Vacuum magnetic rod and vacuum coating equipment

Abstract

The utility model discloses a vacuum magnetic rod and vacuum coating equipment, and the vacuum magnetic rod comprises a sleeve which is provided with a motion cavity; the conveying rod is arranged in the movement cavity, the conveying rod is used for conveying the substrate, and the conveying rod is provided with a first magnet; the magnetic tube is arranged on the outer side of the sleeve in a sleeving manner, is provided with a second magnet, can move relative to the sleeve and drives the conveying rod to move; the limiting assembly comprises a limiting rod and a limiting piece, the limiting rod and the sleeve are arranged in parallel, the limiting piece is rotationally connected to the limiting rod, the limiting piece has a first state and a second state, when the limiting piece is in the first state, the projection of the limiting piece and the projection of the magnetic pipe are overlapped in the length direction of the conveying rod, and the limiting piece can limit movement of the magnetic pipe on the sleeve; when the limiting piece is in the second state, the projection of the limiting piece is not overlapped with the projection of the magnetic tube in the length direction of the conveying rod. The vacuum magnetic rod provided by the utility model can be conveniently used by a worker.

Description

Technical Field

[0001] The utility model relates to vacuum coating equipment, in particular to a vacuum magnetic rod and vacuum coating equipment. Background Art

[0002] In the related technologies, the scientific name of vacuum coating is physical vapor deposition (PVD), which means that under vacuum conditions, a physical method is used to vaporize the material source - solid or liquid surface into gaseous atoms, molecules or partially ionized into ions, and through a low-pressure gas (or plasma) process, a thin film with some special functions is deposited on the surface of the substrate. The main methods of physical vapor deposition are pulsed laser deposition, vacuum evaporation, sputtering coating, arc plasma plating, ion plating, and molecular beam epitaxy. At present, physical vapor deposition technology can not only deposit metal films and alloy films, but also compounds, ceramics, semiconductors, polymer films, etc.

[0003] The vacuum coating is completed by the vacuum coating equipment, wherein before the vacuum coating equipment processes the substrate, a magnetic rod is required to transport the substrate from the sample chamber to the coating chamber. The specific method of the magnetic rod to transport the substrate is that the magnetic rod includes a conveying rod, and the conveying rod has a groove for placing the substrate. The substrate is transported to the coating chamber by driving the conveying rod to move. Further, the method of driving the conveying rod is: a magnet is set on the conveying rod, the conveying rod is set in a sleeve, and the magnetic tube is sleeved on the outside of the sleeve, and the magnet on the magnetic tube attracts the magnet of the conveying rod, thereby pushing the magnetic tube, and the magnetic tube can drive the conveying rod to move. In the prior art, in order to make the conveying rod transport the substrate according to the set travel distance, it can be achieved by setting a mark on the sleeve and then moving the magnetic tube to the mark point. That is, after measuring the set length on the sleeve, and then setting a mark at the position, the travel of the conveying rod can be made to meet the requirements by moving the magnetic tube to the mark point. Since this method requires the staff to always observe whether the magnetic tube reaches the marking point, it is inconvenient for the staff to use. Utility Model Content

[0004] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a vacuum magnetic rod that is convenient for workers to use.

[0005] The utility model also proposes a vacuum coating device

[0006] According to the first aspect of the present invention, the vacuum magnetic rod comprises:

[0007] a cannula having a movement cavity;

[0008] A conveying rod, disposed in the movement cavity, the conveying rod is used to convey the substrate, and the conveying rod is provided with a first magnet;

[0009] A magnetic tube, sleeved on the outer side of the sleeve, the magnetic tube is provided with a second magnet, and the magnetic tube can move relative to the sleeve and drive the conveying rod to move;

[0010] A limit assembly includes a limit rod and a limit member, wherein the limit rod is arranged parallel to the sleeve, and the limit member is rotatably connected to the limit rod. The limit member has a first state and a second state. When the limit member is in the first state, along the length direction of the conveying rod, the projection of the limit member overlaps with the projection of the magnetic tube, and the limit member can limit the movement of the magnetic tube on the sleeve. When the limit member is in the second state, along the length direction of the conveying rod, the projection of the limit member does not overlap with the projection of the magnetic tube.

