Scanning electron microscope sample table

Abstract

The utility model provides a scanning electron microscope sample stage which is used for carrying out accurate and efficient microscopic detection and analysis on single or multiple groups of sheet-shaped samples. According to the scanning electron microscope sample table, T-shaped clamping grooves are formed in a supporting base, a plurality of T-shaped clamping plates are installed on the supporting base through the T-shaped clamping grooves, small holes for connecting rods to penetrate through are formed in the four corners of each T-shaped clamping plate, four supporting rods are fixed to the supporting base in a pairwise combined mode, a fixing plate is fixed between the front two supporting rods, and screw holes are formed in the fixing plate. The fastening pieces are arranged in the screw holes, the four connecting rods penetrate through the through holes in the two front supporting rods, the small holes in the T-shaped clamping plates and the through holes in the two rear supporting rods respectively, and the two ends of the four connecting rods are fixed to the supporting rods. According to the utility model, multiple groups of samples can be placed at one time, so that the sampling and lofting times are reduced, and the test accuracy and efficiency are improved.

Description

Technical Field

[0001] The utility model relates to a sample stage, in particular to a scanning electron microscope sample stage which can be used for electron microscope observation and analysis of a single or multiple groups of sheet samples. Background Art

[0002] Scanning electron microscope is a surface microscopic analysis device that can perform high-resolution microscopic morphology observation. The combination of scanning electron microscope, spectrometer and energy spectrometer has developed into one of the indispensable means of material surface analysis. This method can detect the chemical composition of the surface while observing the surface morphology of the sample, especially in the detection of inclusions in the sample, surface and cross-sectional element distribution, etc. It has the characteristics of high efficiency and accuracy.

[0003] In recent years, with the development of research and development and large-scale production of thin film materials, semiconductors, and reinforced ultra-thin glass, microscopic analysis of the cross-sections of these materials has become an important means to guide research and development and monitor product quality. As we all know, before observing the sample, the sample needs to be fixed on the base of the scanning electron microscope sample stage. For these special samples, the sample is currently mainly fixed vertically on an object with a flat surface using conductive tape, and then the other side of the object perpendicular to the adhesive surface is fixed on the base of the sample stage. The defects of this method are obvious. First, it is easy to cause the sample to tilt, affecting the observation effect and the accuracy of detection and analysis; second, it consumes more conductive tape, resulting in an increase in testing costs; third, it is impossible to paste a large number of samples at one time, affecting the analysis efficiency.

[0004] In view of the above problems, various sample stages have been designed. For example, CN217009116U discloses a scanning electron microscope sample stage and a scanning electron microscope for observing sample cross-sections. Although it solves the problem that a sample stage can place multiple samples at the same time, it still fixes the samples by pasting, and cannot ensure the vertical placement of the samples and causes the problem of tape waste; CN209859910U discloses a scanning electron microscope sample stage for observing ultra-thin glass cross-sections. Although it cleverly solves the problem that the sample may tilt during the fixing process, the number of samples placed at a time is only one, and the detection efficiency is low. Utility Model Content

[0005] The technical problem to be solved by the utility model is to provide a scanning electron microscope sample stage for accurate and efficient microscopic detection and analysis of a single or multiple groups of sheet samples.

[0006] The technical solution adopted by the utility model to solve the technical problem is: a scanning electron microscope sample stage, including a supporting base, a T-shaped clamping plate, a supporting rod, a fixing plate, a fastener and a connecting rod, wherein a T-shaped slot is arranged on the supporting base, and a plurality of T-shaped clamping plates are installed on the supporting base through the T-shaped slots, and small holes for connecting rods to pass through are arranged at four corners of the T-shaped clamping plate, and four supporting rods are fixed on the supporting base in pairs, a fixing plate is fixed between the front two supporting rods, and the positions of the front two supporting rods and the rear two supporting rods on the supporting base correspond, the four supporting rods are provided with through holes for connecting rods to pass through, the fixing plate is provided with screw holes, the fasteners are arranged in the screw holes, and the four connecting rods respectively pass through the through holes on the front two supporting rods, the small holes on the plurality of T-shaped clamping plates, and the through holes on the rear two supporting rods, and the two ends of the four connecting rods are fixed on the supporting rods.

