Liquid pumping device and liquid pumping cover opening equipment

Abstract

The utility model provides a liquid extraction device, including: liquid extraction pipe module, axial movement module, rotation module and translation module, liquid extraction pipe module includes pipe body and adapter, pipe body has first end and second end in the axial direction, the adapter is provided at the second end, axial movement module is connected with pipe body, and the rotation module is connected with the translation module. The axial moving module drives the liquid pumping pipe module to move in the axial direction, the rotating module is connected with the liquid pumping pipe module, the rotating module drives the liquid pumping pipe module to rotate relative to a rotating shaft of the rotating module, the horizontal moving module is connected with the liquid pumping pipe module, the horizontal moving module drives the liquid pumping pipe module to move on a plane, and the plane is perpendicular to the rotating plane of the rotating module. The utility model further provides liquid pumping and uncovering equipment which comprises a liquid pumping device, an uncovering device and a control device. According to the automatic chemical liquid pumping cabinet, the problem that automatic liquid pumping and cover opening are difficult to add, arrange, improve and install due to the fact that the internal space of an existing chemical liquid pumping cabinet is too small is easily solved, and the internal operation space can be miniaturized.

Description

Technical Field

[0001] The utility model relates to a liquid pumping device and a liquid pumping cover opening device, and more particularly to a liquid pumping device and a liquid pumping cover opening device which can reduce the overall occupied space of the liquid pumping device. Background Art

[0002] In the semiconductor, optoelectronics and other industrial fields, chemical liquids and polishing fluids used in the process are stored in chemical barrels, which are placed in chemical extraction cabinets.

[0003] The traditional method of extracting liquid is for the operator to manually insert a liquid extraction tube from the chemical extraction cabinet into the chemical liquid barrel to extract the liquid in the tube. In this way, the chemical extraction cabinet cannot be fully automated. In addition, manual operation may also cause the chemical liquid to be contaminated or endanger the health of the operator.

[0004] If the extraction tube is to be operated in a fully automatic manner, an obvious problem is that the extraction tube and the equipment for operating the extraction tube are inserted into the chemical liquid barrel in a straight up and down manner, which takes up too much space and cannot be applied to the current chemical extraction cabinet. Utility Model Content

[0005] Therefore, in order to solve various problems of the existing liquid pumping device, the utility model provides a liquid pumping device and a liquid pumping cover opening device which can reduce the overall occupied space of the liquid pumping device.

[0006] To achieve the above-mentioned purpose and other purposes, the utility model proposes a liquid extraction device, which includes: a liquid extraction tube module, including a tube body and an adapter, the tube body has a first end and a second end in the axial direction, and the adapter is arranged at the second end; an axially movable module, connected to the tube body, the axially movable module drives the liquid extraction tube module to move along the axial direction; a rotating module, connected to the liquid extraction tube module, the rotating module drives the liquid extraction tube module to rotate relative to the rotation axis of the rotating module; and a translation module, connected to the liquid extraction tube module, the translation module drives the liquid extraction tube module to move on a plane, which is perpendicular to the rotation plane of the rotating module.

[0007] In one embodiment of the present invention, the axial movement module includes a first motor, a first gear and a rack portion, the first gear is connected to the first motor and meshes with the rack portion, and the rack portion is connected to the second end.

[0008] In one embodiment of the present invention, the rotating module includes a second motor, and the second motor is connected to the liquid suction tube module via the axial moving module.

[0009] In one embodiment of the present invention, the translation module is connected to the liquid extraction tube module via the rotation module and the axial movement module.

[0010] In an embodiment of the present invention, the translation module is a linear movement module.

[0011] In order to achieve the above-mentioned purpose and other purposes, the utility model also proposes a liquid extraction and cover opening device, which includes: a liquid extraction device as mentioned above; a cover opening device, including a cover opening module and a movable module, the cover opening module includes a rotary motor, a cover opening component and a plurality of gripping claws, the rotary motor outputs rotational power to the cover opening component, the plurality of gripping claws surround the cover opening component, the movable module is connected to the cover opening module and drives the cover opening module to move; and a control device, the signal of which connects the liquid extraction device and the cover opening device, and the control device controls the movement of the liquid extraction tube module and the cover opening module.

