Chip photoetching machine with stable operation
By designing a stabilizing mechanism in a chip lithography machine, including limiting components, adjustment components and driving components, the problem of inconvenient movement and poor flexibility of existing chip lithography machines is solved, and the flexible movement and height adjustment of the device is realized, improving the improvement of the Stability and flexibility in use.
Patent Information
- Application Number
- CN202421145881.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-24
- Publication Date
- 2025-02-11
- Estimated Expiration
- 2034-05-24
AI Technical Summary
The existing chip lithography machines that operate smoothly are not convenient to move, have poor flexibility, and are difficult to adapt to production line layout and equipment configurations that vary in different product requirements and orders.
A stabilization mechanism including bottom plate, limiting assembly, adjustment assembly and drive assembly is designed. Through components such as pulleys, threaded cylinders, bevel gears and dual-axis motors, the movement and height adjustment of the device are realized, and the stability of the device is improved. flexibility.
It realizes flexible movement and height adjustment of chip lithography machines, improves the stability and use flexibility of the device, and adapts to different production needs.
Smart Images
Figure CN222461890U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of chip production, in particular to a chip lithography machine with stable operation. Background Art
[0002] The photolithography machine is a crucial device in the semiconductor industry. It is mainly used to transfer the chip circuit diagram on the mask to the silicon wafer. The chip photolithography machine, also known as the mask alignment exposure machine, exposure system or photolithography system, is the core equipment for chip manufacturing. The chip photolithography machine uses a technology similar to photo printing to print the fine pattern on the mask onto the silicon wafer through light exposure. It is a device that integrates many world-leading technologies such as precision optics, precision instruments, polymer physics and chemistry, mechanical automation software, high-precision environmental control and fluid mechanics.
[0003] The existing chip lithography machines that run smoothly still have the following problems. The existing devices are generally fixed before use. Referring to the patent application with reference to publication number CN216052600U, which discloses a high-precision lithography machine for chip production, the utility model can effectively solve the problem that the traditional lithography machine lacks effective protection function during the transition to the next process, which leads to easy contamination of silicon wafers. The device can effectively protect the silicon wafers, avoid contamination, and improve the use effect through the coordinated use of a fixed seat, a workbench, a mounting groove, a first motor, a first threaded rod, a threaded sleeve, a connecting block, a processing table, a mounting frame, a top plate, a lithography machine body, a second motor, a transmission rod, a housing, a second threaded rod, a driven gear, a driving gear, a threaded tube and a protective cover.
[0004] However, the above technology requires the device to be fixed before use, and the existing device is not easy to move. Manufacturers need to flexibly adjust the production line layout and equipment configuration according to different product demands and order changes. The flexibility is general and it is not easy to use. Utility Model Content
[0005] In view of the deficiencies in the prior art, the utility model provides a chip lithography machine with smooth operation, which solves the problems that the existing chip lithography machine with smooth operation is not easy to move, has limited flexibility and is not easy to use.
[0006] To achieve the above purpose, the utility model is implemented through the following technical solutions: a chip lithography machine with stable operation, including a base plate, the outer side of the base plate is provided with a stabilizing mechanism for conveniently moving the device to a specified position for use, and the stabilizing mechanism includes:
[0007] A limit assembly is arranged on the bottom surface of the bottom plate to facilitate the movement of the device. The limit assembly includes four fixed columns fixedly installed on the bottom surface of the bottom plate, and pulleys are fixedly installed on the bottom surfaces of the four fixed columns. The outer sides of the four fixed columns are provided with fixed assemblies for fixing the position of the device;
[0008] An adjustment component, disposed on the top surface of the base plate and used for adjusting the height of the device;
[0009] The driving assembly is arranged on the bottom surface of the base plate and is used to provide power for the limiting assembly.
[0010] Preferably, the fixing assembly includes a threaded cylinder movably mounted on the outside of four fixing columns, a driven bevel gear is fixedly mounted on the top surface of the threaded cylinder, a fixing cylinder is threadedly mounted on the outside of the threaded cylinder, two limit plates are fixedly mounted on the outside of the four fixing columns, and two limit grooves are provided on the inside of the fixing cylinder.
[0011] Preferably, the top surface of the driven bevel gear is movably mounted on the bottom surface of the bottom plate, and one side of the two limit plates is slidably mounted inside the two limit grooves.