[0011] The vacuum magnetic rod according to the embodiment of the utility model has at least the following beneficial effects: after the conveying rod is arranged in the moving cavity, when the magnetic tube moves relative to the sleeve, the magnetic tube can drive the conveying rod to move, so that the conveying rod conveys the substrate; when the limiting member is in the first state, since the projection of the limiting member overlaps with the projection of the magnetic tube, the limiting member will prevent the magnetic tube from continuing to move on the sleeve, thereby limiting the movement of the magnetic tube; in the prior art, when the magnetic tube stops at a specific position, it is necessary to mark and observe; however, in the present application, as long as the limiting member prevents the magnetic tube from continuing to move, the staff can know that the magnetic tube has moved to the set position; therefore, the vacuum magnetic rod can be convenient for the staff to use.

[0012] According to the vacuum magnetic rod of some embodiments of the present utility model, there are multiple limit members, and the multiple limit members are arranged at intervals along the length direction of the limit rod.

[0013] According to the vacuum magnetic rod of some embodiments of the utility model, the limiting assembly also includes a first support and a second support, the two ends of the first support are respectively connected to one end of the sleeve and one end of the limiting rod, and the two ends of the second support are respectively connected to the other end of the sleeve and the other end of the limiting rod.

[0014] According to some embodiments of the vacuum magnetic rod of the present invention, the first support includes a first half seat and a second half seat, the first half seat is threadedly connected to the second half seat, the first half seat and the second half seat jointly form a mounting hole, and the sleeve is arranged in the mounting hole.

[0015] According to the vacuum magnetic rod of some embodiments of the present utility model, the limiting assembly further comprises a clamping member, the clamping member is detachably connected to the limiting rod, and the limiting member is rotatably connected to the clamping member.

[0016] According to the vacuum magnetic rod of some embodiments of the utility model, the limiting assembly also includes a locking piece, the clamping piece includes a first clamp and a second clamp, one end of the first clamp is connected to one end of the second clamp, the locking piece is passed through the other end of the first clamp and the other end of the second clamp, so that the first clamp and the second clamp jointly form a fixing hole, and the limiting rod is arranged in the fixing hole.

[0017] According to the vacuum magnetic rod of some embodiments of the utility model, the limiting assembly also includes a rotating shaft, the clamping member is provided with a first rotating hole, the limiting member is provided with a second rotating hole, and the rotating shaft is passed through the first rotating hole and the second rotating hole.

[0018] According to the vacuum magnetic rod of some embodiments of the utility model, one end of the conveying rod is provided with a placement groove, and the placement groove is used for placing the substrate.

[0019] According to some embodiments of the vacuum magnetic rod of the present utility model, the slot wall of the placement slot includes a main body and two branch parts, the two branch parts are connected to the main body, and the extension direction of one branch part is different from the extension direction of the other branch part.

[0020] The vacuum coating equipment according to the second aspect of the present invention comprises a vacuum magnetic rod as described in any one of the first aspect embodiments.

[0021] According to the vacuum coating equipment of the embodiment of the utility model, at least the following beneficial effects are achieved: after the conveying rod is arranged in the moving cavity, when the magnetic tube moves relative to the sleeve, the magnetic tube can drive the conveying rod to move, so that the conveying rod conveys the substrate, when the stopper is in the first state, since the projection of the stopper overlaps with the projection of the magnetic tube, the stopper will block the magnetic tube from continuing to move on the sleeve, thereby limiting the movement of the magnetic tube, in the prior art, it is necessary to mark and observe when the magnetic tube stops moving to a specific position, but in the present application, as long as the stopper blocks the magnetic tube from continuing to move, the staff can know that the magnetic tube has moved to the set position, so the vacuum magnetic rod can be convenient for the staff to use. Further, the vacuum coating equipment with the vacuum magnetic rod can be convenient for the staff to use.

[0022] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:

[0024] Figure 1 Schematic diagram of vacuum magnetic rods of some embodiments of the utility model;

[0025] Figure 2 Another schematic diagram of a vacuum magnetic rod according to some embodiments of the present invention;

[0026] Figure 3 Schematic diagram of the clamping member and the limiting member of the vacuum magnetic rod of some embodiments of the utility model;

[0027] Figure 4 It is a partial schematic diagram of the vacuum magnetic rod of some embodiments of the utility model.

