Roller assembly for film forming cavity and film forming cavity

Abstract

The utility model provides a roller assembly for a film forming cavity and the film forming cavity. The roller assembly for the film forming cavity comprises a driving module and a roller driven by the driving module to rotate, the roller assembly further comprises a roller cover wrapping the lower middle portion of the roller, an opening is formed in the position, corresponding to the upper portion of the roller, of the roller cover, and part of the roller with the preset height extends out of the roller cover through the opening to drive a carrier plate. According to the utility model, powder floating and adverse effects on battery yield and powder cleaning caused by powder floating can be reduced, heat radiation can be blocked, the maintenance period is prolonged, and the maintenance cost is reduced.

Description

Technical Field

[0001] The utility model relates to the field of solar cell manufacturing, in particular to a roller assembly for a film forming cavity and a film forming cavity. Background Art

[0002] Thin-film / crystalline silicon heterojunction solar cells (hereinafter referred to as heterojunction solar cells, also known as HIT or SHJ solar cells) belong to the third generation of high-efficiency solar cell technology. It combines the advantages of first-generation crystalline silicon and second-generation silicon thin film, and has the characteristics of high conversion efficiency and low temperature coefficient. In particular, the conversion efficiency of double-sided heterojunction solar cells can reach more than 26%, and has broad market prospects.

[0003] In the manufacture of heterojunction solar cells, a physical vapor deposition (PVD) process is required to be performed using a physical vapor deposition (PVD) device to deposit a transparent conductive film (TCO) on the P-type amorphous silicon and N-type amorphous silicon formed by the PECVD process.

[0004] HIT mass production PVD equipment generally uses a carrier to load silicon wafers, and transfers the carrier through a roller with a rubber ring. The edge of the carrier is a C-shaped frame with a C-shaped cross-section. The contact area between the carrier and the roller rubber ring is the inner top surface of the C-shaped frame. Because both the C-shaped frame and the roller rubber ring will be coated with TCO film, the long-term contact and friction between the two will inevitably cause film powder to fall off. Although the inner bottom surface of the C-shaped frame can accommodate most of the film powder, it is unavoidable that some of the film powder will drift into the PVD equipment cavity. When the PVD equipment cavity breaks the vacuum, there will be airflow impact, and the powder received by the inner bottom surface of the C-shaped frame is easy to be blown up and scattered. There is a certain probability that the surface of the silicon wafer will be contaminated with powder particles, affecting the yield.

[0005] In addition, the powder that drifts into the cavity is too dispersed and difficult to clean. It easily absorbs water vapor during maintenance and affects process stability after long-term accumulation. Furthermore, the process requires the carrier to be preheated, and the radiation plate is very close to the roller rubber ring. Long-term close-range radiation can easily shorten the life of the roller rubber ring, resulting in a shortened maintenance cycle and increased maintenance costs.

[0006] Therefore, how to provide a roller assembly and a film-forming chamber for a film-forming chamber to reduce powder floating and its adverse effects on battery yield and powder cleaning, and to block heat radiation, extend maintenance cycles, and reduce maintenance costs has become a technical problem that needs to be urgently solved in the industry. Utility Model Content

[0007] In view of the above-mentioned problems in the prior art, the utility model proposes a roller assembly for a film forming chamber, which includes a driving module and a roller driven to rotate by the driving module. The roller assembly for the film forming chamber also includes a roller cover covering the middle and lower part of the roller, and the roller cover is provided with an opening corresponding to the upper part of the roller, and a part of the roller of a predetermined height extends out of the roller cover through the opening to drive the carrier plate.

[0008] In one embodiment, the roller cover includes a mounting portion and a cover body portion, the mounting portion is installed around the driving module, and the cover body portion is a cylindrical cover having the opening.

[0009] In one embodiment, the roller transports the carrier by rolling in a C-shaped frame of the carrier, and the roller cover does not contact the C-shaped frame.

[0010] In one embodiment, the roller cover is an aluminum alloy roller cover or an industrial plastic roller cover.

[0011] In one embodiment, the distance between the roller cover and the adjacent roller is 0.5 cm to 1 cm.

