Graphite boat positioning device and silicon wafer bearing mechanism

Abstract

The utility model discloses a graphite boat positioning device and a silicon wafer bearing mechanism. The graphite boat positioning device comprises a first infrared detector and a second infrared detector, the first infrared detector and the second infrared detector are arranged on the periphery of a boat support in a spaced mode, and the first infrared detector and the second infrared detector are used for forming first positioning light and second positioning light respectively. The first positioning light is used for positioning one surface of the graphite boat, and the second positioning light is used for positioning the other surface of the graphite boat. The silicon wafer bearing mechanism comprises a graphite boat, a boat support and the graphite boat positioning device. The graphite boat positioning device can be used for positioning the graphite boat, so that the silicon wafer can be accurately placed in the graphite boat, the subsequent silicon wafer coating uniformity is realized, and the silicon wafer quality and the photoelectric conversion efficiency are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaics, in particular to a graphite boat positioning device and a silicon slice bearing mechanism. Background Art

[0002] Most of the existing solar cell production technologies use a coating process, in which the graphite boat is an important carrier for silicon wafers. The main function of the graphite boat is to place the cells. Whether the placement of the cells is accurate will affect the quality of subsequent coating. For example, a tubular PECVD device must be matched with at least 10 sets of graphite boats to meet maximum production. At present, the point debugging of the graphite boat needs to be done manually. The position of the graphite boat on the boat support is manually adjusted by observing and manually adjusting the position of the graphite boat on the boat support, and whether the positioning groove on the graphite boat is aligned with the boat support to achieve the positioning of the graphite boat. The point debugging time of a set of graphite boats takes about 20min~30min, which takes a lot of time and requires the installer to concentrate. If there is a graphite boat point error, it will affect the position of the silicon wafer between the boat leaves of the graphite boat, affect the quality of the silicon wafer, and even cause the robot to break the silicon wafer. Utility Model Content

[0003] Based on this, it is necessary to provide a graphite boat positioning device. The graphite boat positioning device of the utility model can assist operators in adjusting the positioning of the graphite boat, reduce the workload of operators, save manual debugging time, improve the efficiency of graphite boat point adjustment, and avoid the risk of errors in manual adjustment causing the robot to drop the battery cell when placing it, and the robot damaging the silicon wafer in the subsequent wafer removal process.

[0004] An embodiment of the present application provides a graphite boat positioning device.

[0005] A graphite boat positioning device comprises a first infrared detector and a second infrared detector, wherein the first infrared detector and the second infrared detector are spaced apart at the periphery of a boat support, and the first infrared detector and the second infrared detector are respectively used to form a first positioning light and a second positioning light, wherein the first positioning light is used to position one surface of the graphite boat, and the second positioning light is used to position the other surface of the graphite boat.

[0006] In some embodiments, the first infrared detector and the second infrared detector are spaced apart on both sides of the boat support, the first positioning light formed by the first infrared detector is parallel to the second positioning light formed by the second infrared detector, and the first positioning light and the second positioning light are respectively used for positioning two surfaces of the graphite boat relative to each other.

[0007] In some embodiments, the graphite boat positioning device further includes a bottom plate, the bottom plate is used for placing the boat support, and the first infrared detector and the second infrared detector are respectively mounted on the bottom plate.

[0008] In some embodiments, the graphite boat positioning device further includes a plurality of support frames, wherein the support frames are mounted on the bottom plate, and the first infrared detector and the second infrared detector are respectively mounted on different support frames.

[0009] In some of the embodiments, the first infrared detector is capable of adjusting a height position on the support frame to which it is connected.

[0010] In some of the embodiments, the second infrared detector is capable of adjusting a height position on the support frame to which it is connected.

[0011] In some embodiments, the graphite boat positioning device further includes a moving component, wherein the moving component is connected to the base plate, the moving component is used for placing a boat support, and the moving component is used for moving the positioned boat support and graphite boat to a predetermined processing position.

