Air inlet connecting plate device of silicon carbide deposition furnace

Abstract

The utility model discloses an air inlet connecting plate device of a silicon carbide deposition furnace, and relates to the field of air inlet connecting plate devices. The air inlet connecting plate device of the silicon carbide deposition furnace comprises a carbonization furnace main body and a connecting plate main body arranged in the carbonization furnace main body. According to the gas inlet connecting plate device of the silicon carbide deposition furnace, the multiple sets of gas outlet holes are formed in the top end of the connecting plate body, gas can be exhausted upwards through the gas outlet holes and dispersed, under the cooperation of the driving assembly, the connecting shaft can drive the connecting plate body to rotate, the gas can be evenly dispersed in the carbonization furnace body, and the gas inlet efficiency is improved. And in the gas inlet process, through mutual cooperation of the adjusting units, the multiple sets of shielding plates can rotate at the bottom ends of the gas outlet holes to shield the gas outlet holes, then the gas inlet amount can be conveniently adjusted according to needs, and the use convenience of the connecting plate body is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of air intake connecting plates, in particular to an air intake connecting plate device for a silicon carbide deposition furnace. Background Art

[0002] The silicon carbide deposition furnace needs to introduce chemical gas during the material processing process, so that the chemical gas contacts the material inside the silicon carbide deposition furnace to produce a chemical reaction, thereby realizing the material processing operation;

[0003] In order to improve the efficiency of the reaction between the gas and the material inside the silicon carbide deposition furnace, a connecting plate needs to be installed inside the silicon carbide deposition furnace. A plurality of gas outlet holes are provided on the surface of the connecting plate, so that the gas is discharged into the silicon carbide deposition furnace through the gas outlet holes at the connecting plate. The connecting plate can diffuse the discharged gas into the interior of the silicon carbide deposition furnace, so that the gas can fully contact with the material.

[0004] In the process of gas-material contact reaction, the material output needs to be proportional to the amount of gas entering, and the quality of the gas-material contact reaction needs to be guaranteed. Since the existing air intake plate is inside the silicon carbide deposition furnace during use, the size of the air intake hole remains unchanged. When there is less or more material inside, the size of the air outlet hole remains unchanged, which is not convenient for adjustment according to the amount of material, resulting in the mismatch between the gas amount and the material reaction, thereby affecting the quality of the material-gas reaction. In view of the shortcomings of the existing technology, we propose a silicon carbide deposition furnace air intake connecting plate device to solve the above problems. Utility Model Content

[0005] In view of the deficiencies in the prior art, the utility model provides an air inlet connecting plate device for a silicon carbide deposition furnace, which solves the problem that it is inconvenient to adjust according to the amount of material, resulting in the mismatch between the gas volume and the material reaction, thereby affecting the quality of the reaction between the material and the gas.

[0006] To achieve the above objectives, the utility model is implemented through the following technical solutions: an air inlet connecting plate device for a silicon carbide deposition furnace, comprising a carbonization furnace body and a connecting plate body arranged inside the carbonization furnace body, an air inlet pipe is installed at the bottom end of the carbonization furnace body, a plurality of groups of air outlet holes are arranged at intervals at the top end of the connecting plate body, an adjusting unit is arranged at the bottom end of the connecting plate body, and the adjusting unit comprises:

[0007] A baffle plate located on one side of the air outlet;

[0008] A fixing plate, the top end of which is connected to the shielding plate via a mounting member;

[0009] The bottom end of the connecting plate body is fixedly connected with a connecting shaft, and the fixing plate drives multiple groups of shielding plates to rotate. The shielding plates are used to change the size of the air outlet holes. The bottom end of the connecting shaft is provided with a driving component, and the connecting shaft is driven by the driving component to rotate to disperse the gas.

[0010] Preferably, the bottom end of the connecting shaft passes through the bottom end surface of the carbonization furnace body, and the driving assembly includes:

[0011] A transmission gear, which is fixedly sleeved on the outer peripheral wall of the bottom end of the connecting shaft;

[0012] The driving gear is located at one side of the transmission gear and meshes with the transmission gear.

