Semiconductor cavity assembly with intra-cavity sealing structure

Abstract

The utility model discloses a semiconductor cavity assembly with an intra-cavity sealing structure, and relates to the technical field of semiconductor vacuum equipment. The semiconductor cavity assembly with the intra-cavity sealing structure comprises a bottom plate, supporting frames are symmetrically fixed to the bottom plate, and a cavity is fixed to the tops of the supporting frames; the two lifting rails are installed on the side walls of the two supporting frames correspondingly; the lifting door is installed on the two lifting rails in a sliding mode and connected with the opening side of the cavity in a sliding mode, a lifting driving piece is rotationally connected to the bottom plate, and the output end of the lifting driving piece is fixed to the lifting door; the oil storage tank is fixed above the bottom plate and located between the two supporting frames; the housings are symmetrically fixed to the bottom plate and located on the side, away from the oil storage tank, of the supporting frame; by arranging the oil receiving tank, when lubricating oil drips on the lifting rail, redundant lubricating oil can slide to the bottom of the lifting rail and drips into the oil receiving tank.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor vacuum equipment, in particular to a semiconductor cavity component with an intra-cavity sealing structure. Background Art

[0002] The semiconductor cavity assembly with an intracavity sealing structure is one of the key equipment in the semiconductor manufacturing process. The equipment ensures a high vacuum environment in the cavity through the design and manufacture of the intracavity sealing structure, reduces the interference of reaction gases and impurities, and improves the reaction quality and stability.

[0003] A semiconductor equipment vacuum chamber sealing door device disclosed in the patent application with reference publication number CN112746799A includes a door panel, a lifting drive and two rows of lifting rails, the two rows of lifting rails are arranged on both sides of the vacuum chamber opening, a lifting slider is arranged on the lifting rail, an elastic member in a stretched state is connected between the lifting slider and the door panel, a switch door rail is arranged between the door panel and the lifting rail, a support member positioned on the switch door rail is arranged on the door panel, a guide portion for guiding the door panel to deviate to the side where the vacuum chamber is located is arranged on the switch door rail, and the lifting drive is connected to the door panel and can deviate to the side where the vacuum chamber is located with the door panel. The invention has the advantages of simple structure, less space occupied, and low cost.

[0004] As shown in the above-mentioned prior art, the semiconductor cavity assembly in the prior art completes the automatic sealing of the door panel and the cavity by setting a lifting drive and a lifting guide rail. The repeated reciprocating movements of the door panel on the lifting guide rail can easily lead to a decrease in the lubrication between the door panel and the lifting guide rail, resulting in the problem of the door panel moving stuck.

[0005] Therefore, it is necessary to provide a semiconductor cavity assembly with an intra-cavity sealing structure to solve the above technical problems. Utility Model Content

[0006] 1. Technical issues to be solved

[0007] In order to solve the above technical problems, the utility model provides a semiconductor cavity assembly with an intra-cavity sealing structure.

[0008] (II) Technical solution

[0009] To achieve the above objectives, the utility model is implemented through the following technical solutions: a semiconductor cavity assembly with an intra-cavity sealing structure, comprising:

[0010] A bottom plate, a support frame is symmetrically fixed on the bottom plate, and a chamber is fixed on the top of the support frame;

[0011] The lifting rail is divided into two and respectively installed on the side walls of the two support frames;

[0012] A lifting door is slidably mounted on the two lifting rails and is slidably connected to the opening side of the chamber, a lifting drive member is rotatably connected to the bottom plate, and an output end of the lifting drive member is fixed to the lifting door;

[0013] An oil storage tank is fixed above the bottom plate and located between the two support frames;

[0014] The cover is symmetrically fixed to the bottom plate and is located on a side of the support frame away from the oil storage tank;

[0015] The lubrication component is installed on the oil storage tank, and utilizes the lifting movement of the lifting drive member to drip the oil in the oil storage tank onto the lifting rail to lubricate the lifting rail.

[0016] Preferably, the lubrication assembly includes a sleeve fixed to the side of the oil storage tank close to the lifting drive member, the inner wall of the sleeve is slidably connected to a piston, an extension rod is fixed above the piston, a pressure block is fixed to the upper end of the extension rod, a spring is fixed above the sleeve, one end of the spring facing away from the sleeve is fixed to the outer wall of the extension rod, and when the lifting drive member drives the lifting door to descend, the bottom of the lifting door can be pressed against the top of the pressure block.

[0017] Preferably, the oil storage tank is connected to the side wall of the sleeve through an oil delivery pipe, a first one-way valve is installed on the oil delivery pipe, a diverter is fixed under the sleeve, the diverter is connected to the sleeve through a transport pipe, a second one-way valve is installed on the transport pipe, and oil drain pipes are fixed to both output ends of the diverter.

[0018] Preferably, the oil drain pipe extends to the top of the cover shell and passes through the cover shell, the water outlet of the oil drain pipe is located above the lifting rail, and an embedding groove is provided below the cover shell, and an oil receiving box is slidably connected in the embedding groove.

[0019] Preferably, an oil inlet pipe is provided at the top of the oil storage tank, the top of the oil inlet pipe is open, and a sealing dust cover is installed above the oil inlet pipe.

