Turnover device and coating equipment
By designing a flip device including a clamping assembly and a driving assembly, the problem of repeated disassembly and assembly when flipping the substrate in the prior art is solved, and convenient substrate pick-up and placement and flipping are achieved, and operation convenience is improved.
Patent Information
- Application Number
- CN202421157570.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-24
- Publication Date
- 2025-02-11
- Estimated Expiration
- 2034-05-24
AI Technical Summary
When the existing flip device flips the substrate, staff members need to repeatedly disassemble and assemble the substrate, resulting in inconvenience in use.
A flip device is designed, including a clamping assembly and a driving assembly, which consists of a first clamping member and a second clamping member, and the clamping members are driven close to each other or away from each other to clamp or release the base The clamping assembly is driven to rotate by the second driving assembly to flip the substrate.
It realizes that the substrate is easily picked up and flipped without repeated disassembly and assembled, and improves the operation convenience of staff.
Smart Images
Figure CN222455194U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor manufacturing equipment, in particular to a turning device and a coating device. Background Art
[0002] In the related art, during the semiconductor wafer packaging process, the substrate needs to be flipped before proceeding to the next process. The existing flipping device flips the substrate in a manner that the substrate is fixed on a flip bracket, and then the flip bracket is driven by a driving device to flip the substrate. Among them, the method of fixing the substrate on the flip bracket requires the staff to repeatedly disassemble and install the substrate, which is particularly inconvenient for the staff. Utility Model Content
[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a turning device that can facilitate workers to take and put substrates.
[0004] The utility model also provides a coating device.
[0005] According to the first aspect of the present invention, the turning device comprises:
[0006] A clamping assembly, comprising a first clamping member and a second clamping member;
[0007] a first driving assembly connected to the clamping assembly, the first driving assembly being used to drive the first clamping member and the second clamping member to move closer to each other so that the first clamping member and the second clamping member clamp the substrate together; or the first driving assembly being used to drive the first clamping member and the second clamping member to move away from each other so that the first clamping member and the second clamping member release the substrate;
[0008] The second driving component is connected to the clamping component, and the second driving component is used to drive the clamping component to rotate, so that the clamping component drives the substrate to rotate.
[0009] According to the flipping device of the embodiment of the utility model, at least the following beneficial effects are achieved: the clamping assembly is used to clamp the substrate. Specifically, after the first driving assembly is connected to the clamping assembly, the first driving assembly can drive the first clamping member and the second clamping member to approach each other, which can make the first clamping member and the second clamping member clamp the substrate together. After that, the clamping assembly can be rotated by the second driving assembly to flip the substrate. After the substrate is flipped, the first driving assembly can make the first clamping member and the second clamping member move away from each other, thereby releasing the substrate. In the prior art, when flipping the substrate, the staff needs to repeatedly disassemble and assemble the substrate, which makes it inconvenient to use. In the present application, the clamping assembly can take and place the substrate under the action of the first driving assembly, which can be convenient for the staff to use. Specifically, the flipping device can facilitate the staff to take and place the substrate.
[0010] According to the flipping device of some embodiments of the utility model, the first driving component includes a first driving member and a first rotating member, and the clamping component also includes a first moving member and a first fixed member, the first driving member is connected to the first rotating member, the first rotating member is connected to the first moving member, the first moving member is slidably connected to the first fixed member, and the first moving member is connected to the first clamping member, wherein the first driving member can drive the first rotating member to move, and the first rotating member drives the first moving member to slide on the first fixed member, so that the first moving member drives the first clamping member to approach or move away from the second clamping member.
[0011] According to the flipping device of some embodiments of the utility model, the clamping assembly also includes a second moving part and a second fixed part, the second moving part is slidably connected to the second fixed part, the second moving part is connected to the second clamping part, the first rotating part has a gear, the gear is engaged with the first moving part and the second moving part, the first driving part can drive the first rotating part to rotate, and the first rotating part drives the first moving part and the second moving part to slide, so that the first clamping part and the second clamping part are closer to or farther away from each other.
[0012] According to the flipping device of some embodiments of the utility model, the second driving assembly includes a second driving member, a second rotating member and an intermediate member, one end of the second rotating member is connected to the second driving member, the other end of the second rotating member is fixedly connected to the intermediate member, the intermediate member is connected to the clamping assembly, the second driving member can drive the second rotating member to rotate, the second rotating member drives the intermediate member to rotate, so that the intermediate member drives the clamping assembly to rotate.