[0012] In some embodiments, the moving component includes a conveyor belt and a power mechanism, the conveyor belt is used to place the boat support, and the power mechanism is connected to the conveyor belt to drive the conveyor belt to move.

[0013] In some embodiments, the power mechanism is a drive motor.

[0014] An embodiment of the present application also provides a silicon wafer supporting mechanism.

[0015] A silicon wafer carrying mechanism comprises a graphite boat, a boat support and a graphite boat positioning device, wherein the first infrared detector and the second infrared detector of the graphite boat positioning device are respectively arranged at intervals on the periphery of the boat support, the boat support is used for installing the graphite boat, and the graphite boat is used for placing silicon wafers.

[0016] The above-mentioned graphite boat positioning device can be used for positioning the position of the graphite boat, so that the silicon wafer can be accurately placed in the graphite boat, and the subsequent silicon wafer coating can be uniform, thereby improving the quality of the silicon wafer and the photoelectric conversion efficiency. The first infrared detector and the second infrared detector provide the first positioning light and the second positioning light. The first positioning light is used to position the two surfaces of the graphite boat. The operator only needs to use the first positioning light and the second positioning light as reference standards to achieve accurate positioning of the graphite boat and installation of the graphite boat and the boat support, saving the operator's debugging time, reducing the operator's workload and labor costs. When the manipulator inserts the silicon wafer into the graphite boat, the placement point is accurate, which will not cause the silicon wafer placement to be offset, and avoid the manipulator damaging the silicon wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application, and those skilled in the art can obtain other drawings based on these drawings without creative work.

[0018] In order to more completely understand the present application and its beneficial effects, the following description will be given in conjunction with the accompanying drawings. In the following description, the same reference numerals represent the same parts.

[0019] FIG1 is a schematic diagram of a graphite boat positioning device according to an embodiment of the present invention.

[0020] Description of Reference Numerals

[0021] 10. Graphite boat positioning device; 100. First infrared detector; 200. Second infrared detector; 300. Bottom plate; 400. Support frame; 500. Moving part; 20. Boat support; 30. Graphite boat. DETAILED DESCRIPTION

[0022] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the utility model. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below.

[0023] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0024] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0025] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0026] In the description of the present utility model, "several" means more than one, "many" means more than two, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used to distinguish the technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0027] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art in the technical field of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0028] The embodiment of the present application provides a graphite boat positioning device 10 to solve the problem that in the conventional coating process, manual operation is used for the position adjustment of the graphite boat, which requires a lot of time and labor costs, and is prone to position errors that affect the position of the silicon wafer between the boat blades of the graphite boat, affect the quality of the silicon wafer, and even cause the robot to break the silicon wafer. The graphite boat positioning device 10 will be described below in conjunction with the accompanying drawings.

[0029] The graphite boat positioning device 10 provided in the embodiment of the present application is exemplarily shown in FIG1 , which is a schematic diagram of the structure of the graphite boat positioning device 10 provided in the embodiment of the present application. The graphite boat positioning device 10 of the present application can be used for installation and positioning between a graphite boat and a boat support 20 .

[0030] In order to more clearly illustrate the structure of the graphite boat positioning device 10 , the graphite boat positioning device 10 will be introduced below with reference to the accompanying drawings.

[0031] For example, please refer to FIG. 1 , a graphite boat positioning device 10 includes a first infrared detector 100 and a second infrared detector 200. The first infrared detector 100 and the second infrared detector 200 are arranged at intervals on the periphery of the boat support 20. The first infrared detector 100 and the second infrared detector 200 are used to form a first positioning light and a second positioning light, respectively. The first positioning light is used to position one surface of the graphite boat 30. The second positioning light is used to position the other surface of the graphite boat 30.

[0032] In some embodiments, as shown in FIG1 , a first infrared detector 100 and a second infrared detector 200 are spaced apart and arranged on both sides of the boat support 20. The first positioning light formed by the first infrared detector 100 is parallel to the second positioning light formed by the second infrared detector 200. The first positioning light and the second positioning light are respectively used for positioning two surfaces of the graphite boat 30 relative to each other.