[0012] In one embodiment, a roller rubber ring is sleeved on the roller.

[0013] In one embodiment, the portion of the roller extending out of the roller cover and having the predetermined height accounts for one third to one fifth of the height of the entire roller.

[0014] The utility model also provides a film-forming chamber, which comprises a chamber and roller assemblies arranged on both sides of the chamber for driving a carrier plate, wherein the roller assemblies are roller assemblies for the film-forming chamber as described in any one of the above items.

[0015] In one embodiment, the film forming chamber is a physical vapor deposition (PVD) equipment chamber.

[0016] Compared with the prior art in which the roller is not provided with a protective cover, which easily causes powder floating and has an adverse effect on the battery yield and powder cleaning, the roller assembly for the film forming chamber of the utility model includes a driving module and a roller driven to rotate by the driving module, and the roller assembly also includes a roller cover covering the middle and lower part of the roller, and the roller cover has an opening corresponding to the upper part of the roller, and a part of the roller at a predetermined height extends out of the roller cover through the opening to drive the carrier. The utility model can reduce powder floating and its adverse effects on battery yield and powder cleaning, and can block heat radiation, extend the maintenance cycle, and reduce maintenance costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The above features and advantages of the present invention can be better understood after reading the detailed description of the embodiments of the present disclosure in conjunction with the following drawings. In the drawings, the components are not necessarily drawn to scale, and components with similar related properties or features may have the same or similar reference numerals.

[0018] Figure 1 It is a schematic diagram of the composition structure of an embodiment of a roller assembly for a film-forming chamber of the utility model.

[0019] Figure 2 for Figure 1 A schematic diagram of the three-dimensional structure of the roller cover 1 in FIG.

[0020] Figure 3 It is a schematic diagram of the partial composition structure of the film-forming chamber of the utility model. DETAILED DESCRIPTION

[0021] The present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments, so as to more clearly understand the purpose, characteristics and advantages of the present invention. It should be understood that the various aspects described below in conjunction with the accompanying drawings and specific embodiments are merely exemplary and should not be construed as limiting the scope of protection of the present invention in any way. Unless the context clearly indicates otherwise, the singular forms "one" and "the" include plural referents. The words "first", "second" and similar terms used in this specification and the claims do not indicate any order, quantity or importance, but are only used to distinguish different components.

[0022] See also Figure 1 as well as Figure 2 , Figure 1 This is a schematic diagram of the composition structure of an embodiment of a roller assembly for a film-forming chamber of the utility model. Figure 2 for Figure 1 The three-dimensional structure diagram of the roller cover 1 in FIG. Figure 1 As shown, the roller assembly for the film forming chamber of the utility model includes a roller cover 1, a roller 2 and a driving module 3. The roller 2 is driven to rotate by the driving module 3. The roller cover 1 covers the middle and lower part of the roller. The roller cover 1 is provided with a first opening 110 corresponding to the upper part of the roller 2. A portion of the roller 2 of a predetermined height extends out of the roller cover 1 through the first opening 110 to drive the carrier plate. The portion of the roller 2 of the predetermined height extending out of the roller cover 1 accounts for one third to one fifth of the height of the entire roller 2. The roller cover 1 can be an aluminum alloy roller cover or an industrial plastic roller cover, etc. A roller rubber ring 20 is sleeved on the roller 2, and the roller rubber ring 20 directly contacts the top wall of the C-shaped frame.

[0023] like Figure 1 and Figure 2As shown, the roller cover 1 includes a mounting portion 10 and a cover body 11, wherein the mounting portion 10 is mounted around the driving module 3, and the cover body 11 is a cylindrical cover having a first opening 110. More specifically, the mounting portion 10 can be mounted on a housing of the driving module 3, and the driving module 3 can be a magnetic fluid bearing. The cover body 11 can also be other approximately cylindrical covers.

[0024] The roller 2 transfers the carrier by rolling in the C-shaped frame (not shown) of the carrier, and the roller cover 1 does not contact the C-shaped frame. The distance between the roller cover 1 and the adjacent roller 2 is 0.5 cm to 1 cm.