[0013] According to the flipping device of some embodiments of the utility model, the middle piece is provided with a movement cavity, the first fixing piece and the first moving piece are both arranged in the movement cavity, the first fixing piece is fixedly connected to the cavity wall of the movement cavity, the second rotating piece is provided with a cavity, one end of the first rotating piece passes through the cavity and is located in the movement cavity.
[0014] According to the flipping device of some embodiments of the present utility model, the second driving component also includes a sealing member, and the sealing member is arranged in the cavity, and the sealing member separates the cavity and the movement cavity.
[0015] The coating device according to the second embodiment of the utility model includes:
[0016] A housing having a processing cavity;
[0017] The flipping device as described in any one of the embodiments of the first aspect is arranged in the processing chamber.
[0018] The coating equipment according to the embodiment of the utility model has at least the following beneficial effects: wherein, the clamping assembly is used to clamp the substrate. Specifically, after the first driving assembly is connected to the clamping assembly, the first driving assembly can drive the first clamping member and the second clamping member to approach each other, which can make the first clamping member and the second clamping member clamp the substrate together. After that, the clamping assembly can be rotated by the second driving assembly to flip the substrate. After the substrate is flipped, the first driving assembly can make the first clamping member and the second clamping member move away from each other, thereby releasing the substrate. In the prior art, when flipping the substrate, the staff needs to repeatedly disassemble and assemble the substrate, which makes it inconvenient to use. In the present application, the clamping assembly can take and place the substrate under the action of the first driving assembly, which can be convenient for the staff to use. Specifically, the flipping device can facilitate the staff to take and place the substrate. Further, the coating equipment with the flipping device also has the characteristic of being easy to use.
[0019] According to some embodiments of the coating equipment of the present invention, the coating equipment further includes two deviation correction devices, which are arranged in the processing chamber, and the two deviation correction devices are respectively located on both sides of the first clamping member, and the deviation correction devices are used to correct the substrate.
[0020] According to some embodiments of the coating equipment of the present invention, the deviation correction device includes a third driving member and a deviation correction member, the third driving member is connected to the deviation correction member, and the third driving member is used to drive the deviation correction member to approach or move away from the clamping assembly.
[0021] According to the coating equipment of some embodiments of the present utility model, the deviation-correcting device further comprises a bellows, and two ends of the bellows are respectively connected to the deviation-correcting member and the third driving member.
[0022] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS
[0023] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:
[0024] Figure 1 Schematic diagram of a flipping device in some embodiments of the utility model;
[0025] Figure 2 It is a cross-sectional schematic diagram of the turning device of some embodiments of the utility model;
[0026] Figure 3 It is a partial cross-sectional schematic diagram of the turning device of some embodiments of the utility model;
[0027] Figure 4 Schematic diagram of a clamping assembly and an intermediate piece of a flipping device in some embodiments of the utility model;
[0028] Figure 5 It is a schematic diagram of coating equipment in some embodiments of the utility model;
[0029] Figure 6 It is a schematic top view of coating equipment in some embodiments of the utility model;
[0030] Figure 7 It is a schematic diagram of a deviation correction device in a coating device according to some embodiments of the utility model.
[0031] Reference numerals:
[0032] Flipping device 10, coating equipment 20, clamping assembly 100, first clamping member 110, second clamping member 120, first moving member 130, first fixed member 140, second moving member 150, second fixed member 160, first driving assembly 200, first driving member 210, first rotating member 220, second driving assembly 300, second driving member 310, second rotating member 320, cavity 321, intermediate member 330, moving cavity 331, sealing member 340, shell 400, processing cavity 410, correcting device 500, third driving member 510, bellows 520, correcting member 530. DETAILED DESCRIPTION
[0033] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.
[0034] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.
[0035] In the description of the present utility model, "several" means more than one, "many" means more than two, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.
[0036] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.
[0037] In the description of the utility model, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.