[0012] Preferably, the driving assembly includes two limit blocks fixedly installed on the left and right sides of the bottom surface of the base plate and a dual-axis motor, the front and rear ends of the dual-axis motor are fixedly installed with shafts, one end of the shaft is fixedly installed with an active bevel gear, one end of the dual-axis motor movably passes through the opposite sides of the two limit blocks and is fixedly installed on one side of the active bevel gear, and the outer side of the active bevel gear is meshed with the outer side of the driven bevel gear.
[0013] Preferably, the adjustment component includes a movable groove opened on the left and right sides of the top surface of the base plate, the movable groove has forward and reverse screws movably installed inside, two movable blocks are slidably installed inside the movable groove, two DC motors are fixedly installed on the front side of the base plate, the top surfaces of the two movable blocks are fixedly installed with movable plates, the top surfaces of the movable plates are movably hinged with connecting plates, and the top surface of the connecting plates is movably hinged with the chip lithography machine body.
[0014] Preferably, the front end of the forward and reverse screw rods movably penetrates the interior of the movable groove and is fixedly mounted on the output ends of the two DC motors, and the rear end threads of the forward and reverse screw rods penetrate the front sides of the two movable blocks and are movably mounted on the rear side of the movable groove.
[0015] Beneficial Effects
[0016] The utility model provides a chip lithography machine with stable operation. Compared with the prior art, it has the following beneficial effects:
[0017] (1) The chip lithography machine runs smoothly. The device can be moved and fixed by means of a fixed cylinder and a pulley. When in use, the device is moved to a suitable position by means of the pulley. After moving to a suitable position, the dual-axis motor is started to drive the shaft to rotate the active bevel gear. Then the active bevel gear drives the driven bevel gear to rotate the threaded cylinder. Then the threaded cylinder drives the fixed cylinder to descend and contact the ground to lift the pulley to fix the position of the device, thereby improving the stability of the device, avoiding shaking, facilitating movement, and having good flexibility.
[0018] (2) The chip lithography machine runs smoothly. The height of the chip lithography machine body can be adjusted by setting the forward and reverse screws and the connecting plate. When in use, the DC motor is started to drive the forward and reverse screws to rotate so that the movable block moves to the opposite side. At this time, the movable block will drive the movable plate to lift the chip lithography machine body through the connecting plate and adjust it to a suitable height to adapt to users of different heights. It is easy to use and has good practicality. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Figure 1 This is a left-side stereoscopic appearance schematic diagram of the utility model;
[0020] Figure 2 This is a right-side stereoscopic appearance schematic diagram of the utility model;
[0021] Figure 3 This is a three-dimensional appearance diagram of the adjustment component of the utility model;
[0022] Figure 4 This is a three-dimensional appearance diagram of the limit assembly of the utility model;
[0023] Figure 5 It is a partial three-dimensional appearance schematic diagram of the limiting component of the utility model;
[0024] Figure 6 It is a partial cross-sectional three-dimensional appearance schematic diagram of the limiting component of the utility model.