[0012] In an embodiment of the present invention, a buffer is disposed at one end of each of the plurality of gripping claws.

[0013] In one embodiment of the present invention, the moving module includes three sets of linear moving modules connected to the cover opening module, and the linear moving directions of the three sets of linear moving modules are perpendicular to each other.

[0014] In one embodiment of the present invention, a plurality of sensing devices are further included, the signals of which are connected to the control device, and the plurality of sensing devices respectively sense the movement states of the liquid extraction tube module and the cover opening module.

[0015] In this way, the pumping device and the pumping cover opening device proposed by the utility model can extend the tube body into the barrel body from the window in the chemical pumping cabinet at an angle, reducing the overall space occupied by the pumping device. Compared with the expensive and bulky mechanical arm, the pumping device and the pumping cover opening device of the utility model have more flexible installation size advantages in the environment, and the mechanism cost is more competitive. Therefore, the pumping device and the pumping cover opening device proposed by the utility model are conducive to the limited space utilization of the chemical pumping cabinet, and can be effectively adapted to the current chemical pumping cabinet. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a three-dimensional schematic diagram of a liquid pumping device according to an embodiment of the utility model.

[0017] Figure 2 Schematic diagram of the movement of the liquid pumping device according to an embodiment of the utility model.

[0018] Figure 3 The figure is a simplified operation diagram of the liquid pumping device according to an embodiment of the utility model.

[0019] Figure 4 It is a three-dimensional schematic diagram of a liquid extraction and cover opening device according to an embodiment of the utility model.

[0020] Figure 5It is a three-dimensional schematic diagram of a cover opening device according to an embodiment of the utility model.

[0021] Figure 6 It is a three-dimensional schematic diagram of a cover opening module according to an embodiment of the utility model.

[0022] Figure 7 It is a block diagram of the liquid extraction and lid opening device according to an embodiment of the utility model.

[0023] Reference numerals

[0024] 100 Liquid pumping device

[0025] 200 Cover opening device

[0026] 300 Liquid extraction and lid opening equipment

[0027] 1 Liquid extraction tube module

[0028] 11 tube body

[0029] 11a First end

[0030] 11b Second end

[0031] 12 Adapter

[0032] 13 Connection block

[0033] 2 Axial movement module

[0034] 21 First Motor

[0035] 22 First Gear

[0036] 23 Rack

[0037] 3 Rotation module

[0038] 31 Second Motor

[0039] 321 Small gear

[0040] 322 Big Gear

[0041] 4 Translation module

[0042] 41 Third Motor

[0043] 42 Guide Rail

[0044] 5 Control device

[0045] 6. Opening module

[0046] 61 Rotary motor

[0047] 62 Opening parts

[0048] 63 Grip

[0049] 631 Buffer

[0050] 7 Mobile Modules

[0051] 71 Z-axis moving motor

[0052] 72 X-axis moving motor

[0053] 73 Y-axis moving motor

[0054] 81 Sensing device

[0055] 82 Sensing device

[0056] C Chemical Extraction Cabinet

[0057] C1 Window

[0058] T Barrel

[0059] T1 Cover DETAILED DESCRIPTION

[0060] In order to fully understand the present utility model, the present utility model is described in detail through the following specific embodiments and the accompanying drawings. Those skilled in the art can understand the purpose, features and effects of the present utility model from the contents disclosed in this specification. It should be noted that the present utility model can be implemented or applied through other different specific embodiments, and the details in this specification can also be modified and changed in various ways based on different viewpoints and applications without departing from the spirit of the present utility model. The following implementation methods will further explain the relevant technical content of the present utility model in detail, but the disclosed content is not intended to limit the scope of the patent application of the present utility model. The description is as follows:

[0061] like Figure 1 and Figure 2 As shown, the liquid pumping device 100 of the embodiment of the present invention comprises: a liquid pumping tube module 1 , an axial moving module 2 , a rotating module 3 and a translating module 4 .

[0062] The liquid extraction tube module 1 includes a tube body 11 and an adapter 12. The tube body 11 has a first end 11a and a second end 11b in the axial direction, the first end 11a extends to a barrel body T, and the second end 11b is the opposite end (distal end) of the first end 11a. The tube body 11 is, for example, a jet stirring tube as described in the invention patent announcement No. I812886, which has the functions of extracting and spraying liquid to achieve the stirring effect; the tube body 11 can also be an ordinary tube body with only a general connection function, and the utility model does not limit it. The adapter 12 is arranged at the second end 11b of the tube body 11, and can be used to connect an external pump or other extraction power equipment or other equipment.