[0038] Please refer to Figures 1 to 4In some embodiments, the flipping device 10 is used to flip the substrate, and the substrate can be a silicon substrate, a ceramic substrate, a glass substrate, etc. The flipping device 10 includes: a clamping assembly 100, a first driving assembly 200 and a second driving assembly 300. The clamping assembly 100 includes a first clamping member 110 and a second clamping member 120. The clamping assembly 100 is used to clamp the substrate. After the clamping assembly 100 clamps the substrate, it can effectively ensure that the substrate will not fall and be damaged when flipping. The first clamping member 110 has an abutment block, and the material of the abutment block can be a flexible material, so as to avoid damaging the substrate. The structure of the second clamping member 120 can be consistent with the structure of the first clamping member 110. There can be multiple first clamping members 110 and second clamping members 120. When the first clamping member 110 and the second clamping member 120 clamp the substrate together, multiple first clamping members 110 and second clamping members 120 can be clamped at the middle position and edge position of the substrate. The first driving assembly 200 is connected to the clamping assembly 100. The first driving assembly 200 is used to drive the first clamping member 110 and the second clamping member 120 to approach each other, so that the first clamping member 110 and the second clamping member 120 clamp the substrate together. Alternatively, the first driving assembly 200 is used to drive the first clamping member 110 and the second clamping member 120 to move away from each other, so that the first clamping member 110 and the second clamping member 120 release the substrate. Specifically, the first driving assembly 200 drives the first clamping member 110 and the second clamping member 120 to approach each other in a specific manner that the first driving assembly 200 drives the first clamping member 110 to approach the second clamping member 120, or the first driving assembly 200 drives the second clamping member 120 to approach the first clamping member 110, or the first driving assembly 200 drives the first clamping member 110 and the second clamping member 120 to move to approach each other. Specifically, the first clamping member 110 and the second clamping member 120 clamp the substrate together, and the first clamping member 110 and the second clamping member 120 are clamped on both sides of the substrate, that is, the first clamping member 110 and the second clamping member 120 are respectively located on the upper surface and the lower surface of the substrate. The second driving assembly 300 is connected to the clamping assembly 100, and the second driving assembly 300 is used to drive the clamping assembly 100 to rotate, so that the clamping assembly 100 drives the substrate to rotate. After the second driving assembly 300 rotates the clamping assembly 100, the substrate can be flipped, for example, the substrate is flipped 180 degrees.
[0039] Among them, the clamping assembly 100 is used to clamp the substrate. Specifically, after the first driving assembly 200 is connected to the clamping assembly 100, the first driving assembly 200 can drive the first clamping member 110 and the second clamping member 120 to approach each other, which can make the first clamping member 110 and the second clamping member 120 clamp the substrate together. After that, the clamping assembly 100 can be rotated by the second driving assembly 300 to flip the substrate. After the substrate is flipped, the first driving assembly 200 can make the first clamping member 110 and the second clamping member 120 move away from each other, thereby releasing the substrate. In the prior art, when the staff flips the substrate, it is necessary to repeatedly disassemble and assemble the substrate, which will cause inconvenience in use. In the present application, the clamping assembly 100 can take and place the substrate under the action of the first driving assembly 200, which can be convenient for the staff to use. Specifically, the flipping device 10 can facilitate the staff to take and place the substrate. Further, the coating equipment 20 with the flipping device 10 also has the characteristics of being easy to use. In addition, a buffer may be provided on the clamping assembly 100 to reduce the probability of scratches and breakages on the surface of the substrate and reduce damage to the substrate, thereby improving the yield of the finished substrate.
[0040] Further, the following describes how the first driving assembly 200 drives the clamping assembly 100. Figures 1 to 4In some embodiments, the first driving assembly 200 includes a first driving member 210 and a first rotating member 220. The clamping assembly 100 also includes a first moving member 130 and a first fixed member 140. The first driving member 210 is connected to the first rotating member 220, the first rotating member 220 is connected to the first moving member 130, the first moving member 130 is slidably connected to the first fixed member 140, and the first moving member 130 is fixedly connected to the first clamping member 110. Among them, the first driving member 210 can drive the first rotating member 220 to move, and the first rotating member 220 drives the first moving member 130 to slide on the first fixed member 140, so that the first moving member 130 drives the first clamping member 110 to approach or move away from the second clamping member 120. Specifically, the first driving member 210 can be a motor. After the motor is connected to the first rotating member 220, the first rotating member 220 can be a rotating shaft, and the rotating shaft can rotate under the drive of the motor. After the first rotating member 220 rotates, the first moving member 130 can slide on the first fixed member 140, so that the first fixed member 140 drives the first clamping member 110 to perform linear motion. It can be imagined that the first clamping member 110 moves closer to or farther from the second clamping member 120 in linear motion. Therefore, when the first rotating member 220 rotates, in order to realize the conversion of rotation into linear motion, a gear can be provided on the first rotating member 220, and the gear and the first moving member 130 are meshed, so that when the first rotating member 220 rotates, the first moving member 130 slides on the first fixed member 140. The specific way for the first moving member 130 to slide on the first fixed member 140 can be that the first moving member 130 has a slider and the first fixed member 140 has a slide rail, so that the first moving member 130 slides on the first fixed member 140. In addition, when the first driving member 210 is a cylinder, the cylinder can directly drive the first rotating member 220 to perform linear motion in linear motion, so that the first moving member 130 slides.
