Vacuum furnace partial pressure judgment control device and vacuum furnace system

Abstract

The utility model discloses a vacuum furnace partial pressure judgment control device and a vacuum furnace system, the vacuum furnace partial pressure judgment control device is used for being arranged on a vacuum furnace body, and comprises a partial pressure pipeline, one end of the partial pressure pipeline is connected with the vacuum furnace body, and the other end of the partial pressure pipeline is connected to an inert gas conveying source; the electromagnetic valve is arranged on the partial pressure pipeline; the detection assembly is arranged on the vacuum furnace body and is used for detecting temperature information and vacuum value information in the vacuum furnace body; and the electric fine adjustment valve is arranged on the partial pressure pipeline and located between the electromagnetic valve and the vacuum furnace body so as to regulate and control the air inflow of the partial pressure pipeline according to the temperature information and the vacuum value information. The problem that when some metal parts are machined through an existing vacuum furnace, the amount of inert gas input into the vacuum furnace cannot be accurately controlled, and therefore metal in the metal parts to be machined possibly volatilizes is solved.

Description

Technical Field

[0001] The present disclosure relates to the technical field of vacuum furnaces, and in particular to a vacuum furnace partial pressure determination control device and a vacuum furnace system. Background Art

[0002] During the vacuum heat treatment process, the metallic elements in pure metals and alloys will evaporate at a certain temperature and vacuum degree, which has a significant adverse effect on the vacuum heat treatment quality of parts and the pollution of the vacuum heating chamber. Therefore, in the heating treatment in vacuum equipment, the reasonable control of the vacuum degree is a very important issue, which requires the formulation of strict process and program setting control.

[0003] At present, it is generally necessary to inject inert protective gas into the equipment during vacuum heating to control the equipment to maintain a medium vacuum and suppress the volatilization of metal in the parts. Traditional partial pressure control has certain disadvantages in setting and control. When the amount of gas released from the parts is too large, accurate partial pressure control cannot be achieved, which may result in the inability to effectively suppress the volatilization of metal in the parts. Utility Model Content

[0004] The purpose of the present invention is to provide a vacuum furnace partial pressure determination control device and a vacuum furnace system, which solves the problem that when using a vacuum furnace to process some metal parts, the amount of inert gas input into the vacuum furnace cannot be accurately controlled, which may cause metal volatilization in the metal parts to be processed.

[0005] To achieve the above-mentioned purpose, the first aspect of the present disclosure provides a vacuum furnace partial pressure determination control device, which is used to be arranged on a vacuum furnace body, comprising:

[0006] A pressure dividing pipeline, one end of which is connected to the vacuum furnace body, and the other end of which is connected to an inert gas delivery source;

[0007] A solenoid valve is arranged on the pressure-dividing pipeline;

[0008] A detection component is arranged on the vacuum furnace body to detect temperature information and vacuum value information in the vacuum furnace body;

[0009] The electric fine-tuning valve is arranged on the pressure-dividing pipeline and is located between the solenoid valve and the vacuum furnace body to adjust the air intake of the pressure-dividing pipeline according to the temperature information and the vacuum value information.

[0010] In some embodiments, the vacuum furnace partial pressure determination control device further includes:

[0011] A controller, electrically connected to the detection component, to receive the temperature information and the vacuum value information detected by the detection component;

[0012] The controller is also electrically connected to the solenoid valve and the electric fine-tuning valve respectively, so as to control the operation of the solenoid valve and the electric fine-tuning valve according to the received temperature information and the vacuum value information.

[0013] In some embodiments, the vacuum furnace partial pressure determination control device further includes a manual fine-tuning valve, which is disposed on the partial pressure pipeline and located between the solenoid valve and the inert gas delivery source.

[0014] In some embodiments, the detection component includes a temperature sensor and a vacuum sensor, and the temperature sensor and the vacuum sensor are respectively arranged on the vacuum furnace and electrically connected to the controller respectively, so as to detect temperature information and vacuum value information in the vacuum furnace body and transmit them to the controller.

[0015] A second aspect of the present disclosure provides a vacuum furnace system, comprising:

[0016] A vacuum furnace body, wherein the vacuum furnace body is provided with an exhaust pipe;

[0017] A vacuum system connected to the vacuum pipe for extracting air from the vacuum furnace body to make the vacuum furnace body in a vacuum state;

[0018] A vacuum furnace partial pressure determination control device, wherein the vacuum furnace partial pressure determination control device is the vacuum furnace partial pressure determination control device as described in any one of the above embodiments.