[0013] Preferably, a driving motor is installed at the bottom end of the carbonization furnace body, the output end of the driving motor is fixedly connected to the top end surface of the driving gear, and the connecting shaft is rotatably sleeved on the outer peripheral wall of the air inlet pipe.

[0014] Preferably, the ends of the plurality of groups of shielding plates that are close to each other are fixedly connected with fixing rings, and the fixing rings are rotatably sleeved on the outer peripheral wall of the connecting shaft.

[0015] Preferably, the mounting member comprises:

[0016] A connecting rod, the top end of which is fixedly mounted on the bottom end surface of the fixing ring, and the bottom end of which is fixedly connected to the driving shaft;

[0017] The two sides of the outer peripheral wall of the driving shaft are fixedly connected with limit plates, and the limit plates on the two sides are rotatably connected to the outer bottom wall and the inner bottom wall at the bottom end of the carbonization furnace body respectively.

[0018] Preferably, the bottom end of the driving shaft is fixedly connected to the top end surface of the fixing plate, and the outer peripheral wall of the connecting shaft is fixedly connected to a functional plate.

[0019] Preferably, the fixing plate is rotatably connected to the top end surface of the functional plate, and an indicating head is installed on the top end of the fixing plate.

[0020] Preferably, a fixing bolt is provided at the top end of the fixing plate, and the fixing bolt is threadedly connected inside the fixing plate and the functional plate.

[0021] The utility model discloses an air intake connecting plate device for a silicon carbide deposition furnace, which has the following beneficial effects: the air intake connecting plate device for the silicon carbide deposition furnace, by opening a plurality of air outlet holes at the top of a connecting plate body, can allow the gas to be discharged upward through the air outlet holes to disperse the gas, and with the cooperation of a driving component, can enable the connecting shaft to drive the connecting plate body to rotate, which helps to evenly disperse the gas inside the carbonization furnace body and improve the effect of gas dispersion, and in the process of air intake, by setting the mutual cooperation of adjustment units, can enable a plurality of baffle plates to rotate at the bottom ends of the air outlet holes to block the air outlet holes, and then can conveniently adjust the air intake amount as needed, improve the quality of the mixing of materials and gas, and improve the convenience of using the connecting plate body. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0023] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0024] Figure 2 This is a schematic diagram of the internal cross-sectional structure of the main body of the carbonization furnace of the utility model;

[0025] Figure 3 This is a schematic diagram of the connection structure between the connecting plate and the bottom air intake pipe of the utility model;

[0026] Figure 4 This is a schematic diagram of the bottom structure of the connecting plate of the utility model;

[0027] Figure 5 This is a schematic diagram of the internal cross-sectional structure of the connection shaft and one side of the intake pipe of the utility model;

[0028] Figure 6 It is a schematic diagram of the connection structure between the fixing ring and the bottom fixing plate of the utility model.

[0029] In the figure: 1. Carbonization furnace body; 2. Connecting plate body; 201. Air inlet pipe; 202. Air outlet; 203. Connecting shaft; 2031. Transmission gear; 2032. Driving gear; 2033. Driving motor; 2034. Functional board; 3. Adjusting unit; 301. Shielding plate; 302. Fixing ring; 303. Connecting rod; 304. Limiting plate; 305. Driving shaft; 306. Fixing plate; 307. Indicating head; 3061. Fixing bolt. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solution and advantages of the embodiments of the utility model clearer, the technical solution in the embodiments of the utility model is described clearly and completely. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0031] The embodiment of the present application provides an air intake connecting plate device for a silicon carbide deposition furnace, which solves the problem that it is inconvenient to adjust according to the amount of material, resulting in the gas volume not corresponding to the material reaction, thereby affecting the quality of the material-gas reaction, and achieves shielding of the air outlet, so that the size of the air intake can be conveniently adjusted according to needs, thereby improving the quality of the mixing of material and gas and improving the convenience of using the connecting plate body.

[0032] In order to better understand the above technical solution, the above technical solution will be described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0033] The utility model embodiment discloses an air intake connecting plate device for a silicon carbide deposition furnace.