[0041] Furthermore, the first driving assembly 200 mentioned above can drive the first clamping member 110 to move closer to or away from the second clamping member 120, wherein the first driving assembly 200 can also simultaneously drive the first clamping member 110 and the second clamping member 120 to move closer to or away from each other. Figures 1 to 4In some embodiments, the clamping assembly 100 further includes a second moving member 150 and a second fixed member 160. The second moving member 150 is slidably connected to the second fixed member 160. The specific manner in which the second moving member 150 slides on the second fixed member 160 may be that the second moving member 150 has a slider and the second fixed member 160 has a slide rail, so that the second moving member 150 slides on the second fixed member 160. The second moving member 150 is connected to the second clamping member 120. The first rotating member 220 has a gear, which is meshed with the first moving member 130 and the second moving member 150. The gear meshing with the first moving member 130 and the second moving member 150 may be that the first moving member 130 is provided with a rack, the rack is meshed with the gear, and when the gear rotates, the rack moves linearly; the second moving member 150 is provided with a rack, the rack is meshed with the gear, and when the gear rotates, the rack moves linearly. The first driving member 210 can drive the first rotating member 220 to rotate, and the first rotating member 220 drives the first moving member 130 and the second moving member 150 to slide, so that the first clamping member 110 and the second clamping member 120 are moved closer to or farther away from each other. Specifically, the first driving member 210 can be a motor. When the motor rotates, it drives the first rotating member 220 to rotate. When the first rotating member 220 rotates, the gear also rotates. The gear can drive the first moving member 130 and the second moving member 150 to move, so that the first clamping member 110 and the second clamping member 120 are moved closer to or farther away from each other.
[0042] Further, the specific structure of the second driving assembly 300 is described below, please refer to Figures 1 to 4 In some embodiments, the second driving assembly 300 includes a second driving member 310, a second rotating member 320 and an intermediate member 330. One end of the second rotating member 320 is connected to the second driving member 310, and the other end of the second rotating member 320 is fixedly connected to the intermediate member 330. The intermediate member 330 is connected to the clamping assembly 100. The second driving member 310 can drive the second rotating member 320 to rotate, and the second rotating member 320 drives the intermediate member 330 to rotate, so that the intermediate member 330 drives the clamping assembly 100 to rotate. Specifically, the second driving member 310 can be a motor. After the motor rotates, the motor can drive the second rotating member 320 to rotate, so that the intermediate member 330 rotates. After the clamping assembly 100 clamps the substrate, the clamping assembly 100 is driven by the intermediate member 330 to rotate, which can cause the substrate to flip. Among them, the angle of the substrate flipping is not specifically limited, for example, it can be 30 degrees, 60 degrees, 90 degrees, 180 degrees, 270 degrees or 360 degrees.
[0043] For further information, please refer to Figures 1 to 4In some embodiments, the intermediate member 330 is provided with a motion cavity 331, the first fixed member 140 and the first moving member 130 are both arranged in the motion cavity 331, the first fixed member 140 is fixedly connected to the cavity wall of the motion cavity 331, and after the first fixed member 140 is fixed, the first moving member 130 can be conveniently slid. The second rotating member 320 is provided with a cavity 321, and one end of the first rotating member 220 passes through the cavity 321 and is located in the motion cavity 331. Specifically, the design of arranging the first rotating member 220 in the cavity 321 of the second rotating member 320 can achieve the effect of space optimization, thereby saving space. The design of setting the motion cavity 331 can make the first fixed member 140, the first moving member 130, the second moving member 150 and the second fixed member 160 located therein, which can prevent these parts from contacting with the outside world, thereby reducing the possibility of mechanical failure. The other end of the first rotating member 220 can protrude out of the cavity 321, so as to be connected to the first driving member 210. One end of the second rotating member 320 can also be connected to the second driving member 310, so that the second rotating member 320 is driven to rotate. In addition, the first driving member 210 can be connected to the first rotating member 220 through a coupling, and the second driving member 310 can be connected to the second rotating member 320 through a synchronous pulley, so that the first driving member 210 and the second driving member 310 can be arranged in parallel.