[0007] Furthermore, the total thickness of the plurality of T-shaped clamping plates is smaller than the distance between the two support rods in the direction of the connecting rod.

[0008] Furthermore, both ends of the four connecting rods are provided with threads, and both ends of the four connecting rods are fixed to the supporting rods by fastening screws.

[0009] Furthermore, the diameters of the small holes on the T-shaped clamping plate and the through holes on the support rods match the outer diameter of the connecting rods.

[0010] Furthermore, the four connecting rods respectively fix the four corners of the T-shaped clamping plate.

[0011] Furthermore, the screw hole is arranged at the center of the fixing plate.

[0012] Furthermore, the through holes are arranged near the bottom and top of the four support rods.

[0013] Furthermore, the fixing plate is parallel to a plurality of T-shaped clamping plates.

[0014] Furthermore, the central axes of the four support rods form a cube or a cuboid, and the central axes of the four connecting rods form a cube or a cuboid.

[0015] Furthermore, the support base is a cylinder, and a screw hole is provided at the center of the bottom of the support base.

[0016] The beneficial effects of the utility model are as follows: multiple groups of samples can be placed at one time, the number of sampling and placement times is reduced, and the test accuracy and efficiency are improved; it is ensured that the samples will not tilt when being fixed, the use of conductive tape is reduced, and the test cost is saved; the utility model is a modular combination design, which is easy to disassemble, install and clean, has a simple structure, and is easy to operate, and can be used for fixing single or batch samples when a scanning electron microscope is used to perform microscopic morphology analysis on a sample cross section and micro-area component analysis. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a front view of the scanning electron microscope sample stage of the utility model.

[0018] Figure 2 yes Figure 1 Side view of.

[0019] Figure 3 yes Figure 2 AA section view.

[0020] Figure 4 yes Figure 1 Top view of the .

[0021] Figure 5 It is a stereogram of the utility model.

[0022] Figure 6 It is a structural schematic diagram of an L-shaped baffle. DETAILED DESCRIPTION

[0023] like Figure 1-5As shown, the scanning electron microscope sample stage of the utility model includes a support base 1, a T-shaped clamping plate 2, a support rod 3, a fixing plate 4, a fastener 5 and a connecting rod 6, wherein the support base 1 is an aluminum alloy cylinder, a T-shaped slot 11 is provided on the support base 1, and a screw hole with a diameter of about 4 mm is provided at the center of the bottom circle of the support base 1 for connecting and fixing with the base of the scanning electron microscope; a plurality of T-shaped clamping plates 2 are installed on the support base 1 through the T-shaped clamping slots 11, and small holes 21 are provided at the four corners of the T-shaped clamping plates 2 for the connecting rod 6 to pass through; four support rods 3 are fixed on the support base 1 in pairs, a fixing plate 4 is fixed between the front two support rods 3, and the front two support rods 3 Completely corresponding to the positions of the two rear support rods 3 on the support base 1, the four support rods 3 are provided with through holes near the bottom and top positions for the connecting rod 6 to pass through; a screw hole is provided at the central position of the fixing plate 4, and a fastener 5 is provided in the screw hole for fixing the T-shaped clamp 2; threads are provided at both ends of the four connecting rods 6, and the four connecting rods 6 respectively pass through the through holes on the front two support rods 3, the small holes 21 on several T-shaped clamps 2, and the through holes on the rear two support rods 3, and the two ends of the four connecting rods 6 are fixed to the support rods 3 by fastening screws 7; the total thickness of several T-shaped clamps 2 is less than the distance between the two support rods 3 in the direction of the connecting rod 6, so as to leave space for sample placement.

[0024] All of the above components are made of aluminum alloy to ensure their good electrical conductivity; the four connecting rods 6 respectively fix the four corners of the T-shaped clamp 2, which can ensure the stable fixation of the T-shaped clamp 2; the diameters of the small holes 21 on the T-shaped clamp 2 and the through holes on the support rods 3 match the outer diameters of the connecting rods 6, which can ensure the stable fixation of the T-shaped clamp 2; the fixing plate 4 is parallel to several T-shaped clamps 2, which can ensure that the fasteners 5 stably fix the T-shaped clamp 2; the central axes of the four support rods 3 form a cube or a cuboid, and the central axes of the four connecting rods 6 form a cube or a cuboid, which can ensure the stable fixation of the T-shaped clamp 2.

