Cavity sealing door lifting mechanism

Abstract

The utility model relates to the technical field of semiconductor equipment, and particularly discloses a cavity sealing door lifting mechanism which comprises a reaction cavity and a cavity sealing door, one end of the cavity sealing door is provided with a vertical lifting motion assembly, and the vertical lifting motion assembly comprises a first executing mechanism, a fixing plate, a sealing door connecting rod and a driving connecting rod. Horizontal movement assemblies are further arranged on the two sides of the reaction cavity, each horizontal movement assembly comprises a second executing mechanism and a connecting assembly capable of being matched, and a protection assembly is arranged at the upper end of the cavity sealing door; according to the utility model, the movement of the first actuating mechanism can control the lifting movement of the cavity sealing door, and the drag chain moves along with the first actuating mechanism, so that an electrical circuit and a gas pipeline on the cavity sealing door can be prevented from being drawn in; and the second execution mechanisms distributed above and below the two sides of the cavity can drive the cavity sealing door to be integrally and horizontally pressed on the reaction cavity through the matching connection assembly, so that the cavity sealing door is sealed and closed.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor equipment, and in particular relates to a cavity sealing door lifting mechanism. Background Art

[0002] In the existing field of semiconductor ALD equipment, wafer coating reactions are required to be carried out in a vacuum environment, and the vacuum degree is required to be high. For the equipment body, a good sealing effect is required. ALD equipment in the semiconductor field is generally large in size and heavy in weight. The closing of the chamber sealing door mostly relies on an auxiliary motion mechanism. In the previous existing designs, the lifting movement of the chamber sealing door is either driven by manpower or by a driving device. In this case, the lines and gas paths on the chamber sealing door may be involved in the moving parts, triggering a dangerous situation; in the existing design, the horizontal fitting movement of the chamber sealing door is driven by a power device installed on the upper part of the cavity. At this time, there is a situation that the lower part of the chamber sealing door is not closed tightly, and it needs to be closed again by manpower. The false triggering of the chamber sealing door causes the lifting movement, which makes the operator who is operating inside the cavity easily in a dangerous situation, and the protection effect is poor, which is not convenient for semiconductor production. Utility Model Content

[0003] The purpose of the utility model is to provide a cavity sealing door lifting mechanism to solve the problems raised in the above background technology.

[0004] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0005] A cavity sealing door lifting mechanism, comprising:

[0006] A reaction chamber and a chamber sealing door, wherein a vertical lifting motion component is arranged at one end of the chamber sealing door, and the vertical lifting motion component comprises a first actuator, a fixed plate, a sealing door connecting rod and a driving connecting rod. The first actuator is arranged below the chamber sealing door, and the output end of the first actuator is connected to the fixed plate so that the fixed plate can move in a vertical direction. The driving connecting rods are slidably connected on both sides of the reaction chamber, and the driving connecting rods are connected to the fixed plate, and the driving connecting rods are connected to the chamber sealing door through the sealing door connecting rods. Horizontal motion components are also arranged on both sides of the reaction chamber, and the horizontal motion components comprise a second actuator and a matable connecting component. The second actuators are installed on the upper and lower sides of both sides of the reaction chamber, and the output end of the second actuator is connected to the sealing door connecting rod through the matable connecting component. A protective component is arranged on the upper end of the chamber sealing door.

[0007] Preferably, the vertical lifting motion assembly also includes a drag chain, a mounting seat is connected below the reaction chamber, the first actuator is fixed on the mounting seat, a support plate is provided on one side of the mounting seat, one end of the drag chain is connected to the fixed plate, and the other end of the drag chain is connected to the support plate, the drag chain is configured as a double-layer chain type and a hollow cavity is provided inside the drag chain.