[0033] In some embodiments, the graphite boat positioning device 10 further includes a bottom plate 300. The bottom plate 300 is used to place the boat support 20. The first infrared detector 100 and the second infrared detector 200 are respectively installed on the bottom plate 300. In actual operation, the bottom plate 300 is installed in a horizontal state.

[0034] In some embodiments, the graphite boat positioning device 10 further includes a plurality of support frames 400. The support frames 400 are mounted on the bottom plate 300. The first infrared detector 100 and the second infrared detector 200 are respectively mounted on different support frames 400.

[0035] Preferably, the first infrared detector 100 is detachably connected to the support frame 400. The second infrared detector 200 is detachably connected to the support frame 400. The first infrared detector 100 and the second infrared detector 200 are detachably connected to the support frame 400, respectively, so that the first infrared detector 100 and the second infrared detector 200 can be disassembled, repaired, replaced, etc.

[0036] In some of the embodiments, the first infrared detector 100 can be adjusted in height on the support frame 400 to which it is connected.

[0037] In some of the embodiments, the second infrared detector 200 can be adjusted in height on the support frame 400 to which it is connected.

[0038] In some embodiments, in order to adjust the height of the first infrared detector 100 and the second infrared detector 200, the support frame 400 can be telescopically adjusted. Preferably, the support frame 400 can be a telescopic frame structure. For example, the support frame 400 is a telescopic rod, and the support frame 400 can be telescopic to adjust the height of the first infrared detector 100 and the second infrared detector 200.

[0039] In some embodiments, the graphite boat positioning device 10 further includes a moving component 500. The moving component 500 is connected to the bottom plate 300. The moving component 500 is used to place the boat support 20. The moving component 500 is used to move the positioned boat support 20 and the graphite boat 30 to a predetermined processing position. The setting of the moving component 500 enables the graphite boat 30 to be directly moved to the predetermined processing position after the silicon wafer is loaded after positioning the graphite boat 30 and the boat support 20, thereby improving the processing efficiency.

[0040] In some embodiments, the moving part 500 includes a conveyor belt and a power mechanism. The conveyor belt is used to place the boat holder 20, and the power mechanism is connected to the conveyor belt to drive the conveyor belt to move.

[0041] In some embodiments, the power mechanism is a drive motor. It is not difficult to understand that in other specific examples, the power mechanism can also be a drive cylinder, a screw assembly or other forms.

[0042] An embodiment of the present application also provides a silicon wafer supporting mechanism.

[0043] A silicon wafer carrying mechanism includes a graphite boat 30, a boat support 20 and a graphite boat positioning device 10. A first infrared detector 100 and a second infrared detector 200 of the graphite boat positioning device 10 are respectively arranged at intervals on the periphery of the boat support 20. The boat support 20 is used for installing the graphite boat 30. The graphite boat 30 is used for placing silicon wafers.

[0044] In some of the embodiments, in order to better fix the graphite boat 30 , a boat-blade fixing fixture may be designed on the bottom plate 300 , and the boat-blade fixing fixture can achieve position fixation of the graphite boat 30 after positioning.

[0045] When the above silicon wafer carrying mechanism is in use, the first infrared detector 100 and the second infrared detector 200 are respectively arranged at the two sides of the boat support 20, and the first infrared detector 100 and the second infrared detector 200 respectively provide the first positioning light and the second positioning light, which are used to locate the two surface positions of the graphite boat 30, so as to realize the positioning and installation of the graphite boat 30 and the boat support 20. After the graphite boat 30 and the boat support 20 are installed, the mechanical arm can be controlled to put the silicon wafer between the boat blades of the graphite boat 30. After a number of silicon wafers are placed on the graphite boat 30, the power mechanism such as the driving motor drives the conveyor belt to move, so as to move the boat support 20 and the graphite boat 30 to the preset processing station for the next process.