[0028] Reference numerals:

[0029] Vacuum magnetic rod 100, sleeve 200, conveying rod 300, placement groove 310, main body 311, branch part 312, magnetic tube 400, limit rod 500, limit member 600, first support 700, first half seat 710, second half seat 720, second support 800, clamping member 900, first clamping member 910, second clamping member 920, rotating shaft 1000. DETAILED DESCRIPTION

[0030] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0031] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0032] In the description of the present utility model, "several" means more than one, "many" means more than two, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used to distinguish the technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0033] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0034] In the description of the utility model, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0035] Please refer to Figures 1 to 4In some embodiments, the vacuum magnetic rod 100 includes: a sleeve 200, a conveying rod 300, a magnetic tube 400 and a limiting assembly. The sleeve 200 has a motion cavity. The conveying rod 300 is arranged in the motion cavity, and the conveying rod 300 is used to convey the substrate, and the conveying rod 300 is provided with a first magnet. The magnetic tube 400 is sleeved on the outside of the sleeve 200, and the magnetic tube 400 is provided with a second magnet, and the second magnet can interact with the first magnet so that the magnetic tube 400 can move relative to the sleeve 200 and drive the conveying rod 300 to move. That is, under the suction of the second magnet and the first magnet, the magnetic tube 400 can drive the conveying rod 300 to move when it moves. The way to drive the magnetic tube 400 to move can be through a motor or manually. The limiting assembly includes a limiting rod 500 and a limiting member 600. The limiting rod 500 is arranged parallel to the sleeve 200, and the limiting member 600 is rotatably connected to the limiting rod 500. When the stopper 600 rotates relative to the stopper rod 500, the stopper 600 has a first state and a second state. When the stopper 600 is in the first state, the projection of the stopper 600 overlaps with the projection of the magnetic tube 400 along the length direction of the conveying rod 300, and the stopper 600 can limit the movement of the magnetic tube 400 on the sleeve 200. When the stopper 600 is in the second state, the projection of the stopper 600 does not overlap with the projection of the magnetic tube 400 along the length direction of the conveying rod 300. After the conveying rod 300 is arranged in the moving cavity, when the magnetic tube 400 moves relative to the sleeve 200, the magnetic tube 400 can drive the conveying rod 300 to move, so that the conveying rod 300 conveys the substrate. When the limiting member 600 is in the first state, since the projection of the limiting member 600 overlaps with the projection of the magnetic tube 400, the limiting member 600 will prevent the magnetic tube 400 from continuing to move on the sleeve 200, thereby limiting the movement of the magnetic tube 400. In the prior art, when the magnetic tube 400 stops at a specific position, it is necessary to mark and observe. In the present application, as long as the limiting member 600 prevents the magnetic tube 400 from continuing to move, the staff can know that the magnetic tube 400 has moved to the set position. Therefore, the vacuum magnetic rod 100 can be convenient for the staff to use.

[0036] Furthermore, it is mentioned above that when the stopper 600 is in the first state, the stopper 600 will block the magnetic tube 400 from continuing to move. When the stopper 600 is in the second state, since the projection of the stopper 600 and the projection of the magnetic tube 400 do not overlap, the stopper 600 will not block the magnetic tube 400 from continuing to move.

[0037] For further information, please refer to Figure 1In some embodiments, there are multiple limit members 600, and the multiple limit members 600 are spaced apart along the length direction of the limit rod 500. For example, there are two limit members 600, wherein when the magnetic tube 400 moves to the position of the first limit member 600, the movement distance of the magnetic tube 400 is 100 cm, and the distance between the two limit members 600 is 20 cm, that is, when the magnetic tube 400 moves to the second limit member 600, the movement distance of the magnetic tube 400 is 120 cm. In some cases, the stroke of the conveying rod 300 is changed according to different substrates. For example, the conveying rod 300 needs to move 100 cm when conveying a substrate for the first time, and needs to move 120 cm when conveying a substrate for the second time. After setting two limiters 600, the first limiter 600 in the first state can make the magnetic tube 400 move 100 cm. When the conveying rod 300 conveys the second substrate, the first limiter 600 is switched from the first state to the second state, which can prevent the first limiter 600 from blocking the magnetic tube 400 from continuing to move. Then, the magnetic tube 400 is blocked by the second limiter 600 in the first state, so that the movement distance of the conveying rod 300 is 120 cm. In this way, through the cooperation of multiple limiters 600, it is convenient for the staff to adjust the movement distance of the conveying rod 300.