[0008] Preferably, the cooperated connecting component includes a moving connecting plate 2 and a moving connecting plate 1, the output end of the second actuator is connected to the moving connecting plate 2 so that the moving connecting plate 2 can move in the horizontal direction, the moving connecting plate 1 is arranged on the side of the driving connecting rod close to the moving connecting plate 2, one end of the sealing door connecting rod is connected to the cavity sealing door, and the other end passes through the driving connecting rod and is connected to the moving connecting plate 1, a clamping seat is arranged on the side of the driving connecting rod close to the cavity sealing door, and a through hole is opened inside the clamping seat to enable the sealing door connecting rod to slide, the moving connecting plate 1 is arranged as a C-shaped structure, and the moving connecting plate 2 is arranged as a C-shaped structure that is mirrored with the moving connecting plate 1, so that the end of the moving connecting plate 1 and the end of the moving connecting plate 2 can form a snap-fit ​​structure, and when the snap-fit ​​structure is formed, the end of the moving connecting plate 1 close to the side of the moving connecting plate 2 is located inside the two ends of the moving connecting plate 2.

[0009] Preferably, the outer end sleeve of the sealing door connecting rod is provided with a spring 1, and the spring 1 is arranged between the cavity sealing door and the seat.

[0010] Preferably, buffer pads are provided on the inner sides of both ends of the second moving connecting plate or the first moving connecting plate.

[0011] Preferably, the protective assembly includes a mechanical pneumatic switch, a screw and a protective pressure plate. The protective pressure plate is installed above the cavity sealing door through the screw. The protective pressure plate is slidably connected to the screw. The outer end of the screw is sleeved with a spring 2, and the spring 2 is located between the cavity sealing door and the protective pressure plate. The mechanical pneumatic switch is also installed on the outside of the cavity sealing door, the mechanical pneumatic switch is connected to the first actuator, and the mechanical pneumatic switch is located below the protective pressure plate.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] 1. The second actuators distributed on the upper and lower sides of the cavity can drive the cavity sealing door to be pressed horizontally on the reaction cavity through the matching connection components to achieve the sealing closure of the cavity sealing door, and the buffer pads arranged on the moving connection plate 2 or the moving connection plate 1 can prevent the moving connection plate 1 and the moving connection plate 2 from colliding with each other during the coordinated movement, thereby avoiding noise caused by metal collision and damage to parts;

[0014] 2. By setting up a drag chain, the electrical circuits and gas pipelines can be centrally embedded in the hollow cavity provided inside, which can effectively prevent the electrical circuits and gas pipelines on the cavity sealing door from being drawn in;

[0015] 3. The mechanical pneumatic switch is connected to the first actuator and is normally closed in the initial state. When the protective pressure plate triggers the mechanical pneumatic switch, the mechanical pneumatic switch controls the first actuator to close, so that the cavity sealing door cannot continue to rise, thereby stopping the movement of the cavity sealing door. This prevents the cavity sealing door from being accidentally triggered when the staff is operating inside the reaction chamber, causing the lifting movement to cause a dangerous situation, thereby playing a protective role. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0017] Figure 2 It is a top view of the utility model;

[0018] Figure 3 It is a partial cross-sectional view of the utility model;

[0019] Figure 4 It is another perspective schematic diagram of the utility model;

[0020] In the figure: 10, reaction chamber; 11, first actuator; 12, fixed plate; 13, driving connecting rod; 14, chamber sealing door; 15, drag chain; 16, spring 1; 18, sealing door connecting rod; 19, card seat;

[0021] 21. Second actuator; 22. Second motion connecting plate; 23. Buffer pad; 24. First motion connecting plate;

[0022] 31. Mechanical pneumatic switch; 32. Protective pressure plate; 33. Screw; 34. Spring 2;

[0023] 41. Support plate; 42. Mounting seat. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] Example:

[0026] See also Figure 1-Figure 4 As shown, a cavity sealing door lifting mechanism comprises:

[0027] A reaction chamber 10 and a chamber sealing door 14, one end of the chamber sealing door 14 is provided with a vertical lifting motion component, the vertical lifting motion component includes a first actuator 11, a fixed plate 12, a sealing door connecting rod 18 and a driving connecting rod 13, the first actuator 11 is located below the chamber sealing door 14, the output end of the first actuator 11 is fixedly connected to the fixed plate 12, and can drive the fixed plate 12 to move in the vertical direction, both sides of the reaction chamber 10 are slidably connected with the driving connecting rod 13 through a slider guide rail, the lower end of the driving connecting rod 13 is fixedly connected to the fixed plate 12, and the driving connecting rod 13 is connected to the chamber sealing door 14 through the sealing door connecting rod 18, and horizontal motion components are also provided on both sides of the reaction chamber 10, the horizontal motion components include a second actuator 21, a matching connecting component, and the upper and lower ends of the two sides of the reaction chamber 10 are connected to the chamber sealing door 14. A second actuator 21 is installed below, and the output end of the second actuator 21 is connected to the sealing door connecting rod 18 through a matching connection component, which is used to drive the cavity sealing door 14 to move horizontally, that is, to drive the cavity sealing door 14 horizontally toward the reaction chamber 10. Specifically, the first actuator 11 drives the cavity sealing door 14 to move upward through the fixing plate 12 and the driving connection rod 13 until it is flush with the cavity opening of the reaction chamber 10. The output end of the second actuator 21 is connected to the sealing door connecting rod 18 through a matching connection component, and then the second actuator 21 can drive the cavity sealing door 14 to move horizontally toward the direction close to the reaction chamber 10 by driving the matching connection component to close the cavity opening of the reaction chamber 10. A protective component is provided at the upper end of the cavity sealing door 14 to play a protective role.

[0028] In one embodiment, the first actuator 11 is a pneumatic cylinder, but is not limited thereto. An actuator such as an electric cylinder that can drive the fixing plate 12 to move in the vertical direction may also be used.

[0029] In one embodiment, the second actuator 21 is an electric cylinder, but is not limited thereto. An actuator such as a gas cylinder can also be used to drive the cavity sealing door 14 to move horizontally.

[0030] refer to Figure 1-Figure 4 As shown, the vertical lifting motion assembly also includes a drag chain 15, a mounting base 42 is fixedly connected to the bottom of the reaction chamber 10, the first actuator 11 is fixedly connected to the mounting base 42, a support plate 41 is fixedly provided on one side of the mounting base 42, one end of the drag chain 15 is fixedly connected to the fixed plate 12, and the other end of the drag chain 15 is fixedly connected to the support plate 41. The drag chain 15 is configured as a double-layer chain type and has a hollow cavity inside, which is used to centrally store the electrical circuits and gas pipelines of the electrical components of the mechanism, can move with the drag chain 15, and can effectively prevent the electrical circuits and gas pipelines of the electrical components from being drawn into during the movement of the cavity sealing door 14 and various components, thereby avoiding dangerous situations.

[0031] refer to Figure 1-Figure 4 As shown, the matching connection assembly includes a second motion connection plate 22 and a first motion connection plate 24. The output end of the second actuator 21 is fixedly connected with the second motion connection plate 22, which can drive the second motion connection plate 22 to move in the horizontal direction. The first motion connection plate 24 is arranged on the side of the driving connection rod 13 close to the second motion connection plate 22. One end of the sealing door connection rod 18 is threadedly connected to the cavity sealing door 14, and the other end passes through the driving connection rod 13 and is fixedly connected to the first motion connection plate 24. A holder 19 is fixedly arranged on the side of the driving connection rod 13 close to the cavity sealing door 14. A through hole is provided inside the holder 19 to enable the sealing door connection rod 18 to slide. The motion connection plate 1 24 is set as a C-shaped structure, and the motion connection plate 2 22 is set as a C-shaped structure that is mirrored with the motion connection plate 1 24, so that the end of the motion connection plate 1 24 and the end of the motion connection plate 2 22 can form a snap-fit ​​structure, so that the motion connection plate 2 22 can drive the motion connection plate 1 24 to move horizontally. When the snap-fit ​​structure is formed, the end of the motion connection plate 1 24 close to the side of the motion connection plate 2 22 is located inside the two ends of the motion connection plate 2 22. At this time, the motion connection plate 2 22 can drive the motion connection plate 1 24 to move, and the motion connection plate 2 22 does not affect the movement of the motion connection plate 1 24 in the vertical direction. When the motion connection plate 1 and the motion connection plate 2 form a snap-fit ​​structure, the second actuator 21 distributed on both sides of the cavity can drive the cavity sealing door to be pressed horizontally on the reaction cavity as a whole, so as to achieve the sealed closure of the cavity sealing door.