[0020] Preferably, a handle is fixed to the side wall of the oil receiving box.

[0021] (III) Beneficial effects

[0022] The utility model provides a semiconductor cavity assembly with an intracavity sealing structure. Compared with the prior art, it has the following beneficial effects:

[0023] 1. The application sets a lubrication component, so that when the lubrication between the lifting rail and the lifting door decreases and sliding jam occurs, the lifting door can be pressed down to the pressing block by using the lifting drive member, so that the pressing block moves downward, thereby squeezing the oil in the oil storage tank to the outlet of the oil drain pipe, dripping the lubricating oil on the lifting rail, reducing the friction between the lifting rail and the lifting door when sliding, which is practical;

[0024] 2. This application sets up an oil receiving box so that when the lubricating oil drips on the lifting rail, the excess lubricating oil can slide to the bottom of the lifting rail and drip into the oil receiving box, thereby preventing the lubricating oil from splashing randomly and being able to collect and recycle the lubricating oil to reduce waste. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0026] Figure 2 It is a schematic diagram of the relationship between the embedded groove and the oil receiving box of the utility model;

[0027] Figure 3 It is a schematic diagram of the relationship between the flow divider and the oil drain pipe of the utility model;

[0028] Figure 4 It is a schematic diagram of the relationship between the spring and the extension rod of the utility model.

[0029] Numbers in the figure: 1. base plate; 2. support frame; 3. chamber; 4. lifting rail; 5. lifting door; 6. lifting drive member; 7. oil storage tank; 8. cover shell; 9. sleeve; 10. piston; 11. extension rod; 12. pressure block; 13. spring; 14. oil pipeline; 15. first one-way valve; 16. diverter; 17. transport pipe; 18. second one-way valve; 19. oil drain pipe; 20. embedded groove; 21. oil tank; 22. oil inlet pipe; 23. sealing dust cover; 24. handle. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0031] The utility model provides two technical solutions:

[0032] Figures 1 to 4 A first embodiment is shown: a semiconductor cavity assembly with an intra-cavity sealing structure, comprising:

[0033] A bottom plate 1, a support frame 2 is symmetrically fixed on the bottom plate 1, and a chamber 3 is fixed on the top of the support frame 2;

[0034] The lifting rail 4 is divided into two and respectively installed on the side walls of the two support frames 2;

[0035] The lifting door 5 is slidably mounted on the two lifting rails 4 and is slidably connected to the opening side of the chamber 3. The bottom plate 1 is rotatably connected to a lifting drive member 6, and the output end of the lifting drive member 6 is fixed to the lifting door 5;

[0036] The oil storage tank 7 is fixed above the bottom plate 1 and located between the two support frames 2;

[0037] The cover 8 is symmetrically fixed on the bottom plate 1 and is located on a side of the support frame 2 away from the oil storage tank 7;

[0038] The lubrication assembly is installed on the oil storage tank 7 , and utilizes the lifting movement of the lifting drive member 6 to drip the oil in the oil storage tank 7 onto the lifting rail 4 to lubricate the lifting rail 4 .

[0039] The lubrication assembly includes a sleeve 9 fixed to the oil storage tank 7 near the side of the lifting drive member 6, the inner wall of the sleeve 9 is slidably connected with a piston 10, an extension rod 11 is fixed above the piston 10, a pressure block 12 is fixed to the upper end of the extension rod 11, a spring 13 is fixed above the sleeve 9, and one end of the spring 13 facing away from the sleeve 9 is fixed to the outer wall of the extension rod 11, and when the lifting drive member 6 drives the lifting door 5 to descend, the bottom of the lifting door 5 can be pressed against the top of the pressure block 12.

[0040] The oil storage tank 7 is connected to the side wall of the sleeve 9 through an oil delivery pipe 14, and a first one-way valve 15 is installed on the oil delivery pipe 14. A diverter 16 is fixed under the sleeve 9. The diverter 16 is connected to the sleeve 9 through a transport pipe 17, and a second one-way valve 18 is installed on the transport pipe 17. Oil drain pipes 19 are fixed to both output ends of the diverter 16.

[0041] This application sets up a lubrication component, so that when the lubrication between the lifting rail 4 and the lifting door 5 decreases and sliding jam occurs, the lifting door 5 can be pressed down to the pressing block 12 by using the lifting drive 6, so that the pressing block 12 moves downward, thereby squeezing the oil in the oil storage tank 7 to the outlet of the oil drain pipe 19, dripping the lubricating oil on the lifting rail 4, reducing the friction between the lifting rail 4 and the lifting door 5 when sliding, which is practical.

[0042] Figure 1 to Figure 2 A second embodiment is shown, which mainly differs from the first embodiment in that the oil drain pipe 19 extends to the top of the cover shell 8 and penetrates the cover shell 8, the water outlet of the oil drain pipe 19 is located above the lifting rail 4, an embedding groove 20 is provided below the cover shell 8, an oil receiving box 21 is slidably connected in the embedding groove 20, and a handle 24 is fixed to the side wall of the oil receiving box 21.