[0038] For further information, please refer to Figure 1 In some embodiments, the limiting assembly further includes a first support 700 and a second support 800. The two ends of the first support 700 are respectively connected to one end of the sleeve 200 and one end of the limiting rod 500, and the two ends of the second support 800 are respectively connected to the other end of the sleeve 200 and the other end of the limiting rod 500. Specifically, the limiting rod 500 is connected to the sleeve 200 through the first support 700 and the second support 800, so that the limiting rod 500 and the sleeve 200 are parallel to each other. After the limiting rod 500 and the sleeve 200 are parallel, when the limiting member 600 is in the first state, the limiting member 600 will hinder the movement of the magnetic tube 400.

[0039] Further, the specific structure of the first support 700 and the second support 800 is introduced below. In some embodiments, the first support 700 includes a first half seat 710 and a second half seat 720. The first half seat 710 is threadedly connected to the second half seat 720, and the first half seat 710 and the second half seat 720 jointly form a mounting hole, and the sleeve 200 is arranged in the mounting hole. Specifically, a semicircular hole is provided on the first half seat 710, and a semicircular hole can also be provided on the second half seat 720. After the first half seat 710 and the second half seat 720 are connected, the two semicircular holes can form a circular hole, so as to be sleeved on the outside of the sleeve 200. The threaded connection method can facilitate the staff to disassemble the first half seat 710 and the second half seat 720. It should be added that the structure of the second support 800 can be consistent with the structure of the first support 700, which will not be further described here.

[0040] For further information, please refer to Figure 1 and Figure 3 In some embodiments, the limiting assembly further includes a clamping member 900, which is detachably connected to the limiting rod 500, and the limiting member 600 is rotatably connected to the clamping member 900. Specifically, the limiting member 600 can be rotatably connected to the limiting rod 500 through the clamping member 900. That is, after the clamping member 900 is installed on the limiting rod 500, the limiting member 600 can be rotatably connected to the clamping member 900, which has the characteristics of simple structure and convenient disassembly.

[0041] For further information, please refer to Figure 1 and Figure 3 , the specific structure of the clamping member 900 is introduced below. In some embodiments, the limiting assembly also includes a locking member. The clamping member 900 includes a first clamp 910 and a second clamp 920. One end of the first clamp 910 is connected to one end of the second clamp 920, and the locking member is passed through the other end of the first clamp 910 and the other end of the second clamp 920, so that the first clamp 910 and the second clamp 920 jointly form a fixing hole, and the limiting rod 500 is arranged in the fixing hole. Specifically, the material of the clamping member 900 can be rubber material, the locking member can be a screw, the first clamp 910 and the second clamp 920 are both provided with threaded holes, and the first clamp 910 and the second clamp 920 are both provided with semicircular holes, and the two semicircular holes can form a fixing hole. When installing the clamping member 900 on the limiting rod 500, the semicircular hole of the first clamping member 910 can be firstly put on the limiting rod 500, and then the first clamping member 910 and the second clamping member 920 can be connected with screws, so that the clamping member 900 can be installed on the limiting rod 500. By changing the position of the clamping member 900 on the limiting rod 500, the movement distance of the magnetic tube 400 can be indirectly changed.

[0042] For further information, please refer to Figure 13, the following describes how the clamping member 900 is rotatably connected to the limiting member 600. In some embodiments, the limiting assembly further includes a rotating shaft 1000. The clamping member 900 is provided with a first rotating hole, the limiting member 600 is provided with a second rotating hole, and the rotating shaft 1000 is passed through the first rotating hole and the second rotating hole. After the rotating shaft 1000 passes through the first rotating hole and the second rotating hole, the limiting member 600 can be rotated relative to the clamping member 900. In order to prevent the rotating shaft 1000 from being separated from the first rotating hole and the second rotating hole, a latch can be inserted at both ends of the rotating shaft 1000.

[0043] For further information, please refer to Figure 1 and Figure 4 In some embodiments, a placement groove 310 is provided at one end of the conveying rod 300, and the placement groove 310 is used to place the substrate. The shape of the placement groove 310 is not specifically limited, and the shape of the placement groove 310 can be circular, rectangular, square, etc. After the substrate is placed on the placement groove 310, when the conveying rod 300 conveys the substrate, the placement groove 310 can protect the substrate and effectively prevent the substrate from falling during the movement.

[0044] For further information, please refer to Figure 1 and Figure 4 In some embodiments, the wall of the placement groove 310 includes a main body 311 and two branch parts 312. The two branch parts 312 are connected to the main body 311, and the extension direction of one branch part 312 is different from the extension direction of the other branch part 312. The two branch parts 312 and the main body 311 can form a "Y"-shaped structure together, which can reduce the cost of materials on the one hand, and facilitate the robot to clamp the substrate on the other hand.