[0032] refer to Figure 1-Figure 4 As shown, the outer end of the sealing door connecting rod 18 is sleeved with a spring 16, and the spring 16 is arranged between the cavity sealing door 14 and the seat 19. When the cavity sealing door 14 needs to be opened, the output end of the second actuator 21 drives the motion connecting plate 22 to reset. After the limiting effect on the motion connecting plate 24 is released, the set spring 16 is conducive to pushing open the cavity sealing door 14, so that a horizontal distance is left between the cavity sealing door 14 and the driving connecting rod 13 in the initial state.

[0033] refer to Figure 1-Figure 4 As shown, buffer pads 23 are fixedly provided on the inner sides of the two ends of the moving connecting plate 22 or the moving connecting plate 1 24. It should be noted that the buffer pads 23 can also be fixedly provided between the contact surfaces of the moving connecting plate 22 and the moving connecting plate 1 24 to avoid direct contact between the moving connecting plate 22 and the moving connecting plate 1 24, avoid noise generated by metal collision, and prevent damage to parts.

[0034] refer to Figure 1-Figure 4 As shown, the protection component includes a mechanical pneumatic switch 31, a screw 33 and a protection pressure plate 32. The protection pressure plate 32 is installed above the cavity sealing door 14 through the screw 33. The protection pressure plate 32 is slidably connected with the screw 33. The outer end of the screw 33 is sleeved with a spring 2 34. The spring 2 34 is arranged between the cavity sealing door 14 and the protection pressure plate 32. A mechanical pneumatic switch 31 is also installed on the outside of the cavity sealing door 14. The mechanical pneumatic switch 31 is connected to the first actuator 11 and can control the shutdown of the first actuator 11. The mechanical pneumatic switch 31 is located below the protection pressure plate 32 and can touch the protection pressure plate 32. When the operator is inside the cavity During operation, the vertical lifting motion component is triggered by mistake. At this time, the vertical lifting motion component drives the cavity sealing door 14 to move upward and approach the reaction chamber 10. The protective pressure plate 32 at the upper end of the cavity sealing door 14 will first touch the operator, causing the protective pressure plate 32 to move downward and press down the mechanical pneumatic switch 31, so that the mechanical pneumatic switch 31 is started. At this time, the mechanical pneumatic switch 31 promptly controls the first actuator 11 to close, so that the cavity sealing door 14 stops moving upward, thereby eliminating the dangerous situation and preventing the cavity sealing door 14 from being accidentally triggered and moving upward when the operator is operating inside the cavity, thereby preventing the operator from being in a dangerous situation and avoiding injury to the operator.

[0035] Working process:

[0036] The first actuator 11 works, driving the fixed plate 12 and the driving connecting rod 13 to move simultaneously, and the cavity sealing door 14 and the driving connecting rod 13 are connected and fixed together, thereby realizing the lifting movement of the cavity sealing door. The drag chain 15 follows the movement of the fixed plate 12 to realize the movement of the chain, and the movement range is fixed. The electrical circuits and gas pipelines are centrally embedded in the internal space of the double-layer drag chain 15 to prevent the circuits from being drawn into the movement of each component, thereby avoiding dangerous situations. When the cavity sealing door 14 moves upward to be flush with the cavity opening of the reaction chamber 10, the end of the motion connecting plate 1 24 and the end of the motion connecting plate 2 22 form a snap-fit ​​structure, the lifting movement stops, and the second actuators 21 arranged above and below both sides of the reaction chamber 10 work to drive the motion connecting plate 2 22 to move in the direction of the second actuator 21. The buffer pad 23 between the motion connecting plate 1 24 and the motion connecting plate 22 contacts and cooperates, thereby driving the cavity sealing door 14 to move in the direction of the second actuator 21 until the cavity sealing door 14 is completely pressed against the reaction chamber 10 and the second actuator 21 stops moving;

[0037] When the cavity sealing door 14 is in the open state, if the operator is operating in the cavity, the cavity sealing door 14 is mistakenly triggered to perform the rising action, which may easily threaten the life safety of the operator. The mechanical pneumatic switch 31 is initially normally closed. When the cavity sealing door 14 is rising, the protective pressure plate 32 arranged on the upper part of the cavity sealing door 14 is subjected to resistance and triggers the mechanical pneumatic switch 31 downward. The mechanical pneumatic switch 31 controls the first actuator 11 to stop moving, and the cavity sealing door 14 stops moving upward. The danger is eliminated, protecting the operator's safety, thereby playing a protective role.