[0025] In the figure: 1-base plate, 2-stabilizing mechanism, 21-limiting assembly, 211-fixed cylinder, 212-threaded cylinder, 213-driven bevel gear, 214-pulley, 215-fixed column, 216-limiting groove, 217-limiting plate, 22-adjusting assembly, 221-DC motor, 222-movable groove, 223-movable block, 224-movable plate, 225-connecting plate, 226-positive and negative screws, 23-driving assembly, 231-limiting block, 232-dual-axis motor, 233-shaft rod, 234-active bevel gear, 3-chip lithography machine body. DETAILED DESCRIPTION
[0026] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0027] The utility model provides two technical solutions:
[0028] Figure 1-Figure 6 The first embodiment is shown: a chip lithography machine with stable operation, including a base plate 1, and a stabilizing mechanism 2 is arranged on the outer side of the base plate 1 to facilitate moving the device to a specified position for use, and the stabilizing mechanism 2 includes:
[0029] The limiting assembly 21 is arranged on the bottom surface of the base plate 1 to facilitate the movement of the device. The limiting assembly 21 includes four fixing columns 215 fixedly installed on the bottom surface of the base plate 1. The bottom surfaces of the four fixing columns 215 are fixedly installed with pulleys 214. The outer sides of the four fixing columns 215 are all provided with fixing assemblies for fixing the position of the device;
[0030] An adjustment component 22, disposed on the top surface of the base plate 1, for adjusting the height of the device;
[0031] The driving assembly 23 is arranged on the bottom surface of the base plate 1 and is used to provide power for the limiting assembly 21. The fixing assembly includes a threaded cylinder 212 movably mounted on the outside of four fixing columns 215. A driven bevel gear 213 is fixedly mounted on the top surface of the threaded cylinder 212. A fixing cylinder 211 is threadedly mounted on the outside of the threaded cylinder 212, and the fixing cylinder 211 can be lifted and lowered when the threaded cylinder 212 rotates. Two limiting plates 217 are fixedly mounted on the outside of the four fixing columns 215. Two limiting grooves 216 are provided on the inner side of the fixing cylinder 211. The top surface of the driven bevel gear 213 is movably mounted on the bottom surface of the base plate 1. One side of the two limiting plates 217 is slidably mounted inside the two limiting grooves 216, and the two limiting plates 217 can limit the movement of the fixing cylinder 211 through the two limiting grooves 216. The driving assembly 23 includes two limit blocks 231 and a dual-axis motor 232 fixedly mounted on the left and right sides of the bottom surface of the base plate 1. The front and rear ends of the dual-axis motor 232 are fixedly mounted with shafts 233. One end of the shaft 233 is fixedly mounted with an active bevel gear 234. One end of the dual-axis motor 232 movably passes through the opposite sides of the two limit blocks 231 and is fixedly mounted on one side of the active bevel gear 234. The two limit blocks 231 can improve the stability of the shaft 233 during rotation. The outer side of the active bevel gear 234 is meshed with the outer side of the driven bevel gear 213. Starting the dual-axis motor 232 can drive the shaft 233 to rotate the active bevel gear 234. At this time, the active bevel gear 234 will rotate the threaded cylinder 212 through the driven bevel gear 213.
[0032] The device can be moved and fixed by the fixed cylinder 211 and the pulley 214. When in use, the device is moved to a suitable position by the pulley 214. After moving to the suitable position, the dual-axis motor 232 is started to drive the shaft 233 to rotate the active bevel gear 234, and then the active bevel gear 234 will drive the driven bevel gear 213 to rotate the threaded cylinder 212, and then the threaded cylinder 212 will drive the fixed cylinder 211 to descend and contact the ground to lift the pulley 214 to fix the position of the device, thereby improving the stability of the device, avoiding shaking, facilitating movement, and having good flexibility.
[0033] Figure 1-Figure 3The second embodiment is shown, which is mainly different from the first embodiment in that the adjustment component 22 includes movable grooves 222 opened on the left and right sides of the top surface of the bottom plate 1, and the movable grooves 222 are movably installed with positive and negative screws 226 inside, and two movable blocks 223 are slidably installed inside the movable grooves 222. Two DC motors 221 are fixedly installed on the front side of the bottom plate 1, and the top surfaces of the two movable blocks 223 are fixedly installed with movable plates 224. The top surface of the movable plate 224 is movably hinged with a connecting plate 225, and the connecting plate 225 is installed at an angle, and the connecting plate 225 is installed at an angle. The top surface is movably hinged with a chip lithography machine body 3, the front end of the forward and reverse screws 226 movably penetrates the interior of the movable groove 222 and is fixedly installed at the output ends of the two DC motors 221, the rear end threads of the forward and reverse screws 226 penetrate the front sides of the two movable blocks 223 and are movably installed at the rear sides of the movable grooves 222, and starting the two DC motors 221 can drive the forward and reverse screws 226 to rotate and move the two movable blocks 223 to opposite sides, and then the two movable blocks 223 will drive the movable plate 224 to drive the chip lithography machine body 3 to rise and fall through the connecting plate 225.
[0034] The height of the chip lithography machine body 3 can be adjusted by the forward and reverse screws 226 and the connecting plate 225. When in use, the DC motor 221 is started to drive the forward and reverse screws 226 to rotate and move the movable block 223 to the opposite side. At this time, the movable block 223 will drive the movable plate 224 to lift the chip lithography machine body 3 through the connecting plate 225 and adjust it to a suitable height to adapt to users of different heights. It is easy to use and has good practicality.