[0034] According to the attached Figure 1-6 As shown, it includes a carbonization furnace body 1 and a connecting plate body 2 arranged inside the carbonization furnace body 1. The bottom end of the connecting plate body 2 and the carbonization furnace body 1 is a gas-introducing area. The bottom end of the air inlet pipe 201 is connected to the air inlet device. The bottom end of the carbonization furnace body 1 is equipped with an air inlet pipe 201. The top of the connecting plate body 2 is provided with a plurality of groups of air outlet holes 202. The bottom end of the connecting plate body 2 is provided with an adjusting unit 3. The adjusting unit 3 includes:

[0035] A shielding plate 301, which is located on one side of the air outlet 202;

[0036] A fixing plate 306, the top end of which is connected to the shielding plate 301 via a mounting member;

[0037] The bottom end of the connecting plate body 2 is fixedly connected with a connecting shaft 203, which drives multiple groups of baffles 301 to rotate through the fixed plate 306. The baffles 301 are used to change the size of the air outlet 202. A driving component is set at the bottom end of the connecting shaft 203, which drives the connecting shaft 203 to rotate through the driving component to disperse the gas, and fill the material to be processed into the interior of the carbonization furnace body 1 for processing. The gas is introduced into the interior of the carbonization furnace body 1 through the air inlet pipe 201 at the bottom to mix and react with the material.

[0038] The bottom end of the connecting shaft 203 passes through the bottom end surface of the carbonization furnace body 1. The driving assembly includes:

[0039] A transmission gear 2031, which is fixedly sleeved on the outer peripheral wall of the bottom end of the connecting shaft 203;

[0040] The driving gear 2032 is located on one side of the transmission gear 2031 and meshes with the transmission gear 2031. A driving motor 2033 is installed at the bottom end of the carbonization furnace body 1. The output end of the driving motor 2033 is fixedly connected to the top end face of the driving gear 2032. The connecting shaft 203 is rotatably sleeved on the outer peripheral wall of the air inlet pipe 201. The gas enters the interior of the connecting shaft 203 through the air inlet pipe 201, and is discharged to the gas area through the air holes at the connecting shaft 203. Finally, the gas is discharged into the interior of the carbonization furnace body 1 through the multiple groups of air outlet holes 202 at the top connecting plate body 2.

[0041] The ends of the multiple sets of shielding plates 301 close to each other are fixedly connected with a fixing ring 302. During the intake process, by starting the driving motor 2033, the driving gear 2032 drives the transmission gear 2031 to rotate, and then the connecting shaft 203 drives the connecting plate body 2 at the top to rotate, so as to evenly disperse the gas entering. The fixing ring 302 is rotatably sleeved on the outer peripheral wall of the connecting shaft 203, and the mounting parts include:

[0042] The top end of the connecting rod 303 is fixedly mounted on the bottom end face of the fixing ring 302, and the bottom end is fixedly connected to a driving shaft 305; the driving shaft 305 rotates on the outer peripheral wall of the connecting shaft 203, and when the size of the air outlet 202 needs to be changed, it is rotated by driving the fixing plate 306. At this time, the staff checks the indicating head 307 according to the size of the air outlet 202 to make the indicating head 307 rotate to correspond to the scale line at the bottom functional plate 2034, thereby driving multiple sets of baffles 301 to rotate on the bottom end face of the connecting plate body 2, so that the baffles 301 block the air outlet 202, change the size of the air outlet 202, and thus control the gas outlet volume.

[0043] Limiting plates 304 are fixedly connected to both sides of the outer peripheral wall of the driving shaft 305, and the limiting plates 304 on both sides are respectively rotatably connected to the outer bottom wall and the inner bottom wall at the bottom end of the carbonization furnace main body 1. When driving multiple groups of shielding plates 301 to rotate, the limiting plates 304 on both sides can be rotatably connected to both sides of the bottom end of the carbonization furnace main body 1.

[0044] The bottom end of the driving shaft 305 is fixedly connected to the top end face of the fixing plate 306, and the outer peripheral wall of the connecting shaft 203 is fixedly connected to the functional plate 2034. After adjusting the fixing plate 306 to rotate, the fixing bolt 3061 is threadedly connected to the inside of the fixing plate 306 and the functional plate 2034, so that the fixing plate 306 and the functional plate 2034 can be fixed. In the process of the driving component driving the connecting plate body 2 to rotate, the multiple groups of shielding plates 301 at the bottom can be driven to rotate together, so that the shielding plates 301 always shield the air outlet 202.