[0063] The axial moving module 2 is connected to the tube body 11, and the function of the axial moving module 2 is to drive the liquid extraction tube module 1 to move along its axial direction. In detail, in this embodiment, the axial moving module 2 includes a first motor 21, a first gear 22 and a rack portion 23, the first gear 22 is connected to the first motor 21 and meshes with the rack portion 23, and the rack portion 23 is connected to the adapter 12 and the second end 11b through a connecting block 13. When the first motor 21 is turned, the rotational power is output to the first gear 22 and the rack portion 23 moves relative to the first gear, thereby driving the liquid extraction tube module 1 to move axially. The axial moving module 2 can be used to adjust the depth of the tube body 11 toward the barrel body T. However, the utility model is not limited to this. In other embodiments, the axial moving module 2 can use other mechanisms to drive the linear movement of the liquid extraction tube module 1, such as using a cylinder, or a combination of a motor and a screw. In addition, the connecting block 13 is also optional, and the rack portion 23 can be directly connected to the tube body 11 or the adapter 12 to drive the tube body 11.

[0064] The rotating module 3 is connected to the liquid extraction tube module 1, and the rotating module 3 drives the liquid extraction tube module 1 to rotate relative to the rotating axis of the rotating module 3. In the present embodiment, the rotating module 3 includes a second motor 31, and the second motor 31 is connected to the liquid extraction tube module 1 via the axially movable module 2, that is, the second motor 31 rotates and drives the axially movable module 2 and the liquid extraction tube module 1 connected to the axially movable module 2 at the same time. However, the present invention is not limited thereto. In other embodiments, the rotating module 3 can be directly connected to the liquid extraction tube module 1 without being connected to the liquid extraction tube module 1 via the axially movable module 2, or the axially movable module 2 is indirectly connected to the liquid extraction tube module 1 via the rotating module 3. In the present embodiment, the rotating module 3 also includes a gear set, and the gear set includes a pinion 321 and a large gear 322. The pinion 321 is sleeved on the rotating axis of the second motor 31 and meshes with the large gear 322. The pinion 321 and the large gear 322 are used to slow down the speed output by the second motor 31. The axis of the large gear 322 is connected to the rack portion 23 of the axially movable module 2. Therefore, when the second motor 31 outputs the rotational power, the rotational power is sequentially output from the rotation of the second motor 31 to the small gear 321 and the large gear 322. The large gear 322 drives the rack portion 23 and the liquid extraction tube module 1 connected to the rack portion 23 to rotate. Since the axial direction of the tube body 11 is located on the rotation plane of the rotating module 3 (such as Figure 2 and Figure 3 As shown in FIG. 1 , the depth of the tube body 11 extending toward the barrel body T can be changed within a limited space without requiring an excessively large vertical space. However, the present invention is not limited thereto. In other embodiments, the second motor 31 may directly drive the liquid extraction tube module 1 without passing through a gear set, or may have a gear set of other forms to achieve the desired effect.

[0065] The translation module 4 is connected to the liquid extraction tube module 1, and the translation module drives the liquid extraction tube module 1 to move on a plane, which is perpendicular to the rotation plane of the aforementioned rotation module 3. In other words, the translation module 4 is used to increase the mobility of the liquid extraction tube module 1 in other dimensions. In the present embodiment, the translation module 4 is connected to the liquid extraction tube module 1 through the rotation module 3 and the axial movement module 2, that is, the translation module 4 drives the rotation module 3, the axial movement module 2 and the liquid extraction tube module 1 at the same time. However, the utility model is not limited to this. In other embodiments, the translation module 4 can be directly connected to the liquid extraction tube module 1 without being connected to the liquid extraction tube module 1 through the rotation module 3 and the axial movement module 2. In the present embodiment, the translation module 4 is a linear movement module, including a third motor 41 and a screw (not shown) for linearly moving along the horizontal guide rail 42. However, the present invention is not limited thereto. In other embodiments, the third motor 41 may cooperate with other types of mechanisms to change the rotational power into linear power; or, the translation module 4 may use a power mechanism such as a cylinder or a hydraulic cylinder to push the liquid extraction tube module 1 to move on a horizontal plane. In other embodiments, the translation module 4 may include more power mechanisms, so that the liquid extraction tube module 1 can move not only linearly, but also two-dimensionally on a horizontal plane.