[0046] In summary, the graphite boat positioning device 10 of the present application can be used for positioning the position of the graphite boat 30, so that the silicon wafer can be accurately placed in the graphite boat 30, and the subsequent silicon wafer coating can be uniform, thereby improving the quality of the silicon wafer and the photoelectric conversion efficiency. The first infrared detector 100 and the second infrared detector 200 provide a first positioning light and a second positioning light. The first positioning light is used to position the two surfaces of the graphite boat 30. The operator only needs to use the first positioning light and the second positioning light as reference standards to achieve accurate positioning of the graphite boat 30 and installation of the graphite boat 30 and the boat support 20, saving personnel debugging time, reducing workload and labor costs. When the manipulator inserts the silicon wafer into the graphite boat 30, the placement point is accurate, which will not cause the silicon wafer placement to be offset, and avoid the manipulator damaging the silicon wafer.

[0047] In the above embodiments, the description of each embodiment has its own emphasis. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0048] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0049] The above-mentioned embodiments only express several implementation methods of the utility model, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the patent of the utility model. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the utility model, and these all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A graphite boat positioning device (10), characterized in that: The invention comprises a first infrared detector (100) and a second infrared detector (200), wherein the first infrared detector (100) and the second infrared detector (200) are arranged at intervals on the periphery of a boat support (20), and the first infrared detector (100) and the second infrared detector (200) are respectively used to form a first positioning light and a second positioning light, wherein the first positioning light is used to position one surface of a graphite boat (30), and the second positioning light is used to position the other surface of the graphite boat.

2. The graphite boat positioning device (10) according to claim 1, characterized in that: The first infrared detector (100) and the second infrared detector (200) are arranged at intervals on both sides of the boat support (20); the first positioning light formed by the first infrared detector (100) is parallel to the second positioning light formed by the second infrared detector (200); the first positioning light and the second positioning light are respectively used for positioning two surfaces of the graphite boat (30) at relative positions.

3. The graphite boat positioning device (10) according to claim 1, characterized in that: The graphite boat positioning device (10) further comprises a base plate (300), the base plate (300) being used to place the boat support (20), and the first infrared detector (100) and the second infrared detector (200) being respectively mounted on the base plate (300).

4. The graphite boat positioning device (10) according to claim 3, characterized in that: The graphite boat positioning device (10) further comprises a plurality of support frames (400), wherein the support frames (400) are mounted on the base plate (300), and the first infrared detector (100) and the second infrared detector (200) are respectively mounted on different support frames (400).

5. The graphite boat positioning device (10) according to claim 4, characterized in that: The first infrared detector (100) is capable of adjusting the height position on the support frame (400) to which it is connected.

6. The graphite boat positioning device (10) according to claim 4, characterized in that: The second infrared detector (200) is capable of adjusting the height position on the support frame (400) to which it is connected.

7. The graphite boat positioning device (10) according to any one of claims 3 to 6, characterized in that: The graphite boat positioning device (10) further comprises a moving component (500), wherein the moving component (500) is connected to the base plate (300), and the moving component (500) is used to place the boat support (20), and the moving component (500) is used to move the positioned boat support (20) and the graphite boat (30) to a predetermined processing position.

8. The graphite boat positioning device (10) according to claim 7, characterized in that: The moving component (500) comprises a conveyor belt and a power mechanism, the conveyor belt is used to place the boat support (20), and the power mechanism is connected to the conveyor belt to drive the conveyor belt to move.

9. The graphite boat positioning device (10) according to claim 8, characterized in that: The power mechanism is a driving motor.

10. A silicon wafer supporting mechanism, characterized in that: The invention comprises a graphite boat (30), a boat support (20) and a graphite boat positioning device (10) as claimed in any one of claims 1 to 9, wherein the first infrared detector (100) and the second infrared detector (200) of the graphite boat positioning device (10) are respectively arranged at intervals on the periphery of the boat support (20), the boat support (20) is used for installing the graphite boat (30), and the graphite boat (30) is used for placing silicon wafers.

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