Reinforced mounting structure for gas circuit joint of semiconductor equipment

Abstract

The utility model discloses a reinforcing installation structure used for a semiconductor device gas circuit joint, comprising a first gas pipe, one side of the first gas pipe is provided with a second gas pipe, the first gas pipe and the second gas pipe are provided with a connecting mechanism, and the connecting mechanism comprises a first connector and a second connector. A first connector is fixedly arranged at one end of the first air pipe, a second connector is fixedly arranged at one end of the second air pipe, a reinforcing mechanism used for preventing connection looseness is arranged between the first connector and the second connector, and the reinforcing mechanism comprises a movable sleeve, clamping teeth, an extension ring and a clamping block; the outer side surface of the second air pipe is movably sleeved with a movable sleeve. By means of threaded connection, connection can be facilitated, sealing performance is guaranteed, meanwhile, the reinforcing mechanism is arranged, and the situation of air leakage caused by thread loosening can be effectively prevented; therefore, normal gas use and production quality of the semiconductor equipment can be ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of reinforced installation structures, in particular to a reinforced installation structure for gas path connections of semiconductor equipment. Background Art

[0002] Some commonly used semiconductor equipment (such as thin film vapor deposition equipment, etching equipment, etc.) are generally provided with a gas path connection structure so that the reaction gas can be stably input into the reaction chamber of the equipment.

[0003] In order to ensure the quality of production, the connection stability of the gas circuit is particularly important. In the prior art in the semiconductor manufacturing industry, there are mainly flange connections and threaded ferrule connections for gas circuit connections. The flange connection has strong sealing, but it is inconvenient to disassemble and repair later, and a large number of screws need to be disassembled and installed. The threaded ferrule connection is relatively easy to connect and can also provide better sealing. However, once the thread is slightly loosened, the extrusion of the sealing ring is weakened, and its airtightness will drop rapidly. There are many reasons for the loosening of the threaded connection, such as vibration. Therefore, to address this problem, it is necessary to improve a reinforced installation structure for the gas circuit connection of semiconductor equipment. Utility Model Content

[0004] The purpose of the utility model is to provide a reinforcement installation structure for the gas path connection of semiconductor equipment to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a reinforcement installation structure for the gas path connection of semiconductor equipment, comprising a first air pipe, a second air pipe is arranged on one side of the first air pipe, a connection mechanism is arranged between the first air pipe and the second air pipe, the connection mechanism comprises a first connecting head and a second connecting head, the first air pipe is fixedly provided with the first connecting head at one end, the second air pipe is fixedly provided with the second connecting head at one end, a reinforcement mechanism for preventing the connection from loosening is arranged between the first connecting head and the second connecting head, the reinforcement mechanism comprises a movable sleeve, a latch tooth, an extension ring, and a clamping block; a movable sleeve is movably sleeved on the outer surface of the second air pipe, a plurality of latch teeth are evenly provided on the inner side wall of the movable sleeve, an extension ring is fixedly provided on the outer surface of the second connecting head, and a plurality of clamping blocks are fixedly provided on the outer surface of the extension ring.

[0006] Preferably, a first thread is provided on the outer surface of the first connector, and a second thread is provided on the inner side wall of the second connector; the first connector is arranged inside the second connector by screwing the first thread and the second thread together; the first connector and the second connector can be connected together conveniently and quickly through the first thread and the second thread; and the sealing performance can also be guaranteed.

[0007] Preferably, a sealing ring is provided between the first connector and the second connector; the sealing ring can be squeezed when the first thread and the second thread connect the first connector and the second connector together; thereby further improving the sealing performance of the connection between the first connector and the second connector.

[0008] Preferably, a friction ring is fixedly provided on the outer surface of the movable sleeve; the friction ring can increase the friction force of the outer surface of the movable sleeve; thereby, the movable sleeve can be easily driven to move; thereby, the fixation of the latch teeth and the latch block can be released.

[0009] Preferably, a fixing ring is fixedly provided on the outer surface of the first trachea, and a spring is sleeved between the fixing ring and the movable sleeve on the outer surface of the first trachea, so that the movable sleeve can be automatically pushed to reset by the spring; so that the movable sleeve can always be sleeved on the outer surface of the extension ring, and the locking tooth can also be sleeved on the outer surface of the blocking block.

[0010] Preferably, one end of the spring close to the fixed ring is fixedly connected to the fixed ring, and one end of the spring close to the movable sleeve is fixedly connected to the movable sleeve; this can ensure the stability of the movable sleeve and prevent the movable sleeve from falling off the surface of the first trachea.

[0011] Preferably, a twisting block is fixedly provided on the outer surface of the second connecting head; the second connecting head can be conveniently rotated by the twisting block, so that the first connecting head and the second connecting head can be conveniently connected together by using the first thread and the second thread.

[0012] Preferably, there are multiple clamping blocks, which are evenly spaced on the outer surface of the extension ring; when one of the multiple clamping blocks is evenly spaced and inserted between the clamping teeth, the others will be inserted together, which will not increase the difficulty of installation; but even if one or two of the multiple clamping blocks are damaged, the device can still ensure the connection stability between the first connector and the second connector.