[0066] like Figure 3 As shown, the pumping device 100 of the present invention can tilt the tube 11 from the window C1 in the chemical pumping cabinet C into the barrel T, reducing the overall space occupied by the pumping device, which is beneficial to the limited space utilization of the chemical pumping cabinet C, and can effectively adapt to the current chemical pumping cabinet C. Compared with expensive and bulky robotic arms, the pumping device 100 of the present invention has a more flexible installation size advantage in the environment and the mechanism cost is more competitive. In addition, although the pumping device 100 of the present invention is suitable for fully automated operation, the present invention is not limited thereto, and the pumping device 100 of the present invention can also be used for semi-automatic or manual operation.

[0067] Furthermore, if Figure 4 and Figure 7 As shown, the present invention further proposes a liquid extraction and cover opening device 300 , comprising: the aforementioned liquid extraction device 100 , a cover opening device 200 and a control device 5 .

[0068] like Figure 5 and Figure 6 As shown, the cover opening device 200 includes a cover opening module 6 and a moving module 7 .

[0069] The cover opening module 6 includes a rotary motor 61, a cover opening component 62 and a plurality of gripping claws 63. The rotary motor 61 outputs rotary power to the cover opening component 62, and the plurality of gripping claws 63 surround the cover opening component 62 at equal angles. The cover opening component 62 is used to match the cover T1 of the barrel body T. When the rotary motor 61 outputs rotary power to the cover opening component 62 through its rotating shaft, the cover opening component 62 drives the cover T1 to rotate and the cover T1 is separated from the barrel body T. The plurality of gripping claws 63 are used to assist in clamping the cover T1. In the present embodiment, a buffer 631 is provided at one end of each of the plurality of gripping claws 63. The buffer 631 is a relatively soft component having elastic deformation capability, such as a rubber component. The buffer 631 is arranged toward the cover opening component 62, and is the position for actually contacting and clamping the cover T1.

[0070] The mobile module 7 is connected to the cover opening module 6 and drives the cover opening module 6 to move so that the cover opening component 62 matches the position of the cover T1. In the present embodiment, the mobile module 7 includes three groups of linear mobile modules connected to the cover opening module 6 so that the cover opening module 6 can move in three dimensions. Preferably, the linear movement directions of the three groups of linear mobile modules are perpendicular to each other. The three groups of linear mobile modules have a total of a Z-axis mobile motor 71, an X-axis mobile motor 72, a Y-axis mobile motor 73, and their respective related mechanisms to convert the rotational power of each motor into a linear power, so that the cover opening module 6 moves on the X, Y, and Z axes. However, the utility model is not limited to this. In other embodiments, the mobile module 7 may only have one-dimensional or two-dimensional linear movement capabilities.

[0071] like Figure 7 As shown, the control device 5 is connected to the first motor 21, the second motor 31, the third motor 41 of the liquid extraction device 100 and the Z-axis moving motor 71, the X-axis moving motor 72, and the Y-axis moving motor 73 of the cover opening device 200 by signal. The control device 5 controls the movement stroke of the liquid extraction tube module 1 and the cover opening module 6 by controlling the above-mentioned motors. The control device 5 is, for example, a control circuit or a control chip with logic judgment ability. The control device 5 can also be further connected to the rotation motor 61 by signal to control the cover opening process of the cover opening module 6.

[0072] Furthermore, in the present embodiment, the liquid extraction and lid opening device 300 further includes a plurality of sensing devices 81 and 82, and the sensing devices 81 and 82 are connected to the control device 5 by signals. The sensing device 81 is used to sense the moving state of the liquid extraction tube module 1, and the sensing device 82 is used to sense the moving state of the lid opening module 6. The sensing devices 81 and 82 are, for example, optical sensors, mechanism-triggered sensors, or electromagnetic sensors for detecting the position of components, and the present invention is not limited thereto. The sensing devices 81 and 82 may each include more sensors, which are installed in the chemical liquid extraction cabinet C to grasp the real-time state of the detection components. The control device 5 adjusts or fine-tunes the moving stroke of the liquid extraction tube module 1 and the lid opening module 6 according to the detection signals of the sensing devices 81 and 82.