[0038] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A cavity sealing door lifting mechanism, characterized in that: include: A reaction chamber (10) and a chamber sealing door (14), wherein one end of the chamber sealing door (14) is provided with a vertical lifting motion assembly, wherein the vertical lifting motion assembly comprises a first actuator (11), a fixing plate (12), a sealing door connecting rod (18) and a driving connecting rod (13), wherein the first actuator (11) is arranged below the chamber sealing door (14), and an output end of the first actuator (11) is connected to the fixing plate (12) so as to enable the fixing plate (12) to move in a vertical direction, and the driving connecting rod (13) is slidably connected to both sides of the reaction chamber (10), and the driving connecting rod (18) is connected to the fixing plate (12). The dynamic connecting rod (13) is connected to the fixed plate (12), and the driving connecting rod (13) is connected to the chamber sealing door (14) through the sealing door connecting rod (18). Horizontal movement components are also arranged on both sides of the reaction chamber (10), and the horizontal movement components include a second actuator (21) and a matching connection component. The second actuator (21) is installed on both sides of the reaction chamber (10) at the upper and lower parts, and the output end of the second actuator (21) is connected to the sealing door connecting rod (18) through the matching connection component. The upper end of the chamber sealing door (14) is provided with a protective component.

2. A cavity sealing door lifting mechanism according to claim 1, characterized in that: The vertical lifting motion assembly also includes a drag chain, a mounting seat (42) is connected below the reaction chamber (10), the first actuator (11) is fixed on the mounting seat (42), a support plate (41) is provided on one side of the mounting seat (42), one end of the drag chain (15) is connected to the fixed plate (12), and the other end of the drag chain (15) is connected to the support plate (41), and the drag chain (15) is configured as a double-layer chain type and has a hollow cavity inside.

3. The cavity sealing door lifting mechanism according to claim 1, characterized in that: The matable connection assembly comprises a second moving connection plate (22) and a first moving connection plate (24); the output end of the second actuator (21) is connected to the second moving connection plate (22) so as to enable the second moving connection plate (22) to move in a horizontal direction; the first moving connection plate (24) is arranged on a side of the driving connecting rod (13) close to the second moving connection plate (22); one end of the sealing door connecting rod (18) is connected to the cavity sealing door (14); the other end passes through the driving connecting rod (13) and is connected to the first moving connection plate (24); the driving connecting rod (13) is close to the cavity sealing door ( A holder (19) is provided on one side of the movable connecting plate (14), and a through hole is provided inside the holder (19) for enabling the sealing door connecting rod (18) to slide. The movable connecting plate (24) is provided as a C-shaped structure, and the movable connecting plate (22) is provided as a C-shaped structure which is mirror-imaged to the movable connecting plate (24), so that the end of the movable connecting plate (24) and the end of the movable connecting plate (22) can form a snap-fit ​​structure. When the snap-fit ​​structure is formed, the end of the movable connecting plate (24) close to the side of the movable connecting plate (22) is located inside the two end portions of the movable connecting plate (22).

4. The cavity sealing door lifting mechanism according to claim 3, characterized in that: The outer end of the sealing door connecting rod (18) is sleeved with a spring 1 (16), and the spring 1 (16) is arranged between the cavity sealing door (14) and the clamping seat (19).

5. The cavity sealing door lifting mechanism according to claim 4, characterized in that: Buffer pads (23) are arranged on the inner sides of both ends of the second moving connection plate (22) or the first moving connection plate (24).

6. A cavity sealing door lifting mechanism according to claim 5, characterized in that: The protection component comprises a mechanical pneumatic switch (31), a screw (33) and a protection pressure plate (32); the protection pressure plate (32) is installed above the cavity sealing door (14) through the screw (33); the protection pressure plate (32) is slidably connected to the screw (33); a spring 2 (34) is sleeved on the outer end of the screw (33); the spring 2 (34) is located between the cavity sealing door (14) and the protection pressure plate (32); the mechanical pneumatic switch (31) is also installed on the outer side of the cavity sealing door (14); the mechanical pneumatic switch (31) is connected to the first actuator (11); and the mechanical pneumatic switch (31) is located below the protection pressure plate (32).

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