[0013] Preferably, the outer surface of the clamping block is provided with a chamfer; the chamfer can facilitate the clamping block to be inserted into the gap of the clamping teeth.

[0014] Compared with the prior art, the beneficial effects of the utility model are:

[0015] 1. The utility model utilizes threaded connection to facilitate connection and ensure sealing, and also provides mutual engagement of latching teeth and latching blocks, so that the threaded connection cannot be reversed and loosened in any case, thereby effectively preventing the occurrence of air leakage caused by loose threads; thereby ensuring the normal use and production quality of semiconductor equipment.

[0016] 2. When the threaded connection of the utility model needs to be released, it is only necessary to pull the movable sleeve to move so that the locking teeth and the blocking block are misaligned. Although the disassembly can be completed by reversing the thread, the entire disassembly process is also convenient and quick, and only one more step is required compared to the traditional threaded connection, so it can be easily promoted and used. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the overall structure of a reinforced installation structure for gas path connection of semiconductor equipment according to the utility model;

[0018] Figure 2 This is a moving view of a movable sleeve in a reinforced installation structure for a gas path connection of a semiconductor device according to the utility model;

[0019] Figure 3 This is an installation view of a first connector and a second connector in a reinforced installation structure for a gas path connection of a semiconductor device according to the utility model;

[0020] Figure 4 This is a sleeve view of a movable sleeve and an extension ring in a reinforced installation structure for a gas path connection of a semiconductor device according to the utility model;

[0021] Figure 5 The utility model is a reinforcement installation structure for the gas path connection of semiconductor equipment Figure 4 sectional view of .

[0022] In the figure: 1. first air pipe; 2. second air pipe; 3. first connector; 4. second connector; 5. movable sleeve; 6. latch teeth; 7. extension ring; 8. clamping block; 9. first thread; 10. second thread; 11. sealing ring; 12. friction ring; 13. fixing ring; 14. spring; 15. twisting block. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] See also Figure 1-5The utility model provides a technical solution: a reinforcement installation structure for the gas path connection of semiconductor equipment, comprising a first gas pipe 1, a second gas pipe 2 is arranged on one side of the first gas pipe 1, a connection mechanism is arranged between the first gas pipe 1 and the second gas pipe 2, the connection mechanism comprises a first connector 3 and a second connector 4, the first gas pipe 1 is fixedly provided with the first connector 3 at one end, the second gas pipe 2 is fixedly provided with the second connector 4 at one end, a reinforcement mechanism for preventing the connection from loosening is arranged between the first connector 3 and the second connector 4, the reinforcement mechanism comprises a movable sleeve 5, a latch tooth 6, an extension ring 7, and a clamping block 8; a movable sleeve 5 is movably sleeved on the outer surface of the second gas pipe 2, a plurality of latch teeth 6 are evenly provided on the inner side wall of the movable sleeve 5, an extension ring 7 is fixedly provided on the outer surface of the second connector 4, and a plurality of clamping blocks 8 are fixedly provided on the outer surface of the extension ring 7.

[0025] The first connector 3 has a first thread 9 on its outer surface, and the second connector 4 has a second thread 10 on its inner side wall; the first connector 3 is arranged inside the second connector 4 by screwing the first thread 9 and the second thread 10 together; the first connector 3 and the second connector 4 can be connected together conveniently and quickly by the first thread 9 and the second thread 10, and the sealing performance can also be ensured;

[0026] A sealing ring 11 is provided between the first connector 3 and the second connector 4; the sealing ring 11 can be squeezed when the first thread 9 and the second thread 10 connect the first connector 3 and the second connector 4 together; thereby further improving the sealing performance of the connection between the first connector 3 and the second connector 4;

[0027] The outer surface of the movable sleeve 5 is fixedly provided with a friction ring 12; the friction ring 12 can increase the friction force of the outer surface of the movable sleeve 5; thereby, the movable sleeve 5 can be easily driven to move; thereby, the fixation of the latch 6 and the latch block 8 can be released;

[0028] A fixing ring 13 is fixedly arranged on the outer surface of the first air pipe 1, and a spring 14 is sleeved between the fixing ring 13 and the movable sleeve 5 on the outer surface of the first air pipe 1, so that the movable sleeve 5 can be automatically pushed to reset by the spring 14; so that the movable sleeve 5 can always be sleeved on the outer surface of the extension ring 7, and the latching teeth 6 can be sleeved on the outer surface of the clamping block 8;

[0029] One end of the spring 14 close to the fixed ring 13 is fixedly connected to the fixed ring 13, and one end of the spring 14 close to the movable sleeve 5 is fixedly connected to the movable sleeve 5; this can ensure the stability of the movable sleeve 5 and prevent the movable sleeve 5 from falling off the surface of the first air pipe 1;