[0025] When working, place the sample table horizontally on the desktop, make the clamping part parallel to the desktop, and the fastener 5 face upwards; place the processed samples between the T-shaped clamps 2 in sequence according to the number, with the surface to be tested protruding from the T-shaped clamp 2 by about 3mm, and use the smooth L-shaped baffle 8 perpendicular to the desktop to gently approach the surface of the sample to be tested, such as Figure 6As shown, move about 1-2mm so that the test surfaces of all samples are basically in the same horizontal position; tighten the fasteners 5 to stably fix all samples between the T-shaped clamps 2; straighten the sample stage and perform gold spraying or carbon treatment; after completing the above operations, use a small amount of conductive tape to connect and fix all samples to the T-shaped clamp 2 to avoid charging, which can improve the morphology clarity and analysis accuracy; connect and fix the sample stage to the scanning electron microscope base through the screw holes of the support base 1, and fix it on the test platform after measuring the height. After adjusting the height of the test platform, close the cabin door, draw a vacuum, and start testing and detection; after the test is completed, take out the sample stage, loosen the fasteners 5, peel off the conductive tape, and then the sample can be taken out.

Claims

1. Scanning electron microscope sample stage, characterized by: The invention comprises a support base (1), a T-shaped clamping plate (2), a support rod (3), a fixing plate (4), a fastener (5) and a connecting rod (6); a T-shaped slot (11) is arranged on the support base (1); a plurality of T-shaped clamping plates (2) are mounted on the support base (1) through the T-shaped slot (11); small holes (21) for the connecting rod (6) to pass through are arranged at four corners of the T-shaped clamping plate (2); four support rods (3) are fixed to the support base (1) in pairs; a fixing plate (4) is fixed between the front two support rods (3); The positions of the two front support rods (3) and the two rear support rods (3) on the support base (1) correspond to each other; the four support rods (3) are all provided with through holes for the connecting rods (6) to pass through; the fixing plate (4) is provided with screw holes; the fasteners (5) are arranged in the screw holes; the four connecting rods (6) respectively pass through the through holes on the two front support rods (3), the small holes (21) on the plurality of T-shaped clamping plates (2), and the through holes on the two rear support rods (3); and the two ends of the four connecting rods (6) are fixed on the support rods (3).

2. The scanning electron microscope sample stage according to claim 1, characterized in that: The total thickness of the plurality of T-shaped clamping plates (2) is less than the distance between the two support rods (3) in the direction of the connecting rod (6).

3. The scanning electron microscope sample stage according to claim 1 or 2, characterized in that: Both ends of the four connecting rods (6) are provided with threads, and both ends of the four connecting rods (6) are fixed to the support rod (3) by means of fastening screws (7).

4. The scanning electron microscope sample stage according to claim 1 or 2, characterized in that: The diameters of the small hole (21) on the T-shaped clamping plate (2) and the through hole on the support rod (3) both match the outer diameter of the connecting rod (6).

5. The scanning electron microscope sample stage according to claim 1 or 2, characterized in that: The four connecting rods (6) respectively fix the four corners of the T-shaped clamping plate (2).

6. The scanning electron microscope sample stage according to claim 1 or 2, characterized in that: The screw hole is arranged at the central position of the fixing plate (4).

7. The scanning electron microscope sample stage according to claim 1 or 2, characterized in that: The through holes are arranged near the bottom and top of the four support rods (3).

8. The scanning electron microscope sample stage according to claim 1 or 2, characterized in that: The fixing plate (4) is parallel to a plurality of T-shaped clamping plates (2).

9. The scanning electron microscope sample stage according to claim 1 or 2, characterized in that: The central axes of the four support rods (3) form a cube or a cuboid, and the central axes of the four connecting rods (6) form a cube or a cuboid.

10. The scanning electron microscope sample stage according to claim 1 or 2, characterized in that: The support base (1) is a cylinder, and a screw hole is provided at the center of the bottom of the support base (1).

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