[0044] For further information, please refer to Figures 1 to 4 In some embodiments, the second driving assembly 300 further includes a seal 340, which is disposed in the cavity 321, and the seal 340 is separated from the cavity 321 and the moving cavity 331. Specifically, when the flipping device 10 is disposed in the coating device 20, the coating device 20 needs to process the substrate under a vacuum environment. Therefore, in order to prevent air from entering the moving cavity 331 from the cavity 321, and air from the moving cavity 331 into the processing cavity 410, the cavity 321 and the moving cavity 331 can be separated by the seal 340. Two seals 340 can be provided, and the two seals 340 are respectively located at the two ends of the cavity 321. In addition, the provision of the seal 340 can also effectively reduce the contamination of the substrate.
[0045] Please refer to Figure 5 and Figure 6 In some embodiments, the coating device 20 includes: a housing 400 and the flipping device 10 in the above embodiment. Figure 6The middle shell 400 has no upper cover, so the flipping device 10 in the processing chamber 410 can be directly seen. The shell 400 has a processing chamber 410. The flipping device 10 is arranged in the processing chamber 410. Among them, the clamping assembly 100 is used to clamp the substrate. Specifically, after the first drive assembly 200 is connected to the clamping assembly 100, the first drive assembly 200 can drive the first clamping member 110 and the second clamping member 120 to approach each other, which can make the first clamping member 110 and the second clamping member 120 clamp the substrate together. After that, the clamping assembly 100 can be rotated by the second drive assembly 300 to flip the substrate. After the substrate is flipped, the first drive assembly 200 can make the first clamping member 110 and the second clamping member 120 move away from each other, thereby releasing the substrate. In the prior art, when the staff flips the substrate, it is necessary to repeatedly disassemble and assemble the substrate, which will cause inconvenience in use. In the present application, the clamping assembly 100 can take and place the substrate under the action of the first drive assembly 200, which can be convenient for the staff to use. Specifically, the turning device 10 can facilitate the workers to take and place the substrate. Furthermore, the coating equipment 20 having the turning device 10 is also convenient to use.
[0046] For further information, please refer to Figure 5 and Figure 6 In some embodiments, the coating device 20 further includes two deflection correction devices 500, which are disposed in the processing chamber 410. The two deflection correction devices 500 are respectively located on both sides of the first clamping member 110, and the deflection correction devices 500 are used to correct the deflection of the substrate. Specifically, when the position of the substrate in the processing chamber 410 deviates from the set processing position, the substrate can be corrected by the deflection correction device 500. The two deflection correction devices 500 are respectively located on both sides of the first clamping member 110. When the clamping assembly 100 clamps the substrate, the two deflection correction devices 500 can be respectively located on both sides of the substrate, thereby abutting against the substrate for correction, which can effectively ensure that the position of the substrate is in a reasonable processing position.
[0047] Further, the specific structure of the correction device 500 is described below, please refer to Figure 6 and Figure 7 In some embodiments, the deflection correction device 500 includes a third driving member 510 and a deflection correction member 530. The third driving member 510 is connected to the deflection correction member 530, and the third driving member 510 is used to drive the deflection correction member 530 to approach or move away from the clamping assembly 100. Specifically, when the third driving member 510 drives the deflection correction member 530 to approach the clamping assembly 100, the deflection correction member 530 will abut against the substrate, thereby pushing the substrate to move and making the substrate reach the correct position. For example, when the substrate is in a left position, the deflection correction member 530 can abut against the left side of the substrate to move the substrate to the right.