[0030] The outer surface of the second connector 4 is fixedly provided with a twisting block 15; the second connector 4 can be conveniently rotated by the twisting block 15, so that the first connector 3 and the second connector 4 can be conveniently connected together by using the first thread 9 and the second thread 10;

[0031] There are multiple clamping blocks 8, which are evenly spaced and distributed on the outer surface of the extension ring 7; multiple clamping blocks 8 are evenly spaced and one is inserted between the clamping teeth 6, and the others are inserted together, which does not increase the difficulty of installation; even if one or two of the multiple clamping blocks 8 are damaged, the device can still ensure the connection stability between the first connector 3 and the second connector 4;

[0032] The outer surface of the clamping block 8 is provided with a chamfer; the chamfer can facilitate the clamping block 8 to be inserted into the gap of the clamping teeth 6.

[0033] Working principle: When using this device Figure 1 , Figure 2 , Figure 3 , Figure 4 Corresponding to the installation steps of this device; Figure 1 The first and second connectors 3 and 4 are connected together by the first and second threads 9 and 10, respectively. After the first and second threads 9 and 10 are tightened, the clamping block 8 is aligned with the notch of the clamping tooth 6. The movable sleeve 5 is released, and the movable sleeve 5 can be sleeved on the outer surface of the extension ring 7 under the action of the spring 14, and the clamping block 8 is clamped into the notch of the clamping tooth 6. In this way, the device can facilitate the connection and ensure the sealing by using the threaded connection, and also provides the mutual engagement of the clamping tooth 6 and the clamping block 8, so that the threaded connection cannot be reversed and loosened in any case, thereby effectively preventing the occurrence of air leakage caused by the loosening of the thread. Therefore, the normal use and production quality of the semiconductor equipment can be guaranteed.

[0034] When the threaded connection needs to be released, it is only necessary to pull the movable sleeve 5 to move so that the locking teeth 6 and the blocking block 8 are misaligned. Although the disassembly can be completed by reversing the thread, the entire disassembly process is also convenient and quick, with only one more step compared to the traditional threaded connection, so it can be easily promoted and used.

[0035] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0036] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A reinforced installation structure for a gas path connection of a semiconductor device, comprising a first gas pipe (1), characterized in that: A second air pipe (2) is arranged on one side of the first air pipe (1), and a connecting mechanism is arranged between the first air pipe (1) and the second air pipe (2), and the connecting mechanism comprises a first connecting head (3) and a second connecting head (4); the first air pipe (1) is fixedly provided with the first connecting head (3) at one end, and the second air pipe (2) is fixedly provided with the second connecting head (4) at one end; a reinforcing mechanism for preventing the connection from loosening is arranged between the first connecting head (3) and the second connecting head (4), and the reinforcing mechanism comprises a movable sleeve (5), a latching tooth (6), an extension ring (7), and a latching block (8); a movable sleeve (5) is movably sleeved on the outer surface of the second air pipe (2), and a plurality of latching teeth (6) are evenly arranged on the inner side wall of the movable sleeve (5); an extension ring (7) is fixedly provided on the outer surface of the second connecting head (4), and a plurality of latching blocks (8) are fixedly provided on the outer surface of the extension ring (7).

2. A reinforced installation structure for gas path connection of semiconductor equipment according to claim 1, characterized in that: The first connector (3) has a first thread (9) on its outer surface, and the second connector (4) has a second thread (10) on its inner side wall; the first connector (3) is arranged inside the second connector (4) by screwing the first thread (9) and the second thread (10) together.

3. A reinforced installation structure for gas path connection of semiconductor equipment according to claim 1, characterized in that: A sealing ring (11) is provided between the first connecting head (3) and the second connecting head (4).

4. A reinforced installation structure for gas path connection of semiconductor equipment according to claim 1, characterized in that: A friction ring (12) is fixedly arranged on the outer surface of the movable sleeve (5).

5. A reinforced installation structure for gas path connection of semiconductor equipment according to claim 1, characterized in that: A fixing ring (13) is fixedly arranged on the outer surface of the first air pipe (1), and a spring (14) is sleeved between the fixing ring (13) and the movable sleeve (5) on the outer surface of the first air pipe (1).

6. A reinforced installation structure for gas path connection of semiconductor equipment according to claim 5, characterized in that: One end of the spring (14) close to the fixed ring (13) is fixedly connected to the fixed ring (13), and one end of the spring (14) close to the movable sleeve (5) is fixedly connected to the movable sleeve (5).

7. A reinforced installation structure for gas path connection of semiconductor equipment according to claim 1, characterized in that: A twisting block (15) is fixedly arranged on the outer surface of the second connecting head (4).

8. A reinforced installation structure for gas path connection of semiconductor equipment according to claim 1, characterized in that: A plurality of the clamping blocks (8) are provided and are evenly spaced and distributed on the outer surface of the extension ring (7).

9. A reinforced installation structure for gas path connection of semiconductor equipment according to claim 1, characterized in that: The outer surface of the clamping block (8) is provided with a chamfer.

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