[0019] In some embodiments, the vacuum furnace system further includes a frequency converter, which is electrically connected to the vacuum pumping system to adjust a pumping speed of the vacuum pumping system according to temperature information and vacuum value information detected by the detection component.

[0020] In some embodiments, a first gas flow meter is provided on the gas extraction pipeline;

[0021] The pressure dividing pipeline is provided with a second gas flow meter, and the second gas flow meter is located between the electric fine-tuning valve and the vacuum furnace body.

[0022] By adopting the above technical scheme, through the solenoid valve, detection component and electric fine-tuning valve arranged on the pressure-dividing pipeline, when inert gas is input into the vacuum furnace body for processing the parts to be processed, the detection component can detect the temperature information and vacuum value information in the vacuum furnace body in real time, so that the electric fine-tuning valve can be controlled according to the temperature information and vacuum value information in the vacuum furnace body to adjust the amount of inert gas input into the vacuum furnace body, so as to ensure that the vacuum furnace body is at the required vacuum degree and temperature, thereby realizing precise pressure-dividing control and effectively suppressing the volatilization of metal components in the parts to be processed.

[0023] Other features and advantages of the present disclosure will be described in detail in the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The accompanying drawings are used to provide further understanding of the present disclosure and constitute a part of the specification. They are used to explain the present disclosure together with the following detailed description, but do not constitute a limitation of the present disclosure.

[0025] In the attached picture:

[0026] Figure 1 It is a schematic diagram of the overall structure of a vacuum furnace partial pressure determination control device of the utility model.

[0027] Figure 2 It is a structural schematic diagram of a vacuum furnace system of the utility model.

[0028] Figure 3 This is a schematic diagram of the control flow of the vacuum furnace system of the utility model.

[0029] Description of reference numerals:

[0030] 1. Vacuum furnace body; 2. Pressure dividing pipeline; 21. Solenoid valve; 22. Electric fine-tuning valve; 23. Manual fine-tuning valve; 31. Temperature sensor; 32. Vacuum sensor; 4. Controller; 5. Exhaust pipeline; 6. Vacuum pumping system; 7. Frequency converter; 81. First gas flow meter; 82. Second gas flow meter; 9. Inert gas delivery source. DETAILED DESCRIPTION

[0031] The specific implementation of the present disclosure is described in detail below in conjunction with the accompanying drawings. It should be understood that the specific implementation described herein is only used to illustrate and explain the present disclosure, and is not used to limit the present disclosure.

[0032] The present disclosure provides a vacuum furnace partial pressure determination control device, which can be arranged on a vacuum furnace body 1 to control the amount of inert protective gas injected into the vacuum furnace body to ensure that the vacuum furnace body 1 is maintained in a medium vacuum state.

[0033] like Figure 1 As shown, the vacuum furnace partial pressure determination control device comprises a partial pressure pipeline 2, a solenoid valve 21, a detection component and an electric fine adjustment valve 22, wherein one end of the partial pressure pipeline 2 is connected to the vacuum furnace body 1, and the other end is connected to the inert gas delivery source 9, so that the inert gas delivery source 9 inputs inert gas into the vacuum furnace body through the partial pressure pipeline 2. The solenoid valve 21 is arranged on the partial pressure pipeline 2 to control the opening and closing of the partial pressure pipeline 2 through the solenoid valve 21.

[0034] The above-mentioned detection component is arranged on the vacuum furnace body 1 to detect the temperature information and vacuum value information inside the vacuum furnace body 1. The electric fine-tuning valve 22 is arranged on the pressure dividing pipe 2 and is located between the solenoid valve 21 and the vacuum furnace body 1 to adjust the air intake of the pressure dividing pipe 2 according to the temperature information and the vacuum value information.

[0035] Through the arrangement of the above structure, when the inert gas is input into the vacuum furnace body 1 by using the inert gas delivery source 9, the detection component can be used to monitor the state inside the vacuum furnace body 1 in real time, so as to control the electric fine-tuning valve 22 according to the temperature information and vacuum value information inside the vacuum furnace body 1, so as to control the amount of inert gas input into the vacuum furnace body 1, thereby ensuring that the vacuum furnace body 1 is in the required vacuum degree, thereby effectively suppressing the volatilization of metal components in the parts to be processed.

[0036] It should be noted that the above-mentioned inert gas delivery source 9 can be a storage tank filled with inert gas, or can be other containers that can store inert gas.