[0043] An oil inlet pipe 22 is provided at the top of the oil storage tank 7 . The top of the oil inlet pipe 22 is open, and a sealing dust cover 23 is installed above the oil inlet pipe 22 .

[0044] This application sets up an oil receiving box 21 so that when the lubricating oil drips on the lifting rail 4, the excess lubricating oil can slide to the bottom of the lifting rail 4 and drip into the oil receiving box 21, thereby preventing the lubricating oil from dripping randomly and being able to collect and recycle the lubricating oil to reduce waste.

[0045] Working principle:

[0046] The chamber 3, lifting rail 4, lifting door 5 and lifting drive 6 adopt the vacuum chamber, lifting rail, switch door rail, lifting drive, etc. in CN112746799A, which are existing technologies and are not described in detail.

[0047] The lifting door 5 does not contact the pressure block 12 when it is normally lifted and closed; when it is necessary to drip lubricating oil on the lifting rail 4, the lifting drive member 6 drives the lifting door 5 to move down to the bottom of the lifting door 5 to abut against the pressure block 12, and drives the pressure block 12 to press down, so that the extension rod 11 slides above the sleeve 9, drives the piston 10 to squeeze in the sleeve 9, so that the lubricating oil in the sleeve 9 enters the diverter 16 through the transport pipe 17, and is evenly diverted into the oil drain pipe 19 through the diverter 16, and is discharged from the water outlet of the oil drain pipe 19 and drips on the lifting rail 4, thereby lubricating the lifting rail 4, and the excess lubricating oil slides to the bottom of the lifting rail 4 and drips into the oil receiving box 21, which is convenient for collecting the dripping lubricating oil.

[0048] When the lifting drive member 6 drives the lifting door 5 to move upward, the bottom of the lifting door 5 leaves the pressure block 12, and the spring 13 rebounds and drives the extension rod 11 to move upward, so that the piston 10 returns to its original position. When the piston 10 moves upward and returns to its original position, the oil in the oil storage tank 7 is transported to the sleeve 9 through the oil pipe 14 to prepare for the next use.

[0049] After the sealing dust cover 23 is removed, lubricating oil can be injected into the oil storage tank 7 through the oil inlet pipe 22 .

[0050] Meanwhile, the contents not described in detail in this specification belong to the prior art known to those skilled in the art.

[0051] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0052] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A semiconductor cavity assembly with an intracavity sealing structure, characterized in that: include: A bottom plate (1), a support frame (2) being symmetrically fixed on the bottom plate (1), and a chamber (3) being fixed on the top of the support frame (2); A lifting rail (4), which is divided into two and respectively mounted on the side walls of the two support frames (2); A lifting door (5) is slidably mounted on the two lifting rails (4) and is slidably connected to the opening side of the chamber (3); a lifting drive member (6) is rotatably connected to the bottom plate (1), and an output end of the lifting drive member (6) is fixed to the lifting door (5); An oil storage tank (7) is fixed above the bottom plate (1) and located between the two support frames (2); The cover (8) is symmetrically fixed on the bottom plate (1) and is located on a side of the support frame (2) facing away from the oil storage tank (7); A lubrication component is installed on the oil storage tank (7), and utilizes the lifting movement of the lifting drive member (6) to drip the oil in the oil storage tank (7) onto the lifting rail (4) to lubricate the lifting rail (4); The lubrication assembly comprises a sleeve (9) fixed to a side of the oil storage tank (7) close to the lifting drive member (6); a piston (10) is slidably connected to the inner wall of the sleeve (9); an extension rod (11) is fixed above the piston (10); a pressure block (12) is fixed to the upper end of the extension rod (11); a spring (13) is fixed above the sleeve (9); an end of the spring (13) facing away from the sleeve (9) is fixed to the outer wall of the extension rod (11); when the lifting drive member (6) drives the lifting door (5) to descend, the bottom of the lifting door (5) can be tightly pressed against the top of the pressure block (12); The oil storage tank (7) is connected to the side wall of the sleeve (9) through an oil delivery pipe (14), a first non-return valve (15) is installed on the oil delivery pipe (14), a flow divider (16) is fixed below the sleeve (9), the flow divider (16) is connected to the sleeve (9) through a transport pipe (17), a second non-return valve (18) is installed on the transport pipe (17), and oil discharge pipes (19) are fixed to both output ends of the flow divider (16); The oil drain pipe (19) extends to the top of the cover shell (8) and penetrates the cover shell (8). The water outlet of the oil drain pipe (19) is located above the lifting rail (4). An embedding groove (20) is provided below the cover shell (8), and an oil receiving box (21) is slidably connected in the embedding groove (20).

2. The semiconductor cavity assembly with an intra-cavity sealing structure according to claim 1, characterized in that: An oil inlet pipe (22) is provided at the top of the oil storage tank (7), the top of the oil inlet pipe (22) is open, and a sealing dust cover (23) is installed above the oil inlet pipe (22).

3. The semiconductor cavity assembly with an intra-cavity sealing structure according to claim 2, characterized in that: A handle (24) is fixed to the side wall of the oil receiving box (21).

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