[0045] In some embodiments, the vacuum coating device includes the vacuum magnetic rod 100 of any one of the above embodiments. The vacuum coating device has a processing chamber and a sampling chamber, which are interconnected. The delivery rod 300 is initially located in the sampling chamber, and then the substrate can be delivered to the processing chamber. After the conveying rod 300 is arranged in the moving cavity, when the magnetic tube 400 moves relative to the sleeve 200, the magnetic tube 400 can drive the conveying rod 300 to move, so that the conveying rod 300 conveys the substrate. When the stopper 600 is in the first state, since the projection of the stopper 600 overlaps with the projection of the magnetic tube 400, the stopper 600 will block the magnetic tube 400 from continuing to move on the sleeve 200, thereby limiting the movement of the magnetic tube 400. In the prior art, when the magnetic tube 400 stops at a specific position, it is necessary to mark and observe. In the present application, as long as the stopper 600 blocks the magnetic tube 400 from continuing to move, the staff can know that the magnetic tube 400 has moved to the set position. Therefore, the vacuum magnetic rod 100 can be convenient for the staff to use. Further, the vacuum coating equipment with the vacuum magnetic rod 100 can be convenient for the staff to use.

[0046] The embodiments of the utility model are described in detail above in conjunction with the accompanying drawings, but the utility model is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the purpose of the utility model. In addition, the embodiments of the utility model and the features in the embodiments can be combined with each other without conflict.

Claims

1. Vacuum magnetic rod, characterized in that: include: a cannula having a movement cavity; A conveying rod, disposed in the movement cavity, the conveying rod is used to convey the substrate, and the conveying rod is provided with a first magnet; A magnetic tube, sleeved on the outer side of the sleeve, the magnetic tube is provided with a second magnet, and the magnetic tube can move relative to the sleeve and drive the conveying rod to move; A limit assembly includes a limit rod and a limit member, wherein the limit rod is arranged parallel to the sleeve, and the limit member is rotatably connected to the limit rod. The limit member has a first state and a second state. When the limit member is in the first state, along the length direction of the conveying rod, the projection of the limit member overlaps with the projection of the magnetic tube, and the limit member can limit the movement of the magnetic tube on the sleeve. When the limit member is in the second state, along the length direction of the conveying rod, the projection of the limit member does not overlap with the projection of the magnetic tube.

2. The vacuum magnetic rod according to claim 1, characterized in that: There are multiple limiting members, and the multiple limiting members are arranged at intervals along the length direction of the limiting rod.

3. The vacuum magnetic rod according to claim 1, characterized in that: The limiting assembly also includes a first support and a second support, wherein two ends of the first support are respectively connected to one end of the sleeve and one end of the limiting rod, and two ends of the second support are respectively connected to the other end of the sleeve and the other end of the limiting rod.

4. The vacuum magnetic rod according to claim 3, characterized in that: The first support includes a first half seat and a second half seat, the first half seat is threadedly connected to the second half seat, the first half seat and the second half seat jointly form a mounting hole, and the sleeve is disposed in the mounting hole.

5. The vacuum magnetic rod according to claim 1, characterized in that: The limiting assembly also includes a clamping member, which is detachably connected to the limiting rod, and the limiting member is rotatably connected to the clamping member.

6. The vacuum magnetic rod according to claim 5, characterized in that: The limiting assembly also includes a locking piece, and the clamping piece includes a first clamp and a second clamp, one end of the first clamp is connected to one end of the second clamp, and the locking piece is passed through the other end of the first clamp and the other end of the second clamp, so that the first clamp and the second clamp jointly form a fixing hole, and the limiting rod is arranged in the fixing hole.

7. The vacuum magnetic rod according to claim 5, characterized in that: The limiting component also includes a rotating shaft, the clamping member is provided with a first rotating hole, the limiting member is provided with a second rotating hole, and the rotating shaft passes through the first rotating hole and the second rotating hole.

8. The vacuum magnetic rod according to claim 1, characterized in that: One end of the conveying rod is provided with a placement groove, and the placement groove is used for placing the substrate.

9. The vacuum magnetic rod according to claim 8, characterized in that: The groove wall of the placement groove includes a main body and two branch parts, the two branch parts are connected to the main body, and the extension direction of one branch part is different from the extension direction of the other branch part.

10. Vacuum coating equipment, characterized in that: Comprising the vacuum magnetic rod according to any one of claims 1 to 9.

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