[0048] Further, the specific structure of the correction device 500 is described below. Figure 6 and Figure 7 In some embodiments, the deviation correction device 500 further includes a bellows 520, and the two ends of the bellows 520 are respectively connected to the deviation correction member 530 and the third driving member 510. Specifically, the bellows 520 can conveniently form a sealing structure with the shell 400, thereby ensuring that the processing chamber 410 inside the shell 400 is separated from the outside world. In this way, through the design of the bellows 520, on the one hand, the third driving member 510 can drive the deviation correction member 530 to move, and the third driving member 510 can be a cylinder. On the other hand, the bellows 520 can be conveniently sealed, effectively avoiding the contamination of the substrate in the processing chamber 410. Among them, the material of the bellows 520 can be metal.
[0049] Furthermore, in some embodiments, the coating equipment 20 also includes a vacuum pump group, a vacuum pipe, a valve and a vacuum meter. The vacuum meter can be used to measure the vacuum degree in the shell 400, and the vacuum pump group can extract the air to create a vacuum environment.
[0050] The embodiments of the utility model are described in detail above in conjunction with the accompanying drawings, but the utility model is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the purpose of the utility model. In addition, the embodiments of the utility model and the features in the embodiments can be combined with each other without conflict.
Claims
1. A turning device for turning over a substrate, characterized in that: include: A clamping assembly, comprising a first clamping member and a second clamping member; A first driving component is connected to the clamping component, and the first driving component is used to drive the first clamping member and the second clamping member to approach each other, so that the first clamping member and the second clamping member clamp the substrate together; Alternatively, the first driving component is used to drive the first clamping member and the second clamping member to move away from each other, so that the first clamping member and the second clamping member release the substrate; The second driving component is connected to the clamping component, and the second driving component is used to drive the clamping component to rotate, so that the clamping component drives the substrate to rotate.
2. The turning device according to claim 1, characterized in that: The first driving component includes a first driving member and a first rotating member, and the clamping component also includes a first moving member and a first fixed member, the first driving member is connected to the first rotating member, the first rotating member is connected to the first moving member, the first moving member is slidably connected to the first fixed member, and the first moving member is connected to the first clamping member, wherein the first driving member can drive the first rotating member to move, and the first rotating member drives the first moving member to slide on the first fixed member, so that the first moving member drives the first clamping member to approach or move away from the second clamping member.
3. The turning device according to claim 2, characterized in that: The clamping assembly also includes a second moving member and a second fixed member, the second moving member is slidably connected to the second fixed member, the second moving member is connected to the second clamping member, the first rotating member has a gear, the gear is engaged with the first moving member and the second moving member, the first driving member can drive the first rotating member to rotate, and the first rotating member drives the first moving member and the second moving member to slide, so that the first clamping member and the second clamping member are closer to or farther away from each other.
4. The turning device according to claim 2, characterized in that: The second driving assembly includes a second driving member, a second rotating member and an intermediate member, one end of the second rotating member is connected to the second driving member, the other end of the second rotating member is fixedly connected to the intermediate member, the intermediate member is connected to the clamping assembly, the second driving member can drive the second rotating member to rotate, the second rotating member drives the intermediate member to rotate, so that the intermediate member drives the clamping assembly to rotate.
5. The turning device according to claim 4, characterized in that: The intermediate member is provided with a moving cavity, the first fixed member and the first moving member are both arranged in the moving cavity, the first fixed member is fixedly connected to the cavity wall of the moving cavity, the second rotating member is provided with a cavity, one end of the first rotating member passes through the cavity and is located in the moving cavity.
6. The turning device according to claim 5, characterized in that: The second driving assembly further includes a sealing member, which is disposed in the cavity and separates the cavity from the moving cavity.
7. Coating equipment, characterized in that, include: A housing having a processing cavity; The turning device according to any one of claims 1 to 6 is arranged in the processing chamber.
8. The coating device according to claim 7, characterized in that: The coating equipment further comprises two deflection correcting devices, which are arranged in the processing chamber and are respectively located on both sides of the first clamping member, and are used for correcting the deflection of the substrate.
9. The coating device according to claim 8, characterized in that: The deviation-correcting device comprises a third driving member and a deviation-correcting member, wherein the third driving member is connected to the deviation-correcting member, and the third driving member is used to drive the deviation-correcting member to approach or move away from the clamping assembly.
10. The coating device according to claim 9, characterized in that: The deviation-correcting device further comprises a bellows, and two ends of the bellows are respectively connected to the deviation-correcting member and the third driving member.