[0037] In some embodiments, Figure 1 and Figure 3 As shown, the vacuum furnace partial pressure determination control device further includes a controller 4, which is electrically connected to the detection component to receive temperature information and vacuum value information detected by the detection component. In addition, the controller 4 is also electrically connected to the solenoid valve 21 and the electric fine-tuning valve 22, respectively, to control the operation of the solenoid valve 21 and the electric fine-tuning valve 22 according to the received temperature information and vacuum value information.

[0038] By using the setting of the controller 4, the opening and closing of the electromagnetic valve 21 can be automatically controlled, and the information detected by the detection component can be received in real time, and the electric fine-tuning valve 22 can be controlled in real time according to the information to adjust the amount of inert gas input into the vacuum furnace body 1 through the pressure-dividing pipeline 2. For example, when it is detected that the temperature in the vacuum furnace body 1 is too high and the controller 4 receives that the temperature in the vacuum furnace body 1 is high, the electric fine-tuning valve 22 can be automatically controlled to increase the amount of inert gas input into the vacuum furnace body 1 to ensure that the parts to be processed are kept at a certain temperature to avoid the situation where the metal components therein are volatilized.

[0039] In some embodiments, Figure 1 As shown, the above vacuum furnace partial pressure determination control device further includes a manual fine-tuning valve 23 , which is arranged on the partial pressure pipeline 2 and located between the solenoid valve 21 and the inert gas delivery source 9 .

[0040] By using the setting of the manual fine-tuning valve 23, when the detection component detects the specific conditions in the vacuum furnace, the staff can also actively adjust the input amount of the inert gas into the vacuum furnace body 1 by adjusting the manual fine-tuning valve 23, so as to avoid the problem that the electric fine-tuning valve 22 is damaged and the gas amount input into the vacuum furnace body 1 cannot be adjusted.

[0041] In some embodiments, Figure 1 As shown, the above-mentioned detection component includes a temperature sensor 31 and a vacuum sensor 32. The temperature sensor 31 and the vacuum sensor 32 are respectively fixedly arranged on the vacuum furnace and are respectively electrically connected to the controller 4 for detecting the temperature information and vacuum value information in the vacuum furnace body 1 and transmitting them to the controller 4.

[0042] By using the temperature sensor 31 and the vacuum sensor 32, the temperature information and vacuum value information in the vacuum furnace body 1 can be accurately detected, and the detected information can be transmitted to the controller 4 in real time, so that the controller 4 can instantly control the electric fine-tuning valve 22 according to the received information.

[0043] Based on the same technical concept, the present disclosure also provides a vacuum furnace system, such as Figure 2 As shown, the vacuum furnace system includes a vacuum furnace body 1, a vacuum pumping system 6 and the vacuum furnace partial pressure determination control device involved in the above embodiments, wherein an exhaust pipe 5 is provided on the vacuum furnace body 1, and the vacuum pumping system 6 is connected to the exhaust pipe 5 to extract the air in the vacuum furnace body 1 to make the vacuum furnace body 1 in a vacuum state.

[0044] In this way, when the vacuum furnace body 1 is used to heat the processed parts, the vacuum system 6 can be used to extract the air in the vacuum furnace body 1, and the vacuum furnace partial pressure determination control device can be used to fill the vacuum furnace body 1 with inert gas, thereby effectively ensuring that the vacuum furnace body 1 is maintained in a medium vacuum state.

[0045] Further, such as Figure 2 and Figure 3 As shown, the vacuum furnace system further includes a frequency converter 7, which is electrically connected to the vacuum system 6 and the controller 4, so as to adjust the pumping speed of the vacuum system 6 according to the temperature information and vacuum value information detected by the detection component.

[0046] Through the arrangement of this structure, when the amount of inert gas input into the vacuum furnace body 1 is changed, the frequency converter 7 can be adjusted accordingly to control the rate at which the vacuum pumping system 6 extracts the gas in the vacuum furnace body 1, so that the vacuum furnace body 1 is always kept in a medium vacuum state. For example, when the amount of inert gas input into the vacuum furnace body 1 is increased, the amount of gas extracted from the vacuum furnace body 1 by the vacuum pumping system 6 also needs to be increased accordingly.

[0047] In some embodiments, Figure 2 As shown, a first gas flow meter 81 is provided on the above-mentioned exhaust pipe 5, and at the same time, a second gas flow meter 82 is provided on the pressure dividing pipe 2, and the second gas flow meter 82 is provided between the electric fine-tuning valve 22 and the vacuum furnace body 1.