[0073] For example, the control device 5 can confirm whether the cover opening module 6 moves to the top of the cover T1 through the detection signal of the sensing device 82. If not, the control device 5 controls the X-axis moving motor 72 and the Y-axis moving motor 73 to move horizontally. Then, the Z-axis moving motor 71 is controlled to make the cover opening module 6 descend, and the cover opening component 62 matches the cover T1. The control device 5 controls the rotation motor 61 to rotate to perform the cover opening. After the cover opening is completed, the control device 5 controls the first motor 21, the second motor 31, and the third motor 41 to gradually move and rotate the liquid extraction tube module 1 through the detection signal of the sensing device 81, so that the tube body 11 is deeply inserted into the barrel body T.

[0074] In summary, the liquid extraction device 100 and the cover opening device 200 of the utility model can reduce the overall occupied space of the liquid extraction device, forming an automated liquid extraction and cover opening equipment 300 with a more compact and efficient operating space; and the automatically controlled liquid extraction and cover opening functions of the liquid extraction device 100 and the cover opening device 200 of the utility model can be quickly and modularly modified into the existing manual liquid extraction equipment, thereby realizing the transition from manual operation to unmanned operation automation.

[0075] The present invention has been disclosed in the above embodiments, but those skilled in the art should understand that the embodiments are only used to describe the present invention and should not be interpreted as limiting the scope of the present invention. It should be noted that all changes and substitutions equivalent to the embodiments should be included in the scope of the present invention. Therefore, the protection scope of the present invention shall be based on the scope of the patent application.

Claims

1. A liquid pumping device, characterized in that: Include: A liquid extraction tube module, comprising a tube body and an adapter, wherein the tube body has a first end and a second end in the axial direction, and the adapter is disposed at the second end; An axially movable module is connected to the tube body, and the axially movable module drives the liquid pumping tube module to move along the axial direction; A rotating module connected to the liquid extraction tube module, the rotating module drives the liquid extraction tube module to rotate relative to the rotating axis of the rotating module; as well as A translation module is connected to the liquid extraction tube module, and the translation module drives the liquid extraction tube module to move on a plane, which is perpendicular to the rotation plane of the rotation module.

2. The liquid extraction device according to claim 1, characterized in that: The axial movement module includes a first motor, a first gear and a rack portion. The first gear is connected to the first motor and meshes with the rack portion. The rack portion is connected to the second end.

3. The liquid pumping device according to claim 1, characterized in that: The rotating module includes a second motor, and the second motor is connected to the liquid suction tube module via the axial moving module.

4. The liquid pumping device according to claim 1, characterized in that: The translation module is connected to the liquid extraction tube module through the rotation module and the axial movement module.

5. The liquid pumping device according to claim 1, characterized in that: The translation module is a linear movement module.

6. A liquid extraction and lid opening device, characterized in that: Include: The liquid extraction device according to any one of claims 1 to 5; A cover opening device, comprising a cover opening module and a moving module, the cover opening module comprising a rotary motor, a cover opening component and a plurality of gripping claws, the rotary motor outputs rotary power to the cover opening component, the plurality of gripping claws surround the cover opening component, the moving module is connected to the cover opening module and drives the cover opening module to move; as well as A control device is connected to the liquid extraction device and the cover opening device by signals, and the control device controls the movement of the liquid extraction tube module and the cover opening module.

7. The liquid extraction and lid opening device according to claim 6, characterized in that: A buffer is disposed at one end of each of the plurality of gripping claws.

8. The liquid extraction and lid opening device according to claim 6, characterized in that: The moving module comprises three groups of linear moving modules connected to the cover opening module, and the linear moving directions of the three groups of linear moving modules are perpendicular to each other.

9. The liquid extraction and lid opening device according to claim 6, characterized in that: It also includes a plurality of sensing devices, whose signals are connected to the control device, and the plurality of sensing devices respectively sense the movement states of the liquid extraction tube module and the cover opening module.

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