[0025] See also Figure 3 , which is a schematic diagram of the partial composition structure of the film-forming chamber of the utility model. Figure 3 As shown, the film forming chamber of the utility model includes a chamber 4, a guide wheel 5, and a roller assembly arranged on both sides of the chamber for driving the carrier plate. The roller assembly is as shown in FIG. Figure 1 The roller assembly for the film forming chamber shown in the figure comprises a roller cover 1, a roller 2 and a driving module 3. The driving module 3 can drive multiple rollers 2 simultaneously through a pulley 6. Figure 2 As shown, the roller cover 1 is further provided with a second opening 112 corresponding to the guide wheel 5, which is lower than the first opening 110, to accommodate the guide wheel 5 passing through. The mounting portion 10 is also provided with a third opening 102 for the guide wheel 5 to pass through. The film forming chamber can be a physical vapor deposition PVD equipment chamber.

[0026] The roller cover 1 of the utility model adopts a semi-enclosed structure, so that most of the roller friction powder falls into the roller cover 1, thereby improving the powder collection rate, reducing powder scattering, and preventing powder from contaminating the substrate. The semi-enclosed roller cover can effectively block the radiation of the heating plate, extend the life of the roller rubber ring, and reduce maintenance costs.

[0027] The roller assembly for the film-forming chamber of the utility model includes a driving module and a roller driven to rotate by the driving module, and the roller assembly for the film-forming chamber also includes a roller cover covering the middle and lower part of the roller, and the roller cover is provided with an opening corresponding to the upper part of the roller, and a part of the roller at a predetermined height extends out of the roller cover through the opening to drive the carrier plate. The utility model can reduce powder floating and its adverse effects on battery yield and powder cleaning, and can block heat radiation. The utility model can reduce powder floating and its adverse effects on battery yield and powder cleaning, and can block heat radiation, extend the maintenance cycle, and reduce maintenance costs.

[0028] The above embodiments are provided for persons familiar with the art to implement or use the present invention. Personnel familiar with the art can make various modifications or changes to the above embodiments without departing from the utility model concept of the present invention. Therefore, the protection scope of the present invention is not limited to the above embodiments, but should be the maximum scope of the innovative features mentioned in the claims.

Claims

1. A roller assembly for a film forming chamber, comprising a driving module and a roller driven to rotate by the driving module, characterized in that: The roller assembly for the film forming chamber also includes a roller cover covering the lower middle part of the roller, the roller cover is provided with an opening corresponding to the upper part of the roller, and a portion of the roller at a predetermined height extends out of the roller cover through the opening to drive the carrier plate.

2. The roller assembly for a film forming chamber according to claim 1, characterized in that: The roller cover comprises a mounting portion and a cover body portion, wherein the mounting portion is mounted around the driving module, and the cover body portion is a cylindrical cover having the opening.

3. The roller assembly for a film forming chamber according to claim 2, characterized in that: The roller conveys the carrier plate by rolling in the C-shaped frame of the carrier plate, and the roller cover does not contact the C-shaped frame.

4. The roller assembly for a film forming chamber according to claim 1, characterized in that: The roller cover is an aluminum alloy roller cover or an industrial plastic roller cover.

5. The roller assembly for a film forming chamber according to claim 1, characterized in that: The distance between the roller cover and the adjacent roller is 0.5 cm to 1 cm.

6. The roller assembly for a film forming chamber according to claim 1, characterized in that: A roller rubber ring is sleeved on the roller, and the roller rubber ring directly contacts the top wall of the C-shaped frame.

7. The roller assembly for a film forming chamber according to claim 1, characterized in that: The portion of the roller extending out of the roller cover and having the predetermined height accounts for one third to one fifth of the height of the entire roller.

8. A film forming chamber, comprising a chamber and roller assemblies arranged on both sides of the chamber for driving a carrier plate, characterized in that: The roller assembly is a roller assembly for a film-forming chamber as described in any one of claims 1 to 7.

9. The film forming chamber according to claim 8, characterized in that: The film forming chamber is a physical vapor deposition (PVD) equipment chamber.

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