[0048] By using the setting of the first gas flow meter 81 and the second gas flow meter 82, the amount of gas extracted from the exhaust pipe 5 and the amount of gas input into the pressure dividing pipe 2 can be monitored in real time, so that the values ​​detected by the first gas flow meter 81 and the second gas flow meter 82 can be compared to determine whether the amount of gas input into the vacuum furnace body 1 is consistent with the amount of gas output from the vacuum furnace body 1. If there is an inconsistency, the amount of gas input into the vacuum furnace body 1 and the amount of gas output from the vacuum furnace body 1 can be adjusted in time.

[0049] Furthermore, a terminal device may be provided, and the first gas flow meter 81 and the second gas flow meter 82 may be electrically connected to the terminal device respectively, so that the information detected by the first gas flow meter 81 and the second gas flow meter 82 is transmitted to the terminal device in real time, so that the staff can observe the gas input and output in the vacuum furnace body 1 in real time. In addition, an alarm may be provided, and the alarm may be electrically connected to the terminal device. When the gas information detected by the first gas flow meter 81 and the second gas flow meter 82 is inconsistent, it indicates that the gas input and output in the vacuum furnace body 1 are inconsistent. At this time, the terminal device may control the alarm to sound an alarm to prompt the staff to adjust the gas input and output in the vacuum furnace body 1 in time, so as to fully and effectively suppress the problem of volatilization of metal components in the parts to be processed.

[0050] The terminal device may be a computer, a mobile phone, a tablet computer or other device.

[0051] The preferred embodiments of the present disclosure are described in detail above in conjunction with the accompanying drawings; however, the present disclosure is not limited to the specific details in the above embodiments. Within the technical concept of the present disclosure, a variety of simple modifications can be made to the technical solution of the present disclosure, and these simple modifications all fall within the protection scope of the present disclosure.

[0052] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present disclosure will not further describe various possible combinations.

[0053] In addition, various embodiments of the present disclosure may be arbitrarily combined, and as long as they do not violate the concept of the present disclosure, they should also be regarded as the contents disclosed by the present disclosure.

Claims

1. A vacuum furnace partial pressure determination control device, used to be arranged on a vacuum furnace body, characterized in that: include: A pressure dividing pipeline, one end of which is connected to the vacuum furnace body, and the other end of which is connected to an inert gas delivery source; A solenoid valve is arranged on the pressure-dividing pipeline; A detection component is arranged on the vacuum furnace body to detect temperature information and vacuum value information in the vacuum furnace body; The electric fine-tuning valve is arranged on the pressure-dividing pipeline and is located between the solenoid valve and the vacuum furnace body to adjust the air intake of the pressure-dividing pipeline according to the temperature information and the vacuum value information.

2. The vacuum furnace partial pressure determination control device according to claim 1, characterized in that: The vacuum furnace partial pressure determination control device also includes: A controller, electrically connected to the detection component, to receive the temperature information and the vacuum value information detected by the detection component; The controller is also electrically connected to the solenoid valve and the electric fine-tuning valve respectively to control the operation of the solenoid valve and the electric fine-tuning valve according to the received temperature information and the vacuum value information.

3. The vacuum furnace partial pressure determination control device according to claim 1, characterized in that: The vacuum furnace partial pressure determination control device further comprises a manual fine-tuning valve, which is arranged on the partial pressure pipeline and located between the solenoid valve and the inert gas delivery source.

4. The vacuum furnace partial pressure determination control device according to claim 2, characterized in that: The detection component includes a temperature sensor and a vacuum sensor. The temperature sensor and the vacuum sensor are respectively arranged on the vacuum furnace and are respectively electrically connected to the controller to detect temperature information and vacuum value information in the vacuum furnace body and transmit them to the controller.

5. A vacuum furnace system, characterized in that: include: A vacuum furnace body, wherein the vacuum furnace body is provided with an exhaust pipe; A vacuum system connected to the vacuum pipe for extracting air from the vacuum furnace body to make the vacuum furnace body in a vacuum state; A vacuum furnace partial pressure determination control device, wherein the vacuum furnace partial pressure determination control device is the vacuum furnace partial pressure determination control device as described in any one of claims 1-4.

6. The vacuum furnace system according to claim 5, characterized in that: The vacuum furnace system further includes a frequency converter, which is electrically connected to the vacuum pumping system to adjust the pumping speed of the vacuum pumping system according to the temperature information and vacuum value information detected by the detection component.

7. The vacuum furnace system according to claim 5, characterized in that: A first gas flow meter is provided on the air extraction pipeline; The pressure dividing pipeline is provided with a second gas flow meter, and the second gas flow meter is located between the electric fine-tuning valve and the vacuum furnace body.

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