[0035] Meanwhile, the contents not described in detail in this specification belong to the prior art known to those skilled in the art, and the model parameters of each electrical appliance are not specifically limited, and conventional equipment can be used.
[0036] When in use, the user moves the device to a suitable position through the pulley 214. After moving to the suitable position, the dual-axis motor 232 is started to drive the shaft 233 to rotate the active bevel gear 234, and then the active bevel gear 234 will drive the driven bevel gear 213 to rotate the threaded cylinder 212, and then the threaded cylinder 212 will drive the fixed cylinder 211 to descend and contact the ground to lift the pulley 214 to fix the position of the device, and then start the DC motor 221 to drive the forward and reverse screws 226 to rotate to move the movable block 223 to the opposite side. At this time, the movable block 223 will drive the movable plate 224 to lift the chip lithography machine body 3 through the connecting plate 225 and adjust it to a suitable height, and then the device can be used after being powered on.
[0037] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include"-"comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process-method-article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process-method-article or device.
[0038] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A chip lithography machine with stable operation, comprising a base plate (1), characterized in that: A stabilizing mechanism (2) is provided on the outer side of the bottom plate (1) for facilitating the movement of the device to a designated position for use. The stabilizing mechanism (2) comprises: A position limiting assembly (21) is arranged on the bottom surface of the base plate (1) for facilitating movement of the device, the position limiting assembly (21) comprising four fixing columns (215) fixedly mounted on the bottom surface of the base plate (1), pulleys (214) being fixedly mounted on the bottom surfaces of the four fixing columns (215), and fixing assemblies are arranged on the outer sides of the four fixing columns (215) for fixing the position of the device; An adjustment component (22) is arranged on the top surface of the base plate (1) and is used to adjust the height of the device; The driving assembly (23) is arranged on the bottom surface of the bottom plate (1) and is used to provide power for the limiting assembly (21).
2. A chip lithography machine with stable operation according to claim 1, characterized in that: The fixing assembly comprises a threaded cylinder (212) movably mounted on the outside of four fixing columns (215); a driven bevel gear (213) is fixedly mounted on the top surface of the threaded cylinder (212); a fixing cylinder (211) is threadedly mounted on the outside of the threaded cylinder (212); two limiting plates (217) are fixedly mounted on the outside of the four fixing columns (215); and two limiting grooves (216) are provided on the inside of the fixing cylinder (211).
3. A chip lithography machine with stable operation according to claim 2, characterized in that: The top surface of the driven bevel gear (213) is movably mounted on the bottom surface of the bottom plate (1), and one side of the two limit plates (217) is slidably mounted inside the two limit grooves (216).
4. A chip lithography machine with stable operation according to claim 1, characterized in that: The driving assembly (23) comprises two limit blocks (231) fixedly mounted on the left and right sides of the bottom surface of the base plate (1) and a dual-axis motor (232); a shaft (233) is fixedly mounted on both the front and rear ends of the dual-axis motor (232); a driving bevel gear (234) is fixedly mounted on one end of the shaft (233); one end of the dual-axis motor (232) movably passes through the opposite sides of the two limit blocks (231) and is fixedly mounted on one side of the driving bevel gear (234); and the outer side of the driving bevel gear (234) is meshed with the outer side of the driven bevel gear (213).
5. A chip lithography machine with stable operation according to claim 1, characterized in that: The adjustment component (22) comprises movable grooves (222) provided on the left and right sides of the top surface of the base plate (1); forward and reverse screws (226) are movably installed inside the movable grooves (222); two movable blocks (223) are slidably installed inside the movable grooves (222); two DC motors (221) are fixedly installed on the front side of the base plate (1); movable plates (224) are fixedly installed on the top surfaces of the two movable blocks (223); the top surfaces of the movable plates (224) are movably hinged to a connecting plate (225); and the top surface of the connecting plate (225) is movably hinged to a chip lithography machine body (3).
6. A chip lithography machine with stable operation according to claim 5, characterized in that: The front end of the forward and reverse thread screw (226) movably penetrates the interior of the movable groove (222) and is fixedly mounted on the output ends of the two DC motors (221), and the rear end of the forward and reverse thread screw (226) is threadedly penetrated through the front sides of the two movable blocks (223) and is movably mounted on the rear side of the movable groove (222).