump dismounting tool

Abstract

The utility model relates to a semiconductor vacuum pump dismounting tool, which relates to the technical field of vacuum pump dismounting, and comprises a vertically arranged sleeve, the two sides of the middle of the sleeve are respectively provided with an open groove penetrating through the sleeve, and the upper end of the outer wall of the sleeve is sleeved with a sleeve rod in a threaded mode. The inner wall of the lower portion of the sleeve rod and the outer wall of the upper portion of the sleeve are respectively provided with corresponding matched threads, jackscrews penetrate through the two sides of the lower portion of the sleeve rod in a threaded mode and extend into the open grooves, and a connector is formed in the upper end face of the sleeve rod.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum pump disassembly, in particular to a semiconductor vacuum pump disassembly tool. Background Art

[0002] There are many types of sun nuts in vacuum pumps, and special socket wrenches are used for disassembly and assembly during work. As a result, there are many types and the number of sockets is also increasing. The heavy weight is inconvenient to carry, and the space occupied is large. The processing cost is also bound to increase. For this reason, we propose a semiconductor vacuum pump disassembly tool. Utility Model Content

[0003] The utility model provides a semiconductor vacuum pump disassembly tool, which solves the above-mentioned technical problems.

[0004] The utility model solves the above-mentioned technical problems as follows: a semiconductor vacuum pump disassembly tool comprises a vertically arranged sleeve, and grooves penetrating the sleeve are respectively provided on both sides of the middle part of the sleeve, a sleeve rod is threadedly sleeved on the upper end of the outer wall of the sleeve, and the lower inner wall of the sleeve rod and the upper outer wall of the sleeve are respectively provided with corresponding matching threads, and top screws are respectively threadedly penetrated on both sides of the lower part of the sleeve rod, and the top screws extend into the groove, and an interface is provided on the upper end surface of the sleeve rod.

[0005] Preferably, the interface has a square cross-section, and the side length of the square cross-section of the interface is 13 mm.

[0006] The beneficial effects of the utility model are:

[0007] The utility model divides a common sleeve into two parts, namely, a sleeve at the front end and a sleeve rod at the rear end. The sleeve can be selected according to the size of the sun nut and is unique. There are a total of fifteen kinds of sleeves, and the sleeve rods are of three different thicknesses, which can be used universally, making it easier to take and put the sleeve removal tool, with a smaller size and weight, and easy to disassemble, avoiding damage to accessories, and providing a more comprehensive range of models.

[0008] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiment of the utility model with the accompanying drawings. The specific implementation method of the utility model is given in detail by the following embodiments and their drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present application. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:

[0010] Figure 1The utility model provides a schematic diagram of the structure of a semiconductor vacuum pump disassembly tool;

[0011] Figure 2 A schematic diagram of the sleeve structure of a semiconductor vacuum pump disassembly tool is provided for the utility model;

[0012] Figure 3 A schematic diagram of a sleeve rod structure of a semiconductor vacuum pump disassembly tool is proposed for the utility model

[0013] Figure 4 The utility model provides a schematic diagram of the top screw structure of a semiconductor vacuum pump disassembly tool.

[0014] Legend:

[0015] 1. Sleeve; 2. Sleeve rod; 3. Top screw; 4. Interface. DETAILED DESCRIPTION

[0016] The following is combined with Figure 1-4 The principles and features of the present invention are described, and the examples given are only used to explain the present invention, and are not used to limit the scope of the present invention. The present invention is described in more detail in the following paragraphs by way of example with reference to the accompanying drawings. The advantages and features of the present invention will become clearer according to the following description and claims. It should be noted that the drawings are all in a very simplified form and are not in precise proportions, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention.

[0017] like Figure 1-4 As shown, the utility model is a semiconductor vacuum pump disassembly tool, including a vertically arranged sleeve 1, the sleeve 1 is designed according to a common nut model, the sleeve 1 is of 15 types, and slots penetrating the sleeve 1 are respectively provided on both sides of the middle of the sleeve 1, and the slots are provided with top screws 3, and the top screws 3 cooperate with the slots to limit the position, so as to realize the stable connection between the sleeve 1 and the sleeve rod 2 and avoid the loose connection between the sleeve 1 and the sleeve rod 2, and the sleeve 1 The upper end of the outer wall of the sleeve 1 is threadedly sleeved with the sleeve rod 2, and the sleeve rod 2 is of 3 specifications, and the lower inner wall of the sleeve rod 2 and the upper outer wall of the sleeve 1 are respectively provided with corresponding matching threads, and the lower two sides of the sleeve rod 2 are respectively threadedly penetrated with top screws 3, and the top screws 3 extend into the slots, and an interface 4 is provided on the upper end surface of the sleeve rod 2. The device reduces weight, saves cost, saves space, has comprehensive functions, is connected to a torque wrench to apply torque, and the corresponding matching sleeve 1 can be selected according to the sun nut, which is convenient and practical.

[0018] Specifically, the interface 4 has a square cross section, and the side length of the square cross section of the interface 4 is 13 mm. The interface 4 can be connected to a wrench or a jackhammer for easy force application and rotation for use.

[0019] Working principle:

[0020] When in use, select a sleeve 1 of corresponding specifications according to the sun nut, screw the sleeve 1 into the corresponding sleeve rod 2, and then screw the top screw 3 from both sides of the sleeve rod 2 to make the top screw 3 enter the groove of the sleeve 1, and use the top screw 3 to fix the sleeve 1 to achieve a stable connection between the sleeve 1 and the sleeve rod 2, and then insert a 1 / 2 torque wrench or air cannon into the interface 4 before use.

[0021] The above are only preferred embodiments of the present invention and are not intended to limit the present invention in any form. Any ordinary technician in the industry can smoothly implement the present invention as shown in the drawings and described above. However, any equivalent changes, modifications and evolutions made by technicians familiar with the profession without departing from the scope of the technical solution of the present invention using the technical content disclosed above are all equivalent embodiments of the present invention. At the same time, any equivalent changes, modifications and evolutions made to the above embodiments based on the essential technology of the present invention are still within the protection scope of the technical solution of the present invention.

Claims

1. A semiconductor vacuum pump disassembly tool, comprising a vertically arranged sleeve (1), characterized in that: The sleeve (1) is provided with grooves penetrating the sleeve (1) on both sides of the middle part, and a sleeve rod (2) is threadedly sleeved on the upper end of the outer wall of the sleeve (1), and corresponding matching threads are respectively provided on the lower inner wall of the sleeve rod (2) and the upper outer wall of the sleeve (1), and top screws (3) are threadedly penetrated on both sides of the lower part of the sleeve rod (2), and the top screws (3) extend into the groove, and an interface (4) is provided on the upper end surface of the sleeve rod (2).

2. A semiconductor vacuum pump disassembly tool according to claim 1, characterized in that: The interface (4) has a square cross section, and the side length of the square cross section of the interface (4) is 13 mm.

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