[0045] The fixed plate 306 is rotatably connected to the top end surface of the functional plate 2034, and an indicating head 307 is installed on the top of the fixed plate 306. A fixing bolt 3061 is provided on the top of the fixed plate 306. The fixing bolt 3061 is threadedly connected between the fixed plate 306 and the inside of the functional plate 2034. It should be noted that the number of scale lines at the functional plate 2034 corresponds to the number of threaded holes at the fixed plate 306. With the cooperation of the indicating head 307, the size of the air outlet 202 can be adjusted in five gears.

[0046] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. An air intake connecting plate device for a silicon carbide deposition furnace, comprising a carbonization furnace body (1) and a connecting plate body (2) arranged inside the carbonization furnace body (1), wherein an air intake pipe (201) is installed at the bottom end of the carbonization furnace body (1), characterized in that: The top end of the connecting plate body (2) is provided with a plurality of groups of air outlet holes (202) at intervals, and the bottom end of the connecting plate body (2) is provided with an adjustment unit (3), and the adjustment unit (3) comprises: A shielding plate (301) located on one side of the air outlet (202); A fixing plate (306), the top end of which is connected to the shielding plate (301) via a mounting member; The bottom end of the connecting plate body (2) is fixedly connected to a connecting shaft (203), and the fixing plate (306) drives the plurality of shielding plates (301) to rotate, wherein the shielding plates (301) are used to change the size of the air outlet holes (202), and the bottom end of the connecting shaft (203) is provided with a driving component, and the driving component drives the connecting shaft (203) to rotate to disperse the gas.

2. The air inlet connecting plate device of a silicon carbide deposition furnace according to claim 1, characterized in that: The bottom end of the connecting shaft (203) passes through the bottom end surface of the carbonization furnace body (1), and the driving assembly comprises: A transmission gear (2031) is fixedly sleeved on the outer peripheral wall of the bottom end of the connecting shaft (203); The driving gear (2032) is located on one side of the transmission gear (2031) and meshes with the transmission gear (2031).

3. The air inlet connecting plate device of a silicon carbide deposition furnace according to claim 2, characterized in that: A driving motor (2033) is installed at the bottom end of the carbonization furnace body (1); the output end of the driving motor (2033) is fixedly connected to the top end surface of the driving gear (2032); and the connecting shaft (203) is rotatably sleeved on the outer peripheral wall of the air inlet pipe (201).

4. The air inlet connecting plate device of a silicon carbide deposition furnace according to claim 3, characterized in that: One end of each of the plurality of groups of shielding plates (301) that are close to each other is fixedly connected with a fixing ring (302), and the fixing ring (302) is rotatably sleeved on the outer peripheral wall of the connecting shaft (203).

5. The air inlet connecting plate device of a silicon carbide deposition furnace according to claim 4, characterized in that: The mounting member comprises: A connecting rod (303), the top end of which is fixedly mounted on the bottom end surface of the fixing ring (302), and the bottom end of which is fixedly connected to a driving shaft (305); Limiting plates (304) are fixedly connected to both sides of the outer peripheral wall of the driving shaft (305), and the limiting plates (304) on both sides are rotatably connected to the outer bottom wall and the inner bottom wall of the bottom end of the carbonization furnace body (1) respectively.

6. The air inlet connecting plate device of a silicon carbide deposition furnace according to claim 5, characterized in that: The bottom end of the driving shaft (305) is fixedly connected to the top end surface of the fixing plate (306), and the outer peripheral wall of the connecting shaft (203) is fixedly connected to the functional plate (2034).

7. The air inlet connecting plate device of a silicon carbide deposition furnace according to claim 6, characterized in that: The fixing plate (306) is rotatably connected to the top end surface of the function plate (2034), and an indicating head (307) is installed on the top end of the fixing plate (306).

8. The air inlet connecting plate device of a silicon carbide deposition furnace according to claim 7, characterized in that: A fixing bolt (3061) is provided at the top end of the fixing plate (306), and the fixing bolt (3061) is threadedly connected to the inside of the fixing plate (306) and the functional plate (2034).

Images